CN109164527A - Five-channel multi-color filter - Google Patents
Five-channel multi-color filter Download PDFInfo
- Publication number
- CN109164527A CN109164527A CN201811308620.6A CN201811308620A CN109164527A CN 109164527 A CN109164527 A CN 109164527A CN 201811308620 A CN201811308620 A CN 201811308620A CN 109164527 A CN109164527 A CN 109164527A
- Authority
- CN
- China
- Prior art keywords
- membrane system
- membrane
- color filter
- channel
- channel multi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
Abstract
The invention belongs to optical film technology fields, more particularly to a kind of Five-channel multi-color filter, including membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5, membrane system 6 and sapphire substrates, the membrane system 1 is deposited on the side of the sapphire substrates, the membrane system 2, the membrane system 3, the membrane system 4, the membrane system 5, the membrane system 6 are deposited on the other side of the sapphire substrates according to number order, and alternately superposition forms by silica coating (L) and titanium oxide layer (H) for the membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6.Compared with the prior art, Five-channel multi-color filter in the present invention has high transmittance in 5 spectral coverages, more meet the application demand of full spectrum in remote sensing system, simultaneously, material is reduced from 10 conventional membrane systems to 6 membrane systems, process is reduced, and reduces the development cost of product, while improving yield rate.
Description
Technical field
The invention belongs to optical film technology fields, and in particular to a kind of Five-channel multi-color filter.
Background technique
At present in multispectral, the full spectrum imaging system of remote sensing system, need a kind of to meet key claimed below
Optical filter: (1) 450 ± 5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630 ± 7~690 ± 7nm, 770 ± 8~895 ±
There is high transmittance (>=90%) in 9nm, the five spectral coverage channels 450 ± 5~800 ± 9nm；(2) due to general section of 300~1100nm
It is interior to have the function of inhibiting optical signal, to reduce the influence of signal noise, therefore should have in general section of 300~1100nm low
Cross rate；(3) base material of optical filter should be the same base material；(4) coating film area of each passband is relatively narrow, should be 3 millis
Within rice, therefore coating process difficulty is caused to increase.
The documents (CN201410403432.7) being closer to retrieved disclose a kind of dichroic filter and design
Method is led to membrane system by the single tape with anti-reflection band of substrate and substrate two sides and is formed, the single tape with anti-reflection band of substrate two sides
Logical membrane system is the Fabry-Perot Luo band logical membrane system of multi-cavity tandem arrangement, and basic structure is [the reflecting layer reflecting layer │ wall │] k, tool
Body film structure are as follows: [... HLH │ mL │ HLH ...] k or [... LHL │ mH │ LHL ...] k, wherein H represents high-index material, L generation
Table low-index material, k are greater than 1 integer, represent resonant cavity number, and m is no less than 2 even number；The list of the every side of substrate
The spectrum of band logical membrane system, which increases by one, can cover the anti-reflection band that other side single tape leads to free transmission range, and having for substrate two sides is anti-reflection
The logical membrane system of the single tape of band combines composition dichroic filter, and the single tape pass filter of the every side of substrate is folded by band
The rejection zone added together for constituting dichroic filter.However, the optical filter in existing file is dichroic filter, only there are two spectrums
Duan Tongdao can not meet the demand of the optical filter in multispectral, full spectrum imaging system very well.
And it is filtered about also being had no in multispectral, the full spectrum imaging system of remote sensing system about five channel polychromes
The correlative study of mating plate is reported；Further, since preparing Five-channel multi-color filter, to be related to membrane system more, design it is complex,
According to traditional mentality of designing, the scheme of use is to be coated with different long waves respectively on substrate two sides to lead to membrane system and short-pass film
System, needs altogether 10 membrane systems, each membrane system is both needed to protect non-plated film area when being coated with, and process is complex, yield rate
It is very low.
Summary of the invention
In order to solve the problems in the prior art, the present invention provides a kind of Five-channel multi-color filter, and the optical filter exists
450 ± 5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630 ± 7~690 ± 7nm, 770 ± 8~895 ± 9nm, 450 ± 5~
In the five spectral coverage channels 800 ± 9nm with >=90% transmitance, in 300~1100nm with≤0.5% within the scope of other
Transmitance, while having the characteristics that same substrate, passband are narrow, transmitance is high.
Specific technical solution is as follows:
A kind of Five-channel multi-color filter, including membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5, membrane system 6 and sapphire
Substrate, the membrane system 1 are deposited on the side of the sapphire substrates, the membrane system 2, the membrane system 3, the membrane system 4, the film
Be that the 5, membrane system 6 is deposited on the other side of the sapphire substrates according to number order, the membrane system 1, membrane system 2, membrane system 3,
Alternately superposition forms by silica coating (L) and titanium oxide layer (H) for membrane system 4, membrane system 5 and membrane system 6.
In some embodiments, the structure of the membrane system 1 is (0.5LH0.5L) ^12 (0.18H0.36L0.18H) ^10,
The central wavelength of the membrane system 1 is 1025nm.
In some embodiments, the structure of the membrane system 2 is (0.5LH0.5L) ^12 (0.60L1.20H0.60L) ^9
(0.75L1.5H0.75L) ^8, the central wavelength of the membrane system 2 are 600nm,
In some embodiments, the structure of the membrane system 3 is (0.60L1.20H0.60L) ^7
(0.495L0.99H0.495L) ^13 (0.305H0.610L0.395H) ^14, the central wavelength of the membrane system 3 are 680nm,
In some embodiments, the structure of the membrane system 4 is (0.50L1.0H0.50L) ^13
(0.330H0.660L0.330H) ^13 (0.30H0.60L0.30H) ^5, the central wavelength of the membrane system 4 are 758nm,
In some embodiments, the structure of the membrane system 5 is (0.50H1.00L0.50H) ^14
(0.38H0.76L0.38H) ^10, the central wavelength of the membrane system 5 are 648nm.
In some embodiments, the structure of the membrane system 6 is (0.5LH0.5L) ^12, the central wavelength of the membrane system 6
For 928nm.
In some embodiments, it is characterised in that: the membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6
Film layer structure, silica coating and titanium oxide layer thickness all optimized by Macleod thin film design software.
The present invention just have it is following the utility model has the advantages that the present invention provide one kind can 450 ± 5~510 ± 6nm (channel 1),
510 ± 6~580 ± 6nm (channel 2), 630 ± 7~690 ± 7nm (channel 3), 770 ± 8~895 ± 9nm (channel 4), 450 ±
In the five spectral coverage channels 5~800 ± 9nm (channel 5) with >=90% transmitance, have within the scope of other in 300~1100nm
There is the multi-color filter of the Five-channel of≤0.5% transmitance, more meets the application demand of full spectrum in remote sensing system.Phase
It is reduced from 10 conventional membrane systems to 6 membrane systems, process than the Five-channel multi-color filter material in the prior art, the present invention
It reduces, reduces the development cost of product, while improving yield rate.
Detailed description of the invention
Fig. 1 is the theoretical transmission spectrogram of the membrane system 1 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 2 is the theoretical transmission spectrogram of the membrane system 2 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 3 is the theoretical transmission spectrogram of the membrane system 3 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 4 is the theoretical transmission spectrogram of the membrane system 4 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 5 is the theoretical transmission spectrogram of the membrane system 5 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 6 is the theoretical transmission spectrogram of the membrane system 6 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 7 is the theoretical transmission spectrogram in the channel 1 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 8 is the theoretical transmission spectrogram in the channel 2 of Five-channel of embodiment of the present invention multi-color filter；
Fig. 9 is the theoretical transmission spectrogram in the channel 3 of Five-channel of embodiment of the present invention multi-color filter；
Figure 10 is the theoretical transmission spectrogram in the channel 4 of Five-channel of embodiment of the present invention multi-color filter；
Figure 11 is the theoretical transmission spectrogram in the channel 5 of Five-channel of embodiment of the present invention multi-color filter.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
The present invention provides a kind of Five-channel multi-color filter, and specific technical solution is as follows:
A kind of Five-channel multi-color filter, including membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5, membrane system 6 and sapphire
Substrate, the membrane system 1 are deposited on the side of the sapphire substrates, the membrane system 2, the membrane system 3, the membrane system 4, the film
Be that the 5, membrane system 6 is deposited on the other side of the sapphire substrates according to number order, the membrane system 1, membrane system 2, membrane system 3,
Alternately superposition forms by silica coating (L) and titanium oxide layer (H) for membrane system 4, membrane system 5 and membrane system 6.
Specific film structure is as follows:
The structure of membrane system 1 is (0.5LH0.5L) ^12 (0.18H0.36L0.18H) ^10, and the central wavelength of the membrane system 1 is
1025nm；The structure of membrane system 2 is (0.5LH0.5L) ^12 (0.60L1.20H0.60L) ^9 (0.75L1.5H0.75L) ^8；Membrane system 2
Central wavelength be 600nm, the structure of membrane system 3 is (0.60L1.20H0.60L) ^7 (0.495L0.99H0.495L) ^13
(0.305H0.610L0.395H) ^14, the central wavelength of the membrane system 3 are 680nm；The structure of membrane system 4 is
(0.50L1.0H0.50L)^13(0.330H0.660L0.330H)^13(0.30H0.60L0.30H)^5；The central wavelength of membrane system 4
For 758nm.The structure of membrane system 5 is (0.50H1.00L0.50H) ^14 (0.38H0.76L0.38H) ^10；The central wavelength of membrane system 5
For 648nm；The structure of membrane system 6 is (0.5LH0.5L) ^12, and the central wavelength of the membrane system 6 is 928nm.Wherein, H is titanium oxide
Film layer, 0.5 times of H indicate titanium oxide layer with a thickness of 0.5 basic thickness, and L is silica coating, and 1 times of L indicates dioxy
SiClx thicknesses of layers is 1 basic thickness, the substantially a quarter with a thickness of optical thickness central wavelength.
It is optimized using thickness of the Macleod software to membrane system 1-6, the thickness of every tunic layer is respectively such as in film structure
Shown in table 1- Fig. 6, as shown in figs 1 to 6, Five-channel polychrome provided by the invention filters the theoretical transmission spectrogram of each membrane system
Piece 450 ± 5~510 ± 6nm (channel 1), 510 ± 6~580 ± 6nm (channel 2), 630 ± 7~690 ± 7nm (channel 3),
770 ± 8~895 ± 9nm (channel 4), the five spectral coverage channels 450 ± 5~800 ± 9nm (channel 5) have high transmittance, such as scheme
Shown in 7- Figure 11.
1 membrane system 1 of table
2 membrane system 2 of table
3 membrane system 3 of table
4 membrane system 4 of table
5 membrane system 5 of table
6 membrane system 6 of table
| The number of plies | Film material | Thicknesses of layers/nm |
| 1 | Silica | 146.4078 |
| 2 | Titanium oxide | 8.027144 |
| 3 | Silica | 31.43587 |
| 4 | Titanium oxide | 81.55776 |
| 5 | Silica | 2.577546 |
| 6 | Titanium oxide | 21.1438 |
| 7 | Silica | 176.7756 |
| 8 | Titanium oxide | 99.70756 |
| 9 | Silica | 170.7605 |
| 10 | Titanium oxide | 96.64162 |
| 11 | Silica | 169.2359 |
| 12 | Titanium oxide | 95.86736 |
| 13 | Silica | 167.7993 |
| 14 | Titanium oxide | 95.66186 |
| 15 | Silica | 167.6924 |
| 16 | Titanium oxide | 95.22498 |
| 17 | Silica | 167.7781 |
| 18 | Titanium oxide | 95.32812 |
| 19 | Silica | 167.5644 |
| 20 | Titanium oxide | 95.65344 |
| 21 | Silica | 167.9859 |
| 22 | Titanium oxide | 95.90193 |
| 23 | Silica | 168.946 |
| 24 | Titanium oxide | 96.9246 |
| 25 | Silica | 170.6218 |
| 26 | Titanium oxide | 99.38503 |
| 27 | Silica | 176.2807 |
| 28 | Titanium oxide | 24.54384 |
| 29 | Silica | 1.270231 |
In conclusion: the present invention provide one kind can 450 ± 5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630 ±
7~690 ± 7nm, 770 ± 8~895 ± 9nm, in the five spectral coverage channels 450 ± 5~800 ± 9nm with >=90% transmission
Rate, 300~1100nm within the scope of other with≤0.5% transmitance Five-channel multi-color filter, more meet remote sensing
The application demand of full spectrum in detection system.Compared with the prior art, the Five-channel multi-color filter material in the present invention is from normal
10 membrane systems of rule are reduced to 6 membrane systems, and process is reduced, and reduce the development cost of product, while improving yield rate.
Above-mentioned preferable possible embodiments only of the invention, are not limitations of the present invention, the present invention is also not limited to above-mentioned
Citing, those skilled in the art, within the essential scope of the present invention, made variations, modifications, additions or substitutions,
Also it should belong to protection scope of the present invention.
Claims (8)
1. a kind of Five-channel multi-color filter, it is characterised in that: including membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5, membrane system 6
And sapphire substrates, the membrane system 1 are deposited on the side of the sapphire substrates, the membrane system 2, the membrane system 3, the membrane system
4, the membrane system 5, the membrane system 6 are deposited on the other side of the sapphire substrates according to number order,
The membrane system 1, membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6 are by silica coating (L) and titanium oxide layer (H)
Alternately superposition composition.
2. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 1 is
(0.5LH0.5L) ^12 (0.18H0.36L0.18H) ^10, the central wavelength of the membrane system 1 are 1025nm.
3. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 2 is
(0.5LH0.5L) ^12 (0.60L1.20H0.60L) ^9 (0.75L1.5H0.75L) ^8, the central wavelength of the membrane system 2 are
600nm。
4. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 3 is
(0.60L1.20H0.60L) ^7 (0.495L0.99H0.495L) ^13 (0.305H0.610L0.395H) ^14, the membrane system 3
Central wavelength is 680nm.
5. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 4 is
(0.50L1.0H0.50L) ^13 (0.330H0.660L0.330H) ^13 (0.30H0.60L0.30H) ^5, the center of the membrane system 4
Wavelength is 758nm.
6. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 5 is
(0.50H1.00L0.50H) ^14 (0.38H0.76L0.38H) ^10, the central wavelength of the membrane system 5 are 648nm.
7. Five-channel multi-color filter according to claim 1, it is characterised in that: the structure of the membrane system 6 is
(0.5LH0.5L) ^12, the central wavelength of the membrane system 6 are 928nm.
8. Five-channel multi-color filter according to claim 1, it is characterised in that: the membrane system 1, membrane system 2, membrane system 3, film
Be 4, membrane system 5 and membrane system 6 film layer structure and silica coating and titanium oxide layer thickness all by Macleod film
Design software optimizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308620.6A CN109164527B (en) | 2018-11-05 | 2018-11-05 | Five-channel multicolor optical filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308620.6A CN109164527B (en) | 2018-11-05 | 2018-11-05 | Five-channel multicolor optical filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109164527A true CN109164527A (en) | 2019-01-08 |
| CN109164527B CN109164527B (en) | 2021-07-30 |
Family
ID=64876552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811308620.6A Active CN109164527B (en) | 2018-11-05 | 2018-11-05 | Five-channel multicolor optical filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109164527B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109655954A (en) * | 2019-03-05 | 2019-04-19 | 浙江水晶光电科技股份有限公司 | Optical filter and preparation method thereof, fingerprint recognition mould group and electronic equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1719283A (en) * | 2004-07-09 | 2006-01-11 | 光伸光学工业株式会社 | Multi-bandpass filter |
| US20060018022A1 (en) * | 2004-07-21 | 2006-01-26 | Asia Optical Co., Inc. | CWDM filter with four channels |
| CN1955764A (en) * | 2005-10-27 | 2007-05-02 | 亚洲光学股份有限公司 | Three-way optical filter |
| CN204536584U (en) * | 2015-04-15 | 2015-08-05 | 北京京仪博电光学技术有限责任公司 | A kind of four peak value optical filters |
| CN105738996A (en) * | 2016-05-11 | 2016-07-06 | 中国科学技术大学 | Detector filtering window |
| CN107037518A (en) * | 2015-07-30 | 2017-08-11 | 王卫国 | A kind of two channels filter |
-
2018
- 2018-11-05 CN CN201811308620.6A patent/CN109164527B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1719283A (en) * | 2004-07-09 | 2006-01-11 | 光伸光学工业株式会社 | Multi-bandpass filter |
| US20060018022A1 (en) * | 2004-07-21 | 2006-01-26 | Asia Optical Co., Inc. | CWDM filter with four channels |
| CN1955764A (en) * | 2005-10-27 | 2007-05-02 | 亚洲光学股份有限公司 | Three-way optical filter |
| CN204536584U (en) * | 2015-04-15 | 2015-08-05 | 北京京仪博电光学技术有限责任公司 | A kind of four peak value optical filters |
| CN107037518A (en) * | 2015-07-30 | 2017-08-11 | 王卫国 | A kind of two channels filter |
| CN105738996A (en) * | 2016-05-11 | 2016-07-06 | 中国科学技术大学 | Detector filtering window |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109655954A (en) * | 2019-03-05 | 2019-04-19 | 浙江水晶光电科技股份有限公司 | Optical filter and preparation method thereof, fingerprint recognition mould group and electronic equipment |
| CN109655954B (en) * | 2019-03-05 | 2024-04-16 | 浙江水晶光电科技股份有限公司 | Optical filter, preparation method thereof, fingerprint identification module and electronic equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109164527B (en) | 2021-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10495796B2 (en) | Near-infrared cut filter | |
| CN104823086B (en) | Near infrared ray cut-off filter | |
| CN107209306A (en) | Near-infrared optical interference filter with improved transmissivity | |
| CN107209305A (en) | Near-infrared optical interference filter with improved transmissivity | |
| CN107015302A (en) | Multispectral filter array based on dielectric mirror | |
| CN105137514B (en) | 4.2~4.45 μm pass through medium-wave infrared optical filter and preparation method | |
| CN106443853B (en) | The wide spectrum color separation film of LONG WAVE INFRARED reflection in a kind of visible light near-infrared transmission | |
| EP1509576A1 (en) | All-dielectric optical diffractive pigments | |
| CN1862296A (en) | Micro-integrated narrow-band filter array and preparing method thereof | |
| US11630252B2 (en) | Optical filter and imaging apparatus | |
| CN108469645B (en) | Polarization filter element and preparation method thereof | |
| CN109164527A (en) | Five-channel multi-color filter | |
| CN107479191B (en) | Laser rectangular filter for visible light deep cut-off and design method | |
| TW201908778A (en) | Optical filter | |
| CN102952418A (en) | Manufacturing of diffractive pigments by fluidized bed chemical vapor deposition | |
| CN111061001A (en) | 480-580 nm visible light transmission filter and preparation method thereof | |
| KR20100053483A (en) | Dichroic filters formed using silicon carbide based layers | |
| CN203786316U (en) | Attenuation band-pass optical filter | |
| CN106435497B (en) | A kind of energy saving fenestrated membrane of golden low radiation and preparation method thereof | |
| CN111638572B (en) | 3D structured light 940nm narrow-band filter and preparation method thereof | |
| CN104297834A (en) | Multi-passband optical filter based on nested loop model | |
| CN103245999B (en) | A kind of broad spectrum out-of-band rejection optical filter | |
| CN105005107A (en) | Multispectral dual-channel photonic crystal filter at visible region | |
| TW200905283A (en) | A plasmonic reflection filter | |
| CN207650432U (en) | A kind of high filter mating plate of Visible-to-Near InfaRed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |