CN109055882A - A kind of blasting craft suitable for plasma spray coating - Google Patents
A kind of blasting craft suitable for plasma spray coating Download PDFInfo
- Publication number
- CN109055882A CN109055882A CN201810840858.7A CN201810840858A CN109055882A CN 109055882 A CN109055882 A CN 109055882A CN 201810840858 A CN201810840858 A CN 201810840858A CN 109055882 A CN109055882 A CN 109055882A
- Authority
- CN
- China
- Prior art keywords
- blasting
- sandblasting
- workpiece
- spray coating
- plasma spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/10—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for compacting surfaces, e.g. shot-peening
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
Abstract
The invention discloses a kind of blasting craft suitable for plasma spray coating, include the following steps: Step 1: cleaning removal of impurities and drying to workpiece substrate；Step 2: carrying out coated masking processing to workpiece non-spraying face；Step 3: the spray-coating surface sandblasting to the workpiece substrate fixed, blasting pressure is 0.2~0.4Mpa, and sandblasting height is 20~100cm.The present invention increases the roughness on workpiece substrate surface by blasting craft, and provides a kind of clean combination interface, helps to improve the quality of follow-up coating, improves intensity, the hardness of matrix, corrosion resistance, prolongs the service life at abrasion resistance properties.
Description
Technical field
The invention belongs to technical field of surface, and in particular to a kind of blasting craft suitable for plasma spray coating.
Background technique
During liquid crystal display panel or production of semiconductor products, usually by dry etch process to glass substrate and core
Piece performs etching, to make corresponding figure.While etching product, the environment of dry etching is to cavity body structure component and function
Energy component is similarly etched, and is removed and a large amount of dust particle, pollution etched rings frequent in use, being easy to produce
Border causes product etching numerous bad, and such component can not be reused.Therefore it needs to do in cavity and parts surface
Anticorrosive film layer provides the service life of excellent etching environment and increase cavity by regularly updating film layer.
Before spraying anticorrosive film layer, need to carry out preamble processing, to increase the roughness on workpiece substrate surface, and it is right
Surface contaminant carries out removing and reaches clean purpose, and otherwise anticorrosive film layer is not easy to adhere to；.
Summary of the invention
The present invention provides a kind of blasting craft suitable for plasma spray coating, it is therefore an objective to increase Substrate Surface Roughness,
Convenient for improving the quality of follow-up coating.
To achieve the goals above, the technical scheme adopted by the invention is as follows:
A kind of blasting craft suitable for plasma spray coating, includes the following steps:
Step 1: cleaning removal of impurities and drying to workpiece substrate；
Step 2: carrying out coated masking processing to workpiece non-spraying face；
Step 3: the spray-coating surface sandblasting to the workpiece substrate fixed, blasting pressure is 0.1~0.4Mpa, sandblasting height
For 20~100cm.
The workpiece is metal material, and blasting pressure is 0.2~0.3Mpa, and sandblasting height is 50~100cm.
The workpiece is ceramic material, and blasting pressure is 0.25~0.4Mpa, and sandblasting height is 20~50cm.
The workpiece sandblasting rear surface roughness is greater than 3.0 μm.
Workpiece cleaning removal of impurities and drying are first degreased to workpiece surface in the step 1, are washed, are then adopted later
It is dried up with nitrogen air gun；Top and the bottom electrode is cleaned using the face-side-back side-surface pure water cleaning way, later
It is dried up using nitrogen air gun, is dried for 24 hours under the conditions of 55-65 DEG C.
Described degrease is to use the soda-dip 13-20s of mass fraction 0.2% to degrease.
The mode of the sandblasting is robot arm automatic sand blasting, and blasting pressure is 0.2~0.4Mpa, the side of automatic sand blasting
Method is at the uniform velocity to move spray gun to carry out bow zig-zag path continuous moving, until surface scan finishes, next spray gun moving direction with
Last time it is vertical.
The sand of the sandblasting is the Alundum of 46-300 mesh.
Beneficial effects of the present invention: the present invention increases the roughness on workpiece substrate surface by blasting craft, and provides one
Kind clean combination interface, helps to improve the quality of follow-up coating, improve the adhesion strength of matrix, hardness, corrosion resistance,
Abrasion resistance properties prolong the service life.Present invention process is simple, and sandblasting is high-quality, and sandblasting is high-efficient, in addition to can satisfy sandblasting
The requirement of technique, sand can repeatedly use, and reduce cost, and improve work efficiency.The present invention can be used as
The inorganic coating surface prepared reduces the blasting method of roughness.
Specific embodiment
Below by the description to embodiment, specific embodiments of the present invention will be described in further detail, purpose
Being to aid in those skilled in the art has more complete, accurate and deep understanding to design of the invention, technical solution, and helps
In its implementation.
It etching in product, the component for constituting dry etching cavity environment is the ceramics and alloy part aluminium sheet of any surface finish, due to
Surface roughness degree is too small, and the bonding force of coating is insufficient, is not able to satisfy the requirement of application environment, it is therefore desirable to these workpiece tables
Face is handled, and roughness is increased, and the present invention provides the sandblastings of a kind of increase metal or ceramic component Substrate Surface Roughness
Method, it is coarse effectively to increase matrix surface, and can effective cleaning surface contaminant, to improve the combination of coating
Power effectively improves the resistance to corrosion of product, and wearability improves service life, has delayed the turnover frequency of cavity.Its technology
Scheme is as follows:
Firstly, checking before carrying out sandblasting to workpiece substrate component, product matrix surface situation is confirmed and to sandblasting position；It beats
Compression air valve is opened, checks whether air pressure is normal；Check sand blasting system, whether sand loading mesh number is accurate, and whether sand amount is enough, and cavity goes out
Whether sand is normal.Secondly, simply being cleaned to ceramics and metal (alloy) thin-plate member, concentration is used to soak for 0.2% lye
Stain 13-20s carries out secondary pressurized (0.2~0.4Mpa) to remove surface and oil contaminant (dip time is preferably 15s or so), with pure water
Cleaning, then with nitrogen air gun dry up, 55-65 DEG C drying 24 hours；For upper and lower part electrode clean, using face-side-
The back side-surface high pressure (2.4~3.4Mpa) pure water cleaning way, cleaned electrode are dried up, 55-65 DEG C with nitrogen air gun
It is 24 hours dry.Then, coated with spraying special adhesive tape to workpiece non-spraying face, workpiece is fixed, then workpiece substrate is sprayed
Sand is packed into 46~100 mesh (metal, ceramic thin pieces), 100~230 mesh (upper and lower electrode) artificial white fused alumina, by sandblasting in silo
Pressure is adjusted to 0.2~0.3Mpa (metal), 0.25~0.4Mpa (ceramics, upper/lower electrode) sandblasting height (pipette tips shaked out to work
The vertical range on part surface) it is 50~100cm (metal), 20~50cm (ceramics, upper/lower electrode).It is automatic using robotic spray gun
It first sprays one time, carries out surface finish measurement, roughness is greater than 3.0um, if be not inconsistent, continues sandblasting.After sandblasting,
Adhesive tape is removed to be dried up with pure water cleaning workpiece with air gun.Have the product of particular/special requirement for roughness, using 100 mesh,
The Alundum of 200 mesh, 300 mesh etc. carries out Coating Surface Roughness modification in a manner of manual sandblasting, and blasting pressure is adjusted to 0.1
~0.25Mpa, sandblasting distance are adjusted to 15~20cm, are at the uniform velocity moved spray gun and are carried out bow zig-zag path continuous moving, until surface
Scanned, next spray gun moving direction is vertical with last time, can obtain more even curface, and test roughness reduces
To requirement.
It is described in detail below by specific example:
Embodiment 1
A kind of blasting method increasing metal parts Substrate Surface Roughness, includes the following steps:
(1) it is checked before carrying out sandblasting to workpiece substrate component, confirms product matrix surface situation and to sandblasting position；It opens
Air valve is compressed, checks whether air pressure is normal；Check sand blasting system, whether sand loading mesh number is accurate, and whether sand amount is enough, and cavity shakes out
It is whether normal.If all going well, next step operation is carried out.
(2) alloy thin-plate member is simply cleaned, using concentration is 0.2% soda-dip 15s to remove surface oil
Dirt carries out secondary pressurized with pure water and cleans, then dried up with nitrogen air gun；Face-side-back is used for upper and lower part electrode
Face-surface High Pressure Pure Water cleaning way, cleaned electrode, with nitrogen air gun dry up, 55 DEG C drying 24 hours.
(3) coated with spraying special adhesive tape to workpiece non-spraying face, workpiece is fixed, then to workpiece substrate sandblasting, sand
It is packed into the artificial white fused alumina of 46 mesh in tank, blasting pressure is adjusted to 0.25Mpa, the sandblasting height (pipette tips shaked out to workpiece surface
Vertical range) it is 55cm.It is first sprayed one time automatically using robotic spray gun, carries out surface finish measurement, roughness is greater than 3.0um
If be not inconsistent, continue sandblasting.After sandblasting, removes adhesive tape and dried up with pure water cleaning workpiece with air gun.
Embodiment 2
A kind of blasting method increasing ceramic component Substrate Surface Roughness, includes the following steps:
(1) it is checked before carrying out sandblasting to workpiece substrate component, confirms product matrix surface situation and to sandblasting position；It opens
Air valve is compressed, checks whether air pressure is normal；Check sand blasting system, whether sand loading mesh number is accurate, and whether sand amount is enough, and cavity shakes out
It is whether normal.If all going well, next step operation is carried out.
(2) ceramic thin plate component is simply cleaned, using concentration is 0.2% soda-dip 15s to remove surface oil
Dirt, with pure water carry out secondary pressurized clean, then with nitrogen air gun dry up, 55 DEG C drying 24 hours.
(3) coated with spraying special adhesive tape to workpiece non-spraying face, workpiece is fixed, then to workpiece substrate sandblasting, sand
It is packed into the artificial white fused alumina of 46 mesh in tank, blasting pressure is adjusted to 0.3Mpa, sandblasting height (hang down by the pipette tips shaked out to workpiece surface
Straight distance) it is 45cm.It is first sprayed one time automatically using robotic spray gun, carries out surface finish measurement, roughness is greater than 3.0um
Can, if be not inconsistent, continue sandblasting.After sandblasting, removes adhesive tape and dried up with pure water cleaning workpiece with air gun.
Matrix after sandblasting through the foregoing embodiment, corrosion resistance and intensity, hardness are improved, and service life can mention
It is 2-4 times high, later again spray-on coating when, the binding force between coating and workpiece substrate reaches 8MPa or more, with excellent resistance to
Plasma etching gas attack performance.
The present invention is exemplarily described above.Obviously, present invention specific implementation is not subject to the restrictions described above.
As long as using the improvement for the various unsubstantialities that the inventive concept and technical scheme of the present invention carry out；Or it is not improved, it will
Above-mentioned conception and technical scheme of the invention directly apply to other occasions, within the scope of the present invention.
Claims (8)
1. a kind of blasting craft suitable for plasma spray coating, which comprises the steps of:
Step 1: cleaning removal of impurities and drying to workpiece substrate；
Step 2: carrying out coated masking processing to workpiece non-spraying face；
Step 3: the spray-coating surface sandblasting to the workpiece substrate fixed, blasting pressure is 0.1~0.4Mpa, and sandblasting height is 20
~100cm.
2. being suitable for the blasting craft of plasma spray coating according to claim 1, which is characterized in that the workpiece is metal
Material, blasting pressure are 0.2~0.3Mpa, and sandblasting height is 50~100cm.
3. being suitable for the blasting craft of plasma spray coating according to claim 1, which is characterized in that the workpiece is ceramics
Material, blasting pressure are 0.25~0.4Mpa, and sandblasting height is 20~50cm.
4. being suitable for the blasting craft of plasma spray coating according to claim 1, which is characterized in that after the workpiece sandblasting
Surface roughness is greater than 3.0 μm.
5. being suitable for the blasting craft of plasma spray coating according to claim 1, which is characterized in that work in the step 1
Part cleaning removal of impurities and drying are first degreased to workpiece surface, are washed later, are then dried up using nitrogen air gun；To top and the bottom
Electrode is cleaned using the face-side-back side-surface pure water cleaning way, is dried up later using nitrogen air gun, 55-65
It is dried for 24 hours under the conditions of DEG C.
6. being suitable for the blasting craft of plasma spray coating according to claim 5, which is characterized in that described degrease be
Use the soda-dip 13-20s of mass fraction 0.2% to degrease.
7. being suitable for the blasting craft of plasma spray coating according to claim 1, which is characterized in that the mode of the sandblasting
For robot arm automatic sand blasting, blasting pressure is 0.2~0.4Mpa, and the method for automatic sand blasting is at the uniform velocity to move spray gun to be bent
Zig-zag path continuous moving, until surface scan finishes, next spray gun moving direction is vertical with last time.
8. being suitable for the blasting craft of plasma spray coating according to claim 7, which is characterized in that the sand of the sandblasting
For the Alundum of 46~300 mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810840858.7A CN109055882A (en) | 2018-07-27 | 2018-07-27 | A kind of blasting craft suitable for plasma spray coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810840858.7A CN109055882A (en) | 2018-07-27 | 2018-07-27 | A kind of blasting craft suitable for plasma spray coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109055882A true CN109055882A (en) | 2018-12-21 |
Family
ID=64836626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810840858.7A Pending CN109055882A (en) | 2018-07-27 | 2018-07-27 | A kind of blasting craft suitable for plasma spray coating |
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| Country | Link |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110524431A (en) * | 2019-07-18 | 2019-12-03 | 浙江博蓝特半导体科技股份有限公司 | A kind of sapphire substrate sheet defect on back side regeneration treating method and sand blasting unit |
| CN111993287A (en) * | 2020-07-31 | 2020-11-27 | 上海富乐德智能科技发展有限公司 | Regeneration method of anodic oxidation part in dry etching equipment for semiconductor |
| CN112521183A (en) * | 2020-11-30 | 2021-03-19 | 合肥微睿光电科技有限公司 | Meltallizing method of ceramic piece for dry etching process |
| CN112553559A (en) * | 2020-12-07 | 2021-03-26 | 苏州众芯联电子材料有限公司 | Base material plasma spraying process |
| CN113471081A (en) * | 2021-06-17 | 2021-10-01 | 江苏富乐德半导体科技有限公司 | Method for improving poor appearance of ceramic copper-clad carrier plate after high-temperature sintering |
| CN114774918A (en) * | 2022-04-25 | 2022-07-22 | 苏州众芯联电子材料有限公司 | Manufacturing process of semiconductor dry etching equipment component |
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| US20030118731A1 (en) * | 2001-12-21 | 2003-06-26 | Applied Materials, Inc. | Method of fabricating a coated process chamber component |
| CN101240408A (en) * | 2008-01-30 | 2008-08-13 | 上海君山表面技术工程股份有限公司 | Furnace roller and manufacturing method thereof |
| CN101782106A (en) * | 2010-03-18 | 2010-07-21 | 苏州至顺表面科技有限公司 | Insulation bearing with ceramic coating and preparation method thereof |
| CN102259080A (en) * | 2010-05-25 | 2011-11-30 | 王安伟 | Mechanical spray-coating method for large annular part |
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2018
- 2018-07-27 CN CN201810840858.7A patent/CN109055882A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118731A1 (en) * | 2001-12-21 | 2003-06-26 | Applied Materials, Inc. | Method of fabricating a coated process chamber component |
| CN101240408A (en) * | 2008-01-30 | 2008-08-13 | 上海君山表面技术工程股份有限公司 | Furnace roller and manufacturing method thereof |
| CN101782106A (en) * | 2010-03-18 | 2010-07-21 | 苏州至顺表面科技有限公司 | Insulation bearing with ceramic coating and preparation method thereof |
| CN102259080A (en) * | 2010-05-25 | 2011-11-30 | 王安伟 | Mechanical spray-coating method for large annular part |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110524431A (en) * | 2019-07-18 | 2019-12-03 | 浙江博蓝特半导体科技股份有限公司 | A kind of sapphire substrate sheet defect on back side regeneration treating method and sand blasting unit |
| CN111993287A (en) * | 2020-07-31 | 2020-11-27 | 上海富乐德智能科技发展有限公司 | Regeneration method of anodic oxidation part in dry etching equipment for semiconductor |
| CN112521183A (en) * | 2020-11-30 | 2021-03-19 | 合肥微睿光电科技有限公司 | Meltallizing method of ceramic piece for dry etching process |
| CN112553559A (en) * | 2020-12-07 | 2021-03-26 | 苏州众芯联电子材料有限公司 | Base material plasma spraying process |
| CN113471081A (en) * | 2021-06-17 | 2021-10-01 | 江苏富乐德半导体科技有限公司 | Method for improving poor appearance of ceramic copper-clad carrier plate after high-temperature sintering |
| CN114774918A (en) * | 2022-04-25 | 2022-07-22 | 苏州众芯联电子材料有限公司 | Manufacturing process of semiconductor dry etching equipment component |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181221 |
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| RJ01 | Rejection of invention patent application after publication |