CN109055907B

CN109055907B - Magnetron sputtering equipment

Info

Publication number: CN109055907B
Application number: CN201810988891.4A
Authority: CN
Inventors: 杨胜
Original assignee: Anhui Haoding Metal Product Limed Co
Current assignee: ANHUI HAODING METAL PRODUCT LIMED Co.
Priority date: 2018-08-28
Filing date: 2018-08-28
Publication date: 2020-11-06
Anticipated expiration: 2038-08-28
Also published as: CN109055907A

Abstract

The invention belongs to the technical field of sputtering, and particularly relates to magnetron sputtering equipment which comprises an outer shell, an inner shell, a target, a workbench, a motor and a magnetic assembly, wherein the outer shell is provided with a plurality of holes; the motor is fixedly connected to the bottom plate of the outer shell, the motor output shaft is connected with the magnetic assembly, and the magnetic assembly comprises a cam, a turntable, a fixing ring, a supporting air bag, a first sliding block, a guide rod and a magnet; the cam is fixedly connected to the end head of the output shaft of the motor and is arranged in the middle of the turntable in a sliding manner; a group of chutes are uniformly arranged at the bottom of the rotary table, supporting air bags are arranged at the ends of the chutes, first sliding blocks are arranged in the chutes in a sliding manner, the first sliding blocks can slide along the radial direction of the rotary table, and one end of each first sliding block is fixedly connected with a guide rod; a set of magnet of first slider bottom fixed connection, the polarity of two adjacent magnets is opposite. According to the invention, the first sliding block drives the magnet to reciprocate, so that the magnetic field loaded on the target by the magnet becomes uniform, the target is uniformly consumed in the sputtering process, and the utilization rate of the target is further improved.

Description

Magnetron sputtering equipment

Technical Field

The invention belongs to the technical field of sputtering, and particularly relates to magnetron sputtering equipment.

Background

Sputtering (Sputter) is to inject a suitable inert gas as a medium in a vacuum environment, and bombard a sputtering Target (Target) by the acceleration of the inert gas, so as to cause Target atoms on the surface (front surface) of the sputtering Target to scatter and form a layer of metal film deposition on the surface of the pedestal.

The cylindrical magnetron sputtering apparatus generally includes a cylindrical housing, a cylindrical target disposed in the cylindrical housing, and a magnet assembly disposed in the cylindrical target. The magnet assembly is typically comprised of a plurality of individual magnets that form a superimposed magnetic field. Because the magnets are independent of each other, the distribution of the superposed magnetic field on the target surface is generally not uniform. During sputtering, the electron concentration is higher in the area with high magnetic field intensity on the target surface, and the bombarding frequency of the part of the target is higher. After repeated use, the target in the part is more consumed than the target in other parts with low magnetic field intensity. When the target material of the part is consumed and needs to be replaced, the target material is remained in other parts, and the utilization rate of the target material is low.

Disclosure of Invention

In order to make up for the defects of the prior art, the magnetron sputtering equipment provided by the invention has the advantages that the arc-shaped air bag extrudes the guide rod to enable the first sliding block to pop up, the popped first sliding block resets again under the rebounding action of the supporting air bag, and the first sliding block drives the magnet to reciprocate, so that the magnetic field loaded on the target by the magnet becomes uniform, the target is uniformly consumed in the sputtering process, and the utilization rate of the target is further improved.

The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to magnetron sputtering equipment which comprises an outer shell, an inner shell, a target, a workbench, a motor and a magnetic assembly, wherein the outer shell is provided with a plurality of through holes; the inner shell divides the inner part of the outer shell into a sputtering space and an accommodating space; the target is fixedly connected to the top of the sputtering space, and a workbench is arranged below the target; the workbench is fixedly connected to the bottom plate of the outer shell; the motor is arranged in the accommodating space and is fixedly connected to the bottom plate of the outer shell, the motor output shaft is connected with the magnetic assembly, and the magnetic assembly is positioned in the accommodating space; the magnetic assembly comprises a cam, a rotary table, a fixing ring, a supporting air bag, a first sliding block, a guide rod and a magnet; the cam is fixedly connected to the end head of the output shaft of the motor and is arranged in the middle of the turntable in a sliding manner; the turntable is slidably mounted at the bottom of the fixing ring, and the fixing ring is fixedly mounted at the bottom of the top plate of the outer shell; a group of sliding grooves are uniformly formed in the bottom of the rotary table, supporting air bags are arranged at the ends of the sliding grooves, a first sliding block is arranged in the sliding grooves in a sliding mode and can slide along the radial direction of the rotary table, and one end of the first sliding block is fixedly connected with a guide rod; the bottom of the first sliding block is fixedly connected with a group of magnets, and the polarities of two adjacent magnets are opposite;

the cam is composed of a disc and an arc-shaped air bag on the outer ring of the disc, the arc-shaped air bag is fixedly connected with the disc, and the disc is fixedly connected with the output shaft of the motor. When the magnetic control device works, when the motor drives the cam to rotate, the arc-shaped air bag extrudes the guide rod, and the first sliding block is ejected out through the guide rod, so that the first sliding block can slide along the sliding groove, and after the first sliding block slides to the end of the sliding groove, the first sliding block rebounds back under the supporting air bag, and the first sliding block drives the magnet to reciprocate; meanwhile, due to the oblique thrust of the arc-shaped air bag to the guide rod, the rotary table rotates at the bottom of the fixing ring, and the magnet can radially move and simultaneously rotate around the output shaft of the motor, so that the magnetic field loaded on the target by the magnet becomes uniform, the target is uniformly consumed in the sputtering process, and the utilization rate of the target is further improved.

Preferably, one end of the sliding chute is fixedly connected with the elastic membrane; the elastic membrane is provided with through holes, the middle part of the guide rod is provided with a boss, and the boss extrudes the elastic membrane and can penetrate through the through holes in the elastic membrane. Through the constraint of the elastic membrane, the guide rod extrudes the elastic membrane to one side under the extrusion of the arc-shaped air bag, and after the elastic membrane is fully extended, the guide rod is separated from the elastic membrane instantly, so that the second sliding block obtains larger kinetic energy, the second sliding block extrudes the supporting air bag, and the hot air in the accommodating space can be led out of the outer shell through the airflow generated by extruding the supporting air bag, thereby improving the cooling efficiency of the device; the elastic membrane then cushions and hugs the guide bar as the second slider is rebounded back by the support airbag, thereby preparing for the next cycle of motion.

Preferably, one side of the boss is tapered. When the guide rod returns, the boss smoothly passes through the through hole in the elastic membrane, and the butt joint efficiency is improved.

Preferably, the side wall of the circular groove for installing the cam is provided with a group of grooves, and the outer side of the arc-shaped air bag is provided with corresponding bulges. When the cam rotates, the arc-shaped air bag rubs the side wall of the circular groove to drive the rotating disc to rotate, so that the magnetic field loaded on the target by the magnet becomes uniform, the target is uniformly consumed in the sputtering process, and the utilization rate of the target is further improved.

Preferably, two arc-shaped elastic pieces are symmetrically installed at one end of the sliding groove, a boss is arranged in the middle of the guide rod, and the arc-shaped elastic pieces can clamp the guide rod through the boss. Make the second slider when popped out by the arc gasbag for the second slider obtains great kinetic energy, and the second slider extrudees the support gasbag, supports the gasbag through the extrusion and produces the air current, can derive the shell body with the hot-air in the accommodation space, improves cooling efficiency.

Preferably, the middle part of the arc-shaped elastic sheet is rotatably arranged on the turntable, the end head of the arc-shaped elastic sheet is hinged with one end of a connecting rod, the other end of the connecting rod is hinged with a second sliding block, and the second sliding block is slidably arranged on the turntable; the side edge of the first sliding block is fixedly connected with a stop block; the stop block is connected with the second sliding block through a pull rope. During operation, boss compression arc shell fragment is to the certain degree after, the guide arm breaks away from the support of arc shell fragment, along with the removal of first slider, the dog promotes the second slider and rotatory through connecting rod pulling arc shell fragment, when first slider is backward slided, the boss is earlier behind the arc shell fragment, the dog pulls back the normal position with the second slider for the arc shell fragment is again to the boss screens, realizes that the guide arm does not strike the arc shell fragment when returning, thereby improves the life of arc shell fragment.

The invention has the following beneficial effects:

1. according to the sputtering target material guiding device, the arc-shaped air bag extrudes the guide rod, so that the first sliding block is popped up, the popped first sliding block is reset again under the rebounding action of the supporting air bag, and the first sliding block drives the magnet to reciprocate, so that the magnetic field loaded on the target material by the magnet becomes uniform, the consumption of the target material in the sputtering process is uniform, and the utilization rate of the target material is further improved.

2. According to the invention, the elastic membrane or the arc-shaped elastic sheet is arranged, so that the second sliding block obtains larger kinetic energy, the second sliding block extrudes the supporting air bag, the supporting air bag is extruded to generate air flow, the hot air in the accommodating space can be led out of the outer shell, and the cooling efficiency of the device is improved.

3. According to the invention, the stop block is arranged, the stop block pushes the second sliding block and pulls the arc-shaped elastic sheet to rotate through the connecting rod, when the first sliding block slides back, the boss firstly passes through the arc-shaped elastic sheet, and then the stop block pulls the second sliding block back to the original position, so that the arc-shaped elastic sheet is clamped to the boss again, the guide rod does not impact the arc-shaped elastic sheet when returning, and the service life of the arc-shaped elastic sheet is prolonged.

Drawings

The invention will be further explained with reference to the drawings.

FIG. 1 is a front view of the present invention;

FIG. 2 is a cross-sectional view A-A of FIG. 1;

FIG. 3 is a first enlarged partial view at E in FIG. 2;

FIG. 4 is a second enlarged partial view at E in FIG. 2;

in the figure: the sputtering device comprises an outer shell 1, an inner shell 11, a sputtering space 12, an accommodating space 13, a target 2, a workbench 21, a motor 22, a magnetic assembly 3, a cam 31, a disc 311, an arc-shaped air bag 312, a rotating disc 32, a sliding groove 321, a fixing ring 33, a supporting air bag 34, a first sliding block 35, a guide rod 36, a boss 361, a magnet 37, an elastic membrane 4, a circular groove 5, an arc-shaped elastic sheet 6, a connecting rod 7, a second sliding block 8 and a stop block 9.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

As shown in fig. 1 to 4, a magnetron sputtering apparatus according to the present invention includes an outer casing 1, an inner casing 11, a target 2, a worktable 21, a motor 22, and a magnetic assembly 3; the inner shell 11 divides the outer shell 1 into a sputtering space 12 and an accommodating space 13; the target 2 is fixedly connected to the top of the sputtering space 12, and a workbench 21 is arranged below the target 2; the workbench 21 is fixedly connected to the bottom plate of the outer shell 1; the motor 22 is arranged in the accommodating space 13 and fixedly connected to a bottom plate of the outer shell 1, an output shaft of the motor 22 is connected with the magnetic component 3, and the magnetic component 3 is positioned in the accommodating space 13; the magnetic component 3 comprises a cam 31, a rotating disc 32, a fixed ring 33, a supporting air bag 34, a first sliding block 35, a guide rod 36 and a magnet 37; the cam 31 is fixedly connected to the end of the output shaft of the motor 22, and the cam 31 is slidably mounted in the middle of the turntable 32; the rotating disc 32 is slidably mounted at the bottom of a fixing ring 33, and the fixing ring 33 is fixedly mounted at the bottom of the top plate of the outer shell 1; a group of sliding grooves 321 are uniformly arranged at the bottom of the rotating disc 32, supporting air bags 34 are arranged at the ends of the sliding grooves 321, first sliding blocks 35 are arranged in the sliding grooves 321 in a sliding mode, the first sliding blocks 35 can slide along the radial direction of the rotating disc 32, and one ends of the first sliding blocks 35 are fixedly connected with guide rods 36; the bottom of the first sliding block 35 is fixedly connected with a group of magnets 37, and the polarities of the two adjacent magnets 37 are opposite;

the cam 31 is composed of a circular disc 311 and an arc-shaped air bag 312 on the outer ring of the circular disc 311, the arc-shaped air bag 312 is fixedly connected with the circular disc 311, and the circular disc 311 is fixedly connected with the output shaft of the motor 22. When the motor 22 drives the cam 31 to rotate, the arc-shaped air bag 312 extrudes the guide rod 36, and the first sliding block 35 is ejected through the guide rod 36, so that the first sliding block 35 can slide along the sliding groove 321, and after sliding to the end of the sliding groove 321, the first sliding block 35 is rebounded by the supporting air bag 34, and the first sliding block 35 drives the magnet 37 to reciprocate; meanwhile, due to the oblique thrust of the arc-shaped air bag 312 to the guide rod 36, the rotating disc 32 rotates at the bottom of the fixing ring 33, and the magnet 37 can radially move and simultaneously rotate around the output shaft of the motor 22, so that the magnetic field loaded on the target by the magnet becomes uniform, the consumption of the target in the sputtering process is uniform, and the utilization rate of the target is further improved.

As an embodiment of the present invention, one end of the sliding groove 321 is fixedly connected to the elastic membrane 4; the elastic membrane 4 is provided with a through hole, the middle part of the guide rod 36 is provided with a boss 361, and the boss 361 extrudes the elastic membrane 4 and can penetrate through the through hole on the elastic membrane 4. Through the constraint of the elastic membrane 4, the guide rod 36 extrudes the elastic membrane 4 to one side under the extrusion of the arc-shaped air bag 312, after the elastic membrane 4 is fully extended, the guide rod 36 is separated from the elastic membrane 4 instantly, so that the second slide block 35 obtains larger kinetic energy, the second slide block 35 extrudes the supporting air bag 34, air flow is generated by extruding the supporting air bag 34, hot air in the accommodating space 13 can be led out of the outer shell 1, and the cooling efficiency of the device is improved; when the second slider 35 is then bounced back by the support airbag 34, the elastic membrane 4 cushions and hugs the guide bar 36 in preparation for the next cycle of movement.

In one embodiment of the present invention, one side of the protrusion 361 is tapered. When the guide rod 36 returns, the boss 361 smoothly passes through the through hole on the elastic membrane 4, so that the butt joint efficiency is improved.

In one embodiment of the present invention, the side wall of the circular groove 5 of the installation cam 31 is provided with a set of grooves, and the outer side of the arc-shaped air bag 312 is provided with corresponding protrusions. When the cam 31 rotates, the arc-shaped air bag 312 rubs the side wall of the circular groove 5 to drive the rotating disc 32 to rotate, so that the magnetic field loaded on the target by the magnet becomes uniform, the target is uniformly consumed in the sputtering process, and the utilization rate of the target is further improved.

As an embodiment of the present invention, two arc-shaped elastic pieces 6 are symmetrically installed at one end of the sliding groove 321, a boss 361 is disposed in the middle of the guide rod 36, and the arc-shaped elastic pieces 6 can clamp the guide rod 36 through the boss 361. When the second slider 35 is popped up by the arc-shaped airbag 312, the second slider 35 obtains large kinetic energy, the second slider 35 extrudes the supporting airbag 34, the supporting airbag 34 generates air flow through extrusion, hot air in the accommodating space 13 can be guided out of the outer shell 1, and the cooling efficiency is improved.

As an embodiment of the present invention, the middle of the arc-shaped elastic sheet 6 is rotatably mounted on the turntable 32, the end of the arc-shaped elastic sheet 6 is hinged to one end of the connecting rod 7, the other end of the connecting rod 7 is hinged to the second slider 8, and the second slider 8 is slidably mounted on the turntable 32; the side edge of the first slide block 35 is fixedly connected with a stop block 9; the stop block 9 is connected with the second slide block 8 through a pull rope. During operation, boss 361 compresses arc shell fragment 6 to a certain extent after, guide arm 36 breaks away from the support of arc shell fragment 6, along with the removal of first slider 35, dog 9 promotes second slider 8 and pulls arc shell fragment 6 rotatory through connecting rod 7, when first slider 35 slides back, boss 361 crosses arc shell fragment 6 back earlier, dog 9 pulls back the normal position with second slider 8, make arc shell fragment 6 again to boss 361 screens, realize that guide arm 36 does not strike arc shell fragment 6 when returning, thereby improve arc shell fragment 6's life.

When the motor 22 drives the cam 31 to rotate, the arc-shaped air bag 312 extrudes the guide rod 36, and the first sliding block 35 is ejected through the guide rod 36, so that the first sliding block 35 can slide along the sliding groove 321, and after sliding to the end of the sliding groove 321, the first sliding block 35 is rebounded by the supporting air bag 34, and the first sliding block 35 drives the magnet 37 to reciprocate; meanwhile, due to the oblique thrust of the arc-shaped air bag 312 to the guide rod 36, the rotating disc 32 rotates at the bottom of the fixing ring 33, and the magnet 37 can rotate around the output shaft of the motor 22 while moving in the radial direction, so that the magnetic field loaded on the target by the magnet becomes uniform, the consumption of the target in the sputtering process is uniform, and the utilization rate of the target is further improved;

in order to obtain a greater kinetic energy of the second slider 35, the first way is to bind the guide rod 36 by means of the elastic membrane 4; the second mode blocks guide rod 36 through arc shell fragment 6 for second slider 35 obtains great kinetic energy when being popped out by arc gasbag 312, and second slider 35 extrudes support gasbag 34, supports gasbag 34 through the extrusion and produces the air current, can derive shell body 1 with the hot-air in the accommodation space 13, improves device cooling efficiency.

While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. A magnetron sputtering device comprises an outer shell (1), an inner shell (11), a target (2), a workbench (21), a motor (22) and a magnetic assembly (3); the inner shell (11) divides the inner part of the outer shell (1) into a sputtering space (12) and an accommodating space (13); the target (2) is fixedly connected to the top of the sputtering space (12), and a workbench (21) is arranged below the target (2); the workbench (21) is fixedly connected to the bottom plate of the outer shell (1); the motor (22) is arranged in the accommodating space (13) and is fixedly connected to a bottom plate of the outer shell (1), an output shaft of the motor (22) is connected with the magnetic component (3), and the magnetic component (3) is positioned in the accommodating space (13); the method is characterized in that: the magnetic assembly (3) comprises a cam (31), a rotating disc (32), a fixing ring (33), a supporting air bag (34), a first sliding block (35), a guide rod (36) and a magnet (37); the cam (31) is fixedly connected to the end of an output shaft of the motor (22), and the cam (31) is installed in the middle of the rotary table (32) in a sliding mode; the rotary table (32) is slidably mounted at the bottom of the fixing ring (33), and the fixing ring (33) is fixedly mounted at the bottom of a top plate of the outer shell (1); a group of sliding grooves (321) are uniformly formed in the bottom of the rotary table (32), supporting air bags (34) are arranged at the ends of the sliding grooves (321), a first sliding block (35) is installed in the sliding grooves (321) in a sliding mode, the first sliding block (35) can slide along the radial direction of the rotary table (32), and one end of the first sliding block (35) is fixedly connected with a guide rod (36); the bottom of the first sliding block (35) is fixedly connected with a group of magnets (37), and the polarities of two adjacent magnets (37) are opposite;

the cam (31) consists of a disc (311) and an arc-shaped air bag (312) on the outer ring of the disc (311), the arc-shaped air bag (312) is fixedly connected with the disc (311), and the disc (311) is fixedly connected with an output shaft of the motor (22);

one end of the sliding groove (321) is fixedly connected with an elastic membrane (4); the elastic membrane (4) is provided with a through hole, the middle part of the guide rod (36) is provided with a boss (361), and the boss (361) extrudes the elastic membrane (4) and can penetrate through the through hole in the elastic membrane (4);

or two arc-shaped elastic sheets (6) are symmetrically arranged at one end of the sliding groove (321), a boss (361) is arranged in the middle of the guide rod (36), and the arc-shaped elastic sheets (6) can clamp the guide rod (36) through the boss (361).

2. A magnetron sputtering apparatus as claimed in claim 1, wherein: one side of the boss (361) is provided with a taper.

3. A magnetron sputtering apparatus as claimed in claim 1, wherein: a group of grooves are formed in the side wall of the circular groove (5) of the mounting cam (31), and corresponding bulges are arranged on the outer side of the arc-shaped air bag (312).

4. A magnetron sputtering apparatus as claimed in claim 1, wherein: the middle part of the arc-shaped elastic sheet (6) is rotatably arranged on the turntable (32), the end of the arc-shaped elastic sheet (6) is hinged with one end of a connecting rod (7), the other end of the connecting rod (7) is hinged with a second sliding block (8), and the second sliding block (8) is slidably arranged on the turntable (32); the side edge of the first sliding block (35) is fixedly connected with a stop block (9); the stop block (9) is connected with the second sliding block (8) through a pull rope.