CN109059976A - A kind of wafer support device for chip detection - Google Patents
A kind of wafer support device for chip detection Download PDFInfo
- Publication number
- CN109059976A CN109059976A CN201810909126.9A CN201810909126A CN109059976A CN 109059976 A CN109059976 A CN 109059976A CN 201810909126 A CN201810909126 A CN 201810909126A CN 109059976 A CN109059976 A CN 109059976A
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- CN
- China
- Prior art keywords
- chip
- bevel gear
- gear
- supporting table
- mandril
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of wafer support device for chip detection, including mandril, load plate, drive rod, bevel gear one, guide gear, it is oriented to rack gear, bracket, bevel gear two and lead screw, the mandril is fixed on load plate upper side, the load plate is assemblied in lead screw annular side, the drive rod setting is set in supporting table low inside, the bevel gear one is mounted on drive rod left side, and bevel gear one is meshed with bevel gear two, the guide gear is mounted on middle part in bracket, and guide gear is meshed with guiding rack gear, the guiding rack gear is fixed in regulating tank, the bracket is welded on column downside, the bevel gear two is arranged in lead screw annular side lower part, medium position is arranged in supporting table in the lead screw, the fast servo of chip after the completion of adjusting and detect the design achieves chip detection position Function, structure of the invention is reasonable, multiple functional, and it is convenient to operate, practical.
Description
Technical field
The present invention is a kind of wafer support device for chip detection, belongs to chip and detects fittings equipment field.
Background technique
The wafer support device of chip detection can not jack chip in the prior art, after the completion of detection, be easy to core
Piece is small in size, and thickness is thin, and operating personnel can not quickly remove chip, while chip detection position is not easy to adjust, so anxious
A kind of wafer support device for chip detection is needed to solve the above-mentioned problem.
Summary of the invention
In view of the deficienciess of the prior art, it is an object of the present invention to provide a kind of wafer support dresses for chip detection
It sets, to solve the problems mentioned in the above background technology, structure of the invention is reasonable, and multiple functional, it is convenient to operate, practical.
To achieve the goals above, the present invention is to realize by the following technical solutions: a kind of detect for chip
Wafer support device, including apparatus main body and chip lifting mechanism, described device main body include chip card slot, supporting table, stand
Column and pedestal, the chip card slot are provided with supporting table upper side medium position, and the supporting table is fixed on the upper end of the column face
On, the column is set on the base in the middle part of side, and middle part is arranged in supporting table in the chip lifting mechanism, and the chip is lifted
Rise mechanism include mandril, load plate, drive rod, bevel gear one, guide gear, regulating tank, guiding rack gear, bracket, bevel gear two with
And lead screw, the mandril are fixed on load plate upper side, the load plate is assemblied in lead screw annular side, the drive rod setting
It is set in supporting table low inside, the bevel gear one is mounted on drive rod left side, and bevel gear one is nibbled with bevel gear two-phase
It closes, the guide gear is mounted on middle part in bracket, and guide gear is meshed with guiding rack gear, and the regulating tank is provided with bottom
On seat upper side, the guiding rack gear is fixed in regulating tank, and the bracket is welded on column downside, the bevel gear two
Medium position is arranged in supporting table in lead screw annular side lower part, the lead screw in setting.
Further, three groups of through-holes are opened up on the chip card slot inner underside face, through-hole described in three groups is equidistantly arranged in a ring
Cloth is in chip groove.
Further, the mandril is equipped with three groups, and mandril described in three groups is equidistantly arranged in load plate upper surface in a ring, described
Mandril central axes and through-hole central axes are on same straight line, and mandril upper surface is mounted on silicagel pad.
Further, the drive rod right end installation and adjustment knob, the adjusting knob are arranged in supporting table annular side
Right part.
Further, it being fixed with position limiting slide block on the bracket left side, the position limiting slide block is mounted in limit sliding chutes,
The limit sliding chutes are provided in regulating tank on left side.
Further, the load plate is connected by ball screw assembly, with lead screw.
Beneficial effects of the present invention: a kind of wafer support device for chip detection of the invention, because the present invention adds
Mandril, load plate, drive rod, bevel gear one, guide gear, regulating tank, guiding rack gear, bracket, bevel gear two and lead screw, should
Design realizes the fast servo function of chip after the completion of chip detection position adjusts and detects, and solves original chip detection
Wafer support device chip can not be jacked, after the completion of detection, it is small to be easy to chip volume, and thickness is thin, operating personnel
Chip can not be quickly removed, while chip detection position is not easy the problem of adjusting.
Because the present invention is added to through-hole, which is moved in chip card slot convenient for mandril, because the present invention is added to silica gel
Pad, the protective performance of the design mandril, because the present invention is added to adjusting knob, the design is convenient for rotation drive rod, because of the present invention
Position limiting slide block and limit sliding chutes are added to, which improves guiding performance when bracket movement, and structure of the invention is reasonable, function
Complete, it is convenient to operate, practical.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is a kind of structural schematic diagram of the wafer support device for chip detection of the present invention；
Fig. 2 is the structural schematic diagram of chip lifting mechanism in a kind of wafer support device for chip detection of the present invention；
In figure: 1- chip lifting mechanism, 2- chip card slot, 3- supporting table, 4- column, 5- pedestal, 101- mandril, 102- load plate,
103- drive rod, 104- bevel gear one, 105- guide gear, 106- regulating tank, 107- are oriented to rack gear, 108- bracket, 109- umbrella
Gear two, 110- lead screw.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to
Specific embodiment, the present invention is further explained.
Fig. 1 and Fig. 2 are please referred to, the present invention provides a kind of technical solution: a kind of wafer support device for chip detection,
Including apparatus main body and chip lifting mechanism 1, apparatus main body includes chip card slot 2, supporting table 3, column 4 and pedestal 5, core
Piece card slot 2 is provided with 3 upper side medium position of supporting table, and supporting table 3 is fixed on 4 upper surface of column, and column 4 is arranged in pedestal
In the middle part of 5 upper sides.
Middle part is arranged in supporting table 3 in chip lifting mechanism 1, and chip lifting mechanism 1 includes mandril 101, load plate 102, passes
Lever 103, bevel gear 1, guide gear 105, regulating tank 106, guiding rack gear 107, bracket 108, bevel gear 2 109 and
Lead screw 110, mandril 101 are fixed on 102 upper side of load plate, and load plate 102 is assemblied in 110 annular side of lead screw, drive rod 103
Setting is set in 3 low inside of supporting table, and bevel gear 1 is mounted on 103 left side of drive rod, and bevel gear 1 and umbrella
Gear 2 109 is meshed, and guide gear 105 is mounted on middle part in bracket 108, and guide gear 105 is nibbled with guiding 107 phase of rack gear
It closes, regulating tank 106 is provided on 5 upper side of pedestal, and guiding rack gear 107 is fixed in regulating tank 106, and bracket 108 is welded on vertical
On 4 downside of column, middle position is arranged in supporting table 3 in 110 annular side lower part of lead screw, lead screw 110 in the setting of bevel gear 2 109
It sets, the fast servo function of chip after the completion of adjusting and detect the design achieves chip detection position.
Three groups of through-holes are opened up on 2 inner underside face of chip card slot, three groups of through-holes are equidistantly arranged in chip groove in a ring, just
It is moved in chip card slot 2 in mandril 101 by through-hole, mandril 101 is equipped with three groups, the equidistant arrangement in a ring of three groups of mandrils 101
In 102 upper surface of load plate, 101 central axes of mandril and through-hole central axes are on same straight line, and 101 upper surface of mandril is respectively mounted
There is silicagel pad, avoid the case where mandril 101 scratches chip generation, 103 right end installation and adjustment knob of drive rod, adjusting knob is set
It sets in 3 annular side right part of supporting table, it is limited convenient for being fixed on 103 bracket of operating personnel's quick rotation drive rod, 108 left side
Position sliding block, position limiting slide block are mounted in limit sliding chutes, and limit sliding chutes are provided in regulating tank 106 on left side, are convenient for bracket 108
Band moving gear limits movement in regulating tank 106, and load plate 102 is connected by ball screw assembly, with lead screw 110.
Specific embodiment: in use, chip to be detected is placed in chip card slot 2 by operating personnel, then this is filled
Placement location is on chip detecting equipment, and when needing to adjust detection position, operating personnel pushes column 4, and column 4 passes through bracket
108 drive guide gears 105 rotate on guiding rack gear 107, while the rotation of guide gear 105 drives column 4 on pedestal 5,
Pedestal 5 is mobile to drive supporting table 3 mobile, and supporting table 3 is mobile to drive chip to be detected mobile, when chip to be detected be moved to it is specified
Check bit postpones, and stops pushing column 4, and after the completion of chip to be detected detection, operating personnel rotates adjusting knob, adjusting knob
Drive rod 103 is driven to rotate, the rotation of drive rod 103 drives bevel gear 1 to rotate, and the rotation of bevel gear 1 drives bevel gear
2 109 rotations, the rotation of bevel gear 2 109 drive lead screw 110 to rotate, and the rotary motion of ball-screw adjutant lead screw 110 is converted into
Linear motion, and then ball screw assembly, drives load plate 102 to move up, load plate 102, which moves up, drives mandril 101 to moving up
Dynamic, mandril 101 is moved in chip card slot 2 by through-hole, and chip is ejected chip card slot 2, and then operating personnel will be to be checked
It surveys chip to take out, to realize the fast servo function of chip after the completion of chip detection position adjusts and detects.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from spirit of the invention or
In the case where essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention
It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. a kind of wafer support device for chip detection, including apparatus main body and chip lifting mechanism, it is characterised in that:
Described device main body includes chip card slot, supporting table, column and pedestal, and the chip card slot is provided in supporting table upper side
Portion position, the supporting table are fixed on the upper end of the column face, and the column is set on the base in the middle part of side；
The chip lifting mechanism is arranged in supporting table middle part, the chip lifting mechanism include mandril, load plate, drive rod,
Bevel gear one, guide gear, regulating tank, guiding rack gear, bracket, bevel gear two and lead screw, the mandril are fixed on load plate
On side, the load plate is assemblied in lead screw annular side, and the drive rod setting is set in supporting table low inside, the umbrella tooth
Wheel one is mounted on drive rod left side, and bevel gear one is meshed with bevel gear two, and the guide gear is mounted in bracket
Middle part, and guide gear is meshed with guiding rack gear, the regulating tank is provided on pedestal upper side, and the guiding rack gear is fixed
In regulating tank, the bracket is welded on column downside, and the bevel gear two setting is described in lead screw annular side lower part
Medium position is arranged in supporting table in lead screw.
2. a kind of wafer support device for chip detection according to claim 1, it is characterised in that: the chip card
Three groups of through-holes are opened up on slot inner underside face, through-hole described in three groups is equidistantly arranged in chip groove in a ring.
3. a kind of wafer support device for chip detection according to claim 1, it is characterised in that: the mandril is set
There are three groups, mandril described in three groups is equidistantly arranged in load plate upper surface in a ring, and the mandril central axes are with through-hole central axes same
On straight line, and mandril upper surface is mounted on silicagel pad.
4. a kind of wafer support device for chip detection according to claim 1, it is characterised in that: the drive rod
Right end installation and adjustment knob, the adjusting knob are arranged in supporting table annular side right part.
5. a kind of wafer support device for chip detection according to claim 1, it is characterised in that: the bracket is left
Position limiting slide block is fixed on side, the position limiting slide block is mounted in limit sliding chutes, and the limit sliding chutes are provided in regulating tank
On left side.
6. a kind of wafer support device for chip detection according to claim 1, it is characterised in that: the load plate is logical
Ball screw assembly, is crossed to be connected with lead screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810909126.9A CN109059976A (en) | 2018-08-10 | 2018-08-10 | A kind of wafer support device for chip detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810909126.9A CN109059976A (en) | 2018-08-10 | 2018-08-10 | A kind of wafer support device for chip detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109059976A true CN109059976A (en) | 2018-12-21 |
Family
ID=64683264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810909126.9A Withdrawn CN109059976A (en) | 2018-08-10 | 2018-08-10 | A kind of wafer support device for chip detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109059976A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111672707A (en) * | 2020-06-17 | 2020-09-18 | 张皖龙 | Manufacturing process of ecological composite board |
| CN116448156A (en) * | 2023-06-15 | 2023-07-18 | 江苏晖恒芯片科技有限责任公司 | Chip supporting structure for chip detection |
-
2018
- 2018-08-10 CN CN201810909126.9A patent/CN109059976A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111672707A (en) * | 2020-06-17 | 2020-09-18 | 张皖龙 | Manufacturing process of ecological composite board |
| CN111672707B (en) * | 2020-06-17 | 2021-01-12 | 广西蓝带木业有限公司 | Manufacturing process of ecological composite board |
| CN116448156A (en) * | 2023-06-15 | 2023-07-18 | 江苏晖恒芯片科技有限责任公司 | Chip supporting structure for chip detection |
| CN116448156B (en) * | 2023-06-15 | 2023-10-03 | 江苏晖恒芯片科技有限责任公司 | Chip supporting structure for chip detection |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181221 |