CN109196385B - Multifunctional radiation detector - Google Patents

Multifunctional radiation detector Download PDF

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Publication number
CN109196385B
CN109196385B CN201780032416.3A CN201780032416A CN109196385B CN 109196385 B CN109196385 B CN 109196385B CN 201780032416 A CN201780032416 A CN 201780032416A CN 109196385 B CN109196385 B CN 109196385B
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Prior art keywords
detector
radiation
radiation detector
units
scintillation
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CN201780032416.3A
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CN109196385A (en
Inventor
J·W·M·雅各布斯
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20188Auxiliary details, e.g. casings or cooling
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20185Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20186Position of the photodiode with respect to the incoming radiation, e.g. in the front of, below or sideways the scintillator
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • G01T1/247Detector read-out circuitry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914Measurement of spatial distribution of radiation
    • G01T1/2921Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2928Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors

Abstract

The present invention provides a multi-functional and multi-modal radiation detector (10). The radiation detector (10) comprises at least two detector units (12 a, 12 b) having a photosensitive pixel (14) and at least one scintillation device (20) optically coupled to the photosensitive pixel (14). The detector units (12 a, 12 b) are arranged adjacent to each other on the substrate foil (24). Wherein the scintillation devices (20) of the detector units (12 a, 12 b) are spaced apart from each other such that the radiation detector (10) is bendable. This allows the radiation detector (10) to be used in many different geometric configurations.

Description

Multifunctional radiation detector
Technical Field
The present invention relates to the field of radiation detectors. More particularly, the present invention relates to a multifunctional radiation detector and a method for producing such a radiation detector.
Background
Radiation detectors are used in many applications ranging from scientific applications, space applications to medical applications. Depending on the application and the constraints inferred with the application, such as, for example, the particle energy to be measured, the radiation detector may reach a large size.
US 2010/0078573 A1 discloses a radiation detection device comprising a flexible radiation detector for detecting radiation that has passed through a subject and converting the detected radiation into radiation image information.
US 2012/0153163 Al discloses an imaging system comprising a radiation source that rotates about a central z-axis of the imaging system for imaging scanning; and an inorganic photodetector array comprising a number of discrete inorganic photodetectors arranged on a curved support such that each row of inorganic photodetectors is aligned along the curvature of the curved support and each column of inorganic photodetectors is aligned parallel to a central z-axis of the imaging system.
US 2016/007076 A1 discloses an imaging system comprising: a plurality of modular imaging detectors, each modular imaging detector comprising a plurality of pixels configured to collect imaging data; a substrate, wherein the pixels are disposed on a surface of the substrate; and a mechanical interconnect configured to cooperate with a corresponding mechanical interconnect of at least one other of the modular imaging detectors to directly join the modular imaging detector to the at least one other of the modular imaging detectors; and a readout electronics unit configured to be operably coupled to the modular imaging detector and to receive signals from the modular imaging detector corresponding to the imaging data.
Disclosure of Invention
Thus, there is a need for a multi-purpose, multi-functional, relatively compact, rugged, and cost-effective radiation detector.
The object of the invention is solved by the subject matter of the independent claims, with further embodiments being incorporated in the dependent claims.
According to a first aspect of the present invention, a radiation detector is provided. The radiation detector includes a plurality of detector cells, each including a plurality of photosensitive pixels, and each including at least one scintillation device optically coupled to the plurality of photosensitive pixels. The radiation detector further comprises a substrate foil for carrying the detector cells.
Wherein the detector units are arranged side by side on the substrate foil. Furthermore, at least two directly adjacent scintillation devices of at least two directly adjacent detector units are spaced apart from each other such that the radiation detector is bendable and/or foldable along at least a part of a bending region of the substrate foil, which bending region is arranged between said at least two directly adjacent scintillation devices.
According to an example of the first aspect of the invention, the radiation detector further comprises at least one addressing circuit for addressing the detector cells and at least one signal readout circuit for reading out signals from the detector cells.
According to another example of the first aspect of the invention, each detector cell comprises a separate addressing circuit and/or a separate signal readout circuit.
According to a second aspect, there is provided a radiation detector arrangement comprising a plurality of radiation detectors as described above and below.
According to a third aspect, there is provided a method for producing a radiation detector as described above and hereinafter.
It should be noted that the features and/or elements of the radiation detector as described above and below may be features and/or elements of the radiation detector arrangement and/or method. Vice versa, the features of the radiation detector arrangement and/or method as described above and below may be features and/or elements of a radiation detector.
The term "photosensitive pixel" may herein and hereinafter refer to an element for detecting electromagnetic radiation and/or for detecting electromagnetic signals, such as light. Each of the pixels may independently detect electromagnetic radiation. However, multiple sub-pixels may also be electronically interconnected to form a single photosensitive pixel. This arrangement may also be referred to as binned pixels (binned pixels).
Herein and hereinafter, the term "scintillation device" may refer to a device comprising a scintillation material such as e.g. CsI, GOS (gadolinium oxysulfide), garnet (e.g. LGGAG, lutetium gadolinium gallium aluminum garnet) and/or NaI, which scintillation material is excitable by photons and/or charged particles, and which scintillation material is de-excited by emitting electromagnetic radiation such as light.
The term "optically coupled" may refer herein and hereinafter to an optical connection such that electromagnetic radiation emitted by the scintillation device and/or the scintillation material may be transmitted to and/or impinge upon the photosensitive pixels to be detected.
Furthermore, the term "substrate foil" may refer to a flat and/or planar carrier element for carrying the detector sub-units. In particular, the substrate foil may be a thin foil, e.g. comprising a polymer material and/or a metal, having a thickness in the range from a few μm to thousands μm, e.g. from 10 μm to 1000 μm, and preferably from 10 μm to 100 μm. In particular, the method comprises the steps of,the substrate foil may have a thickness of about 25 μm. Furthermore, the substrate foil may be flexible, which may mean that the substrate foil may be bendable and/or collapsible without any degradation, e.g. more than 10 5 And twice.
Furthermore, the term "bendable" may refer to the radiation detector being foldable without degradation. In other words, the radiation detector can be folded and/or rolled up, for example, more than 10, without degradation and/or in a wear-free manner and/or without wear 5 And twice.
Furthermore, the term "side-by-side" may mean that the detector units are arranged adjacent to each other and/or are arranged adjacent to each other.
The term "two directly adjacent detector units" may refer to a first detector unit and a second detector unit, wherein the first detector unit may comprise a first edge and/or boundary arranged opposite to a second edge and/or boundary of the second detector unit. Thus, the first edge of the first detector unit may face the second edge of the second detector unit.
The term "two directly adjacent scintillation devices" may refer to a first scintillation device and a second scintillation device, wherein the first scintillation device may comprise a first edge and/or boundary arranged opposite a second edge and/or boundary of the second scintillation device. Thus, the first edge of the first scintillation device may face the second edge of the second scintillation device.
Restating to the first aspect of the invention, the detector may comprise various (i.e. at least two) detector units for detecting radiation. The detector units may each comprise various (i.e. at least two) photosensitive pixels and at least one scintillation device. The detector unit may for example be configured for detecting photons and/or any other radiation particles capable of exciting the scintillation device, such as charged particles, e.g. electrons, positrons and/or alpha particles, in order to generate electromagnetic signals, such as e.g. light output and/or light signals, which may be detected by the photosensitive pixels. Wherein the light sensitive pixels of each detector unit may be arranged in any pattern, such as for example in one or more columns and/or one or more rows. The detector units may be arranged adjacent to each other on the sides of the substrate foil and/or on a surface (e.g. an outer surface) and/or on top. The detector units may be arranged in any pattern on the substrate foil, such as for example in rows, triangles, rectangles and/or circles. The detector units may also be arranged with a certain offset and/or displacement with respect to each other.
At least two immediately adjacent detector units may be separated from each other such that a gap, space and/or void is formed between the scintillation devices of these adjacent detector units and/or between the opposite boundaries/edges of the scintillation devices of the two detector units. The gap may be free of any other elements of the radiation detector, i.e. the gap may be unobstructed. In particular, portions without scintillation devices may be present within the gaps and/or voids. At least two adjacent scintillation devices and/or their directly opposite edges may be separated from each other by at least 0.1cm, preferably at least 1cm. However, depending on the thickness of the scintillation devices, the scintillation devices may be separated from each other by 1cm to 30cm, for example 3cm to 20cm, and preferably 5cm to 15cm. Thus, the curved region of the substrate foil may refer to the region and/or area of the substrate foil arranged within the gap. Thus, a curved region may represent a region of the substrate foil that delimits and/or defines the gap.
By separating directly adjacent scintillation devices of directly adjacent detector units, the radiation detector may advantageously be bendable and/or foldable along at least a portion of that bending region and/or along the gap. In other words, the radiation detector may advantageously be bendable in the bending region and/or the gap. This in turn may allow the radiation detector to be folded arbitrarily in various configurations and/or geometrical arrangements of at least two adjacent detector units relative to each other. In this way, the radiation detector may, for example, be folded into a compact configuration, for example, for transport or storage of the radiation detector, and in use the radiation detector may be temporarily unfolded. In addition, the radiation detectors may be advantageously adapted in terms of the construction and/or geometrical arrangement of the detector units relative to each other according to the specific application. For example, in medical applications, the geometry of the radiation detector may be adjusted according to the specific geometry of the patient. However, the radiation detector may also be advantageously applied in other applications, such as scientific applications, for example at a particle accelerator. The radiation detector may also be used in space applications, where it may be transported to space, for example, in a folded configuration and then unfolded in space.
With specific reference to medical applications, the radiation detector of the present invention may allow for flexible positioning of smaller detector units substantially at any desired angle relative to each other, which enables new imaging opportunities, in contrast to the rigid geometry of a common, single, flat, large detector, which may impose limitations on, for example, X-ray imaging and access to a patient.
Furthermore, the radiation detector of the present invention enables a more compact and cost-effective design of the imaging system, providing higher system mobility, compared to common or standard imaging systems with large area and/or multiple detectors, such as, for example, spinal imaging nerve biplane applications.
In addition, common or standard large-scale rigid flat detectors may limit access of a physician or other medical device to the patient during a substantial portion of the imaging procedure. In contrast, the radiation detector of the present invention may limit access to the patient for only a short period of time when the detector is deployed.
In addition, common or standard large-scale bulk detectors may limit portability and/or mobility of the detector and/or imaging system, while the collapsible concept of the radiation detector of the present invention may allow for compact and/or mobile designs of the radiation detector and/or imaging system equipped with the radiation detector.
According to one embodiment, the radiation detector may be curved according to a bending angle enclosed by at least two directly adjacent and/or directly adjacent detector units, wherein the bending angle is in the range from about 0 ° to about 360 °. This range of bending angles may refer to an initial geometry, wherein the radiation detector may be in a folded geometry. However, assuming a fully expanded and/or flat geometry as the starting geometry, the maximum bend angle may be up to about +/-180 °. By providing a radiation detector in which the detector units are arbitrarily arranged over such a wide angular range relative to each other, the construction and/or geometrical flexibility of the overall radiation detector may be further increased.
According to one embodiment, the radiation detector comprises a single substrate foil. In other words, the substrate foil may be a common substrate foil forming a common carrier element for the detector units. The substrate foil may for example be a monolithic substrate foil. In this way, a cost-effective, lightweight, durable and/or rugged radiation detector may be provided.
According to one embodiment, the substrate foil comprises a polymeric material. The substrate foil may comprise, for example, polyimide (PI), polytetrafluoroethylene (PTFE), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and/or any combination thereof. Such materials may provide low weight and high flexibility and robustness such that the substrate foil and/or radiation detector may be folded almost arbitrarily, typically without any material degradation and/or degradation.
According to one embodiment, each of the detector units comprises an array of light-sensitive pixels. An array of pixels may refer to pixels arranged in rows and columns that form a uniform pattern of pixels. Such an array is particularly beneficial in terms of spatial resolution of the radiation detector.
According to one embodiment, each of the photosensitive pixels includes at least one Thin Film Transistor (TFT) element. Such TFT elements and/or pixels are characterized in that they can be produced inexpensively in large quantities, provide a long service life, are almost maintenance-free, have a small thickness, and in that they can be manufactured in various thicknesses and/or dimensions in order to meet the specific requirements of the radiation detector and/or the corresponding detector unit.
According to one embodiment, at least one of the plurality of detector units has a curved shape. In other words, at least one of the plurality of detector units may have a curved outer surface and/or a curved outer geometry. Alternatively, all of the plurality of detector units may have a curved shape. Depending on the geometry of the radiation source and/or depending on the direction of impingement of the radiation particles onto the radiation detector, the curved shape of the detector unit or at least a part thereof may simplify the post-processing of the radiation image captured with the radiation detector.
According to one embodiment, the photosensitive pixel and/or each detector unit comprises a photodiode. By means of the photodiodes, electromagnetic radiation or signals emitted from the scintillation device can be converted into electrical signals, such as currents and/or voltages, which in turn can be transferred via the at least one TFT element to a signal readout circuit and/or signal readout electronics of the radiation detector. Among them, the TFT element may be used as a switch or a switching element. For example, the electrical signals may be transferred and/or transmitted to data lines of the radiation detector. Further, the electrical signal may be amplified by a TFT circuit, which may include a plurality of TFT elements.
According to one embodiment, the radiation detector further comprises at least one addressing circuit for addressing the detector cells and at least one signal readout circuit for reading out signals from the detector cells. Thus, the radiation detector may comprise one or more addressing circuits and/or one or more signal readout circuits. For example, at least a portion of the detector cells may be electronically interconnected and share an addressing circuit and/or a signal readout circuit.
According to one embodiment, each detector cell comprises a separate addressing circuit and/or a separate signal readout circuit. Thus, each detector unit may be configured to operate independently and/or separately from all other detector units. In addition to providing flexibility in image acquisition, this may also advantageously reduce the signal-to-noise ratio, as relatively short wires may be used to connect the corresponding circuitry to the detector unit and/or the photosensitive pixels comprised therein. Thus, the performance of the radiation detector and/or the detector unit may be improved. Furthermore, equipping each of the detector units with separate peripheral electronics for addressing and/or signal data readout, i.e. addressing circuitry and/or signal readout circuitry, may enable the detector units to operate individually and acquire images, for example, from different radiation shots. The images of the detector units may be acquired simultaneously and/or sequentially. Furthermore, images acquired with different detector units may be combined and/or processed and/or reconstructed to generate anatomical and/or functional information of the patient, for example.
According to one embodiment, each of the individual signal readout circuits is arranged on an individual electronic device carrying region of the substrate foil. In addition, each of the individual addressing circuits may be arranged on a separate electronic device carrying area of the substrate foil. In this way, the length of the electrical wiring can be further reduced, and thus the signal-to-noise ratio is further reduced.
The radiation detector further comprises a switching element arranged between two (e.g. directly adjacent) detector units, wherein the switching element is configured for interconnecting and/or disconnecting the two detector units. The switching element may for example comprise a global data line switch allowing switchable interconnection and/or disconnection of two detector cells. This may enable separate and autonomous operation of each detector unit and may avoid crosstalk between detector units. In addition, this can reduce excessive noise caused by long data lines.
According to one embodiment, the first detector unit is configured for detecting radiation within a first energy range, wherein the second detector unit is configured for detecting radiation within a second energy range, which is at least partly different from the first energy range. The first energy range and the second energy range may at least partially overlap. In this way, a multifunctional radiation detector may be provided which is capable of detecting particles, such as photons, in various energy ranges and thereby providing further information for image acquisition. For example, the first detector unit may be an X-ray detector unit configured to detect X-rays, and the second detector unit may be a gamma-ray detector unit configured to detect gamma-rays. There may be a plurality of such first and second detector units, respectively. In addition, all detector units may be configured for detecting different energies. For example, in dual energy X-ray imaging, a first detector unit may be configured for mainly detecting low energy X-rays, so-called soft X-ray radiation, and a second detector unit, which may be positioned behind the first detector unit with respect to the flight path of the radiation particles, may be configured for mainly detecting high energy X-rays, so-called hard X-ray radiation. In order to provide sensitivity in different energy ranges, the first detector unit and the second detector unit may differ, for example, in terms of pixel size, in terms of scintillation material, in terms of thickness of the scintillation device and/or the scintillation layer comprised therein, and/or in terms of electronics (i.e. addressing and/or signal readout circuitry). For detecting higher energies, for example, larger pixels may be used and/or thicker scintillation layers included in the scintillation device may be used.
According to one embodiment, at least one of the plurality of detector units is an X-ray detector unit configured for detecting X-rays and arranged in a central area of the substrate foil, wherein at least two of the plurality of detector units are gamma-ray detector units arranged on opposite sides and/or on opposite sides of the X-ray detector unit. Thus, the X-ray detector unit may be delimited by at least two gamma-ray detector units. This may provide the radiation detector with multiple modes and functionalities.
According to one embodiment, the at least one scintillation device of each detector cell comprises a scintillation layer arranged on top of at least a part of the plurality of light-sensitive pixels, e.g. on the surface of at least a part of the plurality of light-sensitive pixels. Furthermore, the scintillation layer may be flexible, i.e. the scintillation layer may be bendable to a certain extent without degradation. This may further increase the robustness, flexibility and/or foldability of the entire radiation detector. Furthermore, the flexible scintillation layer may facilitate and/or enable the realization of detector cells having a curved shape. The scintillation layer can include CsI, GOS, garnet, and/or NaI materials.
According to one embodiment, the edges of the scintillation device are beveled. This may further increase bending, thereby further increasing foldability.
According to a second aspect, there is provided a radiation detector arrangement comprising a plurality of radiation detectors as described above and below.
According to one embodiment, at least two substrate foils of the plurality of radiation detectors are interconnected with each other. In other words, at least two of the plurality of radiation detectors may be interconnected with each other. Such an interconnection may comprise a mechanical interconnection of the respective substrate foils of the at least two radiation detectors. The substrate foils may be glued, welded and/or taped together. The substrate foils may also be interconnected by a thermal fusion process, i.e. by heat sealing and compression. The edges of the respective substrate foils may be arranged flush and/or they may at least partially overlap. Furthermore, a plurality of radiation detectors of the radiation detector arrangement may be electrically interconnected, for example by means of so-called Through Foil Vias (TFV), wire bonding and/or by means of printed conductive wires, for example ink-based. In this way, the overall size and versatility of the radiation detector arrangement may be further increased.
According to a third aspect, a method for producing a radiation detector is provided. The method comprises the step of providing a substrate foil and a plurality of detector cells, the detector cells each comprising a plurality of light-sensitive pixels and the detector cells each comprising at least one scintillation device optically coupled to the plurality of light-sensitive pixels. Furthermore, the method comprises the steps of: the plurality of detector units are arranged side by side with each other on the substrate foil such that at least two directly adjacent and/or adjacently arranged scintillation devices of at least two directly adjacent and/or adjacently arranged detector units are separated from each other by a gap such that the radiation detector is bendable and/or foldable along at least a portion of the gap.
These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described hereinafter.
Drawings
The subject matter of the invention will be explained in more detail hereinafter with reference to exemplary embodiments illustrated in the accompanying drawings, in which:
FIG. 1A schematically illustrates a top view of a radiation detector;
FIG. 1B schematically illustrates a cross-sectional view of the radiation detector of FIG. 1A;
FIG. 2A schematically illustrates the radiation detector in a closed configuration;
FIG. 2B schematically illustrates the radiation detector of FIG. 2A in a fully extended configuration;
FIG. 2C schematically illustrates the radiation detector of FIG. 2A in a partially deployed configuration;
fig. 3 to 7 each schematically show a top view of a radiation detector in a particular design;
FIG. 8A schematically illustrates a top view of the radiation detector in a fully extended configuration;
FIG. 8B schematically illustrates the radiation detector of FIG. 8A in a partially deployed configuration;
FIG. 9A schematically illustrates a top view of a radiation detector;
FIG. 9B schematically illustrates a detailed view of a portion of the radiation detector of FIG. 9A;
FIGS. 10-18 each schematically show a cross-sectional view of a radiation detector in a different geometrical arrangement;
FIG. 19A schematically illustrates a cross-sectional view of a radiation detector;
FIG. 19B schematically illustrates a side view of the radiation detector of FIG. 19A;
FIG. 20A schematically illustrates a cross-sectional view of a radiation detector;
FIGS. 20B and 20C each schematically illustrate a detailed view of a portion of the radiation detector of FIG. 20A, according to various embodiments;
FIG. 21 schematically illustrates a top view of a radiation detector arrangement;
FIG. 22 schematically shows a flow chart illustrating steps of a method for producing a radiation detector;
fig. 23 schematically illustrates a method for producing a radiation detector.
In principle, identical components have the same reference numerals in the various figures.
Detailed Description
Fig. 1A schematically shows a top view of the radiation detector 10, and fig. 1B schematically shows a cross-sectional view of the radiation detector 10 of fig. 1A. The radiation detector 10 comprises two detector units 12a, 12b.
Each of the detector units 12a, 12b comprises two light-sensitive pixels 14, illustratively arranged in a row. However, the photosensitive pixels 14 may alternatively be arranged in any arrangement with respect to each other. Each of the pixels 14 includes at least one Thin Film Transistor (TFT) element 16.
Furthermore, each of the detector units 12a, 12b comprises a photodiode 18, which at least partially covers the surface of the TFT element 16 of each detector unit 12a, 12b. In the exemplary embodiment shown in fig. 1A and 1B, the pixels 14 are connected to respective photodiodes 18, wherein the photodiodes 18 substantially provide photosensitivity to the pixels 14, as explained in more detail below. Alternatively, each of the detector units 12a, 12b may also include a plurality of photodiodes 18.
Furthermore, each of the detector units 12a, 12b comprises a scintillation device 20 with a scintillation layer 22 arranged on top of the light sensitive pixel 14 and/or on top of the light sensitive pixel 14. The scintillation layer 22 of each detector cell 12a, 12b can be arranged on top of the respective photodiode 18 and/or on the surface of the respective photodiode 18. The scintillation layer 22 may, for example, include CsI, GOS, garnet and/or NaI as the scintillation material.
The detector units 12a, 12b with all the above-described components and/or elements are arranged side by side and/or adjacent to each other on a flexible substrate foil 24. The detector units 12a, 12b may be arranged at least partly on the surface 25 and/or the top surface 25 and/or the outer surface 25 of the substrate foil 24. The substrate foil 24 may represent a single, large, common substrate foil 24 carrying all or most of the components of each detector unit 12a, 12 b. In other words, the substrate foil 24 may be a common substrate foil 24 forming a common carrier element for the detector units 12a, 12 b. The substrate foil 24 may for example be a monolithic substrate foil 24. Further, the substrate foil 24 may comprise a polymeric material such as, for example, polyimide (PI), polytetrafluoroethylene (ptfe) Alkene (PTFE), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and/or any combination thereof. The substrate foil 24 is flexible such that it can be bent and/or folded, for example more than 10 5 Without significant degradation and/or degradation. The substrate foil 24 may have a thickness in the range from a few μm to thousands μm, for example from 10 μm to 1000 μm, and preferably from 10 μm to 100 μm. Specifically, the substrate foil 24 may have a thickness of about 25 μm.
To use the flexibility of the substrate foil 24 and/or to provide the radiation detector 10 with foldability and/or bendability, the two detector units 12a, 12B arranged adjacent and/or abutting each other on the substrate foil 24 are separated from each other by a distance 26, which is indicated by the arrows in fig. 1A and 1B. More precisely, two directly adjacent scintillation devices 20 of the respective detector units 12a, 12b are separated by a distance 26, wherein the distance 26 may be measured from edges 21 and/or boundaries 21 of the scintillation devices 20 and/or scintillation layers 22 parallel to a surface 25 of the substrate 24, the edges/boundaries 21 being opposite and/or facing each other. In other words, the edges/boundaries 21 are arranged opposite to each other. The distance 26 may be at least 0.1cm, preferably at least 1cm. However, depending on the thickness of the scintillation device 20, the distance 26 may be in the range from 1cm to about 30cm, for example 3cm to 20cm, and preferably 5cm to 15cm. By separating immediately adjacent edges/boundaries 21 of the scintillation devices 20 by a distance 26, a void 28 and/or gap 28 is formed between the scintillation devices 20. The area and/or area of the substrate foil 24 disposed within the gap 28 and/or void 28 is represented as a curved region 30 of the substrate foil 24. Along at least a portion of the bending region 30, the radiation detector 10 is bendable and/or foldable such that the detector units 12a, 12b may be displaced and/or repositioned relative to each other substantially at any angle about an axis 32 parallel to the longitudinal extension of the bending region 30 and/or the gap 28, as further set forth in the figures below.
Furthermore, each of the detector cells 12a, 12b comprises an electronic addressing circuit 34 for addressing the pixels 14. The addressing circuit 34 of each detector cell 12a, 12b may be configured to drive the pixel 14, among other things, for example in terms of supplying power to these components. Addressing circuits 34 may each include, for example, an Integrated Circuit (IC).
Furthermore, each of the detector units 12a, 12b comprises an electronic signal readout circuit 36. The signal readout circuits 36 may each represent a data signal readout device for data and/or signals from the pixels 14 of each of the detector cells 12a, 12b, respectively. The signal readout circuits 36 may each include an Integrated Circuit (IC) and/or an Application Specific Integrated Circuit (ASIC). The signal readout circuits 36 may further each include an analog-to-digital converter for converting the analog signal to a digital signal.
However, the detector cells 12a, 12b may also share a single addressing circuit 34 and/or a single signal readout circuit 36. Thus, the detector units 12a, 12b may be electronically interconnected and share common peripheral electronics of the radiation detector 10.
Both the addressing circuit 34 and the signal readout circuit 36 may be fabricated as electronic TFT backplane circuits arranged on either side of the substrate foil 24, allowing the radiation detector 10 to be bent and/or folded without performance degradation. The circuitry 34, 36 of each detector unit 12a, 12b may be arranged on the same side of the substrate foil 24 or on separate sides of the substrate foil 24.
The principle of operation of the radiation detector 10 may be described as follows. Photons and/or charged particles, such as, for example, electrons, positrons, and/or alpha-particles, impinging on the scintillation device 20 and/or the scintillation layer 22 excite active species, such as, for example, molecules, in the scintillation layer 22, which in turn are de-excited by emission of electromagnetic radiation, such as, for example, visible light. The electromagnetic radiation emitted by the scintillation layer 22 and/or the scintillation device 20 then impinges on a photodiode 18, which converts the electromagnetic radiation into an electrical signal, i.e. a current and/or a voltage, which in turn can be transferred via at least one of the TFT elements 16 to a signal readout circuit 36 of the radiation detector 10. This provides an electronic signal that is related to the predominantly impinging radiation particles and/or the energy deposited in the scintillation device 20 by the predominantly impinging radiation particles. The electronic signal may then be converted to a digital signal, which may be further processed for final image acquisition.
It should be noted here that the two detector units 12a, 12b may be configured for detecting radiation having different energies. For example, detector unit 12a may represent a first detector unit 12a configured to detect radiation within a first energy range, and detector unit 12b may represent a second detector unit 12b configured to detect radiation within a second energy range, the second energy range being at least partially different from the first energy range. The first energy range and the second energy range may at least partially overlap.
For example, the first detector unit 12a may be an X-ray detector unit 12a configured to detect X-rays, and the second detector unit 12b may be a gamma-ray detector unit 12b.
To provide sensitivity in different energy ranges, the first detector unit 12a and the second detector unit 12b may differ, for example, in terms of the size of the pixel 14, in terms of the scintillation material, in terms of the thickness of the scintillation device 20 and/or the scintillation layer 22 comprised therein, and/or in terms of electronics (i.e. the addressing circuit 34 and/or the signal readout circuit 36), respectively. To detect higher energies, for example, a thicker scintillation layer 22 included in the scintillation device 20 may be used.
Measuring and/or detecting different energies with each of the detector units 12a, 12b may advantageously provide the radiation detector 10 with multiple functions and/or modes.
In common or standard detectors, the multiple functions can only be achieved by closely connecting individual smaller detectors together, which inevitably results in high cost prices.
According to the radiation detector 10 of the present invention described above with reference to fig. 1A and 1B, a multi-functional radiation detector 10 may be fabricated from a single sensor-on-foil substrate 24 produced in one process manufacturing flow. In addition, commonly available scintillation device 20 and/or radiation detector 10 assembly processes may be used, thereby reducing the production costs of the radiation detector 10 for use in the present invention.
Furthermore, for example, in clinical procedures with multiple imaging tasks, such as X-rays and gamma rays for SIRT, oncology IGT, etc., for example, intermediate patient transport may be required and use of ordinary or standard detectors may be time consuming.
In contrast, with the multi-modality radiation detector 10 of the present invention described with reference to fig. 1A and 1B, such operation may be simplified and/or shortened without the need for intermediate patient transport.
Furthermore, a common or standard radiation detector may have a fixed combination of sensors and scintillators, which ideally only meets the requirements for "average application". This may limit user flexibility, application range and may result in an undesirable high X-ray dose use.
In contrast, the radiation detector 10 of the present invention described with reference to fig. 1A and 1B may be provided with a plurality of sensors, i.e. detector units 12a, 12B comprising a combination of a plurality of scintillation devices 20, which may each be optimized for specific imaging application requirements, such as for low or high dose, for low or high kV, for low or high resolution, etc. This may provide for a more efficient use of radiation dose, such as X-ray dose.
Furthermore, conventional detectors and systems may have only one imaging function, such as an X-ray function or a gamma ray function.
In contrast, as described above with reference to fig. 1A and 1B, the radiation detector 10 of the present invention provides multi-modal radiation detection in combining X-ray and gamma-ray imaging in one radiation detector 10.
In addition, in common detectors, repeated folding/unfolding and/or bending of "standard" detectors on a common substrate can lead to localized damage to the scintillation device and to degradation of imaging performance.
In contrast, in the radiation detector 10 of the present invention, all detector cells 12a, 12b may be flat and may be folded only at the curved regions 30 and/or gaps 28 not covering any scintillation device 20 and/or scintillation layer 22. This may provide a high degree of robustness and durability.
The radiation detector according to the exemplary embodiment shown in fig. 1A and 1B is briefly summarized below. As described, a compact foldable radiation detector 10 design is provided that can be temporarily unfolded to actuate a larger configuration formed by a plurality of flat detector units 12a, 12b connected to each other. The detector units 12a, 12b may be flexibly positioned at any desired angle relative to each other (i.e., a bend angle 50 as shown in subsequent figures) and have their own specific photosensitive pixels 14 and scintillation devices 20. The basic large substrate foil 24 in the radiation detector 10 comprises a single thin plastic foil 24 on which the various smaller photosensitive pixels 14 are fabricated. The large substrate foil 24 is preferably produced in one process flow using a TFT backplane and photodiode manufacturing process. The multifunctional radiation detector 10 may be realized by designing its detector units 12a, 12b such that the detector units are capable of operating individually and/or acquiring images from different radiation shots, for example.
Fig. 2A schematically illustrates the radiation detector 10 in a closed configuration. Fig. 2B schematically illustrates the radiation detector 10 of fig. 2A in a fully deployed configuration, and fig. 2C schematically illustrates the radiation detector 10 of fig. 2A in a partially deployed configuration.
The radiation detector 10 of fig. 2A-2C includes the same features, functions, and/or elements as the radiation detector 10 of fig. 1A and 1B, if not otherwise described.
The radiation detector 10 of fig. 2A to 2C comprises a total of five detector units 12A, 12b, 12C, 12d and 12e, each having a rectangular shape.
The central detector unit 12a may be larger than the other detector units 12b to 12e. For example, the central detector unit 12a may be an X-ray detector unit 12a, while the other detector units 12b to 12e may be gamma-ray detector units. Alternatively, all detector units 12a to 12e may be configured for detecting radiation particles, e.g. photons, in different energy ranges, which may also overlap.
As shown in fig. 2B, the detector units 12B and 12d have the same size and are disposed on opposite sides 11a and 11B of the detector unit 12a, respectively.
Similarly, the detector units 12c and 12e have the same size and are disposed on opposite sides 11c and 11d of the detector unit 12a, respectively.
As is evident from fig. 2A-2C, the radiation detector 10 is folded into a fairly compact configuration as shown in fig. 2A and can be fully unfolded into the configuration depicted in fig. 2B, thereby increasing the effective detector area.
As illustrated in fig. 2C, because each of the detector units 12B-12 e may be folded and/or bent independently, the radiation detector 10 may be used in a number of different geometric configurations ranging from the fully folded configuration shown in fig. 2A to the fully unfolded configuration shown in fig. 2B.
In summary, a compact foldable radiation detector 10 design is provided that can be temporarily unfolded to actuate a larger configuration formed by a plurality of flat detector units 12 a-12 e connected to each other. The detector units 12 a-12 e may be flexibly positioned at any desired angle relative to each other, i.e. a bending angle 50 as shown in subsequent figures.
Each detector unit 12a to 12e comprises a photosensitive pixel 14 at least partially covered with a specific scintillation device 20, and each detector unit 12a to 12e can be optimized for specific X-ray and/or gamma-ray imaging requirements. Each detector cell 12a to 12e may have its own specific arrangement of pixels 14 and/or TFT elements 16 and/or peripheral electronics 34, 36 for addressing and data signal readout.
The basic large substrate foil 24 comprises a single thin plastic foil on which the various smaller photosensitive pixels 14 are fabricated. The large substrate foil 24 may preferably be produced in one process flow using a TFT backplane and photodiode manufacturing process.
The multifunctional radiation detector 10 is realized by designing its detector units 12a to 12e such that the detector units can be operated individually and images acquired from different radiation shots. The images of the detector units 12a to 12e may be acquired simultaneously and/or sequentially. The images may be processed, combined, and/or reconstructed to generate anatomical and/or functional information.
Fig. 3 schematically shows a top view of the radiation detector 10 according to an exemplary embodiment. The radiation detector 10 of fig. 3 includes the same features, functions, and/or elements as the radiation detector 10 shown in previous figures, if not otherwise stated.
The radiation detector of fig. 3 comprises a total of nine detector units 12a to 12i. Wherein the detector units 12A to 12e correspond to the detector units 12A to 12e of fig. 2A to 2C.
In addition, small-sized detector units 12f, 12g, 12h, 12i are arranged at each corner of the central detector unit 12a, which provides an even larger total detection area for the radiation detector 10.
Fig. 4 schematically shows a top view of the radiation detector 10 according to an exemplary embodiment. The radiation detector 10 of fig. 4, if not otherwise stated, includes the same features, functions, and/or elements as the radiation detector 10 shown in previous figures.
The radiation detector 10 of fig. 4 comprises a total of two detector units 12a, 12b, which are arranged adjacent to each other and differ in size. The detector unit 12a may be regarded as a main detector unit, which is delimited on the edge 11 by the detector unit 12 b.
Fig. 5 schematically illustrates a top view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 5 includes the same features, functions, and/or elements as the radiation detector 10 shown in previous figures, if not otherwise stated.
The radiation detector 10 of fig. 5 comprises a total of five detector units 12a to 12e. Along each side and/or edge 11 a-11 d of the respective detector unit 12 a-12 e, the detector unit 12 a-12 e may be folded, allowing a large variety of geometric configurations. All the detector units 12a to 12e have a square shape and have the same size. Thus, the detector area may be increased five times from the fully collapsed configuration to the fully expanded configuration.
Fig. 6 schematically illustrates a top view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 6 includes the same features, functions, and/or elements as the radiation detector 10 shown in previous figures, if not otherwise stated.
The radiation detector 10 of fig. 6 comprises a total of three detector units 12a to 12c. Along each side and/or edge 11 a-11 b of the respective detector unit 12 a-12 c, the detector unit 12 a-12 c may be folded, allowing a large variety of geometric configurations. All the detector units 12a to 12c have a square shape and have the same size. Thus, the detector area may be increased by a factor of three from a fully collapsed configuration to a fully expanded configuration.
Fig. 7 schematically illustrates a top view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 7 includes the same features, functions, and/or elements as the radiation detector 10 shown in previous figures, if not otherwise stated.
The radiation detector 10 of fig. 7 comprises a total of six detector units 12a to 12f. Along each side and/or edge 11 a-11 e of the respective detector unit 12 a-12 f, the detector units 12 a-12 f may be folded, allowing a large variety of geometric configurations. All the detector units 12a to 12f have a rectangular shape and have the same size. Thus, the detector area can be increased six-fold from the fully collapsed configuration to the fully expanded configuration.
Fig. 8A schematically shows a top view of the radiation detector 10 in a fully extended configuration, and fig. 8B schematically shows the radiation detector 10 of fig. 8A in a partially extended configuration. The radiation detector 10 of fig. 8A and 8B, if not otherwise described, includes the same features, functions, and/or elements as the radiation detector 10 shown in the previous figures.
The radiation detector 10 comprises a total of five detector units 12A to 12e, corresponding to the detector units 12A to 12e of fig. 2A and 2B.
Furthermore, the radiation detector 10 comprises a total of four individual electronics units 13a to 13d, wherein one of these electronics units 13a to 13d is arranged at each corner of the central detector unit 12 a. Each of the electronics units 13a to 13d comprises a separate signal readout circuit 36. Each of these individual signal readout circuits 36 is arranged on an individual electronic device carrying region 15a to 15d of the substrate foil 24.
In order to provide foldability of each of the detector units 12b to 12e along each of the edges 11a to 11d (corresponding to the sides 11a to 11d of the detector unit 12 a), the substrate foil 24 comprises cut-outs 17a to 17d and/or 19a to 19d between each of the electronics units 13a to 13d and at least one directly adjacent and/or neighboring detector unit 12b to 12e.
For example, for the electronics units 13a, 13B, the cutouts 17a, 17B are present in the substrate foil 24, as shown in fig. 8B. Alternatively or additionally, incisions 19a, 19b may be present. The above applies to the other electronic device units 13c, 13d and the cutouts 17c, 17d and/or 19c, 19d, respectively.
However, for increased stability, it is possible to provide the cutouts 17a to 17d or 19a to 19d.
It should be noted that the dashed lines in fig. 8A show the edges of the foldable substrate foil 24, and the solid lines show the cuts 17a to 17d and 19a to 19d, which may be cut foil edges.
The empty strip-shaped region and/or the region between the individual detector units 12a to 12e and/or the electronics units 13a to 13d can also be used for electronics, such as, for example, wiring or the like.
Fig. 9A schematically shows a top view of the radiation detector 10, and fig. 9B schematically shows a detailed view of a portion of the radiation detector 10 of fig. 9A. The radiation detector 10 of fig. 9A and 9B includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise described.
The radiation detector 10 of fig. 9A comprises a total of nine detector cells 12a to 12i, similar to the radiation detector 10 shown in fig. 3.
Furthermore, each detector cell 12a to 12i comprises one or more addressing circuits 34 and one or more signal readout circuits 36.
The detector cells 12a, 12b, 12d, 12f, 12h and 12c, 12e, 12g, 12i may have different pixel sizes, scintillation devices, addressing circuitry 34 and/or signal readout circuitry 36 optimized for low or high dose, low or high kV, low or high resolution applications, as previously described.
Each of the detector cells 12a to 12i is interconnected to one of the adjacent detector cells 12a to 12i via at least one switching element 38, such as a global data line switch. The switching element 38 is configured for switchably interconnecting and/or disconnecting adjacent detector units 12a to 12 i. More specifically, the switching elements 38 may switchably interconnect row address lines or column readout data lines from adjacent detector cells 12a to 12 i. For example, FIG. 9B shows the interconnection of column readout lines of detector cells 12a and 12B. Each of the detector cells 12a to 12i comprises an array 40a, 40b of light-sensitive pixels 14 arranged in several rows and columns on the substrate foil 24. For clarity reasons, the arrays 40a, 40b include only three rows and six columns. However, each of the arrays 40a, 40b may include up to 1000 by 1000 pixels 14 or even more.
The arrays 40a, 40b may be interconnected and/or disconnected from each other by switching elements 38, which may be global data line switches and include, for example, one TFT element per column for interconnecting/disconnecting each column.
The addressing circuits 34 may each include an IC as a row driver that addresses a plurality of rows and/or gate lines of a corresponding array 40a, 40b of photosensitive pixels 14.
The signal readout circuitry 36 may include an IC or ASIC for reading out signals from each column. In addition, the readout circuit 36 may include a Charge Sensitive Amplifier (CSA) 39.
In summary, the detector cells 12a to 12i can be electrically disconnected from each other by inserting the switching elements 38 into the data readout lines and the row driver lines. This enables an individual, autonomous operation of each detector unit 12a to 12i, avoiding crosstalk between the detector units 12a to 12i and reducing excessive noise caused by lengthy data lines.
In addition, the CSA 39 may include bond pads for signal readout of the IC of the signal readout circuitry 36. For simplicity, the TFT elements 16, row driver lines, driver ICs, and pixel circuits are not shown in fig. 9A and 9B.
Optionally, the ICs may be placed on the backside of the substrate foil 24 using a through-foil-via (through-foil-via) technique.
Fig. 10 schematically illustrates a cross-sectional view of a radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 10 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises three detector units 12a to 12c. At each bending region 30 between detector units 12b and 12a and between 12a and 12c, the radiation detector is bent by a bending angle 50 of about 60 °. Wherein the bending angle 50 is the angle enclosed by two directly adjacent detector units 12b, 12a and 12a, 12c, respectively.
As described in the previous figures, the detector units 12a to 12c may be sensitive to radiation of various energies. For example, detector unit 12a may be an X-ray detector unit and detector units 12b and 12c may be gamma-ray detector units.
The direction of impingement of the photon radiation is indicated in fig. 10 by arrow 54 and, for example, the patient position is indicated by object 52. Photons that pass through the object 52 are partially absorbed and a comprehensive radiation image can be acquired by the detector units 12 a-12 c, wherein the detector units 12 a-12 c can be positioned according to the geometry of the patient and/or the object 52.
Fig. 11 schematically illustrates a cross-sectional view of a radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 11 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 of fig. 11 comprises two detector units 12a, 12b arranged at a bending angle 50 of 90 °. The photon radiation may impinge perpendicularly upon each of the detector units 12a, 12b after passing through the object 52, as indicated by double arrow 54. In addition, the detector units 12a, 12b may be sensitive to photons of different energies.
Fig. 12 schematically illustrates a cross-sectional view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 12 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 of fig. 12 comprises two detector units 12a, 12b arranged at a bending angle 50 of 270 °. In contrast to the embodiment of fig. 11, photon radiation may impinge perpendicularly upon each of the detector cells 12a, 12b after passing through the substrate foil 24, as indicated by double arrow 54. In addition, the detector units 12a, 12b may be sensitive to photons of different energies.
Fig. 13 schematically illustrates a cross-sectional view of a radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 13 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 of fig. 13 comprises three detector units 12a, 12b, 12c arranged at a bending angle 50 of 180 °. Due to the high flexibility of the substrate foil 24, the detector units 12a to 12c may be arranged in a stepped structure, such that each of the detector units 12a to 12c may have only a slightly different distance to the object to be irradiated. Ideally, the distance differences should be as small as possible, as they result in differences in image magnification for each detector unit 12a, 12b, 12c. However, these can be corrected by image post-processing. Furthermore, as can be seen, the substrate foil 24 may be arranged in a Z-like structure in each of the bending regions 30, providing a high degree of flexibility of the radiation detector 10.
Fig. 14 schematically illustrates a cross-sectional view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 14 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises a total of five detector units 12a to 12e arranged in an arc-like and/or circular geometry. Each of the detector units 12a to 12e has a flat geometry. The radiation may first pass through the substrate foil 24 and then onto the detector units 12a to 12e, as depicted by arrows 54. However, any other impact direction 54 is possible.
As shown, due to the high flexibility of the substrate foil 24 in the bending region 30, the substrate foil 24 may be folded into a ring-like structure, allowing adjacent detector units 12 a-12 e to be brought together in close proximity for image acquisition.
Fig. 15 schematically illustrates a cross-sectional view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 15 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises a total of seven detector units 12a to 12g arranged in an arc-like and/or circular geometry. Each of the detector units 12a to 12g has a curved shape and/or a curved outer geometry and/or a curved outer surface. Due to the flexibility of the substrate foil 24, the substrate foil 24 also has a curved shape in the area where the detector units 12a to 12g are arranged.
The detector units 12a to 12g may be curved in only one spatial direction or dimension, respectively. Alternatively, the detector units 12a to 12g or a part thereof may be curved in two spatial directions, for example orthogonal spatial directions, wherein the radii of the respective curvatures in the two directions may be equal or different from one another. Furthermore, the radiation detector 10 may also comprise a combination of flat detector units 12a to 12g as shown in fig. 14 and curved detector units 12a to 12g as shown in fig. 15.
The radiation may first pass through the detector cells 12 a-12 g and then onto the substrate foil 24, as depicted by arrows 54. However, any other impact direction 54 is possible.
As shown, due to the high flexibility of the substrate foil 24 in the bending region 30, the substrate foil 24 may be folded into a ring-like structure, allowing adjacent detector units 12a to 12g to be brought together in close proximity for image acquisition.
Fig. 16 schematically illustrates a cross-sectional view of a radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 16 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises a total of six detector units 12a to 12f, wherein the detector 10 is folded in the middle of the detector 10 in a bending region 30 such that the pairs (12 a, 12d;12b, 12e and 12c, 12 f) of detector units are arranged back-to-back. For example, the detector units 12 a-12 c and the detector units 12 d-12 f may be sensitive to different radiant energies, e.g. for dual energy X-ray imaging applications. The bend angle 50 in fig. 16 is about 360 °.
For dual energy X-ray imaging, the detector units 12a to 12c, which are first impinged by radiation, may have a scintillation device 20 and/or a scintillation layer 22 that is thinner than the detector units 12d to 12f arranged behind the detector units 12a to 12c with respect to the impingement direction 54. In this way, the detector units 12 a-12 c may be more sensitive to low energy X-rays, while the detector units 12 d-12 f may be more sensitive to high energy X-rays. Further, the detector units 12a to 12c may include a different scintillation material compared to the detector units 12d to 12 f. Furthermore, in order to shield light and/or electromagnetic signals from the scintillation devices 20 of the detector units 12a to 12c and to avoid so-called crosstalk, the radiation detector 10 may further comprise one or more light shields (not shown) arranged on the substrate foil 24.
Fig. 17 schematically illustrates a cross-sectional view of a radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 17 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises a total of six detector units 12a to 12f, wherein the detector 10 is folded in the middle of the detector 10 in a bending region 30. Contrary to fig. 16, the cells 12a to 12f are shifted and/or offset relative to each other such that they partly overlap at the boundary region and such that the pairs (12 a, 12d;12b, 12e and 12c, 12 f) of detector cells are arranged only partly back-to-back. The configuration of the radiation detector 10 shown in fig. 17 is particularly advantageous for very large field-of-view X-ray imaging such as, for example, whole body imaging and/or spine imaging.
Fig. 18 schematically illustrates a cross-sectional view of the radiation detector 10 according to an example embodiment. The radiation detector 10 of fig. 18 includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
The radiation detector 10 comprises a total of five detector cells 12a to 12e, wherein the cells 12b and 12d are shifted and/or offset with respect to the other cells 12a, 12c and 12 e. As in fig. 13, the substrate foil 24 is bent and/or folded into a Z-like structure in each bending region 30. The configuration of the radiation detector 10 shown in fig. 18 is particularly advantageous for very large field of view X-ray imaging such as, for example, whole body imaging and/or spine imaging.
The geometry and/or configuration shown in fig. 10-18 illustrates the multi-function and/or multi-modality of the radiation detector 10. Applications may include, for example, hybrid X-ray and gamma-ray imaging for SIRT (selective internal radiation therapy, as shown, for example, in fig. 10), biplane X-ray imaging in IGT (image guided therapy, as shown, for example, in fig. 11 and 12), digital radiology (DR, as shown, for example, in fig. 13, 17 and 18, dual energy DR, as shown, for example, in fig. 16), computed Tomography (CT) imaging (as shown, for example, in fig. 14 and 15), tomosynthesis, neonatal and/or pediatric imaging (L-shape), wherein patient movement may not be required for different views, mobile DR applications using compact portable detector 10, whole body imaging, trauma, orthopedics, and many other applications.
Fig. 19A schematically illustrates a cross-sectional view of the radiation detector 10, and fig. 19B schematically illustrates a side view of the radiation detector 10 of fig. 19A.
The radiation detector 10 of fig. 19A and 19B includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise described.
In fig. 19A and 19B, a CT-like ring is formed by a radiation detector 10 comprising a total of twelve detector units 12 arranged in a ring structure. The radiation detector 10 includes a support ring 60 for holding the detector units 12 in a ring configuration. The support ring 60 may be positioned by a tube element 62 attached to the support ring via a further tube element 64.
Alternative constructions and/or embodiments may be semi-rings.
Furthermore, by folding one or more detector units 12 outside the ring structure, an adjustable caliber size is possible.
Further, the detector unit 12 of the radiation detector 10 shown in fig. 19A and 19B may also have a curved shape, as shown in fig. 15.
Fig. 20A schematically illustrates a cross-sectional view of the radiation detector 10, and fig. 20B and 20C each schematically illustrate a detailed view of a portion of the radiation detector 10 of fig. 20A, according to various embodiments, as explained below.
The radiation detector 10 of fig. 20A-20C includes the same features, functions, and/or elements as the radiation detector 10 of the previous figures, if not otherwise described.
Similar to the configuration shown in fig. 18, the radiation detector 10 of fig. 20A includes a total of five detector cells 12 a-12 e, with cells 12b and 12d being shifted and/or offset relative to the remaining cells 12a, 12c and 12 e. The substrate foil 24 is bent and/or folded into a Z-like structure in each bending region 30.
Fig. 20B shows a detailed view of the detector units 12a and 12B. Each of the cells 12a, 12b includes a scintillation device 20 having a scintillation layer 22 disposed over a photodiode 18 and an array 40a, 40b of photosensitive pixels 14. Furthermore, an addressing circuit 34 and a signal readout circuit 36 are depicted, which are arranged in the bending region 30 of the substrate foil 24.
As can be seen in fig. 20B, the substrate foil 24 partially overlaps the detector unit 12B at the edge 70 of the detector unit 12 a. However, because the substrate foil is quite thin, its X-ray absorption rate is negligible.
To provide seamless X-ray detection, the edges 72 of the scintillation devices 20 of the detector units 12a, 12b are beveled.
The main criterion for seamless X-ray imaging may be that the photosensitive pixel array 40a of the top detector unit 12a overlaps the photosensitive pixel array 40b of the bottom detector unit 12b, and in the overlapping region at least one of the photosensitive pixel arrays may cover the scintillation layer 22 and/or the scintillation material. The X-ray images of the two detector units 12a, 12b can be seamlessly stitched to each other by advanced image processing techniques.
Referring to fig. 20B, in contrast to the beveled edges 72 of the scintillation device 20 shown in fig. 20B, the edges 72 of the scintillation device 20 of the detector cells 12a, 12B shown in fig. 20C are abrupt. A steep scintillator edge 72 may be preferable to a beveled scintillator edge because the overlap area is smaller and reduces potential image distortion caused by scintillator thickness variations.
For completeness, it is noted that each of the cells 12a, 12B shown in fig. 20B includes a scintillation device 20 having a scintillation layer 22 arranged over an array 40a, 40B of photodiodes 18 and photosensitive pixels 14. Furthermore, an addressing circuit 34 and a signal readout circuit 36 are depicted, which are arranged in the bending region 30 of the substrate foil 24.
Fig. 21 schematically shows a top view of the radiation detector arrangement 100. The radiation detector arrangement 100 comprises two radiation detectors 10a, 10b as described with reference to the previous figures. Each of the radiation detectors 10a, 10b of the radiation detector arrangement 100 of fig. 21, if not otherwise stated, comprises the same features, functions and/or elements as the radiation detector 10 of the previous figures.
In particular, each of the radiation detectors 10a, 10b includes the same elements, features, and/or functions as described in fig. 1.
The radiation detector 10a comprises, among other things, a substrate foil 24a on which the detector cells 12a, 12b are arranged side by side such that the respective scintillation devices 20 are separated from each other by a distance 26.
Similarly, the radiation detector 10b comprises a substrate foil 24b on which the detector cells 12a, 12b are arranged side by side such that the respective scintillation devices 20 are separated from each other by a distance 26.
The two substrate foils 24a, 24b of the radiation detectors 10a, 10b are interconnected to each other at a connection region 102. The interconnection of the two substrate foils 24a, 24b may comprise a mechanical interconnection of the respective substrate foils 24a, 24 b. Thus, the substrate foils 24a, 24b may be glued, welded and/or taped together. The substrate foils 24a, 24b may alternatively or additionally be interconnected by a thermal fusion process, i.e. by heat sealing and compression. The first edge 104a of the radiation detector 10a and/or the substrate foil 24a at least partially overlaps the second edge 104b of the radiation detector 10b and/or the substrate foil 24 b. The first edge 104a and the second edge 104b may alternatively be arranged flush with respect to each other.
Furthermore, the radiation detectors 10a, 10b may be electrically interconnected, for example by means of so-called Through Foil Vias (TFV), wire bonding and/or by means of printed conductive wires, for example ink-based. In this way, the overall size and versatility of the radiation detector arrangement 100 can be further increased.
In this way, essentially any number of radiation detectors 10, 10a, 10b may be interconnected in alternative embodiments of the radiation detector arrangement 100.
Fig. 22 schematically shows a flow chart illustrating the steps of a method for producing the radiation detector 10. The radiation detector 10 produced according to the method includes the same features, functions and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
In a first step S1, a substrate foil 24, in particular a single substrate foil 24, is provided, and in a second step S2, a plurality of detector units 12a, 12b are provided. The detector units 12a, 12b each comprise a plurality of photosensitive pixels 14 and each comprise at least one scintillation device 20 optically coupled to the plurality of photosensitive pixels 14. Steps S1 and S2 may be performed in any order or simultaneously.
In a further step S3, the detector units 12a, 12b are arranged side by side relative to each other on the substrate foil 24 such that at least two directly adjacent scintillation devices 20 of at least two directly adjacent detector units 12a, 12b are separated from each other by a gap 28 such that the radiation detector 10 is bendable along at least a part of the gap 28.
Optionally, the substrate foil 24 may be cut between the detector units 12a, 12b, i.e. the detector units 12a, 12b may be cut out, and the detector units 12a, 12b may be laminated to another large-sized substrate foil in an arbitrary geometrical arrangement with respect to each other, e.g. by gluing and/or welding.
Fig. 23 schematically illustrates a method for producing the radiation detector 10. Fig. 23 illustrates a detector-on-foil manufacturing process flow. The radiation detector 10 produced according to the method includes the same features, functions and/or elements as the radiation detector 10 of the previous figures, if not otherwise stated.
In a first step S1, a glass carrier 500 is provided, acting as a starting substrate.
In a second step S2, the substrate foil 24 is arranged on the glass carrier 500. The substrate foil 24 may be laminated to the glass carrier 500.
In a third step S3, the pixels 14 and the TFT elements 16 are arranged on the substrate foil 24, for example during TFT backplane manufacturing. The TFT elements 16 may be arranged in an array 40 on the substrate foil 24.
In a fourth step S4, the photodiodes 18 are deposited on the pixels 14 and/or on the array 40 formed by the pixels 14.
In a fifth step S5, the scintillation device 20 is arranged on the photodiode 18 and/or applied to the photodiode 18. Thus, as shown in the exemplary embodiment of fig. 23, two detector units 12a and 12b are formed.
In a sixth step S6, the substrate foil 24 is peeled off and essentially the radiation detector 10 is provided, which may further comprise at least one signal readout circuit 36 and/or addressing circuit 34, as shown in the previous figures.
Optionally, in a further step, electronics may be arranged on the radiation detector 10.
While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive; the invention is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art and practicing the claimed invention, from a study of the drawings, the disclosure, and the appended claims.
In the claims, the word "comprising" does not exclude other elements or steps, and the indefinite article "a" or "an" does not exclude a plurality. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims shall not be construed as limiting the scope.

Claims (12)

1. A radiation detector (10), comprising:
A plurality of detector units (12 a, 12 b) each comprising a plurality of photosensitive pixels (14) and each comprising at least one scintillation device (20) optically coupled to the plurality of photosensitive pixels (14); and
a substrate foil (24) for carrying the detector units (12 a, 12 b),
wherein the detector units (12 a, 12 b) are arranged side by side on the substrate foil (24);
at least two immediately adjacent scintillation devices (20) of at least two immediately adjacent detector cells (12 a, 12 b) are spaced apart from each other such that the radiation detector (10) is bendable along at least a portion of a bending region (30) of the substrate foil (24),
wherein the bending region (30) is arranged between the at least two directly adjacent scintillation devices (20);
each detector unit (12 a, 12 b) comprises a separate addressing circuit (34) for addressing the respective detector unit (12 a, 12 b) and/or a separate signal readout circuit (36) for reading out signals from the respective detector unit (12 a, 12 b);
a switching element (38) is arranged between the two detector units (12 a, 12 b); and is also provided with
The switching element (38) is configured for interconnecting and/or disconnecting the two detector units (12 a, 12 b).
2. The radiation detector (10) according to claim 1,
wherein the radiation detector (10) is bendable and a bending angle (50) is enclosed by the at least two directly adjacent detector units (12 a, 12 b);
the bending angle (50) is in the range from 0 ° to 360 °.
3. The radiation detector (10) according to claim 1 or 2,
wherein the radiation detector (10) comprises a single substrate foil (24); and/or
The substrate foil (24) comprises a polymeric material.
4. The radiation detector (10) according to claim 1 or 2,
wherein each of the detector units (12 a, 12 b) comprises an array (40, 40a, 40 b) of light-sensitive pixels (14); and/or
Each of the photosensitive pixels (14) comprises at least one thin film transistor element (16).
5. The radiation detector (10) according to claim 1 or 2,
wherein at least one of the plurality of detector units (12 a, 12 b) has a curved shape.
6. The radiation detector (10) according to claim 1 or 2,
wherein each of the individual addressing circuits (34) and/or each of the individual signal readout circuits (36) is arranged on an individual electronic device carrying area (15 a-15 d) of the substrate foil (24).
7. The radiation detector (10) according to claim 1 or 2,
wherein the first detector unit (12 a) is configured for detecting radiation in a first energy range; and is also provided with
The second detector unit (12 b) is configured for detecting radiation within a second energy range, which is at least partially different from the first energy range.
8. The radiation detector (10) according to claim 1 or 2,
wherein one of the plurality of detector units (12 a) is an X-ray detector unit configured for detecting X-rays and arranged in a central region of the substrate foil (24); and is also provided with
At least two of the plurality of detector units (12 b, 12 c) are gamma-ray detector units arranged on opposite sides (11 a, 11 b) of the X-ray detector unit.
9. The radiation detector (10) according to claim 1 or 2,
wherein the at least one scintillation device (20) of each detector cell (12 a, 12 b) comprises a scintillation layer (22) arranged on top of at least a portion of the plurality of photosensitive pixels (14); and/or
The edges (72) of the scintillation device (20) are beveled.
10. A radiation detector arrangement (100), comprising:
a plurality of radiation detectors (10 a, 10 b) according to any of the preceding claims.
11. The radiation detector arrangement (100) according to claim 10,
wherein at least two substrate foils (24 a, 24 b) of a plurality of said radiation detectors (10 a, 10 b) are interconnected with each other.
12. A method for producing a radiation detector, the method comprising the steps of:
-providing a substrate foil (24) and a plurality of detector units (12 a, 12 b), the detector units (12 a, 12 b) each comprising a plurality of photosensitive pixels (14) and each comprising at least one scintillation device (20) optically coupled to the plurality of photosensitive pixels (14);
-arranging the plurality of detector units (12 a, 12 b) side by side relative to each other on the substrate foil (24) such that at least two directly adjacent scintillation devices (20) of at least two directly adjacent detector units (12 a, 12 b) are separated from each other by a gap (28) and such that the radiation detector is bendable along at least a portion of the gap (28); and is also provided with
-arranging a switching element (38) between the two detector units (12 a, 12 b);
Wherein the switching element (38) is configured for interconnecting and/or disconnecting the two detector units (12 a, 12 b);
wherein each detector unit (12 a, 12 b) comprises a separate addressing circuit (34) for addressing the respective detector unit (12 a, 12 b) and/or a separate signal readout circuit (36) for reading out signals from the respective detector unit (12 a, 12 b).
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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110100191B (en) * 2016-12-21 2023-05-30 皇家飞利浦有限公司 Protection member for gamma radiation detector
JP7167060B2 (en) * 2017-05-01 2022-11-08 コーニンクレッカ フィリップス エヌ ヴェ multilayer detector
WO2019036446A2 (en) * 2017-08-17 2019-02-21 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Hybrid ct system with additional detectors in close proximity to the body
US11079282B2 (en) * 2018-11-28 2021-08-03 Semiconductor Components Industries, Llc Flexible interconnect sensing devices and related methods
US10859719B2 (en) * 2018-12-13 2020-12-08 The Boeing Company Adjustable multifacet x-ray sensor array
WO2020142977A1 (en) * 2019-01-10 2020-07-16 Shenzhen Xpectvision Technology Co., Ltd. Image sensor having radiation detectors of different orientations
JP7102605B2 (en) * 2019-03-13 2022-07-19 富士フイルム株式会社 Radiation imaging device
CN113543711A (en) * 2019-03-29 2021-10-22 深圳帧观德芯科技有限公司 Image sensor with calibration mode
CN112068178B (en) * 2019-06-10 2023-08-29 睿生光电股份有限公司 Radiation sensing apparatus
CN110664422A (en) * 2019-09-09 2020-01-10 东软医疗系统股份有限公司 Detector module, detector and medical imaging equipment
CN111227858A (en) * 2020-01-22 2020-06-05 东软医疗系统股份有限公司 Detector module, detector and CT equipment
WO2022153627A1 (en) * 2021-01-13 2022-07-21 キヤノン電子管デバイス株式会社 Photoelectric conversion board
CN112885855B (en) * 2021-01-15 2022-05-17 核芯光电科技(山东)有限公司 Deep silicon detector module integrated with pre-amplification circuit
IT202100026417A1 (en) * 2021-10-14 2023-04-14 Milano Politecnico DEVICE AND SYSTEM FOR DETECTION OF RADIATIONS EMITTED BY AN IRRADIATED SAMPLE WITH AN EXCITATION BEAM

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090034541A (en) * 2007-10-04 2009-04-08 삼성전자주식회사 Array substrate for x-ray detector and x-ray detector having the same
CN102483461A (en) * 2009-09-08 2012-05-30 皇家飞利浦电子股份有限公司 Imaging Measurement System With A Printed Photodetector Array
CN106796300A (en) * 2014-09-04 2017-05-31 通用电气公司 For the system and method for modularization imaging detector

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59813628D1 (en) 1997-10-01 2006-08-17 Siemens Ag X-ray detector
JP2001095789A (en) 1999-09-30 2001-04-10 Shimadzu Corp X-ray fluoroscopy photographing apparatus
US7189971B2 (en) 2002-02-15 2007-03-13 Oy Ajat Ltd Radiation imaging device and system
US6982424B2 (en) * 2003-06-02 2006-01-03 Ge Medical Systems Global Technology Company, Llc X-ray and CT image detector
JP3863872B2 (en) 2003-09-30 2006-12-27 株式会社日立製作所 Positron emission tomography system
US7521685B2 (en) 2006-01-18 2009-04-21 General Electric Company Structured scintillator and systems employing structured scintillators
US8552299B2 (en) 2008-03-05 2013-10-08 The Board Of Trustees Of The University Of Illinois Stretchable and foldable electronic devices
JP2010085265A (en) 2008-09-30 2010-04-15 Fujifilm Corp Radiation detecting device and radiography system
JP2010085259A (en) 2008-09-30 2010-04-15 Fujifilm Corp Radiation detecting apparatus and radiation image capturing system
JP2010151681A (en) 2008-12-25 2010-07-08 Toshiba Corp Pet device
US8513612B2 (en) 2009-04-22 2013-08-20 Koninklijke Philips N.V. Imaging measurement system with a printed organic photodiode array
JP2013253887A (en) * 2012-06-07 2013-12-19 Canon Inc Radiographic device, radiographic system
AU2015229722A1 (en) 2014-03-09 2016-09-29 Diro, Inc. Management of group-sourced contacts directories, systems and methods

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090034541A (en) * 2007-10-04 2009-04-08 삼성전자주식회사 Array substrate for x-ray detector and x-ray detector having the same
CN102483461A (en) * 2009-09-08 2012-05-30 皇家飞利浦电子股份有限公司 Imaging Measurement System With A Printed Photodetector Array
CN106796300A (en) * 2014-09-04 2017-05-31 通用电气公司 For the system and method for modularization imaging detector

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