CN109150001A - A kind of nano positioning and voltage linear actuator and its driving method - Google Patents

A kind of nano positioning and voltage linear actuator and its driving method Download PDF

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Publication number
CN109150001A
CN109150001A CN201811028677.0A CN201811028677A CN109150001A CN 109150001 A CN109150001 A CN 109150001A CN 201811028677 A CN201811028677 A CN 201811028677A CN 109150001 A CN109150001 A CN 109150001A
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CN
China
Prior art keywords
jaw
actuating arm
driving screw
linear actuator
piezoelectric ceramics
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Pending
Application number
CN201811028677.0A
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Chinese (zh)
Inventor
贾静
张莹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Three British Precision Control (tianjin) Instrument Equipment Co Ltd
Original Assignee
Three British Precision Control (tianjin) Instrument Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Three British Precision Control (tianjin) Instrument Equipment Co Ltd filed Critical Three British Precision Control (tianjin) Instrument Equipment Co Ltd
Priority to CN201811028677.0A priority Critical patent/CN109150001A/en
Publication of CN109150001A publication Critical patent/CN109150001A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors

Abstract

The invention discloses a kind of nano positioning and voltage linear actuators, including shell, bottom cover, actuating arm, piezoelectric ceramics and driving screw, shell connect with bottom cover and forms a cavity therebetween, actuating arm is mounted in the cavity, piezoelectric ceramics is mounted on actuating arm, the both ends of actuating arm are respectively formed one first jaw and the second jaw, screw is driven to be arranged in the first jaw, second jaw and cage connection, driving screw passes through pre-load nut, first screw is connect to drive screw for fixed support with bottom cover, driving screw end be equipped with locking nut for lock driving screw.The beneficial effects of the invention are as follows piezoelectric ceramics to be mounted on actuating arm inner wall, reduces rigging error while reducing part, and improve the rigidity of actuator on the whole, guarantees the stable of actuator;Jaw and driving screw thread cooperation increase the contact area between the two simultaneously, reduce the damage to actuator, prolong the service life, improve the load capacity of actuator.

Description

A kind of nano positioning and voltage linear actuator and its driving method
Technical field
The invention belongs to precision instrument and equipment technical field, more particularly, to a kind of nano positioning and voltage linear actuator and Its driving method.
Background technique
With the development of nanometer technique, all there is an urgent need to submicron orders, micro-/ nano for the research of numerous field of engineering technology The accurate actuator of grade, but the electromagnetic machine based on electromagnetic induction principle is miniaturized again.In the developing direction of high power to weight ratio very Hardly possible is broken through.The macroscopic view such as traditional driving device, such as ordinary motor, feed screw nut, worm and gear large scale driving device is very Difficulty meets required precision.Therefore, various countries are dedicated to studying the more superior novel high-precision driving device of performance.
With the development of material science, new function material is that these applications propose new solution, wherein piezoelectricity Type precision actuator by its high resolution, frequency response is good, high load is small in size, without electromagnetic interference, be easily achieved integration The advantages that closed-loop control, is widely used in each field.
Piezoelectric actuator specifically includes that (1) signal controls formula inertial piezoelectric actuator, and driving principle is using asymmetric Driving signal as power source, and match symmetrical frictional force on the direction that moves forward and backward and realize driving, but need resume In complicated and accurate whistle control system, microminiaturization to actuator complete machine and integrated bring certain difficulty;(2) friction control Standard inertial piezoelectric precision actuator, driving principle are produced using symmetrical driving signal and mechanical clamping structure collective effect Raw driving force realizes driving with frictional force asymmetrical in direction of retreat as power source, by advancing, but frictional force is It is nonlinear, the case where due to contact surface, timeliness, temperature, abrasion and process and assemble error actuator can be impacted, lead The kinetic stability of cause actuator is poor, resolution ratio is low, load capacity is small.
Summary of the invention
Simple, easy to operate, high resolution that the object of the present invention is to provide a kind of structures, compact-sized, actuator load Ability is big, high production efficiency nano positioning and voltage linear actuator.
Technical scheme is as follows:
A kind of nano positioning and voltage linear actuator, including shell, bottom cover, actuating arm, piezoelectric ceramics and driving screw, institute It states shell to connect with bottom cover and form a cavity therebetween, the actuating arm is mounted in the cavity, the piezoelectric ceramics peace On the actuating arm, the both ends of the actuating arm are respectively formed one first jaw and the second jaw, and the driving screw is set It sets in first jaw, second jaw and the cage connection, the driving screw pass through pre-load nut, the first spiral shell Nail is connect to support the driving screw for fixed with bottom cover, is equipped with locking nut in the end of the driving screw and is used for Lock the driving screw.
In the above-mentioned technical solutions, first jaw is screw thread jaw, and is interference fitted with the driving screw.
In the above-mentioned technical solutions, first jaw is equipped with driving steel wire, one end and first of the driving steel wire Jaw connection, the other end are mounted on the actuating arm, so that resilient clamping force provides normal pressure.
In the above-mentioned technical solutions, first jaw is identical with the structure of the second jaw, and with the actuating arm Center be that symmetrical centre is centrosymmetric structure.
In the above-mentioned technical solutions, the front end of the driving screw is equipped with nut, and the upper nut passes through jackscrew and institute It is circumferentially fixed to state driving screw.
In the above-mentioned technical solutions, the actuating arm is connect by fixing screws with the bottom cover.
In the above-mentioned technical solutions, the side of the actuating arm offers slot, and the piezoelectric ceramics is mounted in the slot.
In the above-mentioned technical solutions, the actuating arm is wedge-shaped hinge.
A kind of driving method of nano positioning and voltage linear actuator, method includes the following steps:
(1) slow electric signal is applied to the piezoelectric ceramics, so that piezoelectric ceramics extends and push the two of the actuating arm A jaw slides in opposite direction, to drive the driving screw being clamped in first jaw rotation;
(2) quick electric signal is applied to the piezoelectric ceramics, so that the fast quick-recovery original of piezoelectric ceramics is long, and first pincers Mouth returns to its initial position, and the driving screw rod is motionless at the position that its described step rotates, to complete once rotation work Make;
(3) it is iteratively repeated the step (1), (2), to realize the driving screw rod continuous rotation, completes the actuator Continuous rotation work.
The advantages and positive effects of the present invention are:
1. piezoelectric ceramics is mounted on the inside of actuating arm, and connect with the both ends of actuating arm, can when elongating or shortening Two jaws of actuating arm are driven to generate opposite direction movement, reducing part reduces rigging error, and improves drive on the whole The rigidity of swing arm, to enhance the stable of actuating arm.
2. the jaw of actuating arm and driving screw thread cooperation, are effectively ensured the contact area between jaw and screw, reduce The local friction of screw causes the damage of actuating arm, and the straightness for improving screw movement is more convenient, extends actuating arm Service life.
3. impaction state is kept in the side of jaw by driving steel wire, to protect in the side of jaw setting driving steel wire The normal pressure of actuating arm and the efficiency of thread friction transmitting are demonstrate,proved, the load capacity of actuator is improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of nano positioning and voltage linear actuator of the invention;
Fig. 2 is the side view of actuating arm in the present invention;
Fig. 3 is use state Fig. 1 of nano positioning and voltage linear actuator of the invention;
Fig. 4 is use state Fig. 2 of nano positioning and voltage linear actuator of the invention.
In figure:
1, actuating arm 2, driving screw 3, locking nut
4, pre-load nut 5, bottom cover 6, fixing screws
7, nut 8, shell 9, jackscrew
10, the first screw 11, piezoelectric ceramics 12, driving steel wire
Specific embodiment
Below in conjunction with specific embodiment, invention is further described in detail.It should be appreciated that described herein specific Embodiment is used only for explaining the present invention, is not intended to limit the present invention, is never limited in protection scope of the present invention.
Embodiment 1
As Figure 1-Figure 4, nano positioning and voltage linear actuator of the invention, including shell 8, bottom cover 5, actuating arm 1, Piezoelectric ceramics 11 and driving screw 2, shell 8 connect with bottom cover 5 and form a cavity therebetween, and actuating arm 1 is mounted on the sky Intracavitary, piezoelectric ceramics 11 is mounted on actuating arm 1, and the both ends of actuating arm 1 are respectively formed one first jaw and the second jaw, and first Jaw is identical with the structure of the second jaw, and is centrosymmetric structure using the center of actuating arm 1 as symmetrical centre, the first pincers Mouthful be screw thread jaw, driving screw 2 (for example, 80 pitch screws) be arranged in the first jaw, and the first jaw and driving spiral shell 2 interference fit of nail, the second jaw connect with shell 8, and the first jaw is equipped with driving steel wire 12, one end of driving steel wire 12 and The connection of first jaw, the other end are mounted on actuating arm 1, so that the resilient clamping force of actuating arm 1 provides normal pressure;Drive screw 2 connects by pre-load nut 4, the first screw 10 with bottom cover 5, for fixed support driving screw 2, and to driving screw 2 Apply axial load, frictional force is applied to driving screw 2 so that driving screw rotation, will revolve in the length variation of piezoelectric ceramics 11 Transhipment turn is changed to linear motion;Driving screw 2 end be equipped with locking nut 3 for lock driving screw 2;Actuating arm 1 is connect by fixing screws 6 with bottom cover 1, and actuating arm 1 offers slot, piezoelectric ceramics for the side of wedge-shaped hinge and the actuating arm 1 11 are mounted in slot, reduce extra component assembly, reduce rigging error and improve the overall stiffness of actuating arm 1.
The front end of above-mentioned driving screw 2 is equipped with nut 7, and top nut 7 is circumferentially fixed by jackscrew 9 and driving screw 2.
When using nano positioning and voltage linear actuator of the invention, slow electric signal is applied to piezoelectric ceramics 11, is pressed Electroceramics 11 slowly extends and two brank opening's edge opposite directions of actuating arm 1 is pushed to slide, the drive with the first jaw interference fit Dynamic screw 2 rotates (static friction) under the action of the first jaw, at the end of actuating arm 1, applies one fastly to piezoelectric ceramics 11 Fast electric signal, the fast quick-recovery original of piezoelectric ceramics 11 is long, and two jaw is made to be back to initial position, due to driving screw 2 Inertia and low dynamic friction, driving screw 2 stop remains stationary in the original location, thus complete a rotary work;In periodicity Signal stimulus under, actuator will constantly repeat the process of above-mentioned rotation and revolution, final to realize that the continuous of driving screw 2 turns It is dynamic.
One end of actuating arm 1 connects the first jaw, and the other end connects the second jaw, the both ends of piezoelectric ceramics 11 respectively with drive Swing arm 1 connects, and to guarantee piezoelectric ceramics 11 during elongation, forward, one end backward, is made with generating opposite direction for one end With to drive screw 2 to provide the driving frictional force of rotary motion.The jaw of actuating arm 1 is threadedly engaged with driving screw 2, and By pre-load nut 4 and the fixed support of locking nut 3, the contact area of driving screw 2 and jaw is effectively ensured, so that rotation is transported Turn changes linear motion into, and improves the straightness of movement, while enhancing jaw rigidity, effectively avoids local friction pair Abrasive damage caused by jaw, extends the service life of actuating arm 1, and then can be improved the kinematic accuracy and stabilization of actuator Property.
The spatially relative terms such as "upper", "lower", "left", "right" have been used in embodiment for ease of explanation, have been used for Relationship of the elements or features relative to another elements or features shown in explanatory diagram.It should be understood that in addition to figure Shown in except orientation, spatial terminology is intended to include the different direction of device in use or operation.For example, if in figure Device be squeezed, the element for being stated as being located at other elements or feature "lower" will be located into other elements or feature "upper". Therefore, exemplary term "lower" may include both upper and lower orientation.Device can be positioned in other ways (be rotated by 90 ° or Positioned at other orientation), it can be interpreted accordingly used herein of the opposite explanation in space.
Moreover, the relational terms of such as " first " and " second " or the like are used merely to one with another with identical The component of title distinguishes, without necessarily requiring or implying between these components there are any this actual relationship or Sequentially.
One embodiment of the present invention has been described in detail above, but the content is only preferable implementation of the invention Example, should not be considered as limiting the scope of the invention.It is all according to equivalent variations made by the present patent application range and improve Deng should still be within the scope of the patent of the present invention.

Claims (9)

1. a kind of nano positioning and voltage linear actuator, it is characterised in that: including shell (8), bottom cover (5), actuating arm (1), pressure Electroceramics (11) and driving screw (2), the shell (8) connect with bottom cover (5) and form a cavity, the driving therebetween Arm (1) is mounted in the cavity, and the piezoelectric ceramics (11) is mounted on the actuating arm (1), the both ends of the actuating arm (1) It is respectively formed one first jaw and the second jaw, the driving screw (2) is arranged in first jaw, second jaw Connect with the shell (8), the driving screw (2) by pre-load nut (4), the first screw (10) connect with bottom cover (5) with The driving screw (2) is supported for fixed, locking nut (3) are installed for locking in the end of driving screw (2) The driving screw (2).
2. nano positioning and voltage linear actuator according to claim 1, it is characterised in that: first jaw is screw thread Jaw, and be interference fitted with the driving screw (2).
3. nano positioning and voltage linear actuator according to claim 2, it is characterised in that: first jaw is equipped with It drives steel wire (12), one end of driving steel wire (12) is connect with the first jaw, and the other end is mounted on the actuating arm (1) On, so that resilient clamping force provides normal pressure.
4. nano positioning and voltage linear actuator according to claim 3, it is characterised in that: first jaw and second The structure of jaw is identical, and is centrosymmetric structure using the center of the actuating arm (1) as symmetrical centre.
5. nano positioning and voltage linear actuator described in any one of -4 according to claim 1, it is characterised in that: the drive The front end of dynamic screw (2) is equipped with nut (7), and the upper nut (7) is circumferentially solid by jackscrew (9) and the driving screw (2) It is fixed.
6. nano positioning and voltage linear actuator according to claim 5, it is characterised in that: the actuating arm (1) passes through Fixing screws (6) are connect with the bottom cover (1).
7. nano positioning and voltage linear actuator according to claim 6, it is characterised in that: the side of the actuating arm (1) Face offers slot, and the piezoelectric ceramics (11) is mounted in the slot.
8. nano positioning and voltage linear actuator according to claim 7, it is characterised in that: the actuating arm (1) is wedge Shape hinge.
9. a kind of driving method using nano positioning and voltage linear actuator described in any one of claim 1-8, It is characterized in that: method includes the following steps:
(1) slow electric signal is applied to the piezoelectric ceramics (11), so that piezoelectric ceramics (11) extends and pushes the actuating arm (1) two jaws slide in opposite direction, to drive the driving screw (2) being clamped in first jaw rotation;
(2) quick electric signal is applied to the piezoelectric ceramics (11), so that the fast quick-recovery original of piezoelectric ceramics (11) is long, and described the One jaw returns to its initial position, and driving screw rod (2) is motionless at the position that its described step (1) rotates, and completes primary Rotary work;
(3) repeating said steps (1), (2) complete the continuous of the actuator to realize driving screw rod (2) continuous rotation Rotary work.
CN201811028677.0A 2018-09-05 2018-09-05 A kind of nano positioning and voltage linear actuator and its driving method Pending CN109150001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811028677.0A CN109150001A (en) 2018-09-05 2018-09-05 A kind of nano positioning and voltage linear actuator and its driving method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811028677.0A CN109150001A (en) 2018-09-05 2018-09-05 A kind of nano positioning and voltage linear actuator and its driving method

Publications (1)

Publication Number Publication Date
CN109150001A true CN109150001A (en) 2019-01-04

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110067832A (en) * 2019-05-05 2019-07-30 广东工业大学 A kind of piezoelectric ceramic actuator pre-tightening apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959268A2 (en) * 1998-05-22 1999-11-24 Central Gikenkogyo Corporation A mechanism for driving a screw rod by supersonic vibration
CN107005179A (en) * 2014-09-16 2017-08-01 统雷有限公司 Scale-up version piezo-activator with motorized adjustment screw

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959268A2 (en) * 1998-05-22 1999-11-24 Central Gikenkogyo Corporation A mechanism for driving a screw rod by supersonic vibration
CN107005179A (en) * 2014-09-16 2017-08-01 统雷有限公司 Scale-up version piezo-activator with motorized adjustment screw

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110067832A (en) * 2019-05-05 2019-07-30 广东工业大学 A kind of piezoelectric ceramic actuator pre-tightening apparatus
CN110067832B (en) * 2019-05-05 2022-04-19 广东工业大学 Pre-tightening device for piezoelectric ceramic driver

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