CN109203266A - A kind of carborundum crystals fast orienting method - Google Patents
A kind of carborundum crystals fast orienting method Download PDFInfo
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- CN109203266A CN109203266A CN201811282639.8A CN201811282639A CN109203266A CN 109203266 A CN109203266 A CN 109203266A CN 201811282639 A CN201811282639 A CN 201811282639A CN 109203266 A CN109203266 A CN 109203266A
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- silicon carbide
- cutting
- crystal bar
- angle
- jig
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- 239000013078 crystal Substances 0.000 title claims abstract description 142
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 125
- 238000000034 method Methods 0.000 title claims abstract description 63
- 238000005520 cutting process Methods 0.000 claims abstract description 120
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 86
- 239000003292 glue Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910003978 SiClx Inorganic materials 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 230000008901 benefit Effects 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 6
- 238000005096 rolling process Methods 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000003763 carbonization Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 11
- 238000004026 adhesive bonding Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000407 epitaxy Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003831 deregulation Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a kind of carborundum crystals fast orienting methods, utilize orientation jig before cutting, directly the silicon carbide crystal bar for gluing glass bar is passed through on the fixed platform of jig before cutting of glue, then pass through the screw and worm gear on jig before cutting, worm screw, which be combined with each other, realizes that the movement carried out on both horizontally and vertically can be crossed by cutting the platform on preceding jig, so as to realize the measurement and orientation of silicon carbide crystal bar both horizontally and vertically angle, it is oriented before can solve current silicon carbide crystal bar cutting, it is cumbersome in the presence of operability, precision is low, the problem that time-consuming waits, with easy to operate, it is time-consuming short, it is high-efficient, personnel's operation is required low, precision is high and does not have to take glass bar to grind on grinding machine, feature at low cost.
Description
Technical field
The present invention relates to crystal pro cessing technical fields, and in particular to a kind of carborundum crystals fast orienting method.
Background technique
Silicon carbide penetrates into rapidly illumination, electrical device, the neck such as microwave radio as third generation semiconductor material in recent years
Each corner in domain.In fields such as backlight of LCD, lamps for vehicle, ornament lamp, general illumination, electric vehicle, 5G applications
Have a wide range of applications market, becomes one of the direction of Future New Energy Source development.
However, carbofrax material as epitaxial substrate, needs to have very high requirement to its surface, extend brilliant mistake outside
Cheng Zhong, since the biasing of substrate wafer angle influences whether the defect concentration and quality in the long brilliant film growth of epitaxial high temperature.
The exception of angle will cause extension need it is time-consuming expend make parameter adjustment the quality that has reached.Therefore, to carbon before cutting
It is to obtain the good essential factor of silicon carbide epitaxy substrate that SiClx crystal, which is oriented,.
Orientation mainly uses following two method before the cutting of Conventional silicon carbide crystal bar: first method is using crystal column shaft as base
Standard is oriented, this kind of method is used in the orientation of the short crystal bar of silicon carbide, there are larger difficulty and will affect carbon to the operation of personnel
The precision of SiClx directional angle；Second method is oriented using the end face of crystal, and the silicon carbide of glass bar will have been bonded
Crystal bar is fixed on the jig of adjustable vertical direction angle, then will fix the jig of crystal bar again, is locked in X-Ray direction finder
It can measure on vertical direction angle side, then by the screw on regulating jig, search out and shown in X-Ray direction finder instrument
The maximum wave crest shown, angle at this time are the angle of silicon carbide crystal bar in vertical direction, the silicon carbide that then will be adjusted again
The jig of crystal bar angle is taken and is polished glass bar on the basis of the bottom edge of jig on grinder station, and it is fixed then to take X-Ray again
Manual methods de-regulation horizontal direction angle is used to the instrument other side, searches out the maximum wave shown in X-Ray direction finder instrument
Peak, angle at this time is the angle of silicon carbide crystal bar in the horizontal direction, and then glass bar is sticked on line cutting machine microscope carrier, such
Method is cumbersome, time-consuming very long, low efficiency.
Chinese patent CN102615721B discloses a kind of orientation material platform of crystal inclination angle processing, including pedestal, adjustment
Plate, vertical rotary target rotate horizontally target, fix turntable screw, chassis upper mounting bracket, retaining plate, are equipped on retaining plate
Adjustment plate, the vertical plate among adjustment plate are equipped with turntable, and turntable connects connection frame, connection frame and are located remotely from bracket one end
The clamping element of setting is opposite.Turntable side is equipped with the fixation turntable screw of fixed dial, and the other side is equipped with vertical side
To vertical rotary target faster, more directly find the crystal orientation of our requirements the purpose of the invention is to can be more preferable,
And the precision of crystal orientation is controlled at minimum, take material processing so as to avoid because precision is not high and duplicate, greatly reduces
Cost improves the utilization rate of crystal.It is longer to the orientation time of crystal inclination angle but in the invention, and influence crystal
It is cut into the extension quality of chip.
Chinese patent CN106553276B discloses a kind of orientation fixture of carborundum crystals inclination angle processing, belongs to crystal
Processing unit (plant) field.The orientation fixture includes: swivel slide, is fixedly connected on cutting working platform, is provided with rotation angle
Adjust knob；Level angle adjuster is installed on swivel slide upper surface, is provided with level angle adjusting knob；Support frame, if
It is equipped with support frame base, support frame base is fixedly connected on level angle adjuster upper surface, and in support frame base upper surface
It is fixedly connected with line slide rail；Compact heap is fixedly connected on the sliding block upper surface of line slide rail, sliding block can be followed to slide.This hair
It is bright based on inclined 0 ° of cylindrical crystal bar, by adjusting the angle of level angle adjuster, 2 ° to 4 ° inclination angles lining can be chamfer
Bottom；By adjusting angle of the swivel slide relative to vertical plane, 4 ° to 8 ° inclination angle substrates can be chamfer；And precision can reach ± 1.
But in the invention, crystal orientation is needed to assist multiple support equipments in the process, longer to the orientation time of crystal, it is fixed to increase
To cost input.
Accordingly, it is desirable to provide a kind of carborundum crystals fast orienting method, using jig is oriented before cutting, directly gluing
Then the silicon carbide crystal bar of glass bar is by passing through the screw on jig before cutting on the fixed platform of jig before cutting of glue
It is combined with each other with worm gear, worm screw and realizes that the movement carried out on both horizontally and vertically can be crossed by cutting the platform on preceding jig, thus
It can be realized the measurement and orientation of silicon carbide crystal bar both horizontally and vertically angle.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of carborundum crystals fast orienting method, benefits
With jig is oriented before cutting, the silicon carbide crystal bar for gluing glass bar is directly passed through the platform of the fixed jig before cutting of glue
On, then be combined with each other by screw before cutting on jig and worm gear, worm screw realize the platform before cut on jig can cross into
Row both horizontally and vertically on movement, so as to realize the both horizontally and vertically measurement of angle and fixed of silicon carbide crystal bar
To can solve orientation before the cutting of current silicon carbide crystal bar, the problem for having that operability is cumbersome, and precision is low, time-consuming etc..
In order to solve the above-mentioned technical problem, the present invention adopts the following technical scheme:
A kind of carborundum crystals fast orienting method passes through control upper mounting plate and lower flat using orientation jig before cutting respectively
The movement vertically and horizontally of two platforms of platform vertically and horizontally carries out silicon carbide crystal bar to determine dress, realize to carbon
The measurement of SiClx crystal bar both horizontally and vertically angle；Carborundum crystals fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 5min~8min by S10, solid to glue
After change, it is fastened on jig is oriented before the cutting of the silicon carbide crystal bar bonded on X-Ray direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found on table, angle at this time is the angle of silicon carbide crystal bar vertical direction；
S30, after the angle for determining silicon carbide crystal bar vertical direction, will before cutting orientation jig from X-Ray direction finder
On remove, be fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, into
The angle shown on X-Ray direction finder display is adjusted to silicon carbide crystal bar by the orientation of row silicon carbide crystal bar horizontal direction
Angle；
S50 removes the microscope carrier that jig and line cutting machine are oriented before the cutting of directional from the card slot on X-Ray direction finder
Come, is put on line cutting machine and is cut.
Further, jig is oriented in S10, before the cutting of the silicon carbide crystal bar bonded passes through orientation before screw and cutting
The threaded hole of jig is fastened on X-Ray direction finder.
Further, in S20, upper mounting plate is carried out in the rotation process of vertical direction using adjusting screw using among platform
There is bearing as rolling support.
Further, it in S40, is carried out in the orientation process of horizontal direction using worm gear, worm screw and handwheel control lower platform
The rotation of horizontal direction.
Further, in S40, the concrete operation step of the orientation of silicon carbide crystal bar horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave
When peak, the position of pointer meaning at this time is recorded；
C adds in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the upper angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven to carry out in horizontal direction
Rotation, find at this time that pointer refers to the position of the pointer meaning in B in the instrument of X-Ray direction finder, it is fixed to complete horizontal direction
To.
Further, in A, it is the graduation mark of 0.001mm~0.1mm that handwheel periphery, which is provided with one week precision,.
Further, in C, the angle for needing to deflect before the cutting of silicon carbide crystal bar is 0.2 °~10 °.
Further, orientation jig can also be used to orient sapphire and monocrystalline silicon before cutting.
The invention has the advantages that
1. carborundum crystals fast orienting method disclosed by the invention, using jig is oriented before cutting in orientation process, no
It is ground on grinding machine with the glass bar being fixed on crystal bar is taken, and can be simply by the screw on jig before cutting
Realize that both horizontally and vertically angle orients silicon carbide with worm gear, worm screw, have it is easy to operate, it is time-consuming short, it is high-efficient, to people
Member's operation requires low, and precision is high and does not have to take glass bar to grind on grinding machine, feature at low cost；
2. carborundum crystals fast orienting method disclosed by the invention can be cut by the way that silicon carbide crystal bar to be sticked to glue
On the platform for orienting jig before cutting, orientation jig is made by adjusting screw, worm gear and worm screw on the preceding jig of cutting before cutting
Platform before cutting on jig can cross the movement carried out both horizontally and vertically, realize silicon carbide crystal bar both horizontally and vertically
The measurement of upper angle, relatively traditional orientation method is at low cost, it is low to require personnel's operation；
3. carborundum crystals fast orienting method disclosed by the invention, shorter to the orientation time of carborundum crystals, orientation
It is high-efficient, and the cutting quality of carborundum crystals can be improved.
Other than objects, features and advantages described above, there are also other objects, features and advantages by the present invention.
Below with reference to accompanying drawings, the present invention is described in further detail.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.In the accompanying drawings:
Fig. 1 is orientation jig before present invention cutting.
Fig. 2 is orientation jig main view before present invention cutting.
Fig. 3 is orientation jig side view before present invention cutting.
In the figure, it is marked as 1- silicon carbide crystal bar；2- intermediate bearing；3- screw；4- upper mounting plate；5- lower platform；6- screw；7-
Handwheel；8- jig threaded hole；The microscope carrier of 9- line cutting machine.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1
A kind of carborundum crystals fast orienting method passes through control upper mounting plate and lower flat using orientation jig before cutting respectively
The movement vertically and horizontally of two platforms of platform vertically and horizontally carries out silicon carbide crystal bar to determine dress, realize to carbon
The measurement of SiClx crystal bar both horizontally and vertically angle；Carborundum crystals fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 5min by S10, will after glue curing
Jig is oriented before the cutting of the silicon carbide crystal bar bonded, and X-Ray is fastened on by the threaded hole of orientation jig before screw and cutting
On direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found on table, angle at this time is the angle of silicon carbide crystal bar vertical direction；
In aforesaid operations, upper mounting plate, which carries out using in the rotation process of vertical direction among platform using adjusting screw, axis
It makes as rolling support.
S30, after the angle for determining silicon carbide crystal bar vertical direction, will before cutting orientation jig from X-Ray direction finder
On remove, be fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, into
The angle shown on X-Ray direction finder display is adjusted to silicon carbide crystal bar by the orientation of row silicon carbide crystal bar horizontal direction
Angle；
In aforesaid operations, level is carried out using worm gear, worm screw and handwheel control lower platform in the orientation process of horizontal direction
The rotation in direction；The concrete operation step of the orientation of silicon carbide crystal bar horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
In aforesaid operations, it is the graduation mark of 0.001mm that handwheel periphery, which is provided with one week precision,.
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave
When peak, the position of pointer meaning at this time is recorded；
C adds in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the upper angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven to carry out in horizontal direction
Rotation, find at this time that pointer refers to the position of the pointer meaning in B in the instrument of X-Ray direction finder, it is fixed to complete horizontal direction
To.
In aforesaid operations, the angle for needing to deflect before the cutting of silicon carbide crystal bar is 0.2 °.
S50 removes the microscope carrier that jig and line cutting machine are oriented before the cutting of directional from the card slot on X-Ray direction finder
Come, is put on line cutting machine and is cut.
In aforesaid operations, orientation jig can also be used to orient sapphire and monocrystalline silicon before cutting.
Embodiment 2
A kind of carborundum crystals fast orienting method passes through control upper mounting plate and lower flat using orientation jig before cutting respectively
The movement vertically and horizontally of two platforms of platform vertically and horizontally carries out silicon carbide crystal bar to determine dress, realize to carbon
The measurement of SiClx crystal bar both horizontally and vertically angle；Carborundum crystals fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 8min by S10, will after glue curing
Jig is oriented before the cutting of the silicon carbide crystal bar bonded, and X-Ray is fastened on by the threaded hole of orientation jig before screw and cutting
On direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found on table, angle at this time is the angle of silicon carbide crystal bar vertical direction；
In aforesaid operations, upper mounting plate, which carries out using in the rotation process of vertical direction among platform using adjusting screw, axis
It makes as rolling support.
S30, after the angle for determining silicon carbide crystal bar vertical direction, will before cutting orientation jig from X-Ray direction finder
On remove, be fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, into
The angle shown on X-Ray direction finder display is adjusted to silicon carbide crystal bar by the orientation of row silicon carbide crystal bar horizontal direction
Angle；
In aforesaid operations, level is carried out using worm gear, worm screw and handwheel control lower platform in the orientation process of horizontal direction
The rotation in direction；The concrete operation step of the orientation of silicon carbide crystal bar horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
In aforesaid operations, it is the graduation mark of 0.1mm that handwheel periphery, which is provided with one week precision,.
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave
When peak, the position of pointer meaning at this time is recorded；
C adds in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the upper angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven to carry out in horizontal direction
Rotation, find at this time that pointer refers to the position of the pointer meaning in B in the instrument of X-Ray direction finder, it is fixed to complete horizontal direction
To.
In aforesaid operations, the angle for needing to deflect before the cutting of silicon carbide crystal bar is 10 °.
S50 removes the microscope carrier that jig and line cutting machine are oriented before the cutting of directional from the card slot on X-Ray direction finder
Come, is put on line cutting machine and is cut.
In aforesaid operations, orientation jig can also be used to orient sapphire and monocrystalline silicon before cutting.
Embodiment 3
A kind of carborundum crystals fast orienting method passes through control upper mounting plate and lower flat using orientation jig before cutting respectively
The movement vertically and horizontally of two platforms of platform vertically and horizontally carries out silicon carbide crystal bar to determine dress, realize to carbon
The measurement of SiClx crystal bar both horizontally and vertically angle；Carborundum crystals fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 6min by S10, will after glue curing
Jig is oriented before the cutting of the silicon carbide crystal bar bonded, and X-Ray is fastened on by the threaded hole of orientation jig before screw and cutting
On direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found on table, angle at this time is the angle of silicon carbide crystal bar vertical direction；
In aforesaid operations, upper mounting plate, which carries out using in the rotation process of vertical direction among platform using adjusting screw, axis
It makes as rolling support.
S30, after the angle for determining silicon carbide crystal bar vertical direction, will before cutting orientation jig from X-Ray direction finder
On remove, be fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, into
The angle shown on X-Ray direction finder display is adjusted to silicon carbide crystal bar by the orientation of row silicon carbide crystal bar horizontal direction
Angle；
In aforesaid operations, level is carried out using worm gear, worm screw and handwheel control lower platform in the orientation process of horizontal direction
The rotation in direction；The concrete operation step of the orientation of silicon carbide crystal bar horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
In aforesaid operations, it is the graduation mark of 0.005mm that handwheel periphery, which is provided with one week precision,.
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave
When peak, the position of pointer meaning at this time is recorded；
C adds in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the upper angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven to carry out in horizontal direction
Rotation, find at this time that pointer refers to the position of the pointer meaning in B in the instrument of X-Ray direction finder, it is fixed to complete horizontal direction
To.
In aforesaid operations, the angle for needing to deflect before the cutting of silicon carbide crystal bar is 0.5 °.
S50 removes the microscope carrier that jig and line cutting machine are oriented before the cutting of directional from the card slot on X-Ray direction finder
Come, is put on line cutting machine and is cut.
In aforesaid operations, orientation jig can also be used to orient sapphire and monocrystalline silicon before cutting.
Embodiment 4
A kind of carborundum crystals fast orienting method passes through control upper mounting plate and lower flat using orientation jig before cutting respectively
The movement vertically and horizontally of two platforms of platform vertically and horizontally carries out silicon carbide crystal bar to determine dress, realize to carbon
The measurement of SiClx crystal bar both horizontally and vertically angle；Carborundum crystals fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 7min by S10, will after glue curing
Jig is oriented before the cutting of the silicon carbide crystal bar bonded, and X-Ray is fastened on by the threaded hole of orientation jig before screw and cutting
On direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found on table, angle at this time is the angle of silicon carbide crystal bar vertical direction；
In aforesaid operations, upper mounting plate, which carries out using in the rotation process of vertical direction among platform using adjusting screw, axis
It makes as rolling support.
S30, after the angle for determining silicon carbide crystal bar vertical direction, will before cutting orientation jig from X-Ray direction finder
On remove, be fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, into
The angle shown on X-Ray direction finder display is adjusted to silicon carbide crystal bar by the orientation of row silicon carbide crystal bar horizontal direction
Angle；
In aforesaid operations, level is carried out using worm gear, worm screw and handwheel control lower platform in the orientation process of horizontal direction
The rotation in direction；The concrete operation step of the orientation of silicon carbide crystal bar horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
In aforesaid operations, it is the graduation mark of 0.01mm that handwheel periphery, which is provided with one week precision,.
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave
When peak, the position of pointer meaning at this time is recorded；
C adds in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the upper angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven to carry out in horizontal direction
Rotation, find at this time that pointer refers to the position of the pointer meaning in B in the instrument of X-Ray direction finder, it is fixed to complete horizontal direction
To.
In aforesaid operations, the angle for needing to deflect before the cutting of silicon carbide crystal bar is 1.0 °.
S50 removes the microscope carrier that jig and line cutting machine are oriented before the cutting of directional from the card slot on X-Ray direction finder
Come, is put on line cutting machine and is cut.
In aforesaid operations, orientation jig can also be used to orient sapphire and monocrystalline silicon before cutting.
Experimental example
Jig is oriented from actual production, before cutting involved in carborundum crystals fast orienting method of the present invention in reality
Huge product benefit is brought in the production of border.As the following table 1 gives involved in carborundum crystals fast orienting method of the present invention
Cutting before orientation jig and Conventional silicon carbide crystal bar cutting before orient data comparison.
Table 1: jig is oriented before cutting involved in carborundum crystals fast orienting method of the present invention and is cut with Conventional silicon carbide
Cut surely forward data statistics
As can be seen from the above table, jig is oriented before cutting involved in carborundum crystals fast orienting method of the present invention to solve
Directional operation is cumbersome before silicon carbide crystal bar is cut, and the operating time is long, low efficiency, needs to buy a surface grinding machine and carries out glass
Stick grinding causes the problem of cost waste etc..
In addition, orientation jig method involved in carborundum crystals fast orienting method of the present invention is imitated than traditional orientation method
Rate improves 3 times~4 times；It is oriented using orientation jig method involved in carborundum crystals fast orienting method of the present invention
The angle for being cut into the direction chip C to A can be converged in ± 0.1 °, and the angle in the direction C to M can be converged in ± 0.05 °；It adopts
It is oriented with traditional orientation method and is cut into the angle in the direction chip C to A and can only be converged in ± 0.2 °, the side M C to
To angle can be converged in ± 0.2 °, influence silicon carbide epitaxy quality；Using in carborundum crystals fast orienting method of the present invention
The orientation jig being related to carries out orientation before the cutting of silicon carbide crystal bar, does not need using any ancillary equipment is arrived, compared to use
Traditional orientation method needs surface grinding machine to carry out Glass rod grinding, saves grinding wheel and board cost.
These are only the preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of carborundum crystals fast orienting method, which is characterized in that the carborundum crystals fast orienting method is utilized and cut
Orientation jig passes through the movement vertically and horizontally of control two platforms of upper mounting plate and lower platform respectively before cutting, to silicon carbide
Crystal bar vertically and horizontally carries out determining dress, realizes the measurement to silicon carbide crystal bar both horizontally and vertically angle；The carbonization
Silicon crystal fast orienting method, comprising the following steps:
Silicon carbide crystal bar is sticked on the upper mounting plate for orienting jig before cutting, places 5min~8min by S10, after glue curing,
It is fastened on jig is oriented before the cutting of the silicon carbide crystal bar bonded on X-Ray direction finder；
S20 adjusts the adjusting screw on upper mounting plate, so that upper mounting plate is done the movement of vertical direction, in the instrument of X-Ray direction finder
The top of pointer is found, angle at this time is the angle of silicon carbide crystal bar vertical direction；
S30 after the angle for determining silicon carbide crystal bar vertical direction, will be torn open orientation jig before cutting from X-Ray direction finder
Get off, is fixed by screws on the microscope carrier of line cutting machine；
S40 will orient jig before the microscope carrier of the line cutting machine fixed and cutting, move in the card slot of X-Ray direction finder, carry out carbon
The angle shown on X-Ray direction finder display is adjusted to the angle of silicon carbide crystal bar by the orientation of SiClx crystal bar horizontal direction；
The microscope carrier that jig and line cutting machine are oriented before the cutting of directional is taken off from the card slot on X-Ray direction finder, is put by S50
It is cut on to line cutting machine.
2. carborundum crystals fast orienting method according to claim 1, which is characterized in that described to have bonded in S10
Jig is oriented before the cutting of silicon carbide crystal bar, and X-Ray direction finder is fastened on by the threaded hole of orientation jig before screw and cutting
On.
3. carborundum crystals fast orienting method according to claim 1, which is characterized in that in S20, the upper mounting plate benefit
Using to use in the motion process of adjusting screw progress vertical direction among platform has bearing as rolling support.
4. carborundum crystals fast orienting method according to claim 1, which is characterized in that in S40, the horizontal direction
Orientation process in using worm gear, worm screw and handwheel control lower platform carry out horizontal direction rotation.
5. carborundum crystals fast orienting method according to claim 1, which is characterized in that in S40, the silicon carbide whisker
The concrete operation step of the orientation of stick horizontal direction are as follows:
A drives worm gear and worm screw using rotation hand wheel, lower platform is driven to carry out the rotation in horizontal direction；
B observes the pointer in the instrument of X-Ray direction finder when lower platform carries out horizontal direction rotation, and pointer refers in wave crest
When, record the position of pointer meaning at this time；
C adds institute in the angle for showing existing X-Ray direction finder according to the angle for needing to deflect before the cutting of silicon carbide crystal bar
Then the angle to be deflected drives worm gear and worm screw using rotation hand wheel again, lower platform is driven turn in horizontal direction
It is dynamic, it finds at this time that pointer refers to the position of pointer meaning in B in the instrument of X-Ray direction finder, completes horizontal direction and orient.
6. carborundum crystals fast orienting method according to claim 5, which is characterized in that in A, the handwheel periphery is set
Being equipped with one week precision is the graduation mark of 0.001mm~0.1mm.
7. carborundum crystals fast orienting method according to claim 5, which is characterized in that in C, the silicon carbide crystal bar
The angle for needing to deflect before cutting is 0.2 °~10 °.
8. carborundum crystals fast orienting method according to claim 1, which is characterized in that orient jig before the cutting
It can also be used to orient sapphire and monocrystalline silicon.
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| CN201811282639.8A CN109203266B (en) | 2018-10-31 | 2018-10-31 | Rapid orientation method for silicon carbide crystals |
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| CN113427650A (en) * | 2021-06-17 | 2021-09-24 | 西北工业大学 | Method for measuring orientation of directionally solidified alloy single crystal and cutting seed crystal |
| CN113787636A (en) * | 2021-07-09 | 2021-12-14 | 麦斯克电子材料股份有限公司 | Manual bar adhering method for 12-inch semiconductor wafer |
| CN115478325A (en) * | 2022-08-15 | 2022-12-16 | 江西兆驰半导体有限公司 | Stick sticking orientation instrument, stick sticking device and stick sticking method |
| CN117415966A (en) * | 2023-11-16 | 2024-01-19 | 深圳平湖实验室 | Orientation jig, orientation method and cutting method of silicon carbide crystal |
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