CN109066281A - Controllable passive Q-adjusted ultraviolet laser - Google Patents
Controllable passive Q-adjusted ultraviolet laser Download PDFInfo
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- CN109066281A CN109066281A CN201811087986.5A CN201811087986A CN109066281A CN 109066281 A CN109066281 A CN 109066281A CN 201811087986 A CN201811087986 A CN 201811087986A CN 109066281 A CN109066281 A CN 109066281A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094076—Pulsed or modulated pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1312—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
Abstract
A kind of controllable passive Q-adjusted ultraviolet laser, including pumping component, focus pack, resonant component, laser crystal, passive Q-adjusted crystal, two frequency-doubling crystals and frequency tripling crystal；Pumping component includes the first pump laser；Resonant component includes preceding end mirror, turning mirror and tail end mirror；Preceding end mirror, fold mirror and tail end microscope group are at laser resonator；First pump laser exports pulse pump light；Laser crystal, passive Q-adjusted crystal, two frequency-doubling crystals and frequency tripling crystal are in laser resonator；The pulse pump light for meeting pump power requirement, which enters, forms population inversion in laser crystal, passive Q-adjusted, frequency multiplication and and the successively effect of frequency effect under generate 355nm pulsed ultraviolet laser and be output to outside laser resonator through turning mirror.By under the frequency limit of the first pump laser, the stable 355nm pulsed ultraviolet laser of controllable passive Q-adjusted ultraviolet laser output pulse frequency.
Description
Technical field
The present invention relates to laser technology fields, more particularly to a kind of controllable passive Q-adjusted ultraviolet laser.
Background technique
Laser is one of the invention of great significance in modern science technology, wherein the 5532nm laser of end pumping is applied to cold
Manufacture field, the application value in nonmetallic and Precision Machining are especially prominent.Acquisition beam quality is excellent, and parameter is controllable,
And the ultraviolet laser of the long-acting stable operation of energy, it is significant to growing laser processing industry.End pumping is to compare conjunction
Suitable mode, but the ultraviolet solid-state laser of general single end face pump uses actively Q-switched (acousto-optic Q modulation, electric light tune on the market
Q etc.) mode, need to use two Q driving, Q crystal high price devices, cost is more high.Using passive Q-adjusted laser
In device, due to adjusting Q to belong to passively, pulsed laser output generally can not carry out active control by control circuit, inevitably pump at one
The train of pulse of multiple pulse compositions is generated in the period of Pu, and then influences pulse peak power, the umber of pulse exported in the unit time
There are certain unstability.Since output pulse frequency can not be adjusted actively；And in practical applications, substantially using sweeping
Retouching galvanometer moves laser along certain track, is processed by the mode that pulse is got ready, and point spacing is between pulse
Every the time multiplied by scanning speed, unstable will cause in pulse spacing is got ready uneven, and the fluctuation of frequency will also result in multiple spot
The case where putting less, so there are certain drawbacks in industrial application for traditional passive Q-adjusted laser.
Summary of the invention
Based on this, it is necessary to for the unstable problem of the pulse frequency of passive Q-regulaitng laser output, provide a kind of controllable
Passive Q-adjusted ultraviolet laser.
A kind of controllable passive Q-adjusted ultraviolet laser, comprising: pumping component, focus pack, resonant component, laser crystal,
Passive Q-adjusted crystal, two frequency-doubling crystals and frequency tripling crystal；The pumping component includes the first pump laser；The resonance group
Part includes preceding end mirror, turning mirror and tail end mirror；The preceding end mirror is correspondingly arranged with the focus pack；The preceding end mirror plating 808/
880nm is anti-reflection and 1064nm high-reflecting film；Turning mirror plating 1064nm is all-trans film；The tail end mirror plating 1064nm and 532nm is complete
Anti- film；The preceding end mirror, the turning mirror and the tail end microscope group are at laser resonator；The laser crystal and described passive
Adjusting Q crystal is arranged between the preceding end mirror and the turning mirror, and two frequency-doubling crystal and frequency tripling crystal are arranged described
Between turning mirror and the tail end mirror；First pump laser is with the first preset frequency output wavelength 808nm's or 880nm
Pulse pump light；The pulse pump light focuses in the laser crystal through the focus pack；Meet pump power requirement
The pulse pump light enter the laser crystal in formed population inversion after, the laser resonator interior resonance amplify
The 1064nm infrared laser continuously run is formed, and the passive Q-adjusted crystal adjusts the 1064nm infrared laser continuously run
For the 1064nm infrared laser of pulse operating, 1064nm pulsed infrared laser light generates frequency-doubled effect when passing through the frequency-doubling crystal,
Part 1064nm pulsed infrared laser light is converted to 532nm pulse green light, part 532nm pulse green light and remaining 1064nm light
It is totally reflected together by the tail end mirror, again through the frequency-doubling crystal；Decline 532nm green laser with it is remaining
1064nm pulsed infrared laser light carries out in the frequency tripling crystal and frequency, generates 355nm pulsed ultraviolet laser；The frequency tripling
Crystal output end is cut using Brewster angle, by remaining 1064nm infrared laser, 532nm green laser and 355nm ultraviolet pulse
Laser separates；355nm ultraviolet pulse laser is output to outside the laser resonator.
Above-mentioned controllable passive Q-adjusted ultraviolet laser exports pulse pump light by the first pump laser, pumps meeting
Under the power requirement of Pu, the energy of pulse pump light is absorbed by laser crystal, forms population inversion, and the 1064nm of pulse operating is red
Outer laser exports 355nm ultraviolet pulse laser, drops in pulse pump light under two frequency-doubling crystals and the effect of frequency tripling crystal
After under pump power requirement, since laser crystal can not absorb enough pump energies, to stop 355nm ultraviolet pulse
Laser output, under the frequency limit of the first pump laser, the laser output frequency of controllable passive Q-adjusted ultraviolet laser with
First preset frequency keeps synchronizing, and the stable 532nm pulse green laser of output pulse frequency enables the energy in a pumping cycle
Amount is locked in single 355nm UV laser pulses, guarantees the pulse peak power of controllable passive Q-adjusted ultraviolet laser.
It in one of the embodiments, further include the first driving power；The pumping component further includes the second pumping laser
Device and bundling device；First driving power exports pulsed drive current to first pump laser；Second pumping
Laser generates the second constant pump light, and the power level of the second constant pump light and the threshold value of the laser resonator pump
Pu power is corresponding；The described second constant pump light that second pump laser generates passes through bundling device and first pumping
Beam pump light, the conjunction beam pump are closed in the pulse pump light and carry out conjunction beam that laser generates, the output end output of the bundling device
Pu light line focus component focuses in the laser crystal, and population inversion is formed in the laser crystal；When the conjunction beam pumps
When the power of Pu light is greater than the threshold pump power of the laser resonator, the intracavitary generation 1064nm pulse of laser resonance is red
Outer laser generates 532nm pulse green light, 532nm pulse green light and 1064nm light and frequency under the action of the frequency-doubling crystal,
355nm pulsed ultraviolet laser is generated, and is output to outside laser resonator.
It in one of the embodiments, further include optical fiber component, the optical fiber component includes, the first transmission fiber, second
Transmission fiber and third transmission fiber；It is defeated that the bundling device is equipped with the first pumping input terminal, the second pumping input terminal and conjunction beam
Outlet；The pulse pump light of the first pump laser output is transmitted to the bundling device by first transmission fiber
Second constant pump light of the first pumping input terminal, the second pump laser output is transmitted by second transmission fiber
To the second pumping input terminal of the bundling device, the conjunction beam output end of the bundling device is input to the third for beam pump light is closed
Transmission fiber；The output end of the third transmission fiber is corresponding with the focus pack.
The optical fiber component further includes export head in one of the embodiments, the export head and the focus pack
It is correspondingly arranged, the output end of the third transmission fiber is fixed in the export head.
It in one of the embodiments, further include the second driving power, second driving power is pumped to described second
Laser exports constant drive current.
The focal spot of the focus pack is inside the laser crystal in one of the embodiments, and with it is described
Laser crystal input end face is at a distance of the position of 1.8-2.2mm.
In one of the embodiments, the focus pack include the first plano-convex lens and with first plano-convex lens
The second plano-convex lens being correspondingly arranged.
The convex surface of first plano-convex lens is opposite with the convex surface of second plano-convex lens in one of the embodiments,
Setting.
The laser crystal is Nd:YVO4 crystal, Nd:YAG crystal or Nd:GdYVO4 brilliant in one of the embodiments,
Body.
The passive Q-adjusted crystal is Cr:YAG crystal in one of the embodiments,.
Detailed description of the invention
Fig. 1 is the structure chart of the controllable passive Q-adjusted ultraviolet laser of a preferred embodiment of the invention；
Fig. 2 is passive Q-adjusted ultraviolet laser controllable shown in Fig. 1 input pumping when being driven by the first pump laser
The relational graph of power and output 355nm ultraviolet pulse laser intensity；
Fig. 3 is that passive Q-adjusted ultraviolet laser controllable shown in Fig. 1 is generated when being passed through peak value and pumping source power
The waveform diagram of 355nm ultraviolet pulse laser；
Fig. 4 is the structure chart that passive Q-adjusted ultraviolet laser controllable shown in Fig. 1 is added after the second pump laser；
Fig. 5 is that passive Q-adjusted ultraviolet laser controllable shown in Fig. 2 passes through the first pump laser and the second pump laser
Pump power is inputted when driving and exports the relational graph of 355nm ultraviolet pulse laser intensity.
Specific embodiment
It to facilitate the understanding of the present invention, below will be to invention is more fully described.But the present invention can be to be permitted
Mostly different form is realized, however it is not limited to embodiment described herein.On the contrary, purpose of providing these embodiments is makes
It is more thorough and comprehensive to the understanding of the disclosure.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention
The normally understood meaning of technical staff is identical.Term as used herein in the specification of the present invention is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.
Fig. 1 to Fig. 5 is please referred to, for the controllable passive Q-adjusted ultraviolet laser 100 of a better embodiment of the invention, is used
Pulsed infrared laser output is generated in the resonant cavity by passive Q-adjusted 1.The controllable passive Q-adjusted ultraviolet laser 100 includes pump
Pu component, focus pack 30, resonant component, laser crystal 51, passive Q-adjusted crystal 52, two frequency-doubling crystals 53 and frequency tripling crystal
54；Pumping component includes the first pump laser 21；Resonant component includes preceding end mirror 41, turning mirror 42 and tail end mirror 43；Front end
Mirror 41 is correspondingly arranged with focus pack 30；The preceding plating of end mirror 41 808/880nm is anti-reflection and 1064nm high-reflecting film；Turning mirror 42 plates
1064nm is all-trans film；Tail end mirror 43 plates 1064nm and 532nm and is all-trans film；Preceding end mirror 41, turning mirror 42 and the composition of tail end mirror 43 swash
Optical cavity；Laser crystal 51 and passive Q-adjusted crystal 52 are arranged between preceding end mirror 41 and turning mirror 42, two frequency-doubling crystals 53 and
Frequency tripling crystal 54 is arranged between turning mirror 42 and tail end mirror 43, and is arranged by caudal part mirror 43；First pump laser 21
With the pulse pump light of the first preset frequency output wavelength 808nm or 880nm；Pulse pump light line focus component 30 focuses on sharp
In luminescent crystal 51；The pulse pump light for meeting pump power requirement enters in laser crystal 51 after formation population inversion, is swashing
Optical cavity interior resonance amplifies the 1064nm infrared laser to be formed and be continuously run, and passive Q-adjusted crystal 52 will be continuously run
1064nm infrared laser is adjusted to the 1064nm infrared laser of pulse operating, and 1064nm pulsed infrared laser light is by turning mirror 42 to tail
Frequency-doubled effect is generated when passing through frequency-doubling crystal during end mirror 43, part 1064nm pulsed infrared laser light is converted to 532nm pulse
Green light, part 532nm pulse green light and remaining 1064nm light are totally reflected together by tail end mirror 43, again through frequency multiplication
Crystal, another part 1064nm pulsed infrared laser light are converted into 532nm pulse green light；Decline 532nm green light with it is remaining
1064nm pulsed infrared laser light carries out in frequency tripling crystal 54 and frequency, generates 355nm pulsed ultraviolet laser；Frequency tripling crystal 54
Output end is cut using Brewster angle, and remaining 1064nm pulsed infrared laser light, 532nm pulse green laser and 355nm is ultraviolet
Pulse laser separates；355nm ultraviolet pulse laser is output to outside laser resonator, and 1064nm infrared laser continues in laser resonance
Intracavitary resonant operational.
Pulse pump light, in the case where meeting pump power requirement, pulse pump light are exported by the first pump laser 21
Energy is absorbed by laser crystal 51, forms population inversion, the 1064nm infrared laser of pulse operating in two frequency-doubling crystals 53 and
Under frequency tripling crystal 54 acts on, 355nm ultraviolet pulse laser is exported, is dropped under pump power requirement in pulse pump light
Afterwards, since laser crystal 51 can not absorb enough pump energies, to stop the output of 355nm ultraviolet pulse laser, the
Under the frequency limit of one pump laser 21, the laser output frequency of controllable passive Q-adjusted ultraviolet laser 100 is predetermined with first
Frequency keeps synchronizing, the stable 355nm ultraviolet pulse laser of output pulse frequency.
Please refer to figs. 2 and 3, the first preset frequency and laser crystal 51, passive Q-adjusted crystal 52, two frequency-doubling crystals 53, three
Frequency-doubling crystal 54 and laser resonator are corresponding, i.e., corresponding with the normal frequency of the optical pulse waveform of 355nm ultraviolet pulse laser to set
It sets；It specifically, is the first preset frequency for determining the first pump laser 21, according to controllable passive Q-adjusted ultraviolet laser 100
The pulse peak power of the 355nm ultraviolet pulse laser exported requires to determine peak value pumping source power P0, it is P by power invariability0
808nm or the constant pump light line focus component 30 of 880nm first focus laser crystal 51, into laser crystal 51 in formed
After population inversion, amplify the 1064nm infrared laser to be formed and be continuously run, passive Q-adjusted crystal 52 in laser resonator interior resonance
The 1064nm infrared laser continuously run is adjusted to the 1064nm infrared laser of pulse operating, in the frequency multiplication of two frequency-doubling crystals 53
Under effect effect, part 1064nm infrared laser is converted into 532nm pulse green light, and 532nm pulse green light and 1064nm are infrared sharp
Light carries out in frequency tripling crystal 54 and frequency, generates 355nm pulsed ultraviolet laser and exports to outside laser resonator；Pass through optical power
Meter and oscillograph, obtaining in power invariability is P0808nm or the constant pump light of 880nm first under the action of, controllable quilt
The dynamic optical pulse waveform for adjusting 355nm pulsed ultraviolet laser caused by Q ultraviolet laser 100, according to 355nm pulsed ultraviolet laser
Waveform, to can determine when not generating repetition pulse string, the normal cycle of the optical pulse waveform of 355nm pulsed ultraviolet laser
Or frequency；The normal cycle or frequency and pumping system, resonance cavity system phase of the optical pulse waveform of 355nm pulsed ultraviolet laser
It closes, specifically, size, the chamber length of resonant cavity, laser crystal 51, passive Q-adjusted crystalline substance of size, aggregation hot spot including pump power
Body 52, two frequency-doubling crystals 53 and type selecting of frequency tripling crystal 54 etc..
Fig. 4 and Fig. 5 is please referred to, in a wherein embodiment, controllable passive Q-adjusted ultraviolet laser 100 further includes
First driving power 61, for realize the first pump laser 21 pumping light power pulse regulation, the first driving power 61 to
First pump laser 21 exports pulsed drive current, by the adjusting of the input current to the first pump laser 21, thus
Realize the pulse regulation to the pumping light power of the first pump laser 21, specifically, pulsed drive current and the first driving electricity
The output power in source 61 is positively correlated；To reduce the performance requirement to the first driving power 61, reduce to the upper of pulsed drive current
It rises along time taOr failing edge time tbLimitation, pumping component further includes the second pump laser 22 and bundling device 23, the second pump
Pu laser 22 generates the second constant pump light, the power level of the second constant pump light and the pump for threshold value function of laser resonator
Rate is corresponding；The second constant pump light that second pump laser 22 generates is generated by bundling device 23 and the first pump laser 21
Pulse pump light carry out conjunction beam, beam pump light is closed in the output end output of bundling device 23, and it is poly- to close beam pump light line focus component 30
Coke forms population inversion in laser crystal 51 in laser crystal 51.
When the power for closing beam pump light is greater than the threshold pump power of laser resonator, passive Q-adjusted crystal 52 generates vibration
It swings, the intracavitary generation 1064nm pulsed infrared laser light of laser resonance, under the action of frequency-doubling crystal, generates 532nm pulse green light,
532nm pulse green light and 1064nm light and frequency generate 355nm pulsed ultraviolet laser, and are output to outside laser resonator；When conjunction beam
When the power of pump light is less than or equal to the threshold pump power of laser resonator, laser resonator is not up to oscillating condition, limit
The output of 355nm pulsed ultraviolet laser processed.
Fig. 2 and Fig. 5 is please referred to, since when pulsed drive current is in low value, the second pump laser 22 keeps output
Second constant pump light, when generating the pulse output of 355nm pulsed ultraviolet laser every time, the power for closing beam pump light is humorous from laser
The threshold pump power of vibration chamber is nearby begun to ramp up, and when pulse exports end cycle, the power for closing beam pump light drops to threshold
It is worth near pump power, in identical rising time taOr failing edge time tbUnder it is required that, it is defeated can to reduce by the first driving power 61
The current change rate that electric current rises or export during electric current decline out can subtract under the conditions of identical current change rate
Few rising time taOr failing edge time tbNumerical value limitation, to reduce to the performance requirement of the first driving power 61.
Specifically, the threshold pump power of laser resonator is that laser resonator exports facing for 355nm pulsed ultraviolet laser
Dividing value, when entering the power of pump light of laser resonator more than threshold pump power, laser resonator starts to export 355nm
Pulsed ultraviolet laser.
For determine the second pump laser 22 generate second it is constant pumping light when inputted constant drive current it is big
Small, the operation by stopping the first pump laser 21 exports, while the input current of the second pump laser 22 being opened from zero
Beginning gradually raises, while being detected using light power meter probe to the 355nm pulsed ultraviolet laser that laser resonator exports, when
When just detecting faint 355nm pulsed ultraviolet laser, the power of the second pump laser 22 output pump light can be confirmed
Reach the threshold pump power of laser resonator, the input current of the second pump laser 22 is by suitably lowering at this time
The constant drive current of corresponding input when as the second constant pumping light of the second pump laser 22 generation；Second constant pumping
The power of light is P1。
Referring to Fig. 4, in a wherein embodiment, to make the first pump laser 21 or the second pump laser 22
The pump light of generation reliably transmits, and controllable passive Q-adjusted ultraviolet laser 100 further includes optical fiber component, and optical fiber component includes, the
One transmission fiber 71, the second transmission fiber 72 and third transmission fiber 73；Bundling device 23 is equipped with the first pumping input terminal, second
It pumps input terminal and closes beam output end；The pulse pump light of first pump laser 21 output is passed by the first transmission fiber 71
The first pumping input terminal of bundling device 23 is transported to, the second constant pump light of the second pump laser 22 output passes through the second transmission
Optical fiber 72 is transmitted to the second pumping input terminal of bundling device 23, and the conjunction beam output end of bundling device 23 will close beam pump light and be input to the
Three transmission fibers 73；The output end of third transmission fiber 73 is corresponding with focus pack 30.
In a wherein embodiment, for the output end of fixed third transmission fiber 73, optical fiber component further includes output
First 74, export head 74 is correspondingly arranged with focus pack 30, and the output end of third transmission fiber 73 is fixed in export head 74.
In a wherein embodiment, to avoid the input current of the second pump laser 22 from being interfered, the is influenced
The stability of the input current of two pump lasers 22, controllable passive Q-adjusted ultraviolet laser 100 further includes the second driving power
62, the second driving power 62 exports constant drive current to the second pump laser 22.
In a wherein embodiment, more uniformly it is distributed, improves in laser crystal 51 to make to close beam pump light
The transfer efficiency of 808nm 880nm pump light, the focal spot of focus pack 30 is inside laser crystal 51, and and laser
51 input end face of crystal is at a distance of the position of 1.8-2.2mm, specifically, the focus point and 51 input terminal of laser crystal of focus pack 30
Face is at a distance of 2mm.
In a wherein embodiment, to make most of beam pumping luminous energy that closes focus on laser crystal 51, focus pack
30 include the first plano-convex lens 31 and the second plano-convex lens 32 being correspondingly arranged with the first plano-convex lens 31.
In a wherein embodiment, the convex surface of the first plano-convex lens 31 is opposite with the convex surface of the second plano-convex lens 32 to be set
It sets.
In a wherein embodiment, laser crystal 51 is Nd:YVO4 crystal, Nd:YAG crystal or Nd:GdYVO4 brilliant
Body.
In a wherein embodiment, passive Q-adjusted crystal 52 is Cr:YAG crystal.
Since the laser frequency of passive Q-adjusted generation is influenced by the doping concentration of passive Q-adjusted crystal 52, passive Q-adjusted crystal 52
Doping concentration it is excessively high, cause output laser frequency it is too low, be unfavorable for obtaining more multi-frequency laser output, passive Q-adjusted crystal
52 doping concentration is too low, will cause that output laser frequency is excessively high, and when excessively high electrical modulation electric current can then have electric current rise and fall
Time is more than the imbalance situation of modulation period, therefore, in a kind of wherein embodiment, the Cr as passive Q-adjusted crystal 52:
The doping concentration of YAG is 0.3~1at%, and 1064nm initial transmission is 1.06 μm of 5%~95%@, to obtain optimal
Laser frequency output effect；Specifically, two frequency-doubling crystals 53 are the crystal such as LBO, KDP or KTP；Frequency tripling crystal 54 be LBO or
BBO；355nm pulsed ultraviolet laser is polluted to reduce 532nm pulse green light, controllable passive Q-adjusted ultraviolet laser 100
It further include light barrier 80, light barrier 80 stops the 532nm pulse green laser exported from 54 output end of frequency tripling crystal,
To enable laser resonator export pure 355nm pulsed ultraviolet laser.
In the present embodiment, pulse pump light, in the case where meeting pump power requirement, pulse are exported by the first pump laser
The energy of pump light is absorbed by laser crystal, forms population inversion, the 1064nm infrared laser of pulse operating is in two frequencys multiplication crystalline substance
Under body and the effect of frequency tripling crystal, 355nm ultraviolet pulse laser is exported, is dropped under pump power requirement in pulse pump light
Afterwards, since laser crystal can not absorb enough pump energies, to stop the output of 355nm ultraviolet pulse laser, first
Under the frequency limit of pump laser, the laser output frequency and the first preset frequency of controllable passive Q-adjusted ultraviolet laser are protected
Synchronization is held, the stable 532nm pulse green laser of output pulse frequency enables the energy in a pumping cycle be locked in individually
In 355nm UV laser pulses, guarantee the pulse peak power of controllable passive Q-adjusted ultraviolet laser；Based on output pulse frequency
The stability of rate, controllable passive Q-adjusted ultraviolet laser are applied when scanning galvanometer is got ready along certain track, can ensure that and get ready
Uniformity.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
1. a kind of controllable passive Q-adjusted ultraviolet laser characterized by comprising pumping component, focus pack, resonant component,
Laser crystal, passive Q-adjusted crystal, two frequency-doubling crystals and frequency tripling crystal；The pumping component includes the first pump laser；Institute
Stating resonant component includes preceding end mirror, turning mirror and tail end mirror；The preceding end mirror is correspondingly arranged with the focus pack；The front end
Mirror plating 808/880nm is anti-reflection and 1064nm high-reflecting film；Turning mirror plating 1064nm is all-trans film；Tail end mirror plating 1064nm and
532nm is all-trans film；The preceding end mirror, the turning mirror and the tail end microscope group are at laser resonator；The laser crystal and institute
It states passive Q-adjusted crystal to be arranged between the preceding end mirror and the turning mirror, two frequency-doubling crystal and the setting of frequency tripling crystal
Between the turning mirror and the tail end mirror；First pump laser with the first preset frequency output wavelength 808nm or
The pulse pump light of 880nm；The pulse pump light focuses in the laser crystal through the focus pack；Meet pumping function
The pulse pump light that rate requires enters in the laser crystal after formation population inversion, intracavitary humorous in the laser resonance
Vibration amplification forms the 1064nm infrared laser continuously run, and the passive Q-adjusted crystal is infrared sharp by the 1064nm continuously run
Light is adjusted to the 1064nm infrared laser of pulse operating, and 1064nm pulsed infrared laser light generates frequency multiplication when passing through the frequency-doubling crystal
Effect, part 1064nm pulsed infrared laser light are converted to 532nm pulse green light, part 532nm pulse green light and remaining
1064nm light is totally reflected together by the tail end mirror, again through the frequency-doubling crystal；Decline 532nm green laser
It is carried out in the frequency tripling crystal with remaining 1064nm pulsed infrared laser light and frequently, generates 355nm pulsed ultraviolet laser；Institute
It states frequency tripling crystal output end to cut using Brewster angle, by remaining 1064nm infrared laser, 532nm green laser and 355nm
Ultraviolet pulse laser separates；355nm ultraviolet pulse laser is output to outside the laser resonator.
2. controllable passive Q-adjusted ultraviolet laser according to claim 1, which is characterized in that further include the first driving electricity
Source；The pumping component further includes the second pump laser and bundling device；First driving power swashs to first pumping
Light device exports pulsed drive current；Second pump laser generates the second constant pump light, the second constant pump light
Power level it is corresponding with the threshold pump power of the laser resonator；Described the second of the second pump laser generation
The pulse pump light and carry out conjunction beam, the bundling device that constant pump light is generated by bundling device and first pump laser
Output end output close beam pump light, the conjunction beam pump light line focus component focuses in the laser crystal, the laser
Population inversion is formed in crystal；When the power for closing beam pump light is greater than the threshold pump power of the laser resonator
When, the intracavitary generation 1064nm pulsed infrared laser light of laser resonance generates 532nm arteries and veins under the action of the frequency-doubling crystal
Green light, 532nm pulse green light and 1064nm light and frequency are rushed, generates 355nm pulsed ultraviolet laser, and be output to laser resonator
Outside.
3. controllable passive Q-adjusted ultraviolet laser according to claim 2, which is characterized in that it further include optical fiber component, institute
State optical fiber component include, the first transmission fiber, the second transmission fiber and third transmission fiber；The bundling device is equipped with the first pump
Pu input terminal, the second pumping input terminal and conjunction beam output end；The pulse pump light of the first pump laser output passes through institute
The first pumping input terminal that the first transmission fiber is transmitted to the bundling device is stated, the second of the second pump laser output is permanent
Determine the second pumping input terminal that pump light is transmitted to the bundling device by second transmission fiber, the conjunction beam of the bundling device
Output end is input to the third transmission fiber for beam pump light is closed；The output end of the third transmission fiber and the focusing group
Part is corresponding.
4. controllable passive Q-adjusted ultraviolet laser according to claim 3, which is characterized in that the optical fiber component also wraps
Export head is included, the export head is correspondingly arranged with the focus pack, and the output end of the third transmission fiber is fixed on described
In export head.
5. controllable passive Q-adjusted ultraviolet laser according to claim 2, which is characterized in that further include the second driving electricity
Source, second driving power export constant drive current to second pump laser.
6. controllable passive Q-adjusted ultraviolet laser according to claim 2, which is characterized in that the focus pack gathers
Focus is in inside the laser crystal, and with the laser crystal input end face at a distance of the position of 1.8-2.2mm.
7. controllable passive Q-adjusted ultraviolet laser according to claim 2, which is characterized in that the focus pack includes
First plano-convex lens and the second plano-convex lens being correspondingly arranged with first plano-convex lens.
8. controllable passive Q-adjusted ultraviolet laser according to claim 7, which is characterized in that first plano-convex lens
Convex surface and the convex surfaces of second plano-convex lens be oppositely arranged.
9. controllable passive Q-adjusted ultraviolet laser according to claim 1, which is characterized in that the laser crystal is Nd:
YVO4 crystal, Nd:YAG crystal or Nd:GdYVO4 crystal.
10. controllable passive Q-adjusted ultraviolet laser according to claim 1, which is characterized in that the passive Q-adjusted crystal
For Cr:YAG crystal.
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| CN201811087986.5A CN109066281A (en) | 2018-09-18 | 2018-09-18 | Controllable passive Q-adjusted ultraviolet laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110277726A (en) * | 2019-07-11 | 2019-09-24 | 长春新产业光电技术有限公司 | A kind of acousto-optic Q modulation ultraviolet laser |
| CN110277726B (en) * | 2019-07-11 | 2024-05-03 | 长春新产业光电技术有限公司 | Acousto-optic Q-switched ultraviolet laser |
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| CN104466653A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院半导体研究所 | Passive Q-switched laser pulse generation method capable of controlling repetition frequency |
| CN204809628U (en) * | 2015-06-19 | 2015-11-25 | 深圳联品激光技术有限公司 | Laser |
| JP2016136555A (en) * | 2015-01-23 | 2016-07-28 | 株式会社島津製作所 | Pulse laser device |
| CN205901062U (en) * | 2016-07-04 | 2017-01-18 | 深圳市杰普特光电股份有限公司 | End pump ultraviolet ray laser instrument |
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| CN104466653A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院半导体研究所 | Passive Q-switched laser pulse generation method capable of controlling repetition frequency |
| JP2016136555A (en) * | 2015-01-23 | 2016-07-28 | 株式会社島津製作所 | Pulse laser device |
| CN204809628U (en) * | 2015-06-19 | 2015-11-25 | 深圳联品激光技术有限公司 | Laser |
| CN205901062U (en) * | 2016-07-04 | 2017-01-18 | 深圳市杰普特光电股份有限公司 | End pump ultraviolet ray laser instrument |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110277726A (en) * | 2019-07-11 | 2019-09-24 | 长春新产业光电技术有限公司 | A kind of acousto-optic Q modulation ultraviolet laser |
| CN110277726B (en) * | 2019-07-11 | 2024-05-03 | 长春新产业光电技术有限公司 | Acousto-optic Q-switched ultraviolet laser |
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Application publication date: 20181221 |