CN109141284A - A kind of diffraction optical element generation superfine wire laser three-D topography measurement method - Google Patents
A kind of diffraction optical element generation superfine wire laser three-D topography measurement method Download PDFInfo
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- CN109141284A CN109141284A CN201810981701.6A CN201810981701A CN109141284A CN 109141284 A CN109141284 A CN 109141284A CN 201810981701 A CN201810981701 A CN 201810981701A CN 109141284 A CN109141284 A CN 109141284A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention discloses a kind of diffraction optical elements to generate superfine wire laser three-D topography measurement method, ultra-fine line laser is generated using multi-step diffraction optical element, this method passes through parallel laser beam lighting multi-step diffraction optical element, after Fourier transform lens, ultra-fine line laser is obtained in focal plane, object under test is placed in the plane, along vertical line laser direction uniform speed scanning object in focal plane, the Accurate Reconstruction to object dimensional pattern is realized using laser triangulation.Ultra-fine line laser is generated present invention employs diffraction optical element, it can be achieved that identification to the smaller feature of object, thus improves measurement accuracy, can be used for the three-dimensional appearance optical precision detection of engineering sample.
Description
Technical field
The invention belongs to technical field of optical detection, and in particular to a kind of diffraction optical element generation superfine wire laser three-D
Topography measurement method.
Background technique
Diffraction optical element is built upon technical a kind of device such as diffraction theory, CAD and minute manufacturing
Part.For its design method, when characteristic size is much larger than illumination light wavelength, and viewing plane is remote enough apart from diffraction plane,
The requirement of design accuracy can be met using scalar diffraction theory, in response to the above problems at present mainly include that following several optimizations are set
Meter method: GS algorithm, also known as iterative Fourier transform algorithm, genetic algorithm, simulated annealing, ant group algorithm etc.；First
Kind GS Iterative Fourier Transform algorithm, the advantage is that calculating speed is fast, is easy and fast to solve phase, is widely used in diffraction light
Learn the design of element.
Currently, using the laser triangulation of line laser structured light in reconstruction of objects three-dimensional appearance, the larger journey of line laser width
Measurement accuracy is affected on degree, i.e. the minor detail of object under test is difficult to be identified by wider line laser, above-mentioned in order to overcome
A kind of problem, it is desirable to provide ultra-fine line laser generation method.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of diffraction optics
Element generates superfine wire laser three-D topography measurement method, and the effect based on diffraction optical element to laser beam shaping passes through
Optimization algorithm modulation generates ultra-fine line laser, realizes the identification and measurement of measuring targets tiny characteristic, and then improves measurement essence
Degree and reliability.
The invention adopts the following technical scheme:
A kind of diffraction optical element generation superfine wire laser three-D topography measurement method, the parallel laser generated by laser
Diffraction optical element is illuminated, after Fourier transform lens, realizes that ultra-fine line laser focuses on its focal plane, by determinand
Body is placed in the position, along vertical line laser direction uniform speed scanning object in focal plane, using imaging lens and ccd sensor
The photographic device of composition is acquired scan image, realizes the reconfigurable measurement to object dimensional pattern using laser triangulation.
Specifically, the following steps are included:
The COMPLEX AMPLITUDE g of S1, given incident light0(x1,y1) with the diffractive light field intensity distribution I (x of viewing plane2,y2),
The light field COMPLEX AMPLITUDE g of input plane is obtained by the initial phase φ and given incident light distribution of diffraction optical element
(x1,y1), distribution of light intensity is distributed I (x2,y2) it is superfine wire laser profile shape；
S2, to input plane light field COMPLEX AMPLITUDE g (x1,y1) Fraunhofer diffraction transformation is carried out, obtain viewing plane
Distribution of light intensity is distributed I ' (x2,y2)；
S3, the real amplitude that will be givenInstead of the real amplitude being calculatedAnd it is carried out inverse
Diffraction changes to obtain transformed COMPLEX AMPLITUDE the G " (x of real amplitude2,y2), according to G " (x2,y2) obtain the light field of input plane
COMPLEX AMPLITUDE g ' (x1,y1), then again by given input plane reality amplitude | g (x1,y1) | instead of the real amplitude being calculated
|g′(x1,y1)|；
S4, in gradually iterative process, on viewing plane distribution of light intensity be distributed I ' (x2,y2) with the real amplitude of input plane |
g(x1,y1) | setting value is gradually approached, determines diffraction optical element phase distribution；
S5, obtain superfine wire Basis of Laser on, using laser triangulation reconstruct object under test three-dimensional appearance.
Further, in step S3, by transformed COMPLEX AMPLITUDE the G " (x of real amplitude2,y2) bring that fraunhofer is inverse to spread out into
Integral formula is penetrated, the light field COMPLEX AMPLITUDE g ' (x of input plane is calculated1,y1)。
Further, in step S4, stop calculating when error function variable quantity reaches setting value, at this time on input plane
Corresponding phase subtracts the phase distribution for the diffraction optical element that incident light phase designs.
Further, step S5 specifically:
Coordinate system is initially set up, using diffraction optical element central point as origin, establishes world coordinate system O-XYZ, with imaging
The optical center of camera lens is that origin establishes camera coordinate system o-xyz, establishes image coordinates system o by origin of ccd sensor center0-
uv；
Assuming that P point is object under test surface any point, determine that video camera is sat by the geometrical relationship established between coordinate system
The transformation relation of the point in point and image coordinate system in mark system；
By the relationship between incident ray laser plane and world coordinate system, plane of incidence can be obtained under camera coordinate system
Equation；Obtain the coordinate (x, y, z) of object under test surface arbitrary point.
Further, the transformation relation of the point in camera coordinate system and the point in image coordinate system is as follows:
Wherein, coordinate of the P point under camera coordinate system is (xp,yp,zp), coordinate under image coordinates system be (u,
V), (u0, v0) it is the intersecting point coordinate practised physiognomy with optical axis, Nx、NyFor the pixel in ccd sensor unit sizes, f2For video camera coke
Away from.
Further, the transformation relation of world coordinate system to camera coordinate system is expressed as follows:
Wherein, L=r11r22r33+r12r23r31+r13r21r32-r11r23r32-r12r21r33-r13r22r31；
Further, plane of incidence is obtained under camera coordinate system by incident ray laser plane and world coordinate system
Equation is as follows:
K21x+K22y+K23z+K4=0
Wherein, K4=-(K21tx+K22ty+K23tz)。
Further, the coordinate (x, y, z) of object under test surface arbitrary point calculates as follows:
Wherein, a=- (u-u0)/f2·K23·Nx；B=- (v-v0)/f2·K23·Ny。
Specifically, being given birth to using diffraction optical element and condenser lens control line laser width and focal position using modulation
At ultra-fine line laser structured light object under test.
Compared with prior art, the present invention at least has the advantages that
A kind of diffraction optical element of the present invention generates superfine wire laser three-D topography measurement method, using diffraction optical element
Ultra-fine line laser is generated, realizes that line laser width is smaller, can be right to the reconfigurable measurement of object dimensional pattern using laser triangulation
The micro-structure feature of object under test is identified and is measured, and measurement accuracy is substantially increased, and can be used for engineering sample three-dimensional shaped
The optical detection of looks.
Further, pass through given incident light COMPLEX AMPLITUDE, viewing plane diffractive light field intensity distribution and diffraction optics
The initial phase of element can optimize to obtain ultra-fine line laser using GS iterative Fourier transform algorithm.
Further, it by giving the error function variable quantity of GS iterative Fourier transform algorithm, determines to stop design conditions.
Further, according to laser triangulation, the three-dimensional coordinate of object under test surface arbitrary point can be calculated.
Further, it using diffraction optical element and Fourier transform lens control line laser width and focal position, adopts
The three-dimensional appearance of body surface can be obtained according to laser triangulation with the ultra-fine line laser structured light object under test that modulation generates.
In conclusion the present invention generates ultra-fine line laser using multi-step diffraction optical element, pass through parallel laser light beam
Illumination multi-step diffraction optical element obtains ultra-fine line laser after Fourier transform lens in focal plane, by determinand
Body is placed in the plane, along vertical line laser direction uniform speed scanning object in focal plane, is realized using laser triangulation
To the Accurate Reconstruction of object dimensional pattern.
Below by drawings and examples, technical scheme of the present invention will be described in further detail.
Detailed description of the invention
Fig. 1 is measuring device structural schematic diagram of the present invention；
Fig. 2 is line laser design object；
Fig. 3 is a kind of diffraction optical element phase diagram；
Fig. 4 is the line laser figure obtained using diffraction optical element shown in Fig. 3.
Wherein: 1. lasers；2. diffraction optical element；3. condenser lens；4. object under test；5. scanning means；6. imaging
Camera lens；7.CCD sensor.
Specific embodiment
Referring to Fig. 1, a kind of diffraction optical element of the present invention generates superfine wire laser three-D topography measurement device, including shine
Bright laser 1, diffraction optical element 2, condenser lens 3, object under test 4, sweep mechanism 5, imaging lens 6 and ccd sensor 7,
The parallel laser that laser 1 issues successively is radiated on object under test 4 through diffraction optical element 2 and condenser lens 3, object under test
4 are arranged on moveable sweep mechanism 5, and ccd sensor 7 is acquired scan image by imaging lens 6.
The parallel laser generated by laser 1 illuminates diffraction optical element 2, after condenser lens 3, surface behind
One determines apart from the ultra-fine line laser focusing of upper realization, and object under test 4 is placed in the position at this time, is controlled by sweep mechanism 5
Object at the uniform velocity moves, and is acquired using the photographic device that imaging lens 6 and ccd sensor 7 form to scan image, and then adopt
The reconfigurable measurement to object dimensional pattern is realized with laser triangulation.
The present invention provides a kind of diffraction optical elements to generate superfine wire laser three-D topography measurement method, using GS iteration
Fourier's optimization algorithm, the specific steps are as follows:
The COMPLEX AMPLITUDE g of S1, given incident light0(x1,y1) with the diffractive light field intensity distribution I (x of viewing plane2,y2)；
The light field COMPLEX AMPLITUDE g of input plane is obtained by the initial phase φ and given incident light distribution of diffraction optical element
(x1,y1)；
In step S1, the incident light COMPLEX AMPLITUDE of input plane calculates as follows:
g0(x1,y1)=A0(x1,y1)exp[iφ0(x1,y1)]
g(x1,y1)=g0(x1,y1)t(x1,y1)=A0(x1,y1)exp[iφ0(x1,y1)+φ(x1,y1)]
Wherein, g0(x1,y1) it is incident light COMPLEX AMPLITUDE, A0(x1,y1) it is incident light amplitude；φ0(x1,y1) it is incidence
Light phase；t(x1,y1)=exp [i φ (x1,y1)] it is diffraction optical element complex amplitude transmittance function, φ (x1,y1) be to
Seek diffraction optical element phase.
I (the x given in the present invention2,y2) as shown in Fig. 2, incident light is directional light, viewing plane is line laser distribution map
Case；
S2, then to input plane light field COMPLEX AMPLITUDE g (x1,y1) Fraunhofer diffraction transformation is carried out, sight is calculated
Examine the distribution of light intensity distribution I ' (x of plane2,y2), distribution of light intensity is distributed I (x2,y2) it is superfine wire laser profile shape；
Algorithm iteration preconvergence is very fast, and the light distribution of obtained viewing plane and given target difference are also larger；
The distribution of light intensity distribution calculating process being calculated is as follows:
The light field COMPLEX AMPLITUDE of given viewing plane is
Then distribution of light intensity is distributed as
I(x2,y2)=| G (x2,y2)|2
According to Fraunhofer diffraction integral formula
Wherein, λ is illumination light wavelength；K=2 π/λ is wave number, f1Distance for viewing plane apart from diffraction element；
The distribution of light intensity being calculated is distributed as
I′(x2,y2)=| G ' (x2,y2)|2
S3, with given real amplitudeInstead of real amplitude is calculatedAnd inverse spread out is carried out to it
Variation is penetrated, the light field COMPLEX AMPLITUDE g ' (x of input plane is obtained1,y1), by given input plane reality amplitude | g (x1,y1)|
Instead of the real amplitude being calculated | g ' (x1,y1) |, specifically calculate step are as follows:
By given real amplitudeInstead of real amplitude is calculatedI.e.
By transformed COMPLEX AMPLITUDE the G " (x of real amplitude2,y2) bring fraunhofer inverse diffraction integral formula into and obtain
By given input plane light field reality amplitude | g (x1,y1) | instead of | g ' (x1,y1) |, i.e.,
In formula, ∑ is the effective coverage of diffraction optical element.
S4, in gradually iterative process, on viewing plane distribution of light intensity be distributed I ' (x2,y2) with the real amplitude of input plane |
g(x1,y1) | given value is gradually approached, stops calculating when error function variable quantity reaches setting value, it is right on input plane at this time
The phase answered subtracts the phase distribution for the diffraction optical element that incident light phase designs；
S5, obtain superfine wire Basis of Laser on, using laser triangulation reconstruct object under test three-dimensional appearance.
Coordinate system is initially set up, using diffraction optical element central point as origin, establishes world coordinate system O-XYZ, with imaging
The optical center of camera lens is that origin establishes camera coordinate system o-xyz, establishes image coordinates system o by origin of ccd sensor center0-
uv。
Assuming that P point is object under test surface any point, by establishing the geometrical relationship between coordinate system it is found that video camera is sat
Mark system is as follows with the transformation relation of image coordinate system:
Wherein, (xP, yP, zP) it is coordinate of the P point under camera coordinate system, (u, v) is P point under image coordinates system
Coordinate, (u0, v0) it is the intersecting point coordinate practised physiognomy with optical axis, Nx、NyFor the pixel in ccd sensor unit sizes, f2For video camera
Focal length.
Transformation relation of the world coordinate system to camera coordinate system are as follows:
It converts to obtain according to above formula
Wherein, L=r11r22r33+r12r23r31+r13r21r32-r11r23r32-r12r21r33-r13r22r31；
By the relationship between incident line laser and world coordinate system, plane that incident line laser is constituted is obtained in video camera
Equation under coordinate system are as follows:
K21x+K22y+K23z+K4=0
Wherein, K4=-(K21tx+K22ty+K23tz)。
The above-mentioned equation of simultaneous obtains
Wherein, a=- (u-u0)/f2·K23·Nx；B=- (v-v0)/f2·K23·Ny；(x, y, z) is object under test surface
The coordinate of arbitrary point.
Therefore, pass through the three-dimensional appearance on the restructural object under test surface of the above method.
Ultra-fine line laser is generated present invention employs diffraction optical element, it can be achieved that identification to the smaller feature of object, because
And measurement accuracy is improved, it can be used for the three-dimensional appearance optical precision detection of engineering sample.
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being described and shown in usually here in attached drawing is real
The component for applying example can be arranged and be designed by a variety of different configurations.Therefore, below to the present invention provided in the accompanying drawings
The detailed description of embodiment be not intended to limit the range of claimed invention, but be merely representative of of the invention selected
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
Design condition is the parallel laser beam lighting of 532nm, and amplitude is in Gaussian Profile, and waist radius is 500 μm, Fu
In the leaf transformation focal length of lens be 200mm, execute the above process repeatedly, when the error function variable quantity of setting reaches setting value,
Stop calculating.Fig. 3 show the diffraction optical element phase diagram obtained under the above conditions using GS optimization method, pixel
Having a size of 10 μm, Fig. 4 is the diffractive light field pattern obtained using diffraction optical element shown in Fig. 3.
Preferably, using diffraction optical element and condenser lens control line laser width and focal position.
Preferably, the ultra-fine line laser structured light object under test generated using modulation is based on laser triangulation, can degree of precision
Reconstruction of objects three-dimensional appearance.
The method of the present invention is due to using ultra-fine line laser structured light, it can be achieved that identification to the small feature of object, improves survey
Accuracy of measurement can be used for the three-dimensional appearance optical detection of engineering sample.
The above content is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, all to press
According to technical idea proposed by the present invention, any changes made on the basis of the technical scheme each falls within claims of the present invention
Protection scope within.
Claims (10)
1. a kind of diffraction optical element generates superfine wire laser three-D topography measurement method, which is characterized in that generated by laser
Parallel laser illuminate diffraction optical element, after Fourier transform lens, realize that ultra-fine line laser is poly- on its focal plane
Object under test is placed in the position by coke, along vertical line laser direction uniform speed scanning object in focal plane, using imaging lens
Scan image is acquired with the photographic device of ccd sensor composition, is realized using laser triangulation to object dimensional pattern
Reconfigurable measurement.
2. a kind of diffraction optical element according to claim 1 generates superfine wire laser three-D topography measurement method, special
Sign is, comprising the following steps:
The COMPLEX AMPLITUDE g of S1, given incident light0(x1,y1) with the diffractive light field intensity distribution I (x of viewing plane2,y2), pass through
The initial phase φ of diffraction optical element and given incident light distribution obtain the light field COMPLEX AMPLITUDE g (x of input plane1,
y1), distribution of light intensity is distributed I (x2,y2) it is superfine wire laser profile shape；
S2, to input plane light field COMPLEX AMPLITUDE g (x1,y1) Fraunhofer diffraction transformation is carried out, obtain the light field of viewing plane
Intensity distribution I ' (x2,y2)；
S3, the real amplitude that will be givenInstead of the real amplitude being calculatedAnd inverse diffraction is carried out to it
Variation obtains transformed COMPLEX AMPLITUDE the G " (x of real amplitude2,y2), according to G " (x2,y2) light field that obtains input plane shakes again
Width is distributed g ' (x1,y1), then again by given input plane reality amplitude | g (x1,y1) | instead of the real amplitude being calculated | g '
(x1,y1)|；
S4, in gradually iterative process, on viewing plane distribution of light intensity be distributed I ' (x2,y2) with the real amplitude of input plane | g
(x1,y1) | setting value is gradually approached, determines diffraction optical element phase distribution；
S5, obtain superfine wire Basis of Laser on, using laser triangulation reconstruct object under test three-dimensional appearance.
3. a kind of diffraction optical element according to claim 2 generates superfine wire laser three-D topography measurement method, special
Sign is, in step S3, by transformed COMPLEX AMPLITUDE the G " (x of real amplitude2,y2) bring fraunhofer inverse diffraction integral formula into,
Calculate the light field COMPLEX AMPLITUDE g ' (x of input plane1,y1)。
4. a kind of diffraction optical element according to claim 2 generates superfine wire laser three-D topography measurement method, special
Sign is, in step S4, stops calculating when error function variable quantity reaches setting value, at this time corresponding phase on input plane
Subtract the phase distribution for the diffraction optical element that incident light phase designs.
5. a kind of diffraction optical element according to claim 2 generates superfine wire laser three-D topography measurement method, special
Sign is, step S5 specifically:
Coordinate system is initially set up, using diffraction optical element central point as origin, world coordinate system O-XYZ is established, with imaging lens
Optical center be origin establish camera coordinate system o-xyz, establish image coordinates system o by origin of ccd sensor center0-uv；
Assuming that P point is object under test surface any point, camera coordinate system is determined by the geometrical relationship established between coordinate system
In point and image coordinate system in point transformation relation；
By the relationship between incident ray laser plane and world coordinate system, equation of the plane of incidence under camera coordinate system is obtained；
Obtain the coordinate (x, y, z) of object under test surface arbitrary point.
6. a kind of diffraction optical element according to claim 5 generates superfine wire laser three-D topography measurement method, special
Sign is that the transformation relation of the point in camera coordinate system and the point in image coordinate system is as follows:
Wherein, (xP, yP, zP) it is coordinate of the P point under camera coordinate system, (u, v) is coordinate of the P point under image coordinates system
For (u0, v0) it is the intersecting point coordinate practised physiognomy with optical axis, Nx、NyFor the pixel in ccd sensor unit sizes, f2For video camera coke
Away from.
7. a kind of diffraction optical element according to claim 5 generates superfine wire laser three-D topography measurement method, special
Sign is that the transformation relation of world coordinate system to camera coordinate system is expressed as follows:
Wherein, L=r11r22r33+r12r23r31+r13r21r32-r11r23r32-r12r21r33-r13r22r31；
8. a kind of diffraction optical element according to claim 7 generates superfine wire laser three-D topography measurement method, special
Sign is, it is as follows with world coordinate system to obtain equation of the plane of incidence under camera coordinate system by incident ray laser plane:
K21x+K22y+K23z+K4=0
Wherein, K4=-(K21tx+K22ty+K23tz)。
9. a kind of diffraction optical element according to claim 5 generates superfine wire laser three-D topography measurement method, special
Sign is that the coordinate (x, y, z) of object under test surface arbitrary point calculates as follows:
Wherein, a=- (u-u0)/f2·K23·Nx；B=- (v-v0)/f2·K23·Ny。
10. a kind of diffraction optical element according to claim 1 generates superfine wire laser three-D topography measurement method, special
Sign is, using diffraction optical element and condenser lens control line laser width and focal position, is generated using modulation ultra-fine
Line laser structured light object under test.
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Application publication date: 20190104 |