CN109813531A - The debugging apparatus and its adjustment method of optical system - Google Patents
The debugging apparatus and its adjustment method of optical system Download PDFInfo
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- CN109813531A CN109813531A CN201910044369.5A CN201910044369A CN109813531A CN 109813531 A CN109813531 A CN 109813531A CN 201910044369 A CN201910044369 A CN 201910044369A CN 109813531 A CN109813531 A CN 109813531A
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Abstract
The present invention relates to a kind of debugging apparatus of optical system and adjustment methods, comprising: optical platform is located at optical system to be measured and detector array on optical platform；Parallel light tube, the object above parallel light tube, light source；Control platform is connect with optical platform, detector array, and for controlling optical platform and detector array；It adjusts optical platform and the object of infinity is imaged onto detector, the object is the straight line of brightness uniformity distribution；Optical system is transferred to the defocus position closest to detector array, carries out Image Acquisition；Gradually moving optical system is far from detector array, by focal position until other side defocus position, carries out Image Acquisition in each position appropriate, obtains a series of figures of optical system；Imaging capability analysis is carried out to image series, determines the optimal imaging precision of optical system.
Description
Technical field
The present invention relates to optical system manufacturing technology field more particularly to infrared optical imaging systems on optical platform
The devices and methods therefor debugged.
Background technique
The imaging and its quality evaluation of optical system are a central issue of traditional optical research, even if one does not have picture
Difference improves optical system, and the limitation due to system to light beam is also one to an object imaging and is determined by system aperture
Diffraction spot.Optical system then corresponds to the superposition for constituting the diffraction spot of all the points of object to extension object imaging.Just because of
The diffraction effect of optical system prevents perfect optical system imaging from knowing each other completely with object itself.However for one
Have the actual optical system of aberration, also as the presence of aberration and influence the Energy distribution in diffraction spot, to reduce optical system
The image quality of system.The correction of aberration must be taken into consideration in Optical System Design, but any optical system is impossible to aberration school
Just to zero, the aberration of real surplus is directly related to image quality, and there has been proposed a variety of optical system quality evaluation sides thus
Method, these evaluation methods are applied not only to the evaluation of optical design result, are also embodied in the most final inspection of image quality after optical element processing
In survey.
There are commonly star test methods, resolution ratio method, spot diagram, several for traditional optical system imaging quality evaluation method
What aberration, wave aberration and optical transfer function test method etc..Optical transfer function was not only related with aberration, but also had with system diffraction
It closes, while being suitable for small aberration optical system and big aberration optical system, so evaluating image quality with it is than more objective.?
In traditional optical transfer function test, the method being commonly used is scanning survey method, the basic principle is that tested object lens are to one
Object (the slit or grating etc.) imaging of setting shape, is scanned picture with various forms of scan screens in image planes, by light
Electric explorer receives the luminous flux by scan screen, and converted processing obtains optical transfer function.Scanning method is generally divided into optics
Fourier analysis method, photoelectricity Fourier analysis method and digital Fourier analysis method etc..
With the development of computer technology and image analysis method, more optical transfer function test macros are based on now
Using system under test (SUT) to object direct imaging, by acquisition digital picture, digital picture is analyzed by computer,
Reason, obtains optical transfer function, thereby produces numerous instruments specifically for optical system transfer function test.
As previously mentioned, the traditional test methods of optical transfer function are, installation one is removable on optical system imaging face
Dynamic point source detection device, laterally or longitudinally moves on in image planes, the point-by-point image for acquiring the point spread function that optical system generates.
Pass through collected point spread function calculating transmission function.The method of this acquisition needs for detector to be placed on focal plane, moves
Dynamic precision needs to generally require much smaller than image patch size better than 1 μm.The greatest difficulty of optical transfer function test is to detect
Device is accurately placed at the point target center on focal plane and can be vertically mobile with optical path.Due to will to beam spot scans thus test need
Want the long period.Detector located lateral precision also will have a direct impact on measuring accuracy.Close another method is just with the above method
It is directly to be sampled to line spread function, that is, optical system directly generates line to the slit image of infinity on focal plane and expands
Function is dissipated, slit scan is imaged using single-element detector.Its advantages are not need to find point spread function center, phase
To simple.
If, can be with more relatively easy using the test of above method transmission function using face element detector.But which
Pixel have passed through point source center and still need carefully to adjust and recognize.If not moving face source detector, can also directly adopt
Collect image and obtains point spread function.But due between pixel spacing generally between 20-30 μm, point spread function
Acquisition precision also only has 20-30 μm, this measurement accuracy generally can not accurate response point spread function or transmission function.In addition,
This measures the Nonuniformity Correction that must also carry out detector, and the point spread function error otherwise calculated is very big.
Summary of the invention
The purpose of the present invention is to provide a kind of debugging apparatus of optical system and adjustment method, solution is surveyed in the prior art
The examination technical problem that error is big, precision is low.
In order to solve the above technical problem, the present invention provides the adjustment methods of optical system, comprising:
It adjusts optical platform and the object of infinity is imaged onto detector array, the object is brightness uniformity distribution
Straight line；
The optical system is transferred to the defocus position closest to detector array, carries out Image Acquisition；
The optical system is gradually moved far from detector array, the optical system passes sequentially through focal position to another
Side defocus position, it is synchronous to carry out Image Acquisition, obtain the image series of the object；
Imaging capability analysis is carried out to the image series, determines the optimal imaging precision of optical system.
Optionally, the step of carrying out imaging analysis is imaged to image includes:
The image of the object is negated, the target area of rectangle is intercepted；
Obtain the linear fit function of target object image: y=kx+b；
Pixel around linear fit function is projected to linear fit function, projector distance is calculated, is with gray value
The longitudinal axis, pixel projector distance are horizontal axis, obtain data and curves；
Spread function is gone out to curve-fitting data: Determine light
The optimal imaging precision of system.
Optionally, the image of the object and the intersection point of target area are located on the vertical both sides of rectangle.
Optionally, more than the length of object is arranged 100 in the target area of interception.
Optionally, the spread function is fourier transformed and normalizes the modulation transfer function for obtaining optical system.
Optionally, A is amplitude in spread function, and point centered on m, σ is standard deviation, and a0 is constant, for eliminating image
In homogeneous background, a1 is coefficient of first order, for eliminating the gradual change background in image.
Optionally, image series are fitted into line spread function or edge spread function carries out imaging capability analysis.
Optionally, the object is slit, edge, grating.
Optionally, at an angle, the object is in detector array for the object and detector array column direction
0 °~90 °.
Correspondingly, another aspect of the present invention also provides a kind of debugging apparatus of optical system, comprising:
Optical platform is located at optical system to be measured and detector array on optical platform；
Parallel light tube, the object above parallel light tube, light source；
Control platform is connect with optical platform, detector array, and for controlling optical platform and detector array；
Using above-mentioned adjustment method, the optimal imaging precision of the optical system is determined.
Compared with the existing technology, the debugging apparatus of optical system of the invention and adjustment method have the advantages that
In adjustment method of the invention, the optical system passes sequentially through side defocus position, focal position to the other side
Defocus position, it is synchronous to carry out Image Acquisition, obtain image series, imaging capability analysis carried out to the image series, successively into
Row linear fit, curve matching obtain optimal spread function, so that it is determined that the optimal imaging precision of optical system.The present invention
Calculation method do not need really to adjust optical system and focal plane distance to optimal imaging position, it is only necessary to minimum position moves
Dynamic precision is close to depth of focus and all focussing distances cover pinpointed focus, can calculate optimal imaging ability, final error is small.
Detailed description of the invention
Fig. 1 is the schematic diagram of the debugging apparatus of optical system in one embodiment of the invention；
Fig. 2 is the flow chart of the debugging apparatus of optical system in one embodiment of the invention；
Fig. 3 is the schematic diagram of linear fit in one embodiment of the invention；
Fig. 4 is the schematic diagram of curve matching in one embodiment of the invention；
Fig. 5 (a) is the fitting result of different angle line spread function in one embodiment of the invention；
Fig. 5 (b) is the fitting result of different angle edge spread function in one embodiment of the invention；
Fig. 6 (a) is the fitting result of different slit length line spread functions in one embodiment of the invention；
Fig. 6 (b) is the fitting result of different edge lengths edge spread function in one embodiment of the invention；
Fig. 7 is the adjustment schematic diagram of linear fit k in one embodiment of the invention；
Fig. 8 (a) is σ in one embodiment of the invention with the variation schematic diagram of k；
Fig. 8 (a) is regression criterion in one embodiment of the invention with the variation schematic diagram of k.
Specific embodiment
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention.But the present invention can be with
Much it is different from other way described herein to implement, those skilled in the art can be without prejudice to intension of the present invention the case where
Under do similar popularization, therefore the present invention is not limited to the specific embodiments disclosed below.
Secondly, the present invention is described in detail using schematic diagram, when describing the embodiments of the present invention, for purposes of illustration only, institute
Stating schematic diagram is example, should not limit the scope of protection of the invention herein.
To make the above purposes, features and advantages of the invention more obvious and understandable, below in conjunction with attached drawing to the present invention
Optical system debugging apparatus and adjustment method be described in detail.
Refering to what is shown in Fig. 1, the debugging apparatus of optical system of the invention, comprising:
Optical platform 10, the optical platform can be mobile in Z axis；
Optical system 20 to be measured and detector array 30 on optical platform 10；
Parallel light tube 40, the object 50 above parallel light tube 40, light source 6；
Control platform 70, control platform 70 are connect with optical platform 10, detector array 20, and for controlling optical platform
10 with detector array 20.
Refering to what is shown in Fig. 2, the adjustment method of optical system of the invention, comprising:
Firstly, step S1, the entire debugging apparatus in Fig. 1 is installed in place, light source 60, detector array 20, control are opened
Platform 70 processed adjusts optical platform 10 for the object 50 of infinity and is imaged onto detector array 20, the object 50 and spy
It surveys 30 direction of device array at an angle, the imaging of object 50 is immediately seen on the display screen of control platform 70.Wherein, institute
The straight line that object 50 is brightness uniformity distribution is stated, such as the object 50 is slit, edge, grating etc..The object
Direction and detector array X, Y pixel direction at an angle, object 50 and detector array 30 are in 0 °~90 °.
Step S2 adjusts optical platform 10 and enables 20 accurately image of optical system, and imaging level can be by Software thread
Measuring and calculating, optical system 20 is transferred to closest to the position of detector array 30, optical system 20 is located at detector array most at this time
Close defocus position carries out Image Acquisition.
Step S3, control platform 70 control optical system and automatically move, and gradually moving optical system 20 is far from detector array
Column 30 so that optical system 20 passes sequentially through focal position until other side defocus position, it is synchronous each position appropriate into
Row Image Acquisition obtains a series of images of optical system 20.
Step S4, control platform 70 obtain the image series of object, and carry out imaging capability point to image series automatically
Analysis carries out imaging capability analysis to image series.Object can use slit or edge in the present embodiment, can be fitted respectively
Line spread function (LSF) or edge spread function out obtain optimal line spread function, edge spread function, or are returned
One change obtains modulation transfer function, so that it is determined that the optimal imaging precision of optical system 20.It is not needed in this algorithm by optical system
System is really adjusted with detector array to optimal imaging position (focal position), it is only necessary to the mobile essence of the minimum position of optical system
Degree is close to depth of focus and all focussing distances cover pinpointed focus, can calculate optimal imaging ability.
Specifically, the step of progress imaging analysis is imaged to image includes the following:
Refering to what is shown in Fig. 3, negating to the image of the object of acquisition, the target area ROI of rectangle, the figure of object are intercepted
As and the intersection point of target area ROI be located at rectangle or so (vertical) side, can be with if intersection point is fallen on upper and lower (level) side of rectangle
It is calculated by changing 90 ° of rectangular frame shape or image rotation.
Then, refering to what is shown in Fig. 4, taking the target area upper left corner ROI is coordinate origin O (0,0), target area ROI coordinate
It can be realized by simple translation transformation with original image coordinate, in the ROI of target area, from left to right gray value in each column
Maximum point is marked, and is put to these and is carried out linear fit, obtain straight line: y=kl x+bl fits the figure of object 50
As straight line.
Later, the pixel around object 50 is projected to straight line y, using pixel gray value of image as the longitudinal axis, pixel
Point projector distance is horizontal axis, obtains line spread function curve.By taking P (xi, yi) as an example, calculates pixel P (xi, yi) and arrive object
Distance be dp, be apparent from:
When pixel P (xi, yi) on straight line when, dp=0, dp > 0 when P (xi, yi) is located above straight line, when P (xi,
When yi) being located at below straight line, the unit of dp < 0, dp are 1 pixel width.
It carries out curve fitting, obtains to spread function:
Wherein, A is amplitude, and point centered on m is related with y=klx+bl, and as m=0, central point is on y=klx+bl, σ
For standard deviation, a0 is constant, and for eliminating the homogeneous background in image, a1 is coefficient of first order, for eliminating in image gradually
Become background.
When Fig. 5 gives identical σ setting value, the fitting result of different angle Imitating figure is compared, and Fig. 5 (a), 5 (b) are respectively
When giving σ=0.6, the fitting result of line spread function, edge spread function under different angle, wherein having selected 0 °~45 °
The angle in section, the result in 45 °~90 ° sections are theoretically consistent with 0 °~45 ° sections.In figure it can be seen that, at 0 °
The problem of because of undersampling, so that fitting result and setting value deviation are larger, line spread function and edge spread function have respectively
0.2% and 0.4% deviation, maximum deviation is respectively 0.07% and 0.17% under other angles.Known to when σ it is certain, sampled point
If enough, fitting result and object 50 are unrelated with detector array institute's angle degree.
Algorithm error of fitting mostlys come from: introducing in the slit or edge length l, linear fit in interception target area
Error and last curve matching nonlinear fitting error.
It is given in Fig. 6 as σ=0.6, by changing the range of target area ROI interception, obtains different l, thus
Different l is obtained to the error of the Fitting Calculation, wherein l is its projection l ' in the horizontal direction, to arrange as digit.Wherein scheme
6 (a) when to be slit inclination angle be 27.6 °, and the fitting result of line spread function under different slit lengths, Fig. 6 (b) is that edge inclination angle is
At 29.3 °, the fitting result of different slit length lower edges spread function, it can be seen that the fitting result of line spread function
The height of ratio of precision edge spread function, error of fitting are gradually reduced with the increase of l ', when the column of l '=100 are above, fitting
As a result it all tends towards stability, the maximum error of fitting of edge spread function also only has 0.1% (when l '=30 is arranged).
For the error of linear fit in location confirmation, fitting parameter slope k and intercept b are quasi- to subsequent nonlinear curve
Conjunction has an impact.Refering to what is shown in Fig. 7, when slit location is confirmed, when mono- timing of l, being calculated when k is ± 1% by taking slit as an example
Hunting range in variation when, thus the match value situation of change of σ confirms influence of the k to σ.When slope k is a certain optimal value
When, i.e., when fitting a straight line is completely coincident with slit or edge or is parallel, optimal σ match value will be obtained；The variation of intercept b only can
The position of projection centre is influenced, and σ is unrelated with center, thus b variation can not considered.
Refering to what is shown in Fig. 8, inclination angle is that 27.6 ° of slit is tested, and l '=100 is arranged, initial linear when using σ=0.6
Fit slope k=0.5224, the value for adjusting k change in the range of ± 1%, and b is constant, and Fig. 8 (a) is σ bent with the variation of k
Line, Fig. 8 (b) are change curve of the curve matching residual error R with k, know that σ, R have the change of an approximate conic section with k in figure
Change relationship, when k variation 1%, caused σ maximum changing value is 2.6%.However, the error of linear fit k will be well below
1%, the changing value of σ, R substantially reduce.
In conclusion the optical system passes sequentially through side defocus position, focal position in adjustment method of the invention
It is synchronous to carry out Image Acquisition to other side defocus position, image series are obtained, imaging capability point is carried out to the image series
Analysis successively carries out linear fit, curve matching, obtains optimal spread function, so that it is determined that the optimal imaging essence of optical system
Degree.Calculation method of the invention does not need really to adjust optical system and focal plane distance to optimal imaging position, it is only necessary to
Minimum position mobile accuracy is close to depth of focus and all focussing distances cover pinpointed focus, can calculate optimal imaging ability,
Final error is small.
Although the invention has been described by way of example and in terms of the preferred embodiments, but it is not for limiting the present invention, any this field
Technical staff without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this hair
Bright technical solution makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, and according to the present invention
Technical spirit any simple modifications, equivalents, and modifications to the above embodiments, belong to technical solution of the present invention
Protection scope.
Claims (10)
1. a kind of adjustment method of optical system characterized by comprising
It adjusts optical platform and the object of infinity is imaged onto detector array, the object is the straight of brightness uniformity distribution
Line；
The optical system is transferred to the defocus position closest to detector array, carries out Image Acquisition；
The optical system is gradually moved far from detector array, the optical system pass sequentially through focal position to the other side from
Burnt position, it is synchronous to carry out Image Acquisition, obtain the image series of the object；
Imaging capability analysis is carried out to the image series, determines the optimal imaging precision of optical system.
2. the adjustment method of optical system according to claim 1, which is characterized in that be imaged to image and carry out imaging analysis
The step of include:
The image of the object is negated, the target area of rectangle is intercepted；
Obtain the linear fit function of target object image: y=kx+b；
Pixel around linear fit function is projected to linear fit function, projector distance is calculated, using gray value as the longitudinal axis,
Pixel projector distance is horizontal axis, obtains data and curves；
Spread function is gone out to curve-fitting data: Determine optical system
Optimal imaging precision.
3. the adjustment method of optical system according to claim 2, which is characterized in that the image and target of the object
The intersection point in region is located on the vertical both sides of rectangle.
4. the adjustment method of optical system according to claim 2, which is characterized in that object in the target area of interception
Length 100 column more than.
5. the adjustment method of optical system according to claim 2, which is characterized in that the spread function becomes through Fourier
It changes and normalizes the modulation transfer function for obtaining optical system.
6. the adjustment method of optical system according to claim 2, which is characterized in that A is amplitude in spread function, and m is
Central point, σ are standard deviation, and a0 is constant, and for eliminating the homogeneous background in image, a1 is coefficient of first order, for eliminating figure
Gradual change background as in.
7. the adjustment method of optical system according to claim 1, which is characterized in that by image series curve matching outlet
Spread function or edge spread function carry out imaging capability analysis.
8. the adjustment method of optical system according to claim 1, which is characterized in that the object be slit, edge,
Grating.
9. the adjustment method of optical system according to claim 1, which is characterized in that the object and detector array
At an angle, the object and detector array are in 0 °~90 ° in direction.
10. a kind of debugging apparatus of optical system characterized by comprising
Optical platform is located at optical system to be measured and detector array on optical platform；
Parallel light tube, the object above parallel light tube, light source；
Control platform is connect with optical platform, detector array, and for controlling optical platform and detector array；
Using the adjustment method as described in any one of claim 1~9, the optimal imaging essence of the optical system is determined
Degree.
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Application publication date: 20190528 |