CN109161843B - Mask plate, preparation method of display substrate, display substrate and display device - Google Patents

Mask plate, preparation method of display substrate, display substrate and display device Download PDF

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Publication number
CN109161843B
CN109161843B CN201811073847.7A CN201811073847A CN109161843B CN 109161843 B CN109161843 B CN 109161843B CN 201811073847 A CN201811073847 A CN 201811073847A CN 109161843 B CN109161843 B CN 109161843B
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area
display
display area
substrate
mask
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CN109161843A (en
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白妮妮
薛智勇
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention provides a mask plate, a preparation method of a display substrate, the display substrate and a display device, and belongs to the technical field of display. The mask plate comprises a mask area, a display area and a mask layer, wherein the mask area is used for corresponding to the display area of the display substrate; the display area of the display substrate comprises a main display area and an edge display area surrounding the main display area; at least part of the outer contour of the edge display area is arc-shaped; the mask area includes: an open area and a blocked area surrounding the open area; the opening area is used for corresponding to a main display area of the display substrate, and the shielding area is used for corresponding to an edge display area of the display substrate.

Description

Mask plate, preparation method of display substrate, display substrate and display device
Technical Field
The invention belongs to the technical field of display, and particularly relates to a mask plate, a preparation method of a display substrate, the display substrate and a display device.
Background
Along with the promotion of display technology, also more and more diversified to the outward appearance requirement of demonstration product, like marginal anomalous display products such as fillet cell-phone, circular wrist-watch, bracelet, because the pixel cell generally is the matrix and arranges, the partial edge region of demonstration product can't place complete pixel, leads to showing that the marginal sawtooth of product feels obvious, influences display effect.
In view of the above problem of the edge display with obvious jaggy feeling, the prior art proposes to gradually reduce the gray scale of N rows (or N columns) of pixels near the edge region to reduce the brightness difference between the display region and the non-light-emitting region around the display region, thereby alleviating the problem of the edge display with obvious jaggy feeling of the display product.
In the prior art, the display products generally include LCD display products and OLED display products. The LCD product controls the brightness through a backlight source, and the edge gray scale can be controlled step by controlling the light-emitting area through a black matrix; the OLED product is a current-driven device, the luminance of which is determined by the current density, and if the evaporation area is reduced, the current density is higher, and the gray scale is higher, so that the gray scale cannot be adjusted by adjusting the evaporation area of the pixel unit. However, there is no other method in the prior art to effectively improve the problem of the edge display with obvious jaggy feeling.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a mask plate which can improve the display sawtooth feeling at the edge of a display substrate and improve the viewing experience of a user.
The technical scheme adopted for solving the technical problem is that the mask plate comprises a mask area and a display area, wherein the mask area is used for corresponding to the display area of a display substrate; the display area of the display substrate comprises a main display area and an edge display area surrounding the main display area; the mask area includes: an open area and a blocked area surrounding the open area;
the opening area is used for corresponding to a main display area of the display substrate, and the shielding area is used for corresponding to an edge display area of the display substrate.
Preferably, at least part of the outer contour of the edge display area is arc-shaped.
Preferably, the shape of the opening area is the same as the shape of the outer contour of the mask area.
Further preferably, the shape of the open area comprises a circle or an ellipse.
Preferably, the material of the shielding region comprises metal.
The technical scheme adopted for solving the technical problem is a preparation method of a display substrate, wherein a display area of the display substrate comprises a main display area and an edge display area surrounding the main display area;
the preparation method of the display substrate comprises the following steps:
forming an auxiliary light-emitting structure in a main display area of the substrate by using a mask plate through a composition process; wherein, the mask plate is any one of the mask plates.
Preferably, the step of forming the auxiliary light emitting structure in the main display region of the substrate by a patterning process using a mask includes:
aligning a mask plate with a substrate, wherein an opening area of the mask plate corresponds to a main display area of the substrate;
and forming an auxiliary light-emitting structure in the main display area of the substrate by an evaporation process.
Preferably, at least part of the outer contour of the edge display area is arc-shaped.
Preferably, the display substrate is an OLED substrate; the auxiliary light-emitting structure is at least one of a hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer of the OLED device.
Preferably, the auxiliary light emitting structure is a hole transport layer of the OLED device.
The technical scheme adopted for solving the technical problem is that the display substrate is characterized in that a display area of the display substrate is divided into a main display area and an edge display area surrounding the main display area;
the main display area is provided with an auxiliary light-emitting structure, and the edge display area is free of the auxiliary light-emitting structure.
Preferably, at least part of the outer contour of the edge display area is arc-shaped.
Further preferably, the shape of the outer contour of the edge display area includes a circle or an ellipse.
Further preferably, the shape of the outer contour of the main display area is the same as the shape of the outer contour of the edge display area.
Preferably, the display substrate is an OLED display substrate;
the auxiliary light-emitting structure is a hole transport layer of the OLED device.
The technical scheme adopted for solving the technical problem of the invention is a display device which comprises any one of the display substrates.
Drawings
Fig. 1 is a schematic structural diagram of a mask according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method of fabricating a display substrate according to an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a display substrate according to an embodiment of the invention;
wherein the reference numerals are: 1. a mask plate; 11. an open area; 12. a shielded area; 21. a main display area; 22. an edge display area; 3. a pixel unit.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The display area of the display substrate provided by the embodiment of the invention comprises a main display area and an edge display area surrounding the main display area. The embodiment is particularly suitable for the display substrate with the arc-shaped at least part of the outer contour of the edge display area, but is not limited to the case; wherein, the display area refers to the area for forming the pixel unit 3 (for example, red, green and blue sub-pixels); the outer contour of the edge display area is also the whole contour of the display area.
The overall shape (outline shape) of the display substrate is not limited in this embodiment, and may be the same shape as the outline of the display region or a shape different from the outline of the display region.
The outline shape of the display area in the present embodiment may specifically be a rectangle with a rounded chamfer, a sector, an ellipse, a circle, or the like. In the following embodiments, for convenience of understanding, the display substrate with a circular display area is taken as an example for description, but the embodiments of the present invention are not limited thereto.
However, since the display device has a narrower frame, it is preferable to design the outline of the display substrate to have the same shape as the outline of the display region, and therefore, in the following embodiments, the outline of the display substrate is the same as the outline of the display region, that is, the outlines of the display substrate and the display region are both circular, but the embodiments of the present invention are not limited thereto.
Example 1:
as shown in fig. 1 to fig. 3, the present embodiment provides a mask plate 1, which can be used for preparing a display substrate. The display substrate may be circular, and the display area may also be circular. The mask plate in the embodiment comprises a mask area, wherein the mask area corresponds to a display area of the display substrate in the preparation process of the display substrate, and the shape and the size of the mask area are the same as those of the display area. Specifically, the mask area includes: an opening area 11 and a shielding area 12 surrounding the opening area 11; the opening area 11 corresponds to a main display area 21 of the display substrate, and the shielding area 12 corresponds to an edge display area 22 of the display substrate.
The mask 1 provided in this embodiment can be used to prepare a layer structure (auxiliary light emitting structure) of a display substrate, which improves light emitting efficiency, such as a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer of an OLED substrate.
When the mask plate 1 provided by the embodiment is used to prepare a display substrate, the opening region 11 can be used to form an auxiliary light-emitting structure only in the main display region 21 of the display substrate, and the shielding region 12 is used to prevent the edge display region 22 of the display substrate from forming the auxiliary light-emitting structure. Therefore, the luminous efficiency of the edge display area 22 of the display substrate is lower than that of the main display area 21, that is, when the display substrate displays, the brightness of the main display area 21 of the display substrate is higher than that of the edge display area 22, so as to reduce the brightness difference between the edge display area 22 and the non-display area, further realize the brightness transition from the display area to the non-display area of the OLED display substrate, and improve the edge sawtooth display phenomenon caused by incomplete arrangement of the pixel units 3 in the display substrate.
In this embodiment, the shape of the opening region 11 of the mask plate 1 can be limited by the inner contour of the shielding region 12. Because mask 1 among the prior art does not usually include the district 12 that shelters from that corresponds marginal display area 22 in this embodiment, but opening area 11 directly corresponds the whole display area of display substrate, so mask 1 among the embodiment can be through on mask 1's among the prior art basis, increase and shelter from district 12 and realize to need not to prepare new mask 1, and then practice thrift display substrate's preparation cost. Preferably, the material of the shielding region 12 may include metal. Of course, it is understood that the mask 1 can be directly reproduced, and in this case, the shielding region 12 and the main structure of the mask 1 are preferably formed as an integral structure of the same material.
Specifically, the shape of the opening area 11 can be designed according to actual requirements, such as square, circular and other various shapes. Preferably, the shape of the opening region 11 is the same as the shape of the outer contour of the mask region, that is, the shape of the opening region 11 of the mask plate 1 is the same as the shape of the display region of the display substrate. As shown in fig. 3, since the opening area 11 is circular, and the pixel units 3 of the display substrate are generally square in array, a part of the pixel units 3 in the display area corresponds to the opening area 11, and a part of the pixel units corresponds to the shielding area 12. Therefore, when the mask 1 is used to prepare a display substrate, a part of the auxiliary light-emitting structures (i.e., the auxiliary light-emitting structures cannot cover the entire pixel units 3) is formed in the pixel units 3 corresponding to the opening regions 11.
That is to say, in the display substrate formed by using the mask 1 provided in this embodiment, a complete auxiliary light emitting structure is formed in the pixel unit 3 completely located in the main display area 21, a partial auxiliary light emitting structure is formed in the pixel unit 3 located at the boundary between the main display area 21 and the edge display area 22, and no auxiliary light emitting structure is formed in the pixel unit 3 completely located in the edge display area 22. Therefore, when the display substrate displays, the brightness of the pixel unit 3 completely located in the main display area 21 is greater than the brightness of the pixel unit 3 completely located in the edge display area 22, and the brightness of the pixel unit 3 at the boundary between the main display area 21 and the edge display area 22 is less than the brightness of the pixel unit 3 completely located in the main display area 21 and greater than the brightness of the pixel unit 3 completely located in the edge display area 22.
Example 2:
as shown in fig. 2, the present embodiment provides a method for manufacturing a display substrate, wherein the display substrate is an OLED substrate, the shape of which is circular, and the display area of which is also circular. The display area of the display substrate includes a main display area 21 and an edge display area 22 surrounding the main display area 21. In the method for manufacturing a display substrate provided in this embodiment, the mask plate 1 provided in embodiment 1 is used to manufacture an auxiliary light emitting device of an OLED substrate, such as at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer of the OLED device. In order to clearly illustrate the present embodiment, the following description uses the mask 1 provided in embodiment 1 to prepare a hole transport layer as an example, but the embodiment of the present invention is not limited thereto. It is to be understood that the mask 1 provided in embodiment 1 can also be used for the above-described other auxiliary light emitting devices.
The preparation method of the display substrate comprises the following steps:
and S1, forming an anode of the OLED device on the substrate.
Specifically, the anode may be formed by sputtering or the like in this step. Specifically, the anode may have a large thickness of 10nm to 150nm, and the material may be Al, Mg, Ag, ITO, IZO, or the like.
And S2, forming a hole injection layer on the substrate.
Specifically, in step S2, a vacuum evaporation process may be used to form the hole injection layer. The material of the hole injection layer may be an organic material or a polymer doped with a phosphorescent dopant (P).
S3, forming an auxiliary light-emitting structure in the main display area 21 of the substrate by using the mask plate 1 through a composition process; wherein, mask 1 provided in embodiment 1 of mask 1.
Step S3 may include:
s31, aligning the mask plate 1 with the substrate to enable the mask plate 1 to be positioned on the side, to be film-formed, of the substrate, and enabling the opening area 11 of the mask plate 1 to correspond to the main display area 21 of the substrate; s32, forming a hole transport layer in the main display region 21 of the substrate by an evaporation process. Specifically, the substrate on which the mask 1 is placed may be placed in a vacuum evaporation chamber for evaporation, so that a hole transport layer is formed on the substrate at a position (main display region 21) corresponding to the opening region 11.
S4, sequentially forming organic functional layer structures of the OLED device such as a light-emitting layer, an electron transport layer and an electron injection layer on the substrate.
Specifically, in step S3, the organic functional layer structure may be formed by inkjet printing, vacuum evaporation, or other processes. The luminescent layer can be made of an undoped fluorescent luminescent organic material consisting of a luminescent material with a hole transport ability not lower than an electron transport ability, or made of a fluorescent material-doped organic material consisting of a fluorescent dopant and a host material, or made of a phosphorescent material-doped organic material consisting of a phosphorescent dopant and a host material. The material of the electron transport layer is a material having a high electron mobility, and is preferably any one of 2- (4-biphenyl) -5-phenyl oxadiazole (PBD), 2, 5-bis (1-naphthyl) -1,3, 5-oxadiazole (BND), and 2,4, 6-triphenoxy-1, 3, 5-Triazine (TRZ). The material of the electron injection layer is any one of lithium fluoride, sodium fluoride, potassium fluoride, rubidium fluoride, cesium fluoride, lithium oxide and lithium metaborate.
And S5, forming a cathode on the substrate with the electron injection layer.
Specifically, the cathode may be formed by a vacuum evaporation process in this step. Among them, the cathode is usually made of a low work function metal material, such as: lithium, magnesium, calcium, strontium, aluminum, indium, etc. or alloys of the above metals with copper, gold, silver; or a very thin buffer insulating layer (such as lithium fluoride LiF, cesium carbonate CsCO3, and the like) and the above metal or alloy.
In the method for manufacturing a display substrate provided in this embodiment, the mask plate 1 provided in embodiment 1 is used to manufacture an auxiliary light emitting structure on a substrate, so that a hole transport layer is formed in the main display region 21 of the display substrate, and a hole transport layer is not formed in the edge display region 22. Therefore, when the display substrate works, the luminous efficiency of the edge display area 22 is lower than that of the main display area 21, that is, when the display substrate displays, the brightness of the main display area 21 of the display substrate is higher than that of the edge display area 22, the brightness difference between the edge display area 22 and the non-display area is reduced, the brightness transition of the OLED display substrate from the display area to the non-display area is further realized, and the edge sawtooth display phenomenon caused by incomplete arrangement of the pixel units 3 is improved.
Example 3:
as shown in fig. 3, the present embodiment provides a display substrate, which can be prepared according to the preparation method provided in embodiment 2. The display area of the display substrate includes a main display area 21 and an edge display area 22 surrounding the main display area 21; wherein the main display area 21 has an auxiliary light emitting structure disposed therein, and the edge display area 22 has no auxiliary light emitting structure disposed therein.
The display substrate provided by the embodiment is particularly suitable for an OLED substrate, and specifically, the auxiliary light emitting structure may be at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer of an OLED device. Preferably, the auxiliary light emitting structure is a hole transport layer.
Taking the auxiliary light emitting structure as a hole transport layer as an example, a hole transport layer is formed in the main display area 21 of the display substrate, and the edge display area 22 has no hole transport layer, so that the light emitting efficiency of the OLED device in the edge display area 22 is lower than that of the OLED device in the main display area 21. Therefore, when the display substrate displays, the brightness of the main display area 21 of the display substrate is greater than that of the edge display area 22, so that the brightness difference between the edge display area 22 and the non-display area can be reduced, further, the brightness transition of the display substrate from the display area to the non-display area is realized, and the edge sawtooth display phenomenon of the OLED substrate caused by incomplete arrangement of the pixel units 3 is improved.
Preferably, the shape of the main display area 21 is the same as the shape of the display area of the display substrate. That is, as shown in fig. 3, the shape of the main display area 21 is also circular, and the pixel units 3 are generally square in array arrangement, so that a part of the pixel units 3 in the display substrate is located in the main display area 21 in half and in the edge display area 22 in half, and only the part of the pixel units 3 located in the main display area 21 is formed with a hole transport layer.
That is, in the display substrate of the present embodiment, a complete hole transport layer is formed in the pixel unit 3 completely located in the main display area 21, a partial hole transport layer is formed in the pixel unit 3 located at the boundary between the main display area 21 and the edge display area 22, no hole transport layer is formed in the pixel unit 3 completely located in the edge display area 22, so that, when displaying, the luminance of the pixel unit 3 completely located in the main display area 21 is greater than the luminance of the pixel unit 3 completely located in the edge display area 22, the brightness of the pixel unit 3 at the boundary between the main display area 21 and the edge display area 22 is less than that of the pixel unit 3 completely located in the main display area 21, and is greater than that of the pixel unit 3 completely located in the edge display area 22, therefore, the edge sawtooth display phenomenon is improved, the brightness difference transition of the display substrate is smoother, and the visual experience effect of a user is better.
Example 4:
the present embodiment provides a display device including the display substrate provided in embodiment 3.
Because the display device of this embodiment includes the display substrate provided in embodiment 3, compared with the OLED display device in the prior art, the display device of this embodiment has a smaller luminance difference between the edge display area and the non-display area, the whole edge sawtooth display phenomenon is less obvious, and the visual experience effect of the user is better.
Specifically, the display device in this embodiment may be: any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, an advertising screen and the like.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (10)

1. A mask plate is characterized in that,
comprises a mask area used for corresponding to a display area of a display substrate; the display area of the display substrate comprises a main display area and an edge display area surrounding the main display area; the mask area includes: an open area and a blocked area surrounding the open area;
the opening area is used for corresponding to a main display area of the display substrate, and the shielding area is used for corresponding to an edge display area of the display substrate.
2. A mask according to claim 1,
at least part of the outer contour of the edge display area is arc-shaped.
3. A mask according to claim 1,
the shape of the opening area is the same as the shape of the outer contour of the mask area.
4. A mask according to claim 3,
the shape of the open area includes a circle or an ellipse.
5. A mask according to claim 1,
the shielding area is made of metal.
6. A method for preparing a display substrate is characterized in that,
the display area of the display substrate comprises a main display area and an edge display area surrounding the main display area;
the preparation method of the display substrate comprises the following steps:
forming an auxiliary light-emitting structure in a main display area of the substrate by using a mask plate through a composition process; the mask is the mask in any one of claims 1 to 4.
7. The method for manufacturing a display substrate according to claim 6,
the step of forming the auxiliary light-emitting structure on the main display area of the substrate by using the mask through the composition process comprises the following steps:
aligning a mask plate with a substrate, wherein an opening area of the mask plate corresponds to a main display area of the substrate;
and forming an auxiliary light-emitting structure in the main display area of the substrate by an evaporation process.
8. The method for manufacturing a display substrate according to claim 6,
at least part of the outer contour of the edge display area is arc-shaped.
9. The method for manufacturing a display substrate according to claim 8,
the display substrate is an OLED substrate;
the auxiliary light-emitting structure is at least one of a hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer of the OLED device.
10. The method for manufacturing a display substrate according to claim 9,
the auxiliary light-emitting structure is a hole transport layer of the OLED device.
CN201811073847.7A 2018-09-14 2018-09-14 Mask plate, preparation method of display substrate, display substrate and display device Active CN109161843B (en)

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CN115679254A (en) * 2022-09-08 2023-02-03 京东方科技集团股份有限公司 Mask plate, display substrate and display device

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CN206441731U (en) * 2017-01-25 2017-08-25 昆山国显光电有限公司 Organic light-emitting display device and electronic display unit
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