CN109185377A - A kind of precision damping component and the vibration reduction platform being made of it - Google Patents
A kind of precision damping component and the vibration reduction platform being made of it Download PDFInfo
- Publication number
- CN109185377A CN109185377A CN201811315943.8A CN201811315943A CN109185377A CN 109185377 A CN109185377 A CN 109185377A CN 201811315943 A CN201811315943 A CN 201811315943A CN 109185377 A CN109185377 A CN 109185377A
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- China
- Prior art keywords
- fixed disk
- fixed
- spring
- vibration reduction
- several
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The vibration reduction platform that the present invention discloses a kind of precision damping component and is made of it, including pedestal, several groups shock absorber part is provided with below the pedestal, the shock absorber part includes the first fixed disk and the inserting column for being fixed on the first fixed disk the center point, it is connected between first fixed disk and pedestal by several first clamping screws, the inserting column is plugged on inside third fixed disk through the second fixed disk, the guide rod being able to drive in the first fixed disk when mechanical equipment vibration slides in pilot hole, drive the first telescopic spring between guide rod and pilot hole, in the first fixed disk vertical tremor, the inserted block on inserting column will be driven to slide in the slippage slot of third fixed disk, in order to increase damped coefficient, the peripheral wall of slippage slot is pasted into one layer of non-slip mat, therefore the damping effect of shock absorber part is preferable, mechanical equipment shakes smaller in the process of running , noise it is smaller.
Description
Technical field
The present invention relates to accurate technology of preparing technical field, specially a kind of precision damping component and the vibration damping being made of it
Platform.
Background technique
Litho machine is a kind of micro electronmechanical equipment with labyrinth, and resolution ratio and alignment precision reach nanoscale, have
Great manufacture difficulty has been approached the limit of Precision Manufacturing Technology.Requirement of the litho machine for vibration insulating system has also reached extremely
Harsh degree, represents the highest difficulty of precision vibration damping and the most typically application of precision vibration damping technology.In litho machine
Moving component include silicon wafer stage and mask platform, their movement and positioning accuracy is the important finger for influencing litho machine complete machine precision
Mark.In order to complete an exposure, mask platform and silicon wafer along Y-direction with the speed of 4:1 than reverse scan campaign, complete an exposure
Afterwards, silicon wafer stage is along X to stepping to next field and continue to expose, it can be seen that, mask platform and silicon wafer stage are during the work time always
It moves back and forth in the horizontal plane, this will cause the deflection of mask platform silicon wafer stage in the horizontal plane, form internal vibration source, while from base
The external environment micro-vibration of seat transmitting couples therewith, seriously affects kinematic accuracy.Current most of litho machines all use one
It covers vibration insulating system and litho machine is separated into part: Inner-world and the external world.The external world is that the complete machine frame of litho machine is straight
It connects and is connected with ground, litho machine rest part is suspended on the external world as Inner-world.Such structure can play
The function of certain isolation external vibration.But when.Due to the arrangement of vibration insulating system, so that damping effect only connects in two parts
The place of connecing works, and little to the critical component silicon wafer stage inside litho machine and the internal vibration incentive action for flooding platform.By
Theory analysis and actual test discovery, mask platform, silicon wafer stage and the object lens of litho machine still carry out micro breadth oscillation with certain frequency.
Therefore the requirement that vibration damping respectively is just able to satisfy the continuous improvement of litho machine precision must be carried out for the feature of critical component.Mask platform
With silicon wafer stage vertical positioning accuracy be also influence photoetching quality principal element, generally use one in traditional litho machine
The leveling and focusing mechanism of nested structure complexity completes the guarantee of vertical positioning accuracy, can make sports platform in this way structure is complicated to change,
Simultaneously because the inertia for increasing workbench to control difficulty and increase, for this purpose, proposing a kind of precision damping component and being made of it
Vibration reduction platform.
Summary of the invention
The purpose of the present invention is to provide a kind of precision damping component and the vibration reduction platforms being made of it, to solve above-mentioned back
The problem of being proposed in scape technology.
To achieve the above object, the invention provides the following technical scheme: a kind of precision damping component and what is be made of it subtract
Shake platform, including pedestal, and several groups shock absorber part is provided with below the pedestal, and the shock absorber part includes the first fixed disk and fixation
It is connected between the inserting column of the first fixed disk the center point, first fixed disk and pedestal by several first clamping screws,
The inserting column is plugged on inside third fixed disk through the second fixed disk, is passed through between second fixed disk and third fixed disk
Several second clamping screws are connected, and first fixed disk is in the one side close to the second fixed disk along the center of circle of the first fixed disk
Circumference array is fixed with several guide posts, several guiding matched with guide post are offered in second fixed disk
Hole is connected with the first spring between the guide post and pilot hole bottom hole, one end of first spring is fixed in guide post,
The other end of first spring is fixed on pilot hole bottom hole, and second fixed disk is in the one side close to the first fixed disk along the
The center of circle circumference array of two fixed disks offers several grooves, is connected with second between first fixed disk and groove slot bottom
Spring, one end of the second spring are fixed in the first fixed disk, and the other end of the second spring is fixed on groove slot bottom,
The groove slot bottom is fixed with inserted link in spring inner, and the casing matched with inserted link, institute are fixed in first fixed disk
It states inserted link to slide in inside pipe casing, the inserting column is fixed with inserted block, the third fixed disk in one end far from the first fixed disk
The slippage slot slid vertically for inserted block is inside offered, is fixed with non-slip mat on the peripheral wall of the slippage slot.
Preferably, the first elastic cushion is provided between first fixed disk and pedestal.
Preferably, the end of first clamping screw is provided with rotation ear.
Preferably, the second elastic cushion is provided between first clamping screw and the first fixed disk.
Preferably, the inserted block is fixed with the first magnetic block in one end far from inserting column, and the slot bottom of the slippage slot is fixed
Have the second magnetic block, first magnetic block and the second magnetic block it is mutually close one side it is magnetic opposite.
Preferably, second clamping screw is hexagon socket head cap screw.
Preferably, the third fixed disk is being provided with several anti-skid bulges far from the second fixed disk on one side.
Compared with prior art, the beneficial effects of the present invention are: it is solid by being able to drive first when mechanical equipment shakes
Guide rod on price fixing slides in pilot hole, drives the first telescopic spring between guide rod and pilot hole, fixed first
When disk vertical tremor, the inserted block on inserting column will be driven to slide in the slippage slot of third fixed disk, it, will in order to increase damped coefficient
The peripheral wall of slippage slot pastes one layer of non-slip mat, while making the second magnetic block of the first magnetic block and slippage slot slot bottom on inserted block
Keep the power to attract each other；When inserted block slides in slippage slot, the second spring in groove will stretch, and inserted link also will be in sleeve
Interior sliding is oriented to, therefore the damping effect of shock absorber part is preferable, mechanical equipment shake in the process of running smaller, noise compared with
It is small.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is front view of the invention；
Fig. 3 is the cross-sectional view of shock absorber part of the present invention；
Fig. 4 is the area the A enlarged structure schematic diagram in Fig. 3 of the present invention；
Fig. 5 is the area the B enlarged structure schematic diagram in Fig. 3 of the present invention.
In figure: 1, pedestal；5, the first fixed disk；6, inserting column；7, the first clamping screw；8, the second fixed disk；9, third is solid
Price fixing；10, guide post；11, pilot hole；12, the first spring；13, groove；14, second spring；15, inserted link；16, casing；17,
Inserted block；18, slippage slot；19, non-slip mat；20, the first magnetic block；21, the second magnetic block；22, the first elastic cushion；23, ear is rotated；
24, the second elastic cushion；25, anti-skid bulge；26, the second clamping screw.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment:
The present invention provides a kind of precision damping component as shown in Figs. 1-5 and the vibration reduction platform being made of it, including pedestal 1,
Several groups shock absorber part is provided with below the pedestal 1, the shock absorber part includes the first fixed disk 5 and is fixed on the first fixed disk 5
The inserting column 6 of the center point is connected between first fixed disk 5 and pedestal 1 by several first clamping screws 7, the inserting column 6
It is plugged on inside third fixed disk 9 through the second fixed disk 8, by several between second fixed disk 8 and third fixed disk 9
A second clamping screw 26 is connected, and first fixed disk 5 is in the one side close to the second fixed disk 8 along the circle of the first fixed disk 5
Heart circumference array is fixed with several guide posts 10, several are offered in second fixed disk 8 and guide post 10 matches
Pilot hole 11, be connected with the first spring 12 between 11 bottom hole of the guide post 10 and pilot hole, the one of first spring 12
End is fixed in guide post 10, and the other end of first spring 12 is fixed on 11 bottom hole of pilot hole, and second fixed disk 8 exists
One side close to the first fixed disk 5 offers several grooves 13 along the center of circle circumference array of the second fixed disk 8, and described first is solid
Second spring 14 is connected between 13 slot bottom of price fixing 5 and groove, one end of the second spring 14 is fixed on the first fixed disk 5
On, the other end of the second spring 14 is fixed on 13 slot bottom of groove, and 13 slot bottom of groove is fixed with inserted link in spring inner
15, be fixed with the casing 16 matched with inserted link 15 in first fixed disk 5, the inserted link 15 in 16 interior slip of casing,
The inserting column 6 is fixed with inserted block 17 in one end far from the first fixed disk 5, offers in the third fixed disk 9 for inserted block 17
The slippage slot 18 slid vertically is fixed with non-slip mat 19 on the peripheral wall of the slippage slot 18.
The electric elements occurred in this article are electrically connected with extraneous main controller and 220V alternating current, and external main controller
The conventionally known equipment of control can be played for computer etc..
Preferably, being provided with the first elastic cushion 22 between first fixed disk 5 and pedestal 1.
By using above-mentioned technical proposal, the first elastic cushion 22 is provided between first fixed disk 5 and pedestal 1, the
One elastic cushion 22 can prevent the first fixed disk 5 from causing to wear to pedestal 1.
Preferably, the end of first clamping screw 7 is provided with rotation ear 23.
By using above-mentioned technical proposal, the end of first clamping screw 7 is provided with rotation ear 23, setting rotation ear
23 the first clamping screws of energy side's operator's turn 7.
Preferably, being provided with the second elastic cushion 24 between first clamping screw 7 and the first fixed disk 5.
By using above-mentioned technical proposal, the second elasticity is provided between first clamping screw 7 and the first fixed disk 5
Pad 24, the second elastic cushion 24 can prevent the first clamping screw 7 from causing to wear to the first fixed disk 5.
Preferably, the inserted block 17 is fixed with the first magnetic block 20, the slot of the slippage slot 18 in one end far from inserting column 6
Bottom is fixed with the second magnetic block 21, and first magnetic block 20 is magnetic opposite with the mutually close one side of the second magnetic block 21.
By using above-mentioned technical proposal, the inserted block 17 is fixed with the first magnetic block 20, institute in one end far from inserting column 6
The slot bottom for stating slippage slot 18 is fixed with the second magnetic block 21, first magnetic block 20 one side mutually close with the second magnetic block 21
It is magnetic opposite.
Preferably, second clamping screw 26 is hexagon socket head cap screw.
By using above-mentioned technical proposal, second clamping screw 26 is hexagon socket head cap screw, using hexagon socket head cap screw ratio
It is more beautiful, also prevent take up space.
Preferably, the third fixed disk 9 is being provided with several anti-skid bulges 25 far from the second fixed disk 8 on one side.
By using above-mentioned technical proposal, the third fixed disk 9 is several in being provided on one side far from the second fixed disk 8
A anti-skid bulge 25, anti-skid bulge 25 can increase the frictional force with ground face contact.
Working principle: in use, when the starting of the damping device of machinery production processing mechanical equipment, mechanical equipment can be produced
Raw a series of vibration, the guide rod being able to drive in the first fixed disk 5 when mechanical equipment vibration slide in pilot hole 11,
It drives the first spring 12 between guide rod and pilot hole 11 flexible, in the first 5 vertical tremor of fixed disk, inserting column 6 will be driven
On inserted block 17 slided in the slippage slot 18 of third fixed disk 9, in order to increase damped coefficient, the peripheral wall of slippage slot 18 is pasted
One layer of non-slip mat 19, while the second magnetic block 21 of 18 slot bottom of the first magnetic block 20 and slippage slot on inserted block 17 being made to keep phase
The power mutually attracted；When inserted block 17 slides in slippage slot 18, the second spring 14 in groove 13 will stretch, and inserted link 15 also will be
Sliding is oriented in sleeve, therefore the damping effect of shock absorber part is preferable, and mechanical equipment shakes smaller, noise in the process of running
It is smaller.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (7)
1. a kind of precision damping component and the vibration reduction platform being made of it, including pedestal (1), it is characterised in that: the pedestal (1)
Lower section is provided with several groups shock absorber part, and the shock absorber part is including the first fixed disk (5) and is fixed on the first fixed disk (5) the center point
Inserting column (6), between first fixed disk (5) and pedestal (1) by several first clamping screws (7) connect, it is described insert
Column (6) is plugged on third fixed disk (9) inside, second fixed disk (8) and third fixed disk through the second fixed disk (8)
(9) it is connected between by several second clamping screws (26), first fixed disk (5) is close to the second fixed disk (8)
The center of circle circumference array along the first fixed disk (5) is fixed with several guide posts (10) on one side, opens on second fixed disk (8)
Equipped with the pilot hole (11) that several and guide post (10) match, connect between the guide post (10) and pilot hole (11) bottom hole
It is connected to the first spring (12), one end of first spring (12) is fixed on guide post (10), first spring (12)
The other end is fixed on pilot hole (11) bottom hole, and second fixed disk (8) is solid along second in the one side close to the first fixed disk (5)
The center of circle circumference array of price fixing (8) offers several grooves (13), between first fixed disk (5) and groove (13) slot bottom
It is connected with second spring (14), one end of the second spring (14) is fixed on the first fixed disk (5), the second spring
(14) the other end is fixed on groove (13) slot bottom, and groove (13) slot bottom is fixed with inserted link (15) in spring inner, described
The casing (16) matched with inserted link (15) is fixed in first fixed disk (5), the inserted link (15) is sliding inside casing (16)
It moves, the inserting column (6) is fixed with inserted block (17) in one end far from the first fixed disk (5), opens up in the third fixed disk (9)
There is the slippage slot (18) slid vertically for inserted block (17), is fixed with non-slip mat (19) on the peripheral wall of the slippage slot (18).
2. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
The first elastic cushion (22) are provided between first fixed disk (5) and pedestal (1).
3. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
The end of first clamping screw (7) is provided with rotation ear (23).
4. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
The second elastic cushion (24) are provided between first clamping screw (7) and the first fixed disk (5).
5. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
Inserted block (17) is fixed with the first magnetic block (20) far from the one end of inserting column (6), and the slot bottom of the slippage slot (18) is fixed with the
Two magnetic blocks (21), first magnetic block (20) are magnetic opposite with the mutually close one side of the second magnetic block (21).
6. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
Second clamping screw (26) is hexagon socket head cap screw.
7. a kind of precision damping component according to claim 1 and the vibration reduction platform being made of it, it is characterised in that: described
Third fixed disk (9) is being provided with several anti-skid bulges (25) far from the second fixed disk (8) on one side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811315943.8A CN109185377A (en) | 2018-11-07 | 2018-11-07 | A kind of precision damping component and the vibration reduction platform being made of it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811315943.8A CN109185377A (en) | 2018-11-07 | 2018-11-07 | A kind of precision damping component and the vibration reduction platform being made of it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109185377A true CN109185377A (en) | 2019-01-11 |
Family
ID=64941997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811315943.8A Pending CN109185377A (en) | 2018-11-07 | 2018-11-07 | A kind of precision damping component and the vibration reduction platform being made of it |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109185377A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207180A (en) * | 2020-03-10 | 2020-05-29 | 镇江市高等专科学校 | Damping device of hydraulic straightening cut-off machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001254776A (en) * | 2000-03-10 | 2001-09-21 | Hitachi Ltd | Vibration interrupting device and equipment using this vibration interrupting device |
| CN103116249A (en) * | 2012-12-12 | 2013-05-22 | 清华大学 | Negative stiffness system for gravity compensation of micropositioner |
| CN203259773U (en) * | 2013-03-27 | 2013-10-30 | 上海微电子装备有限公司 | Micromotion module provided with vibration absorption device |
| CN207762191U (en) * | 2018-01-11 | 2018-08-24 | 张世亮 | A kind of shock-absorbing device for mechanical equipment |
| CN208006030U (en) * | 2018-03-20 | 2018-10-26 | 盘锦亿和塑胶有限公司 | A kind of open mill producing CPE rubber compounds |
-
2018
- 2018-11-07 CN CN201811315943.8A patent/CN109185377A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001254776A (en) * | 2000-03-10 | 2001-09-21 | Hitachi Ltd | Vibration interrupting device and equipment using this vibration interrupting device |
| CN103116249A (en) * | 2012-12-12 | 2013-05-22 | 清华大学 | Negative stiffness system for gravity compensation of micropositioner |
| CN203259773U (en) * | 2013-03-27 | 2013-10-30 | 上海微电子装备有限公司 | Micromotion module provided with vibration absorption device |
| CN207762191U (en) * | 2018-01-11 | 2018-08-24 | 张世亮 | A kind of shock-absorbing device for mechanical equipment |
| CN208006030U (en) * | 2018-03-20 | 2018-10-26 | 盘锦亿和塑胶有限公司 | A kind of open mill producing CPE rubber compounds |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207180A (en) * | 2020-03-10 | 2020-05-29 | 镇江市高等专科学校 | Damping device of hydraulic straightening cut-off machine |
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| PB01 | Publication | ||
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Application publication date: 20190111 |