CN109164516A - The manufacture craft of micro-lens array - Google Patents
The manufacture craft of micro-lens array Download PDFInfo
- Publication number
- CN109164516A CN109164516A CN201811043350.0A CN201811043350A CN109164516A CN 109164516 A CN109164516 A CN 109164516A CN 201811043350 A CN201811043350 A CN 201811043350A CN 109164516 A CN109164516 A CN 109164516A
- Authority
- CN
- China
- Prior art keywords
- micro
- lens array
- base steel
- stainless base
- steel version
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention discloses a kind of manufacture craft of micro-lens array, then the technique being refined stainless base steel version and being polished on one side first carries out the greasy dirt that cleaning removes surface, drying;Stainless base steel version is placed on the workbench of precise laser drilling machine, requires to carry out accurate punching according to the size of miniature circular hole and the size of matrix arrangement;A thin layer uv-curable glue is coated on its surface;It vacuumizes;Then the stainless base steel version with micro- shape array of circular apertures is placed on centrifugation photoresist spinner and gets rid of extra uv-curable glue, then with ultraviolet light irradiation, make its solidification, just at the spherical surface of micro lens;Obtain micro-lens array.Technique of the invention is convenient for massive duplication, the stainless base steel version of this micro-lens array with the uv-curable glue after solidifying is carried out electroforming duplication, so that it may obtain the nickel plate of convex or recessed micro-lens array.Due to nickel plate mechanical strength with higher, so that it may replicate in large quantity, produce micro-lens array.
Description
Technical field
The present invention relates to the micro-lens array manufacture technology fields of microfabrication class, in particular to a kind of micro lens battle array
The manufacture craft of column.
Background technique
In recent years, micro-lens array is widely used in field of photoelectric technology, such as focussing plane optics member
Part, light efficiency booster, uniform illumination device, light-beam shaper, On Microoptical Scanner, colored filter, even optical anti-counterfeiting mark
Will.Especially because micro-lens array film flexible can be made in it, more cause widely to pay attention to.In recent years, it is developed
A variety of manufacturing technologies, but more complicated fine processing technique is all used, equipment is more complicated, and production process is also relatively more multiple
Miscellaneous, higher cost, process flow is longer.
Summary of the invention
Present invention defect of the existing technology;A kind of manufacture craft of micro-lens array is provided, the technology utilization
Precise laser drilling technology makes micro-lens array, which can simplify technique, reduces cost, shortens production stream
Journey.
To achieve the above object, the present invention provides a kind of manufacture crafts of micro-lens array, comprising the following steps:
1) then being refined stainless base steel version and being polished on one side carries out the greasy dirt that cleaning removes surface, drying;
2) stainless base steel version is placed on the workbench of precise laser drilling machine, is arranged according to the size and matrix of miniature circular hole
The size of column requires to carry out accurate punching;Obtain the stainless base steel version with miniature array of circular apertures;
3) after being cleaned and dried the stainless base steel version with miniature array of circular apertures, on its surface, coating a thin layer is ultraviolet
(UV) solidification glue;
4) the stainless base steel version for having been coated with uv-curable glue is placed in vacuum chamber, is vacuumized;So that miniature circular hole
Intracavitary air discharge, and uv-curable glue is made to be completely filled with the intracavitary of miniature circular hole;
5) then the stainless base steel version with micro- shape array of circular apertures is placed on centrifugation photoresist spinner get rid of it is extra ultraviolet solid
Change glue (under the synergy of the centrifugal force of the surface tension and photoresist spinner of uv-curable glue, the intracavitary purple in each miniature circular hole
The liquid level of outer solidification glue will become the spherical surface with certain curvature radius), then with ultraviolet light irradiation, make its solidification, just at
The spherical surface of micro lens;Obtain micro-lens array.
Further, in the step 2), diameter and the depth ratio of miniature circular hole are 1:1~3.
Still further, the diameter and depth ratio of the miniature circular hole are 1:1.
The beneficial effects of the present invention are:
Technique of the invention is convenient for massive duplication, this is had the micro-lens array of the uv-curable glue after solidifying not
Base steel version of becoming rusty carries out electroforming duplication, so that it may obtain the nickel plate of convex or recessed micro-lens array.Due to nickel plate machine with higher
Tool intensity, so that it may replicate in large quantity, produce micro-lens array.
Detailed description of the invention
Fig. 1 is the partial enlarged view of miniature array of circular apertures in stainless base steel version,
In figure, Figure 1A is top view, and Figure 1B is sectional view,
D is the diameter of miniature circular hole, i.e. lenslet diameter, D=100 microns;D is spaced between lenticule, and d=5 microns;
S is punching depth, and s is approximately equal to D;
Fig. 2, the partial enlarged view for the spherical surface that uv-curable glue is formed after whirl coating,
In figure, 1- uv-curable glue, 2- stainless steel substrate.The radius of curvature for the spherical surface that R- uv-curable glue is formed.
Specific embodiment
In order to better explain the present invention, below in conjunction with the specific embodiment main contents that the present invention is furture elucidated, but
The contents of the present invention are not limited solely to following embodiment.The manufacture craft of micro-lens array, comprising the following steps:
1) it by being refined and being polished on one side with a thickness of 3~4 millimeters of stainless base steel version, is then carefully cleaned,
To remove the greasy dirt on surface, and use hot blast drying;
2) cleaned stainless base steel version is placed on the workbench of precise laser drilling machine, as shown in Figure 1: according to
The size of miniature circular hole and the size of matrix arrangement require to carry out accurate punching, and diameter and the depth ratio of miniature circular hole reach 1:1;?
The array of miniature circular hole is got in stainless base steel version, and (miniature Circularhole diameter size shown in FIG. 1 and array layout are only one by one
Example, can set different Circularhole diameter and array layout according to the requirement of actual use.);Wherein, precise laser drilling machine
Running parameter are as follows:
Laser power: 200W
Wavelength: 1064NM
Pulse width: 0.1~20ms;
The size of miniature circular hole and the size of matrix arrangement depending on require and machining accuracy depending on, generally 0.001~
0.1mm;
3) the stainless base steel version for having accomplished fluently miniature array of circular apertures is subjected to depth cleaning, except the ash in degreasing and micropore
Slag, and dried up with drying nitrogen;
4) a thin layer ultraviolet (UV) solidification is coated in stainless base steel version after cleaning up, with miniature array of circular apertures
Glue;
5) the stainless base steel version for having been coated with uv-curable glue is placed in vacuum chamber, is vacuumized, so that miniature circular hole
Intracavitary air discharge, and uv-curable glue is made to be completely filled with the intracavitary of miniature circular hole;
6) stainless steel substrate 2 for after vacuumize process, being coated with uv-curable glue 1 is installed on high speed photoresist spinner, it will
Extra uv-curable glue is got rid of, the intracorporal uv-curable glue of chamber of each circle micropore its surface tension and photoresist spinner from
Under the synergy of mental and physical efforts, a spherical surface (Fig. 2) just will form,;It then, with wavelength is immediately the ultraviolet light irradiation of 365nm, it will
Ultra-violet curing adhesive curing, the spherical surface that uv-curable glue is formed in miniature circular hole is exactly the spherical surface of micro lens, and each miniature circular hole
Middle uv-curable glue is formed by the array of spherical surface to get namely micro-lens array is arrived.The radius of curvature R of this spherical surface depends on
In the revolving speed of photoresist spinner and the viscosity of uv-curable glue, so, it, can by adjusting the viscosity of photoresist spinner revolving speed and uv-curable glue
To obtain the spherical surface of different curvature radius.
In mass production, since the mechanical strength of uv-curable glue is not too much high, such template can only be lacked
The duplication of amount.It, just need to be by the stainless of the micro-lens array formed with uv-curable glue in order to can be carried out large batch of duplication
Base steel version carries out electroforming duplication, can thus obtain the nickel template of convex or recessed micro-lens array, micro-lens array
Nickel template just can be used for producing large batch of micro-lens array product.
Other unspecified parts are the prior art.Although above-described embodiment is made that the present invention and retouches in detail
State, but it is only a part of the embodiment of the present invention, rather than whole embodiments, people can also according to the present embodiment without
Other embodiments are obtained under the premise of creativeness, these embodiments belong to the scope of the present invention.
Claims (3)
1. a kind of manufacture craft of micro-lens array, it is characterised in that: the following steps are included:
1) then being refined stainless base steel version and being polished on one side carries out the greasy dirt that cleaning removes surface, drying;
2) stainless base steel version is placed on the workbench of precise laser drilling machine, according to the size and matrix arrangement of miniature circular hole
Size requires to carry out accurate punching;Obtain the stainless base steel version with miniature array of circular apertures;
3) after being cleaned and dried the stainless base steel version with miniature array of circular apertures, a thin layer ultra-violet curing is coated on its surface
Glue;
4) the stainless base steel version for having been coated with uv-curable glue is placed in vacuum chamber, is vacuumized;So that miniature circular hole is intracavitary
Air discharge, and uv-curable glue is made to be completely filled with the intracavitary of miniature circular hole;
5) then the stainless base steel version with micro- shape array of circular apertures is placed on centrifugation photoresist spinner and gets rid of extra uv-curable glue,
Again with ultraviolet light irradiation, make its solidification, just at the spherical surface of micro lens;Obtain micro-lens array.
2. the manufacture craft of micro-lens array according to claim 1, it is characterised in that: in the step 2), miniature circular
Diameter and the depth ratio in hole are 1:1~3.
3. the manufacture craft of micro-lens array according to claim 2, it is characterised in that: the diameter of the miniature circular hole and
Depth ratio is 1:1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811043350.0A CN109164516A (en) | 2018-09-07 | 2018-09-07 | The manufacture craft of micro-lens array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811043350.0A CN109164516A (en) | 2018-09-07 | 2018-09-07 | The manufacture craft of micro-lens array |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109164516A true CN109164516A (en) | 2019-01-08 |
Family
ID=64894551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811043350.0A Pending CN109164516A (en) | 2018-09-07 | 2018-09-07 | The manufacture craft of micro-lens array |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109164516A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112099118A (en) * | 2020-11-17 | 2020-12-18 | 广州纳诺新材料技术有限公司 | Enhanced light-gathering prism film, backlight module and preparation method of enhanced light-gathering prism film |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008222523A (en) * | 2007-03-15 | 2008-09-25 | Matsushita Electric Ind Co Ltd | Method of manufacturing glass gob |
CN103353627A (en) * | 2013-07-12 | 2013-10-16 | 厦门理工学院 | Manufacturing method of micro lens array mold |
CN103955014A (en) * | 2014-05-21 | 2014-07-30 | 福州大学 | Manufacturing method of micro-lens arrays |
-
2018
- 2018-09-07 CN CN201811043350.0A patent/CN109164516A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008222523A (en) * | 2007-03-15 | 2008-09-25 | Matsushita Electric Ind Co Ltd | Method of manufacturing glass gob |
CN103353627A (en) * | 2013-07-12 | 2013-10-16 | 厦门理工学院 | Manufacturing method of micro lens array mold |
CN103955014A (en) * | 2014-05-21 | 2014-07-30 | 福州大学 | Manufacturing method of micro-lens arrays |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112099118A (en) * | 2020-11-17 | 2020-12-18 | 广州纳诺新材料技术有限公司 | Enhanced light-gathering prism film, backlight module and preparation method of enhanced light-gathering prism film |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5670198B2 (en) | Optical element and method for manufacturing wafer scale assembly | |
KR100703095B1 (en) | High sag lens fabrication method and high sag lens manufactured thereby | |
EP2437928B1 (en) | Method for manufacturing wafer lens and the manufatured wafer lens | |
CN101161400B (en) | Method for manufacturing mould core of light conducting plate | |
CN104508464B (en) | Surface enhanced raman scattering element | |
CN110405369A (en) | Method for generating micro-structure in the volume of the substrate made of crisp and hard material | |
JP2006337985A (en) | Method of manufacturing high sag lens and lens manufactured by using the same method | |
CN110383113A (en) | The manufacturing method of optical component and optical component | |
JP2004170935A5 (en) | ||
CN106772715B (en) | Preparation method of curved bionic compound eye | |
CN1857990A (en) | Method for making complicate three dimension microstructure or micro device at low cost | |
WO2003023458A2 (en) | Multiple lens molding system and method | |
JP2005043897A (en) | Method of manufacturing microlens | |
CN110261940B (en) | Preparation method of fly-eye lens | |
JP2003240914A (en) | Method of forming fiducial mark | |
CN109164516A (en) | The manufacture craft of micro-lens array | |
US20110063730A1 (en) | Disk-shaped optical lens array and manufacturing method thereof | |
JP2008070556A (en) | Method of manufacturing optical member and method of manufacturing optical member molding die | |
Kim et al. | Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas | |
JP2003200278A (en) | Fiber optic parts array and method of manufacturing the same | |
CN110058332B (en) | Method for manufacturing micro lens | |
JP2005527459A (en) | Method for making a product having a structured surface | |
CN110780365A (en) | Method for manufacturing micro-lens array by photoetching and electroforming process | |
CN114063206B (en) | Front light plate with micro lattice point structure and manufacturing process thereof | |
JP2008290357A (en) | Method for manufacturing microlens array |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190108 |
|
RJ01 | Rejection of invention patent application after publication |