CN109060607B - Compliant operation device based on visual feedback and liquid bridge force automatic detection method - Google Patents
Compliant operation device based on visual feedback and liquid bridge force automatic detection method Download PDFInfo
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- CN109060607B CN109060607B CN201810501668.2A CN201810501668A CN109060607B CN 109060607 B CN109060607 B CN 109060607B CN 201810501668 A CN201810501668 A CN 201810501668A CN 109060607 B CN109060607 B CN 109060607B
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Abstract
The invention discloses a compliant operation device and a liquid bridge force automatic detection method based on visual feedback, relating to an automatic detection technology of compliant operation of a micron-sized object, with the operation liquid drop that relies on passive acquireing in solving traditional capillary force operation process carries out passive operation, unable real-time detection, the problem of feedback liquid bridge power, it includes the motion control module, vision feedback module and end effector module, the shock insulation platform, the operation base, the motion control module includes x to the accurate electronic platform of triaxial, y to the accurate electronic platform of triaxial of manipulator, the vision feedback module includes x to the microscope, x is to microscope anchor clamps, y is to the microscope, y is to microscope anchor clamps, the end effector module includes executor accommodate motor, the connecting plate, the executor chuck, the chuck fixture, the condensing unit, the condensation executor, the condensation controller. The invention is used for the automatic real-time detection of the liquid bridge force based on vision in the compliant operation of the micron-sized object.
Description
Technical Field
The invention relates to an automatic detection technology of capillary force compliance operation, in particular to a compliance operation device based on visual feedback and an automatic liquid bridge force detection method.
Background
As a nondestructive micro-operation technology, the micro-object (0.1 mu m-1 mm) operation method based on the liquid bridge capillary force has operation flexibility, can effectively avoid local stress concentration caused by traditional mechanical clamping (clamping, vacuum adsorption and the like), avoids the damage of key characteristics of the micro-object, and is suitable for the grabbing of micro-objects in different shapes. The existing capillary force operation method is mainly divided into a single-needle type and a capillary type, wherein the single-needle type mainly utilizes a liquid medium obtained from the tail end of an operation probe to realize the grabbing of a micro object; the capillary type is to use the meniscus at the end of the capillary to grab the micro-object. In order to evaluate the picking capacity of the micro-object, the generated liquid bridge force needs to be calculated, a corresponding liquid bridge action model is established according to liquid bridge modes with different configurations (plane-spherical surface, plane-plane, spherical surface-spherical surface, plane-conical surface and the like), the liquid bridge force can be theoretically solved, and factors influencing the liquid bridge action force are analyzed. However, in the actual operation process based on the capillary force, neither the single-needle type operation method nor the capillary type operation method can observe the capillary force in the operation process in real time, and can not realize the real-time control of the operation liquid drop in the operation process, thereby limiting the further application development of the method. The image processing technology based on visual feedback is beneficial to acquiring the liquid bridge profile in real time, the mathematical equation of the liquid bridge profile can be acquired through processes such as binarization processing, angular point detection, profile fitting and the like, and a foundation is laid for solving the liquid bridge force by combining theories. Therefore, a real-time liquid bridge force automatic detection method based on capillary force operation and a corresponding operation device are still important to research.
Aiming at the key scientific and technical problem that the liquid bridge force based on the liquid medium operation process cannot be automatically detected in real time, the invention discloses a compliant operation device based on visual feedback and an automatic liquid bridge force detection method.
Disclosure of Invention
The invention aims to solve the problem that the traditional capillary force operation method cannot detect the liquid bridge force in real time and can not effectively guide an operation task on line, and further provides a compliant operation device based on visual feedback and an automatic liquid bridge force detection method.
The technical scheme adopted by the invention for solving the problems is as follows:
the invention relates to a compliant operation device based on visual feedback, which is characterized in that: the device comprises a motion control module, a visual feedback module, an end effector module, a shock insulation table and an operation substrate, wherein the motion control module comprises an x-direction three-axis precision electric platform, a y-direction three-axis precision electric platform and an operator three-axis precision electric platform; x is to the accurate electric platform of triaxial, y is to the accurate electric platform of triaxial, the accurate electric platform of operative hand triaxial is arranged respectively on the shock insulation platform, x passes through x to microscope to fix on x to the accurate electric platform of triaxial through microscope anchor clamps to the microscope, y passes through y to fix on y to the accurate electric platform of triaxial through microscope anchor clamps to the microscope, the vertical setting of executor accommodate motor, fix on the accurate electric platform of operative hand triaxial through the connecting plate, the vertical setting of executor chuck, one end is passed through chuck fixture and is adorned on executor accommodate motor admittedly, other end centre gripping condensation executor, process the condensation duct on the condensation unit, the two coaxial settings of condensation executor and condensation duct.
The invention relates to a liquid bridge force automatic detection method based on visual feedback, which comprises the following steps:
the method comprises the following steps: adjusting the three-axis precise electric platform of the manipulator to be above the micron-sized object;
step two: controlling an actuator adjusting motor to enable a condensation actuator to extend out of a condensation unit channel;
step three: the condensation controller adjusts the temperature of the channel of the condensation unit, so that the temperature of the tail end of the condensation actuator is lower than the ambient saturation temperature, and operation liquid drops are generated;
step four: adjusting a three-axis precision electric platform of an operator to enable the condensed liquid drops to contact with the micron-sized object to form a liquid bridge;
step five: acquiring initial contour information of a liquid bridge by an x-direction microscope, determining the position of a micron-sized object through Hough transformation, selecting a real-time tracking window and a liquid bridge ROI for operating a probe, and calculating a region between the tracking window and the micron-sized object to be a liquid bridge region after the liquid bridge is formed;
step six: carrying out Ostu threshold segmentation on the liquid bridge area to obtain a binary image, and taking the center of the liquid bridge with the extracted contour as the boundary of the left contour and the right contour;
step seven: extracting the corner points of the liquid bridge profile based on a Shi-Tomasi corner point detection method, and calculating the intersection points of the contour of the microsphere and the operation tool as the end points of the liquid bridge profile;
step eight: based on the determined end points, obtaining a mathematical equation of the liquid bridge profile through least square parabolic fitting;
step nine: and solving a partial differential Yankee equation of the liquid bridge profile, automatically acquiring the acting force of the liquid bridge, and synchronously detecting the positions of the operation tool, the micro object and the liquid bridge in real time by the x-direction microscope and the y-direction microscope.
The invention has the beneficial effects that: the compliance operation device based on visual feedback combines the visual feedback technology, can control the quantitative acquisition of capillary force operation liquid drops in real time through the adjustment of a condensation actuator, and solves the problem of real-time control of the operation liquid drops; the length of the actuator of the compliance operation device based on visual feedback, which extends out of a refrigerating unit channel, can be changed through the control of an actuator adjusting motor, so that the refrigerating capacity is regulated and controlled; the liquid bridge force automatic detection method based on visual feedback obtains the liquid bridge profile in real time through the liquid bridge area, utilizes the image processing technology to obtain the liquid bridge profile, solves the liquid bridge force, and solves the automatic real-time detection problem of the liquid bridge force in the capillary force operation process.
Drawings
FIG. 1 is a schematic perspective view of a compliant operating device based on visual feedback according to the present invention.
Figure 2 is a schematic diagram of the condensate droplet control pickup according to the present invention.
FIG. 3 is a flow chart of the liquid bridge force calculation process based on image processing according to the present invention.
Fig. 4 is a test result chart based on automatic detection of visual liquid bridge force according to the present invention.
Detailed Description
The first embodiment is as follows: with reference to fig. 1 and 2, a compliant operating device based on visual feedback in this embodiment includes a motion control module, a visual feedback module, an end effector module, a vibration isolation table 1-15, and an operation substrate 1-12, where the motion control module includes an x-direction three-axis precision electric platform 1-9, a y-direction three-axis precision electric platform 1-1, and an operator three-axis precision electric platform 1-8, the visual feedback module includes an x-direction microscope 1-11, an x-direction microscope clamp 1-10, a y-direction microscope 1-3, and a y-direction microscope clamp 1-2, the end effector module includes an effector adjusting motor 1-5, a connecting plate 1-7, an effector clamp 1-4, a clamp 1-6, a condensing unit 1-14, a condensing effector 1-13, a condensing actuator, a condensing lens, a condensation controller 2-3; the X-direction three-axis precise electric platform 1-9, the Y-direction three-axis precise electric platform 1-1 and the manipulator three-axis precise electric platform 1-8 are respectively arranged on a shock insulation platform 1-15, the X-direction microscope 1-11 is fixed on the X-direction three-axis precise electric platform 1-9 through an X-direction microscope clamp 1-10, the Y-direction microscope 1-3 is fixed on the Y-direction three-axis precise electric platform 1-1 through a Y-direction microscope clamp 1-2, an actuator adjusting motor 1-5 is vertically arranged and is fixed on the manipulator three-axis precise electric platform 1-8 through a connecting plate 1-7, an actuator chuck 1-4 is vertically arranged, one end of the actuator chuck is fixedly arranged on the actuator adjusting motor 1-5 through a chuck clamp 1-6, the other end of the actuator chuck holds a condensation actuator 1-, the condensing units 1-14 are provided with condensing channels, and the condensing actuators 1-13 and the condensing channels are coaxially arranged.
The second embodiment is as follows: referring to fig. 1, the x-direction microscope 1-11 and the y-direction microscope gripper 1-2 of the compliant manipulation device based on visual feedback of the present embodiment are vertically disposed in the same plane.
The third concrete implementation mode: as described in conjunction with FIGS. 1 and 2, the temperature of the condensing units 1-14 channels of a compliant operating device based on visual feedback of the present embodiment is regulated in real time by the condensing controllers 2-3.
The fourth concrete implementation mode: referring to FIG. 1, the operation substrates 1-12 of the compliant operation device based on visual feedback of the present embodiment are mounted on vibration isolation tables 1-15.
The fifth concrete implementation mode: with reference to fig. 3 and 4, the method for automatically detecting a liquid bridge force based on visual feedback by using a compliant operating device according to this embodiment of the present invention includes the following steps:
the method comprises the following steps: adjusting a three-axis precision electric platform 1-8 of an operator to be above a micron-sized object 2-2;
step two: controlling an actuator adjusting motor 1-5 to enable a condensation actuator 1-13 to extend out of a channel of a condensation unit 1-14;
step three: the condensation controller 2-3 adjusts the temperature of the channels of the condensation unit 1-14, so that the temperature of the tail end of the condensation actuator 1-13 is lower than the ambient saturation temperature, and operation liquid drops are generated;
step four: adjusting a three-axis precision electric platform 1-8 of an operator to enable condensed liquid drops to be in contact with a micron-sized object 2-2 to form a liquid bridge 2-1;
step five: acquiring initial contour information of a liquid bridge 2-1 by an x-direction microscope 1-11, determining the position of a micron-sized object 2-2 through Hough transformation, selecting a real-time tracking window 4-1 and a liquid bridge ROI 4-2 for operating a probe, and calculating a region between the tracking window 4-1 and the micron-sized object 2-2 to be a liquid bridge region 4-3 after the liquid bridge 2-1 is formed;
step six: carrying out Ostu threshold segmentation on the liquid bridge area to obtain a binary image, and taking the center 4-4 of the liquid bridge for extracting the outline as the boundary of the left outline and the right outline;
step seven: extracting corner points 4-6 of the liquid bridge profile based on a Shi-Tomasi corner point detection method, and calculating intersection points with the microsphere profile 4-8 and an operation tool to be liquid bridge profile end points 4-5;
step eight: based on the determined end points 4-5, obtaining a mathematical equation of the liquid bridge profile 4-7 through least square parabola fitting;
step nine: and solving partial differential Poisson equation of the liquid bridge profile 4-7 to automatically obtain liquid bridge acting force, and synchronously carrying out real-time detection on the positions of the operation tool, the micro object and the liquid bridge in the X-direction microscope 1-11 and the Y-direction microscope 1-3.
The sixth specific implementation mode: the present embodiment is described with reference to fig. 1 to 4, and the compliant operation apparatus and the liquid bridge force automatic detection method based on visual feedback in the present embodiment perform an operation task of a micron-sized object to operate a BGA solder ball with an outer dimension of 760 μm; test experiments show that the compliance operation device based on visual feedback and the liquid bridge force automatic detection method can realize real-time control of operation liquid drops in a micro-object operation process and can realize real-time feedback and display of liquid bridge force, and the other methods are the same as the first, second, third, fourth or fifth embodiment modes.
Claims (4)
1. The method is characterized in that the compliant operating device based on visual feedback comprises a motion control module, a visual feedback module, an end effector module, a shock insulation platform (1-15) and an operating substrate (1-12), wherein the motion control module comprises an x-direction three-axis precise electric platform (1-9), a y-direction three-axis precise electric platform (1-1) and an operator three-axis precise electric platform (1-8), the visual feedback module comprises an x-direction microscope (1-11), an x-direction microscope clamp (1-10), a y-direction microscope (1-3) and a y-direction microscope clamp (1-2), the end effector module comprises an effector adjusting motor (1-5), a connecting plate (1-7), The device comprises an actuator chuck (1-4), a chuck fixture (1-6), a condensing unit (1-14), a condensing actuator (1-13) and a condensing controller (2-3); the X-direction triaxial precision electric platform (1-9), the Y-direction triaxial precision electric platform (1-1) and the manipulator triaxial precision electric platform (1-8) are respectively arranged on a shock insulation platform (1-15), an X-direction microscope (1-11) is fixed on the X-direction triaxial precision electric platform (1-9) through an X-direction microscope clamp (1-10), a Y-direction microscope (1-3) is fixed on the Y-direction triaxial precision electric platform (1-1) through a Y-direction microscope clamp (1-2), an actuator adjusting motor (1-5) is vertically arranged and fixed on the manipulator triaxial precision electric platform (1-8) through a connecting plate (1-7), an actuator chuck (1-4) is vertically arranged, one end of the actuator adjusting motor is fixedly arranged on the actuator adjusting motor (1-5) through a chuck clamp (1-6), the other end clamps a condensation actuator (1-13), a condensation channel is processed on the condensation unit (1-14), and the condensation actuator (1-13) and the condensation channel are coaxially arranged;
the method mainly comprises the following steps:
the method comprises the following steps: adjusting a three-axis precise electric platform (1-8) of an operator to be above a micron-sized object (2-2);
step two: controlling an actuator adjusting motor (1-5) to enable a condensation actuator (1-13) to extend out of a channel of a condensation unit (1-14);
step three: the condensation controller (2-3) adjusts the temperature of the channels of the condensation units (1-14) to enable the temperature of the tail ends of the condensation actuators (1-13) to be lower than the ambient saturation temperature, and operation liquid drops are generated;
step four: adjusting a three-axis precision electric platform (1-8) of an operator to enable the condensed liquid drop to contact with a micron-sized object (2-2) to form a liquid bridge (2-1);
step five: acquiring initial contour information of a liquid bridge (2-1) by an x-direction microscope (1-11), determining the position of a micron-sized object (2-2) through Hough transformation, selecting a real-time tracking window (4-1) and a liquid bridge ROI (4-2) for operating a probe, and calculating a region between the tracking window (4-1) and the micron-sized object (2-2) to be a liquid bridge region (4-3) after the liquid bridge (2-1) is formed;
step six: carrying out Ostu threshold segmentation on the liquid bridge region to obtain a binary image, and taking the liquid bridge with the extracted contour as the boundary of the left contour and the right contour by taking the center (4-4) of the liquid bridge;
step seven: extracting corner points (4-6) of the liquid bridge profile based on a Shi-Tomasi corner point detection method, and calculating intersection points with the microsphere profile (4-8) and an operation tool as end points (4-5) of the liquid bridge profile;
step eight: based on the determined end points (4-5) of the liquid bridge profile, obtaining a mathematical equation of the liquid bridge profile (4-7) through least square parabolic fitting;
step nine: and solving a partial differential Poisson equation of the liquid bridge profile (4-7), automatically acquiring the acting force of the liquid bridge, and synchronously detecting the positions of the operation tool, the micro object and the liquid bridge in real time by the x-direction microscope (1-11) and the y-direction microscope (1-3).
2. The method for automatic detection of liquid bridge force using compliant manipulator based on visual feedback according to claim 1, wherein the x-microscope (1-11) and the y-microscope holder (1-2) are vertically arranged in the same plane.
3. A method for automatic detection of liquid bridge force using a compliant operating device based on visual feedback according to claim 1, characterized in that the temperature of the condensing unit (1-14) channels is regulated in real time by a condensing controller (2-3).
4. The method for automatically detecting liquid bridge force by using the compliant operating device based on visual feedback as claimed in claim 1, wherein: the device also comprises an operation substrate (1-12), and the operation substrate (1-12) is arranged on the vibration isolation table (1-15).
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