Preparation facilities of high depth-diameter ratio micropore
Technical Field
The invention relates to the field of high-precision photoelectronic device processing, in particular to a device for preparing micropores with high depth-diameter ratio.
Background
the rapid development of the manufacturing industry of the Chinese optoelectronic device is realized, the yield of the product is broken through under the stimulation that the requirements of the application fields such as optical communication, optical display and the like are continuously expanded, the yield of the Chinese optoelectronic device is broken through by 1100 hundred million in 2010, meanwhile, the overall technical level of the industry is further improved, and the gap between the industry and the internationally developed countries is gradually reduced; in addition, the industry has gradually emerged a group of leading enterprises with strong competitive power, such as Wuhan optical communication, Hua Gong technology, Jing east, and the like.
In recent years, with the integration and miniaturization of optoelectronic devices, the demand for miniaturization of unit elements is increasing, and micropores are one of the basic configurations of unit elements, and many core components thereof require that the pore diameter of the micropores is small and the depth-diameter ratio is large, so that the performance of the devices is effectively improved and even breakthrough development is made.
At present, the preparation of micropores by using single femtosecond pulse laser is a commonly adopted technical means at present, but with the increase of the depth of the micropores, residues generated in a preparation mode and a preparation process in the prior art are more and more difficult to discharge, so that the depth of the micropores prepared by using pulses is limited, and the situation of the limited depth of the micropores causes that the technology cannot be widely applied in the fields of aerospace, energy sources, biomedicine, photoelectron microfluidic devices, national defense and the like.
Disclosure of Invention
The invention mainly aims to overcome the defects of the prior art and provide a preparation device of micropores with high depth-diameter ratio.
The invention is realized by adopting the following technical scheme: a device for preparing micropores with high depth-diameter ratio structurally comprises an external protective shell, a workpiece conveying and cleaning box, a master control transmission box and a slag cleaning transmission air box, wherein the external protective shell is connected below a control transmission motor in a riveting mode through bolts, the workpiece conveying and cleaning box is embedded at the bottom end inside the external protective shell, the master control transmission box is embedded above the workpiece conveying and cleaning box, the slag cleaning transmission air box is vertically welded to the inner wall of the external protective shell, the external protective shell is provided with bottom supporting legs, a control transmission motor, a motor control main shaft, a punching device movable groove, a workpiece inlet and a workpiece outlet, the bottom supporting legs are connected to four opposite corners of the bottom of the external protective shell in a riveting mode through bolts, the control transmission motor is connected above the external protective shell in a riveting mode through bolts, the motor control main shaft is connected between the control transmission motor and the external protective shell through threaded engagement, the punching device movable groove is embedded in the inner wall of the external protective shell, the workpiece inlet is embedded in the side surface of the external protective shell, and the workpiece discharge opening is embedded in the other side surface of the external protective shell; the workpiece conveying and cleaning box is provided with workpiece conveying rollers, a residue cleaning filter screen and a bottom residue collecting box, the workpiece conveying rollers are uniformly meshed with the upper surface of the workpiece conveying and cleaning box at equal intervals through threads, the residue cleaning filter screen is embedded between the workpiece conveying and cleaning box and the master control transmission box, and the bottom residue collecting box is embedded inside the workpiece conveying and cleaning box; the master control transmission case is provided with a circuit control mechanism, a transmission gear set device and a punching control device, the circuit control mechanism is connected above the punching device in a riveting mode through a bolt, the circuit control mechanism is connected on the inner wall of an external protective shell in a riveting mode through a bolt, the transmission gear set device is connected on the inner wall of the external protective shell in a threaded engagement mode, and the punching control device is connected on the same horizontal plane in a riveting mode through a bolt and a transmission gear set device; the slag removal transmission bellows is provided with a vacuum cleaning pump, and the vacuum cleaning pump is connected to the inner wall of the slag removal transmission bellows through bolts in a riveting mode.
preferably, the bottom residue collecting box is provided with a cleaning box main body and a cleaning box movable guide rail, the cleaning box main body is embedded in the workpiece conveying and cleaning box through the cleaning box movable guide rail, and the cleaning box movable guide rail is connected to two sides of the cleaning box main body in a riveting mode through bolts.
As optimization, the circuit control mechanism is provided with a circuit starting push rod, a reset spring, a spring fixing rod, a pull wire fixing ring, a small transmission pulley, a transmission pull wire, a control balance supporting rod and a balance rod rotating shaft, the circuit starting push rod is embedded on the outer wall of the master control transmission box, and the reset spring is connected between the spring fixing rod and the master control transmission box.
Preferably, the spring fixing rod is vertically welded to two sides of the circuit starting push rod, the traction wire fixing ring is vertically welded to one end of the circuit starting push rod, and the small transmission pulley is connected to the inner wall of the master control transmission box through a bolt in a riveting mode.
Preferably, the transmission traction wire is connected between the traction wire fixing ring and the control balance supporting rod, the control balance supporting rod is connected to the balance rod rotating shaft through threaded engagement, and the balance rod rotating shaft is connected between the control balance supporting rod and the master control transmission box through bolt riveting.
Preferably, the transmission gear set device is provided with a transmission large gear, a gear transmission belt, a transmission small gear and a transmission traction push rod, and the transmission large gear is connected to the inner wall of the master control transmission box through threaded engagement.
Preferably, the gear conveyor belt is connected between the transmission large gear and the transmission small gear, the transmission small gear is connected below the transmission large gear through threaded engagement, and the transmission traction push rod is connected between the transmission small gear and the punching control device through bolt riveting.
As optimization, the punching control device is provided with a fixed rotating shaft, a movable fixed plate, a telescopic folding supporting rod, a movable limiting groove, a punching head connecting supporting rod and a punching head device, the fixed rotating shaft is connected between the movable fixed plate and the master control transmission case through bolt riveting, and the movable fixed plate is connected on the inner wall of the master control transmission case through bolt riveting.
As optimization, flexible folding branch passes through the screw-thread engagement and connects between fixed rotating shaft and the first connecting strut that punches, activity spacing groove inlays and locates on the movable fixed plate, the first connecting strut that punches passes through the bolt riveting and connects between flexible folding branch and the first device that punches, the first device that punches connects in the first connecting strut below that punches through the screw-thread engagement.
Advantageous effects
When the manufacturing device for the micropores with the high depth-diameter ratio works, the circuit control mechanism is arranged, the circuit control mechanism is provided with a circuit starting push rod, a reset spring, a spring fixing rod, a traction wire fixing ring, a small transmission pulley, a transmission traction wire, a control balance supporting rod and a balance rod rotating shaft, the push rod is started by pressing the circuit, so that the transmission traction wire is driven to pull the control balance supporting rod to lose balance, the control over the transmission gear set device is separated, and the transmission gear set device works; the punching control device is provided with a transmission gear set device which is provided with a transmission large gear, a gear conveyor belt, a transmission small gear and a transmission traction push rod, and when the transmission large gear drives the transmission small gear to rotate, the transmission traction push rod is driven to horizontally reciprocate, so that the punching control device is pushed to work; the punching control device is provided with a fixed rotating shaft, a movable fixed plate, a telescopic folding supporting rod, a movable limiting groove, a punching head connecting supporting rod and a punching head device, and the telescopic folding supporting rod is pulled to fold and unfold for repeated work under the driving of a transmission traction push rod, so that the punching head connecting supporting rod is driven to move up and down on the movable limiting groove, and the punching head device is driven to move up and down rapidly to punch; through being equipped with a work piece conveying cleaning box, work piece conveying cleaning box is equipped with work piece conveying running roller, residue clearance filter screen, bottom residue collecting box, under the condition of circuit intercommunication, carries out the work piece conveying through work piece conveying running roller, and starting circuit control mechanism carries out processing work simultaneously, and the work piece is conveyed residue clearance filter screen after accomplishing the processing on, the rethread vacuum cleaning pump carries out the residue clearance work.
Compared with the prior art, the invention has the beneficial effects that: can be through the work of controlling inside drive mechanism to control the processing mechanism that punches, the slag cleaning device carries out work in step simultaneously with this, is convenient for clear up the residue in the micropore fast after punching the completion, and it is convenient fast look, improves production machining efficiency.
drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of a device for preparing a micro-hole with a high aspect ratio according to the present invention.
FIG. 2 is a schematic structural diagram of a manufacturing apparatus of a high aspect ratio micro-hole according to the present invention in a working state.
Fig. 3 is a schematic structural diagram of the circuit control mechanism in a static state.
Fig. 4 is a schematic structural diagram of the circuit control mechanism in a working state.
FIG. 5 is a schematic structural diagram of the punching control device of the present invention in a static state.
Fig. 6 is a schematic structural view of the punching control device of the present invention in a working state.
In the figure: the device comprises an external protective shell 1, a workpiece conveying and cleaning box 2, a master control transmission box 3, a slag cleaning transmission bellows 4, bottom supporting feet 10, a control transmission motor 11, a motor control main shaft 12, a perforating device movable groove 13, a workpiece inlet 14, a workpiece discharge opening 15, a workpiece conveying roller 20, a residue cleaning filter screen 21, a bottom residue collecting box 22, a cleaning box main body 220, a cleaning box movable guide rail 221, a circuit control mechanism 30, a circuit starting push rod 300, a reset spring 301, a spring fixing rod 302, a pull wire fixing ring 303, a transmission small pulley 304, a transmission pull wire 305, a control balance support rod 306, a balance rod rotating shaft 307, a transmission gear assembly 31, a transmission large gear 310, a gear transmission belt 311, a transmission small gear 312, a transmission pulling push rod 313, a perforating control device 32, a fixed rotating shaft 320, a movable fixing plate 321, a telescopic folding support rod 322, a movable limiting groove 323, The perforating head is connected with the support rod 324, the perforating head device 325 and the vacuum cleaning pump 40.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
referring to fig. 1-6, the present invention provides a technical solution of a device for preparing a micro-hole with a high depth-to-diameter ratio: the structure of the device comprises an external protective shell 1, a workpiece conveying and cleaning box 2, a master control transmission box 3 and a slag cleaning transmission air box 4, wherein the external protective shell 1 is connected below a control transmission motor 11 in a riveting manner through bolts, the workpiece conveying and cleaning box 2 is embedded at the bottom end inside the external protective shell 1, the master control transmission box 3 is embedded above the workpiece conveying and cleaning box 2, the slag cleaning transmission air box 4 is vertically welded on the inner wall of the external protective shell 1, the external protective shell 1 is provided with bottom supporting legs 10, a control transmission motor 11, a motor control main shaft 12, a punching device movable groove 13, a workpiece inlet 14 and a workpiece discharge opening 15, the bottom supporting legs 10 are connected to four opposite corners at the bottom of the external protective shell 1 in a riveting manner through bolts, the control transmission motor 11 is connected above the external protective shell 1 in a riveting manner through bolts, the motor control main shaft 12 is connected between the control transmission motor 11 and the external protective, the punching device movable groove 13 is embedded in the inner wall of the external protective shell 1, the workpiece inlet 14 is embedded in the side surface of the external protective shell 1, and the workpiece discharge opening 15 is embedded in the other side surface of the external protective shell 1; the workpiece conveying and cleaning box 2 is provided with a workpiece conveying roller wheel 20, a residue cleaning filter screen 21 and a bottom residue collecting box 22, the workpiece conveying roller wheel 20 is uniformly meshed with the upper surface of the workpiece conveying and cleaning box 2 at equal intervals through threads, the residue cleaning filter screen 21 is embedded between the workpiece conveying and cleaning box 2 and the master control transmission box 3, and the bottom residue collecting box 22 is embedded inside the workpiece conveying and cleaning box 2; the master control transmission case 3 is provided with a circuit control mechanism 30, a transmission gear assembly device 31 and a punching control device 32, the circuit control mechanism 30 is connected above the punching device 32 through bolts in a riveting manner, the circuit control mechanism 30 is connected on the inner wall of the external protective shell 1 through bolts in a riveting manner, the transmission gear assembly device 31 is connected on the inner wall of the external protective shell 1 through threaded engagement, and the punching control device 32 is connected on the same horizontal plane through bolts and the transmission gear assembly device 31 in a riveting manner; the slag removal transmission bellows 4 is provided with a vacuum cleaning pump 40, the vacuum cleaning pump 40 is connected to the inner wall of the slag removal transmission bellows 4 through bolt riveting, the bottom slag collection box 22 is provided with a cleaning box main body 220 and a cleaning box movable guide rail 221, the cleaning box main body 220 is embedded in the workpiece conveying cleaning box 2 through the cleaning box movable guide rail 221, the cleaning box movable guide rail 221 is connected to two sides of the cleaning box main body 220 through bolt riveting, the circuit control mechanism 30 is provided with a circuit starting push rod 300, a reset spring 301, a spring fixing rod 302, a pull wire fixing ring 303, a small transmission pulley 304, a transmission pull wire 305, a control balance support rod 306 and a balance rod rotating shaft 307, the circuit starting push rod 300 is embedded on the outer wall of the master control transmission box 3, the reset spring 301 is connected between the spring fixing rod 302 and the control transmission box 3, the spring fixing rod 302 is vertically welded to two sides of the circuit starting push rod 300, and the pull wire fixing ring 303 is vertically welded to two sides of the circuit One end of a circuit starting push rod 300, the small transmission pulley 304 is connected to the inner wall of the master control transmission box 3 through a bolt in a riveting manner, the transmission pull wire 305 is connected between the pull wire fixing ring 303 and the control balance supporting rod 306, the control balance supporting rod 306 is connected to the balance rod rotating shaft 307 through a thread meshing manner, the balance rod rotating shaft 307 is connected between the control balance supporting rod 306 and the master control transmission box 3 through a bolt in a riveting manner, the transmission gear set device 31 is provided with a large transmission gear 310, a gear transmission belt 311, a small transmission gear 312 and a transmission pull push rod 313, the large transmission gear 310 is connected to the inner wall of the master control transmission box 3 through a thread meshing manner, the gear transmission belt 311 is connected between the large transmission gear 310 and the small transmission gear 312, the small transmission gear 312 is connected below the large transmission gear 310 through a thread meshing manner, and the transmission pull push rod 313 is connected between the, punch controlling means 32 and be equipped with fixed pivot 320, activity fixed plate 321, flexible folding branch 322, activity spacing groove 323, punch first connecting strut 324, punch first device 325, fixed pivot 320 passes through the bolt riveting and connects between activity fixed plate 321 and total control transmission case 3, activity fixed plate 321 passes through the bolt riveting and connects on total control transmission case 3 inner wall, flexible folding branch 322 is connected between fixed pivot 320 and punch first connecting strut 324 through the screw-thread engagement, activity spacing groove 323 inlays and locates on activity fixed plate 321, punch first connecting strut 324 passes through the bolt riveting and connects between flexible folding branch 322 and punch first device 325, punch first device 325 connects in punch first connecting strut 324 below through the screw-thread engagement.
When using, carry out the work piece conveying through work piece conveying running roller 20, make drive gear set 31 carry out work through starting circuit control mechanism 30 to drive punching control device 32 and carry out work, punch work from top to bottom, work piece conveying running roller 20 will punch the processing and accomplish conveys on residue clearance filter screen 21, the rethread vacuum cleaning pump 40 carries out the residue clearance, the residue that the clearance was come out falls into bottom residue collecting box 22, carry out the residue and collect.
Compared with the prior art, the invention has the technical progress that: can be through the work of controlling inside drive mechanism to control the processing mechanism that punches, the slag cleaning device carries out work in step simultaneously with this, is convenient for clear up the residue in the micropore fast after punching the completion, and it is convenient fast look, improves production machining efficiency.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.