CN109108843A - 一种陶瓷砂轮 - Google Patents

一种陶瓷砂轮 Download PDF

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Publication number
CN109108843A
CN109108843A CN201810966272.5A CN201810966272A CN109108843A CN 109108843 A CN109108843 A CN 109108843A CN 201810966272 A CN201810966272 A CN 201810966272A CN 109108843 A CN109108843 A CN 109108843A
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China
Prior art keywords
abrasive
pore creating
bonding agent
weight
ptfe
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CN201810966272.5A
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English (en)
Inventor
刘宏伟
吕升东
刘星星
岳家兴
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SHENYANG ZONGKE SUPERHARD GRINDING TOOL GRINDING RESEARCH INSTITUTE
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SHENYANG ZONGKE SUPERHARD GRINDING TOOL GRINDING RESEARCH INSTITUTE
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Priority to CN201810966272.5A priority Critical patent/CN109108843A/zh
Publication of CN109108843A publication Critical patent/CN109108843A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本发明公开一种陶瓷砂轮,工作磨料层成分按重量比为磨料45‑55、结合剂25‑35、临时粘结剂4‑6、造孔剂13‑15；所述造孔剂为聚四氟乙烯(PTFE)、聚酰亚胺(PI)、双马来酰亚胺(BMI)、聚乙烯醇(PVA)、聚乙烯醇缩丁醛(PVB)、聚碳酸酯(PC)中的两种或两种以上。本发明的优点：可将耐磨性能大幅度提高，在各种晶圆的加工中，还可将晶圆的磨削质量大幅度提高。

Description

一种陶瓷砂轮
技术领域：
本发明是用于硅片、蓝宝石及半导体等各种晶圆加工的陶瓷结合剂超硬磨料砂轮。
背景技术：
砂轮是磨削加工中最主要的一类磨具，依结合剂种类可以分为树脂砂轮、陶瓷砂轮、金属砂轮和电镀砂轮。其中陶瓷砂轮因为锋利性好，寿命长且不用修整而被应用晶圆的加工。
随着近些年技术的发展，各种晶圆的品质不断提高，并且要求降低加工成本，已知的技术已经没办法满足生产的需要，就需要磨削性能更好的陶瓷结合剂砂轮。
砂轮要有一定的气孔以利于排屑和冷却，通常在配方中加入核桃壳等有机造孔剂，这些物质可以在低温下通过蒸发，升华或燃烧从生坯中除去。单一的造孔剂烧制时的燃烧产物和分解产物在较窄的温度区间内释放，温度范围窄，产生的气体容易对生胚造成损伤。
发明内容
针对与上述问题，本发明是为了提供更耐磨损、磨削质量更好的陶瓷结合剂砂轮。在陶瓷结合剂砂轮超硬磨料砂轮方面，不受传统技术的束缚，采用多种有机物混合作为造孔剂，并使用独特的配方体系改进结合剂强度。其目的在于将燃烧产物和分解产物释放区间放宽，减少气体对生胚冲击；为增加砂轮强度，本发明提供独特的配方体系。
本发明的技术方案如下：
一种陶瓷砂轮,工作磨料层成分按重量比为磨料45-55、结合剂25-35、临时粘结剂4-6、造孔剂13-15；
所述磨料成分为金刚石；
所述结合剂成分按重量比为:SiO245-80,，Al2O35-25，B2O310-30，CaO0-6，Na2O0-15，Y2O30-3；
所述临时粘结剂成分为聚乙烯醇(PVA)；
所述造孔剂为聚四氟乙烯(PTFE)、聚酰亚胺(PI)、双马来酰亚胺(BMI)、聚乙烯醇(PVA)、聚乙烯醇缩丁醛(PVB)、聚碳酸酯(PC)中的两种或两种以上。
制备步骤如下：
1.将磨料、结合剂、临时粘结剂、造孔剂按配方进行称量；
2.将称量好的物料混合直至均匀；
3.将混合好的物料按设定的重量称取，填充于成型磨具；
4.施加压力，初次成型。
5.室温下存放48h以上，干燥湿胚；
6.电阻炉烧结，烧结温度保持在750-900℃范围之内，烧结时间18-25分钟；
7.将烧结好的砂轮加工成设计的尺寸，完成砂轮制造。
本发明的优点：可将耐磨性能大幅度提高，在各种晶圆的加工中，还可将晶圆的磨削质量大幅度提高。
具体实施方式
1.将磨料、结合剂、临时粘结剂、造孔剂按配方进行称量；
2.将称量好的物料混合直至均匀；
3.将混合好的物料按设定的重量称取，填充于成型磨具；
4.施加压力，初次成型。
5.室温下存放48h以上，干燥湿胚；
6.电阻炉烧结，烧结温度保持在750-900℃范围之内，烧结时间18-25分钟；
7.将烧结好的砂轮加工成设计的尺寸，完成砂轮制造。
按上述制造方法的结合剂、造孔剂组成表1，数值单位为wt％
表1
按重量比磨料45-55、结合剂25-35、临时粘结剂4-6、造孔剂13-15制备砂轮与用核桃壳作为造孔剂的砂轮比较，其参数如表2；
表2
由表2可见，采用本发明的配比及造孔剂，砂轮寿命及加工的光洁度均大幅提高，没有Y2O3的砂轮性能与添加的砂轮性能相比稍差。

Claims (2)

1.一种陶瓷砂轮,其特征在于：工作磨料层成分按重量比为磨料45-55、结合剂25-35、临时粘结剂4-6、造孔剂13-15；
所述磨料成分为金刚石；
所述结合剂成分按重量比为:SiO245-80,，Al2O35-25，B2O310-30，CaO0-6，Na2O0-15，Y2O30-3；
所述临时粘结剂成分为聚乙烯醇(PVA)；
所述造孔剂为聚四氟乙烯(PTFE)、聚酰亚胺(PI)、双马来酰亚胺(BMI)、聚乙烯醇(PVA)、聚乙烯醇缩丁醛(PVB)、聚碳酸酯(PC)中的两种或两种以上。
2.根据权利要求1所述的陶瓷砂轮,其特征在于制备步骤如下：
(1).将磨料、结合剂、临时粘结剂、造孔剂按配方进行称量；
(2).将称量好的物料混合直至均匀；
(3).将混合好的物料按设定的重量称取，填充于成型磨具；
(4).施加压力，初次成型。
(5).室温下存放48h以上，干燥湿胚；
(6).电阻炉烧结，烧结温度保持在750-900℃范围之内，烧结时间18-25分钟；
(7).将烧结好的砂轮加工成设计的尺寸，完成砂轮制造。
CN201810966272.5A 2018-08-23 2018-08-23 一种陶瓷砂轮 Pending CN109108843A (zh)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102071333A (zh) * 2010-12-20 2011-05-25 中南大学 一种制备泡沫TiAl金属间化合物的方法
CN102503531A (zh) * 2011-10-12 2012-06-20 景德镇陶瓷学院 一种采用球形和纤维状结构的复合造孔剂制备sofc阳极的方法
CN102837266A (zh) * 2012-08-29 2012-12-26 天津大学 一种双端面磨削用陶瓷结合剂立方氮化硼砂轮
CN102922436A (zh) * 2012-11-13 2013-02-13 北京安泰钢研超硬材料制品有限责任公司 金刚石砂轮及其制备方法
US8895139B2 (en) * 2003-03-27 2014-11-25 Robert Roberts Isotropic nano crystallites of polytetrafluoroethylene (PTFE) resin and products thereof that are biaxially planar oriented and form stable
CN104999383A (zh) * 2015-06-19 2015-10-28 白鸽磨料磨具有限公司 一种磨齿砂轮及其制备方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8895139B2 (en) * 2003-03-27 2014-11-25 Robert Roberts Isotropic nano crystallites of polytetrafluoroethylene (PTFE) resin and products thereof that are biaxially planar oriented and form stable
CN102071333A (zh) * 2010-12-20 2011-05-25 中南大学 一种制备泡沫TiAl金属间化合物的方法
CN102503531A (zh) * 2011-10-12 2012-06-20 景德镇陶瓷学院 一种采用球形和纤维状结构的复合造孔剂制备sofc阳极的方法
CN102837266A (zh) * 2012-08-29 2012-12-26 天津大学 一种双端面磨削用陶瓷结合剂立方氮化硼砂轮
CN102922436A (zh) * 2012-11-13 2013-02-13 北京安泰钢研超硬材料制品有限责任公司 金刚石砂轮及其制备方法
CN104999383A (zh) * 2015-06-19 2015-10-28 白鸽磨料磨具有限公司 一种磨齿砂轮及其制备方法

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