CN109186812A - A kind of method and its amendment circuit of temperature sensors of high precision error correction - Google Patents
A kind of method and its amendment circuit of temperature sensors of high precision error correction Download PDFInfo
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- CN109186812A CN109186812A CN201811203754.1A CN201811203754A CN109186812A CN 109186812 A CN109186812 A CN 109186812A CN 201811203754 A CN201811203754 A CN 201811203754A CN 109186812 A CN109186812 A CN 109186812A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Abstract
The present invention discloses the method and its amendment circuit of a kind of temperature sensors of high precision error correction, and this method includes: S1, the required digit correcting mode for determining error correction；S2, first with electric current of the different coarse adjustment positions mode to transistor coarse adjustment is carried out, modulation code stream is generated by duty cycle modulator again and puts capable folding into according to modulation code stream height is split, fine tuning is carried out to the electric current of transistor, is determined as the extent of amendment of the emitter-base voltage of temperature signal；S3, the transistor current size opened and closed according to the temperature signal extent of amendment of fabrication error and determination, determining switch, meet the requirement of extent of amendment；S4, amendment precision is obtained according to required precision.The present invention changes final revised voltage swing by changing the duty ratio of modulation code stream, avoid the case where needing low current when high-precision, the error in temperature sensor temperature signal is effectively eliminated, and reaches very high required precision, can satisfy the modified demand of temperature sensors of high precision.
Description
Technical field
The present invention relates to IC design field, in particular to a kind of method of temperature sensors of high precision error correction
And its amendment circuit.
Background technique
With the continuous improvement of application demand, the precision of temperature sensor is also being continuously improved.It is manufactured in temperature sensor
During, due to technological factor, inevitably introduce error.In order to guarantee the accurate of temperature sensor detection temperature
Property, it needs for the error of sensor to be modified.Common correcting mode can effectively correct the error of sensor, but due to
Technological factor limitation, modified precision are limited.In high-precision sensor, common correcting mode is simultaneously not suitable for.
Fig. 1 show the structural schematic diagram of temperature sensor.
Two bias current I in Fig. 1bias1And Ibias2Respectively flow through bipolar pipe (bipolar transistor, also referred to as three poles
Pipe) Q1 and Q2, wherein transistor Q1 generates a temperature signal VBE, which is the voltage of transistor Q1 emitter and base stage
Difference.Transistor Q2 also generates a temperature signal VBE, which is the voltage difference of transistor Q2 emitter and base stage.Transistor Q1
With the V of transistor Q2 between the twoBEDifference produces another temperature signal Δ VBE。
∑ Δ analog-digital converter (Sigma delta ADC) is responsible for signal VBEWith Δ VBEIt is sampled, and will be sampled
To signal quantified, obtain digital code stream BS (bit stream), digital code stream pass through desampling fir filter
After (decimation filter) filtering, the temperature signal after being quantified.
In temperature sensor, two temperature signal VBEWith Δ VBEError will be introduced.Each temperature signal has multiple
Error source.Wherein, temperature signal VBEIn can introduce error error source have reverse saturation current deviation, base resistance introduce
Error, the error of reversed Early effect introducing, error of bias current etc.；Temperature signal Δ VBEIn can introduce the mistake of error
Error that poor source has matching error between transistor, the matching error between current source, transistor finite current gain to introduce,
The error etc. that reversed Early effect introduces.
Assuming that the required precision of temperature sensor is 0.1K (K is Kelvin unit), then all error source contributions are required
Sum of the deviations cannot be greater than 0.1K, therefore the error that can contribute of each error source is number of the overall error divided by error source.
According to this method of salary distribution, error an order of magnitude smaller than overall error or so of each error source contribution, i.e., each error source
Error be 0.01K.
Usual situation, by preferable Circuit Matching, or even it is necessary when can will be warm by the way of Dynamic Matching
Spend signal delta VBEIn error concealment to sufficiently small range, therefore, can ignore temperature letter Δ VBEError.And temperature is believed
VBEIn error, then cannot be eliminated by matched mode, need additionally to increase in circuit an amendment circuit.The amendment
The effect of circuit is that temperature signal V is calculated by way of test after actual productionBEIn error size, it is then sharp
With amendment circuit by temperature signal VBEIn error concealment.
In mixed signal (Mix signal) technique in SMIC 0.18um standard cell lib, various factors leads to temperature
Spend signal VBEError range be about ± 9.22mV, and the corresponding temperature signal V of ± 0.01K temperature errorBEError be ±
0.04mV (25 degree are at room temperature), the ratio of error range and error precision is as follows:
From above formula (1) as can be seen that realizing that error correction needs the correcting mode of 8bit.
Common error correcting circuit is as shown in Figures 2 and 3.
Fig. 2 is resistance correcting mode.V of the which in transistorBEUpper to be directly superimposed a voltage, the size of voltage is n
×R×Ibias, wherein n is the number that amendment needs to use resistance, and R is each amendment resistance sizes, IbiasIt is inclined on transistor
Set electric current.It is available by calculating, to realize the requirement of 0.01K precision, the matching precision needs for correcting circuit are up to
0.074%, this precision is difficult to realize in general technology.
Fig. 3 is to utilize electric current correcting mode.Which changes transistor by the size of bias current on change transistor
VBEValue, to correct VBEIn error.Under normal conditions, in order to avoid temperature sensor self-heating is to environmental monitoring
Influence, biosensor power consumption all can very little, therefore the electric current very little on transistor, such as 0.5uA.In this case, for reality
Existing VBEHigh-precision amendment, the precision for the correcting current for needing to use is very high, by calculate it is available, to realize 0.01K essence
The requirement of degree, then the correcting current size of minimum bit is 0.75nA.And the electric current of 0.75nA is very small, implements in design
It is extremely difficult, and precision it is difficult to ensure that.
From the above it can be seen that common error correction mode is in high-precision sensor using there are limitations.
Summary of the invention
The object of the present invention is to provide a kind of method of temperature sensors of high precision error correction and its amendment circuits, utilize
The mode of modulation duty cycle realizes the amendment of temperature signal error, and which can effectively eliminate temperature sensor temperature letter
Error in number, and reach very high required precision, it can satisfy the modified demand of temperature sensors of high precision.
In order to achieve the above object, the invention discloses a kind of method of temperature sensors of high precision error correction, the party
Method comprises the steps of:
Required digit correcting mode when S1, the amendment of temperature sensor error；
S2, first the electric current progress coarse adjustment using different coarse adjustment positions mode to transistor, then pass through duty cycle modulator and generate
Modulation code stream simultaneously opens and closes control switch according to modulation code stream height, carries out fine tuning to the electric current of transistor, is determined as
The extent of amendment of the emitter-base voltage of temperature signal；Alternatively, directly generating modulation code stream and basis by duty cycle modulator
Modulation code stream height opens and closes control switch, carries out fine tuning to the electric current of transistor, is determined as the emitter-base bandgap grading-of temperature signal
The extent of amendment of base voltage；
The extent of amendment of S3, the error according to caused by technique and identified temperature signal determine that control switch opens and closes
When transistor size of current, to meet the requirement of extent of amendment；
S4, amendment precision is obtained according to the required precision of the required digit correcting mode in step S1.
Preferably, it in the step S1, further includes:
By the ratio for calculating temperature signal error a and error precision c caused by techniqueRoot again
According to the required digit correcting mode of the accomplished error correction of ratio m.
Preferably, it in the step S2, further includes:
When code stream is low, control switch S is disconnected, and the first electric current flowed through on transistor is Ibias1, generate an emitter-base bandgap grading-
Base voltage VBE1, it is denoted as first voltage, the first voltage are as follows:
When code stream is high, control switch S is closed, and the second electric current flowed through on transistor is Ibias1+Ibias2, generate another
One emitter-base voltage VBE2, it is denoted as second voltage, second voltage are as follows:
In formula, k is Boltzmann constant, and T is absolute temperature, and q is electron charge, IsFor transistor reverse saturation current；
The first voltage and the second voltage obtain revised equivalent voltage after wave filter
VBE,trim=γ VBE2+(1-γ)VBE1(4),
In formula, γ is the duty ratio for modulating code stream；
The extent of amendment known to formula (2) and (3) are as follows:
Preferably, it in the step S3, further includes:
Temperature signal error caused by already known processes is a, then has:
The ratio of the second electric current and the first electric current can be obtained by formula (6)；
It can determine the first electric current and the second electricity of the requirement for meeting extent of amendment by the ratio of the second electric current and the first electric current
The numerical value of stream；
According to the x position required precision for the correcting mode that error correction needs, the difference d=1/ between adjacent duty ratio is obtained
2x, then formula (4) are combined, it is known that amendment precision are as follows:
VBE,accuracy=VBE,trim|γ+d-VBE,trim|γ
=(γ+d) VBE2+(1-γ-d)VBE1-γVBE2-(1-γ)VBE1
=dVBE2-d·VBE1
=d (VBE2-VBE1)
=dVBE,range (7)。
Preferably, coarse adjustment mode is set as 2bit coarse adjustment mode or other digit coarse adjustment modes, and duty ratio modulation side
Formula matches setting with the coarse adjustment mode.
Preferably, the duty ratio modulation mode can increase modulation essence by increasing the number of modulation sampling clock cycle
Degree.
Preferably, it in the duty ratio modulation mode, is adjusted by the number that control stream is high sampling clock cycle
The duty ratio of code stream processed.
The present invention also provides a kind of height of method using temperature sensors of high precision error correction as described above
Accuracy temperature sensor error correcting circuit, which includes:
Generate the duty cycle modulator of modulation code stream；
With the control switch of duty cycle modulator cooperation, it is connect with transistor；The control switch is according to code stream
Height opened and closed, the electric current flowed through on transistor is adjusted, obtained revised equivalent voltage determines transistor
The extent of amendment of emitter base voltage, and amendment precision is obtained according to the required precision of correcting mode.
Preferably, the control switch is also connect with a low-pass filter or the low-pass filter is by temperature sensor
In decimation filter replacement.
Compared with prior art, the invention has the benefit that (1) present invention by change modulation code stream duty ratio come
The case where changing final revised voltage swing, needing low current when avoiding high-precision, which can pass through increasing
Add the number of modulating clock to increase modulation accuracy, effectively eliminates the error in temperature sensor temperature signal, and reach very high
Required precision, can satisfy the modified demand of temperature sensors of high precision.(2) present invention guarantees extent of amendment by coarse adjustment,
And guarantee amendment precision using duty ratio fine tuning, the case where correcting mode needs low current is not only avoided, is in turn avoided simultaneously
The problem of correcting mode influences modulation accuracy since the surplus period causes modulation error larger.
Detailed description of the invention
The temperature sensor configuration diagram of Fig. 1 prior art；
The resistance of Fig. 2 prior art corrects VBEVoltage system schematic diagram；
The electric current of Fig. 3 prior art corrects VBEVoltage system schematic diagram；
Duty ratio modulation Fig. 4 of the invention corrects VBEVoltage system schematic diagram；
Duty ratio modulation schematic diagram Fig. 5 of the invention；
The modulation error schematic diagram that the surplus period introduces in duty ratio modulation Fig. 6 of the invention；
The correcting mode schematic diagram of current-modulation Fig. 7 of the invention in conjunction with duty ratio modulation.
Specific embodiment
The invention discloses a kind of method of temperature sensors of high precision error correction and its amendment circuits, in order to make this hair
Bright more obvious and easy to understand, below in conjunction with the drawings and specific embodiments, the present invention will be further described.
In temperature sensor, the temperature signal V of two transistors generationBE(the i.e. electricity of the emitter of transistor and base stage
Pressure difference) and two temperature signals difference DELTA VBEError will be introduced.Each temperature signal has multiple error sources.Wherein, warm
Spend signal VBEIn can introduce error, the reversed strategic point benefit that the error source of error has reverse saturation current deviation, base resistance to introduce
Error that effect introduces, the error of bias current etc.；Temperature signal Δ VBEIn can introduce error error source have transistor
Between matching error, the matching error between current source, transistor finite current gain introduce error, reversed Early effect
Error of introducing etc..
Assuming that the required precision of temperature sensor is 0.1K (K is Kelvin unit), then all error source contributions are required
Sum of the deviations cannot be greater than 0.1K, therefore the error that can contribute of each error source is number of the overall error divided by error source.
According to this method of salary distribution, error an order of magnitude smaller than overall error or so of each error source contribution, i.e., each error source
Error be 0.01K.
Usual situation, by preferable Circuit Matching, or even it is necessary when can will be warm by the way of Dynamic Matching
Spend signal delta VBEIn error concealment to sufficiently small range, therefore, can ignore temperature letter Δ VBEError.And temperature is believed
VBEIn error, then cannot be eliminated by matched mode, need additionally to increase in circuit an amendment circuit.The amendment
The effect of circuit is that temperature letter V is calculated by way of test after actual productionBEIn error size, then utilize
It corrects circuit and temperature is believed into VBEIn error concealment.
In mixed signal (Mix signal) technique in SMIC 0.18um standard cell lib, various factors leads to temperature
Spend signal VBEError range be about ± 9.22mV, and the corresponding temperature signal V of ± 0.01K temperature errorBEError be ±
0.04mV (25 degree are at room temperature), the ratio of error range and error precision is as follows:
From above formula (1) as can be seen that realizing that error correction needs the correcting mode of 8bit.
Fig. 4 be the present invention provide error correction is realized in the way of duty ratio modulation, wherein amendment circuit in include
One duty cycle modulator and its corresponding control switch S, switch S are connect with transistor and low-pass filter LPF respectively.Such as
Shown in Fig. 4, modulation code stream is generated by duty cycle modulator, when code stream is low, switch S is disconnected, the electricity flowed through on transistor
Stream is Ibias1, generate emitter base voltage VBE1；When code stream is high, switch S is closed, and the electric current flowed through on transistor is
Ibias1+Ibias2, generate emitter base voltage VBE2；Two VBEVoltage obtains revised equivalent after low-pass filter
Voltage VBE,trim。
The modulation of duty ratio can be illustrated with Fig. 5 in Fig. 4.The waveform of top one is sampling clock, the wave of lower section one in Fig. 5
Shape is the code stream after duty ratio modulation, and Fig. 5 show the modulation of a 3bit.Wherein, 3bit modulation needs 23A sampling clock,
That is 8 sampling clocks are realized.Wherein, the present invention can modulate code stream by the way that control stream is high sampling period number
Duty ratio.
In Fig. 5, in every 8 sampling periods, 3 periodic modulation code streams are height, 5 periodic modulation code streams be it is low, realization
Modulating code stream duty ratio is 3/8.The precision of the duty ratio modulation is 1/8.In duty ratio modulation, the required precision of modulation is got over
Height, the clock cycle number needed are more.
In addition, according to the working principle of transistor:
When switch S is disconnected, emitter-base voltage on transistor are as follows:
When the switch s is closed, emitter-base voltage on transistor are as follows:
Wherein, k is Boltzmann constant, and T is absolute temperature, and q is electron charge, IsFor transistor reverse saturation current.
In the present invention, voltage after amendment are as follows:
VBE,trim=γ VBE2+(1-γ)VBE1(4)；
Wherein, γ is the duty ratio for modulating code stream.
From formula (2) and (3) as can be seen that correcting V in Fig. 4BERange are as follows:
As described above, it is assumed that V caused by techniqueBEError is ± 9.22mV, then has:
Here sign bit is put aside.
It can be obtained by formula (6):
By formula (7) it is found that working as Ibias1When for 0.5uA, then Ibias2For 0.215uA, it is just able to satisfy the requirement of extent of amendment.
Assuming that being modified to 8bit required precision, then the difference between adjacent duty ratio is 1/256, then convolution (4), it is known that
Correct precision are as follows:
From formula (8) as can be seen that modified size is V between adjacent duty ratioBE,range/ 256, which is VBEAmendment
Precision.
Can be seen that duty ratio modulation of the invention by above-mentioned analysis is changed by changing the duty ratio of modulation code stream
The case where final revised voltage swing of change, which needs low current when avoiding high-precision.The modulation system can lead to
Cross the number increase modulation accuracy for increasing modulating clock.
The present invention is in practical application, for example using in temperature sensor shown in Fig. 1, due to ∑ Δ analog-digital converter
The output end of (sigma delta ADC) has a decimation filter (decimation filter), therefore Fig. 4 of the invention
In low-pass filter (LPF) can save, this is that this is modulated at another advantage used in temperature sensor.
In modulated process of the invention, adopted when ∑ Δ analog-digital converter (sigma delta ADC) completes a temperature
V in sampleBESampling clock number (be denoted as NS,ADC) be not complete a duty ratio modulation clock number (be denoted as NM,DAC) it is whole
When several times, modulation can have error.That is NS,ADC/NM,DACWhen not being integer, modulation can have error.
As shown in fig. 5, it is assumed that ∑ Δ analog-digital converter completes V in a temperature samplingBESampling clock number be 8, then this 8
Duty ratio modulation, duty ratio 3/8 are just completed in a period；Assuming that ∑ Δ analog-digital converter completes V in a temperature samplingBE
Sampling clock number be 9, then a duty ratio modulation is completed in preceding 8 periods, but at the 9th period, modulation code stream is defeated
It is out 1, then within 9 periods, the duty ratio for modulating code stream is 4/9, and there are error, error size is for modulation at this time
If completing V in a temperature samplingBESampling clock number be 1024+R, wherein 1024 is complete integer
The sampling clock number of duty ratio modulation, R are the remaining clock periodicity that cannot complete a duty ratio modulation, referred to herein as
The surplus period.
As shown in fig. 6, being 0~2 The present invention gives the surplus periodnWhen, since the presence in surplus period causes modulation to be deposited
Error.Wherein, abscissa is normalized surplus periodicity, i.e. R/2 in Fig. 6n, ordinate is modulation error.From Fig. 6
As can be seen that as surplus mid-term R is from 0 to 2nIncrease, modulation error first increases, rear to reduce.From Fig. 6 it can also be seen that with
The reduction of modulation bit number, the modulation error as caused by the surplus period is gradually reduced.Because working as VBEThe clock number of sampling
One timing, modulation bit is smaller, and the modulation period that can be completed is more, so that the error that the surplus period generates is in entire sampling process
In influence it is smaller.
From the above mentioned, in order to avoid the surplus period causes modulation error excessive, modulation accuracy is influenced, The present invention gives such as
Another kind correcting mode shown in Fig. 7.
In the correcting mode of Fig. 7, first passes through 2bit and coarse adjustment is carried out to electric current, determine VBEExtent of amendment, recycle 6bit
The fine tuning of electric current is realized in the modulation of duty ratio.When 2bit coarse adjustment position is 00, switch S2~S4 is normally opened, and switch S1 is accounted for by 6bit
Sky is than the bite rate control of modulation, then VBEExtent of amendment are as follows:
When 2bit coarse adjustment position is 01, switch S3~S4 is normally opened, and switch S1 is normally closed, and switch S2 passes through 6bit duty ratio modulation
Bite rate control, then VBEExtent of amendment are as follows:
When 2bit coarse adjustment position is 10, switch S4 is normally opened, and switch S1~S2 is normally closed, and switch S3 passes through 6bit duty ratio modulation
Bite rate control, then VBEExtent of amendment are as follows:
When 2bit coarse adjustment position is 11, switch S1~S3 is normally closed, and switch S4 passes through the bite rate control of 6bit duty ratio modulation,
Then VBEExtent of amendment are as follows:
In mode shown in Fig. 7, extent of amendment is guaranteed by coarse adjustment, and amendment precision is guaranteed by duty ratio fine tuning, both
The case where correcting mode in Fig. 3 needs low current is avoided, in turn avoids in Fig. 4 correcting mode since the surplus period causes to adjust
The larger situation of error processed.Coarse adjustment mode of the invention is not limited only to the 2bit mode of the present embodiment, can also be other digits
Regulative mode, then corresponding number of switches, opening and closing situations such as also change therewith.
It is discussed in detail although the contents of the present invention have passed through above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read above content, for of the invention
A variety of modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (9)
1. a kind of method of temperature sensors of high precision error correction, which is characterized in that the method includes the steps of:
Required digit correcting mode when S1, the amendment of temperature sensor error；
S2, first the electric current progress coarse adjustment using different coarse adjustment positions mode to transistor, then pass through duty cycle modulator and generate modulation
Code stream simultaneously opens and closes control switch according to modulation code stream height, carries out fine tuning to the electric current of transistor, is determined as temperature
The extent of amendment of the emitter-base voltage of signal；Alternatively, directly generating modulation code stream by duty cycle modulator and according to modulation
Code stream height opens and closes control switch, carries out fine tuning to the electric current of transistor, is determined as the emitter-base of temperature signal
The extent of amendment of voltage；
The extent of amendment of S3, the error according to caused by technique and identified temperature signal determine when control switch opens and closes
The size of current of transistor, to meet the requirement of extent of amendment；
S4, amendment precision is obtained according to the required precision of digit correcting mode required in step S1.
2. the method for temperature sensors of high precision error correction as described in claim 1, which is characterized in that the step S1
In, it further includes:
Pass through the ratio m for calculating temperature signal error a and error precision c caused by technique:Further according to ratio m
Digit correcting mode needed for accomplished error correction.
3. the method for temperature sensors of high precision error correction as claimed in claim 2, which is characterized in that the step S2
In, it further includes:
When code stream is low, control switch S is disconnected, and the first electric current flowed through on transistor is Ibias1, generate an emitter-base
Voltage VBE1, it is denoted as first voltage, the first voltage are as follows:
When code stream is high, control switch S is closed, and the second electric current flowed through on transistor is Ibias1+Ibias2, generate another and penetrate
Pole-base voltage VBE2, it is denoted as second voltage, second voltage are as follows:
In formula, k is Boltzmann constant, and T is absolute temperature, and q is electron charge, IsFor transistor reverse saturation current；
The first voltage and the second voltage obtain revised equivalent voltage after wave filter
VBE,trim=γ VBE2+(1-γ)VBE1(4),
In formula, γ is the duty ratio for modulating code stream；
The extent of amendment known to formula (2) and (3) are as follows:
4. the method for temperature sensors of high precision error correction as claimed in claim 3, which is characterized in that the step S3
In, it further includes:
Temperature signal error caused by already known processes is a, then has:
The ratio of the second electric current and the first electric current can be obtained by formula (6)；
It can determine the first electric current and second electric current of the requirement for meeting extent of amendment by the ratio of the second electric current and the first electric current
Numerical value；
According to the x position required precision for the correcting mode that error correction needs, the difference d=1/2 between adjacent duty ratio is obtainedx, then
In conjunction with formula (4), it is known that amendment precision are as follows:
VBE,accuracy=VBE,trim|γ+d-VBE,trim|γ
=(γ+d) VBE2+(1-γ-d)VBE1-γVBE2-(1-γ)VBE1
=dVBE2-d·VBE1
=d (VBE2-VBE1)
=dVBE,range (7)。
5. the method for temperature sensors of high precision error correction as described in claim 1, which is characterized in that coarse adjustment mode is arranged
For 2bit coarse adjustment mode or other digit coarse adjustment modes, and duty ratio modulation mode matches setting with the coarse adjustment mode.
6. the method for temperature sensors of high precision error correction as claimed in claim 5, which is characterized in that the duty ratio tune
Mode processed can increase modulation accuracy by increasing the number of modulation sampling clock cycle.
7. such as the method for temperature sensors of high precision error correction described in claim 5 or 6, which is characterized in that the duty
Than in modulation system, duty ratio that code stream is modulated by number that control stream is high sampling clock cycle.
8. a kind of method using the temperature sensors of high precision error correction as described in claim 1-7 any one is high-precision
It spends temperature sensor error correcting circuit, which is characterized in that the amendment circuit includes: generating the duty ratio modulation of modulation code stream
Device；
With the control switch of duty cycle modulator cooperation, it is connect with transistor；Wherein, the control switch is according to code stream
Height opened and closed, the electric current flowed through on transistor is adjusted, obtained revised equivalent voltage determines transistor
The extent of amendment of emitter base voltage, and amendment precision is obtained according to the required precision of correcting mode.
9. temperature sensors of high precision error correcting circuit as claimed in claim 8, which is characterized in that
The control switch is also connect with a low-pass filter or the low-pass filter is by the filtering extraction in temperature sensor
Device replacement.
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| CN113607329A (en) * | 2021-07-13 | 2021-11-05 | 复旦大学 | Pressure sensor signal temperature compensation method and pressure sensor |
| CN113820030A (en) * | 2021-09-18 | 2021-12-21 | 中国科学院长春光学精密机械与物理研究所 | Resistance value error correction method |
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