CN109048658A - A kind of dedicated wafer barreling process equipment of LED production - Google Patents
A kind of dedicated wafer barreling process equipment of LED production Download PDFInfo
- Publication number
- CN109048658A CN109048658A CN201810966036.3A CN201810966036A CN109048658A CN 109048658 A CN109048658 A CN 109048658A CN 201810966036 A CN201810966036 A CN 201810966036A CN 109048658 A CN109048658 A CN 109048658A
- Authority
- CN
- China
- Prior art keywords
- barreling
- fixed
- frame
- silicon crystal
- crystal bar
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/02—Machines or devices using grinding or polishing belts; Accessories therefor for grinding rotationally symmetrical surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/18—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/08—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing combined with fluid systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
- B24B55/08—Dust extraction equipment on grinding or polishing machines specially designed for belt grinding machines
Abstract
The present invention relates to a kind of LED to make dedicated wafer barreling process equipment, including bottom plate, rotary electric machine is equipped with by motor cabinet on bottom plate, barreling rotor plate is installed on the output shaft of rotary electric machine, the right end of barreling rotor plate is equipped with barreling executive device, barreling fixed device is installed, the left end of bottom plate is equipped with barreling auxiliary device in the middle part of barreling rotor plate.The present invention can solve existing silicon crystal bar during barrel finishing needs manually by existing equipment to silicon crystal bar carry out barreling processing, it needs manually to detect silicon crystal bar, it needs that manually silicon crystal bar is fixed, manual adjustment setting tool is needed for the silicon crystal bar of different size, it is complicated for operation, it is irregular that barreling manually is carried out to silicon crystal bar by tool, the accuracy of silicon crystal bar barreling is not can guarantee, it needs to carry out secondary detection to the silicon crystal bar after barreling, influence the using effect of silicon crystal bar, and the particle that silicon crystal bar barreling is fallen needs artificial progress clearing and retrieving.
Description
Technical field
The present invention relates to LED sealed in unit field, specifically a kind of LED makes dedicated wafer barrel finishing and sets
It is standby.
Background technique
Wafer is the main material for making LED, and wafer is by silicon crystal bar by dissection, and barreling, slice, chamfering polishes, sharp
Photoetching after packaging, becomes the base stock of integrated circuit factory --- silicon wafer, silicon crystal bar before and after barreling process all
It needs manually to measure detection to its specification, so that the wafer for guaranteeing that silicon crystal bar is made into complies with standard, while needing people
Work carries out barreling processing to silicon crystal bar by existing equipment, needs that manually silicon crystal bar is fixed, for the silicon of different size
Crystal bar needs manual adjustment setting tool, complicated for operation, manually irregular to silicon crystal bar progress barreling by tool, not can guarantee
The accuracy of silicon crystal bar barreling needs to carry out secondary detection to the silicon crystal bar after barreling, influences the using effect of silicon crystal bar, and silicon
The particle that crystal bar barreling is fallen needs artificial progress clearing and retrieving, and large labor intensity is low with working efficiency.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of LED to make dedicated wafer barreling process equipment, can solve
Certainly existing silicon crystal bar during barrel finishing needs manually by existing equipment to silicon crystal bar carry out barreling processing, need
Manually silicon crystal bar is detected, needs that manually silicon crystal bar is fixed, needs artificial adjust for the silicon crystal bar of different size
Setting tool is saved, it is complicated for operation, it is manually irregular to silicon crystal bar progress barreling by tool, it not can guarantee the essence of silicon crystal bar barreling
True property needs to carry out secondary detection to the silicon crystal bar after barreling, influences the using effect of silicon crystal bar, and that silicon crystal bar barreling is fallen
Grain need it is artificial carry out clearing and retrieving, it is smart that silicon crystal bar automation has may be implemented in the problems such as large labor intensity is low with working efficiency
The function of true barrel finishing can guarantee the accuracy of silicon crystal bar barreling without human intervention, and have easy to operate, labour
The advantages that intensity is small and work efficiency is high.
To achieve the goals above, the present invention is realized using following technical scheme: a kind of dedicated wafer roll of LED production
Grind process equipment, including bottom plate is equipped with rotary electric machine by motor cabinet on bottom plate, rolling is equipped on the output shaft of rotary electric machine
Rotor plate is ground, the right end of barreling rotor plate is equipped with barreling executive device, barreling fixed device is installed in the middle part of barreling rotor plate,
The left end of bottom plate is equipped with barreling auxiliary device, and the lower end of the barreling rotor plate is provided with barreling rotating bar, barreling rotating bar
Lower end be connected with barreling sliding slot by sliding matching mode, barreling sliding slot is mounted on bottom plate, by existing equipment by silicon wafer
Stick is placed on the fixed device of barreling, and the fixed device of barreling can be fixed the lower end of silicon crystal bar, barreling auxiliary device pair
The upper end of silicon crystal bar is pushed against, and rotary electric machine work drives the rotation of barreling executive device, mistake of the barreling executive device in rotation
Carry out barreling operation to the surface of silicon crystal bar in journey reduces the labor intensity of staff, improves work without human intervention
The efficiency of work.
The fixed device of the barreling includes the fixation column spinner being mounted on barreling rotor plate by bearing, fixed column spinner
It for hollow shell structure, fixes on column spinner and is evenly arranged with secured adjusted slot along its circumferential direction, be provided in secured adjusted slot solid
Determine regulating mechanism, fixed pusher cylinder is installed on the inner wall of fixed column spinner, the top of fixed pusher cylinder is pacified by flange
On fixed bogie, cooperates and move between fixed bogie and secured adjusted mechanism.Secured adjusted mechanism packet
The fixed feeding frame being mounted in secured adjusted slot by sliding matching mode is included, the lower end of fixed feeding frame is equipped with fixed tune
Locking nub, secured adjusted block from it is interior be outward upward incline structure, be equipped between secured adjusted block and the inner wall of fixed column spinner
Fixed telescopic rod, fixes on telescopic rod and is arranged with fixed reset spring, and fixed telescopic rod plays limit to secured adjusted block
The upper end of effect, fixed feeding frame is equipped with fixed board, and fixed operation slot, the side wall of fixed board are provided on fixed board
On fixed operation cylinder is installed, the top of fixed operation cylinder is mounted on fixed falsework, fixed falsework position by flange
In fixing in work nest, it is convex structure that fixed falsework, which is located at one end on the inside of fixed work nest, and fixes falsework
Rubber block is provided on side wall, the fixed bogie is in cross-shaped structure, and the top end of fixed bogie is pacified by bearing
Equipped with fixed driven roller, and fixed driven roller is resisted against on secured adjusted block, and silicon crystal bar is placed into fixation by existing equipment
On column spinner, fixed pusher cylinder controls fixed bogie and carries out elevating movement, and fixed bogie is in the process of movement and solid
Determining mutual cooperation operation between reset spring drives fixed feeding frame that movement is adjusted, and fixed operation cylinder drives fixed work
Frame work carries out gripping operation to the lower end of silicon crystal bar, it is ensured that the carry out barreling operation that silicon crystal bar can be stable, Neng Gouyou
The efficiency of the raising work of effect, reduces the labor intensity of staff.
The barreling executive device includes the barreling reference frame being mounted on barreling rotor plate, and barreling is set in the middle part of frame
It is equipped with barreling regulating tank, barreling regulating mechanism is provided in barreling regulating tank, barreling passes through referring between frame and barreling rotor plate
Sliding matching mode is connected with execution mounting rack, executes and is connected with execution spring between the inner wall of mounting rack and barreling referring to frame,
It executes and execution driving motor is equipped with by motor cabinet on the inner wall of mounting rack, execute and pass through shaft coupling on the output shaft of driving motor
Device is connected with the lower end for executing lead screw, and the upper end for executing lead screw is mounted on by bearing to be executed on mounting rack, executes and sets on lead screw
It is equipped with execution sliding block, sliding block is executed and is connected by sliding matching mode with mounting rack is executed, is equipped on execution sliding block and executes work
Industry frame executes and is provided with dust removal port on the side wall of operation frame, and design has dedusting mechanism at dust removal port, executes and is provided on operation frame
Executing agency, executing agency are located at the surface of dedusting mechanism, and the barreling regulating mechanism includes being mounted on to execute on sliding block
Interlocking bar is adjusted, interlocking bar is adjusted and is located in barreling regulating tank, adjusts and adjusting follower lever is connected with by pin shaft in interlocking bar, adjust
Section follower lever is mounted on by bearing and is adjusted on rotor plate, is adjusted rotor plate and is mounted on the output shaft for adjusting work drive motor, adjusts
Section work drive motor is mounted on barreling referring on frame by motor cabinet, and the dedusting mechanism includes the dedusting being mounted in dust removal port
Pipe, the lower end of dust removing tube, which is threadably secured, is connected with dust settling pocket, executes and is connected to dust excluding hood, dedusting by bearing pin chain on operation frame
The upper end of cover is arc-shaped bend structure, and dedusting ball is provided on the side wall of dust excluding hood, dust excluding hood and execute operation frame it
Between by bearing pin chain be connected to dedusting adjust cylinder.The executing agency includes being mounted on two executed on operation frame to execute fixation
Frame, two execute fixed frame and are symmetrically positioned in the front and rear sides for executing operation frame, are installed by bearing on each execution fixed frame
There is an execution barreling roller, is mounted between the execution barreling roller that two execute on barreling frame and is provided with execution barreling band, be located at
The execution barreling roller for executing operation frame front end is connected by shaft coupling with the output shaft for executing barreling motor, and it is logical to execute barreling motor
It crosses motor cabinet to be mounted on execution fixed frame, barreling plays the role of reference during barreling silicon crystal bar referring to frame, holds
The control of row driving motor executes sliding block and moves up and down, and executes sliding block and drives executing agency to silicon crystal bar in the process of moving
Surface carry out barreling operation, execute barreling motor control execute barreling band silicon crystal bar surface is processed, on dedusting mechanism
Dedusting adjust cylinder control dust excluding hood stick on silicon crystal bar, dedusting ball can be pasted during operation with assisted dust-collecting cover
It leans against and is rotated on silicon crystal bar, the particle fallen in tumbling process is transported in dust settling pocket by dust excluding hood, and in barreling operation
In the process, according to actual operation, work drive motor is adjusted by adjusting rotor plate control and regulation follower lever and carries out rotation adjusting,
It adjusts follower lever and adjusts to cooperate between interlocking bar and effective barreling work is carried out to silicon crystal bar to control and execute barreling band
Industry, it is ensured that the error of silicon crystal bar can control in effective range after barreling, and automation adjusts operation, without artificial behaviour
Make, improves the precision of silicon crystal bar barreling, reduce the labor intensity of staff, improve the efficiency of work.
The barreling auxiliary device includes the assisted diversion motor being mounted on bottom plate by motor cabinet, assisted diversion motor
Output shaft on assisted diversion plate is installed, assistance for lifting cylinder, the top of assistance for lifting cylinder are installed on assisted diversion plate
It is mounted on assistance for lifting frame by flange, auxiliary telescopic cylinder, auxiliary telescopic cylinder is installed on the side wall of assistance for lifting frame
Top be mounted on auxiliary support frame by flange, be provided with less important work hole on auxiliary support frame, lead in less important work hole
It crosses sliding matching mode and auxiliary is installed against frame, auxiliary is in inverted T-type structure against frame, and auxiliary is enclosed with against the lower end of frame
Rubber, auxiliary are provided with spring-assisted reduction between frame and auxiliary support frame, and auxiliary is set against the upper end of frame by bearing
It is equipped with help roll, back work plate is provided with by pin shaft on auxiliary support frame, back work plate is resisted against the outer wall of help roll
On, and back work cylinder is connected with by pin shaft between back work plate and auxiliary support frame.The auxiliary is against the straight of frame
Diameter is less than the diameter in less important work hole, cooperates and makees between assisted diversion motor, assistance for lifting cylinder and auxiliary telescopic cylinder
Industry can control auxiliary support frame and be rotated, go up and down adjusting with flexible three degree of freedom, to guarantee that auxiliary is transported against frame
Specified operating position is moved, operation is adjusted in back work cylinder control back work plate, and back work plate and auxiliary are multiple
Mutual cooperation operation carries out abutting fixed operation against upper end of the frame to silicon crystal bar with dynamic auxiliary between the spring of position, without artificial behaviour
Make, reduces the labor intensity of staff, improve the efficiency of work.
When work, silicon crystal bar is placed on fixed column spinner by existing equipment first, fixed pusher cylinder control is solid
Determine bogie and carry out elevating movement, fixes the bogie mutual cooperation operation band between fixed reset spring in the process of movement
Movement is adjusted in dynamic fixed feeding frame, and fixed operation cylinder drives fixed falsework work to clamp the lower end of silicon crystal bar
Fixed operation, it is ensured that the carry out barreling operation that silicon crystal bar can be stable, assisted diversion motor, auxiliary on barreling auxiliary device rise
Mutual cooperation operation can control auxiliary support frame and be rotated, gone up and down and stretched three between sending down abnormally ascending cylinder and auxiliary telescopic cylinder
The adjusting of freedom degree, to guarantee to assist moving to specified operating position against frame, back work cylinder controls back work
Operation is adjusted in plate, and mutual cooperation operation band dynamic auxiliary is against frame to silicon crystal bar between back work plate and spring-assisted reduction
Upper end carry out abutting fixed operation, barreling executive device work, barreling plays during barreling silicon crystal bar referring to frame
The effect of reference executes driving motor control execution sliding block and moves up and down, and execution sliding block drives in the process of moving to be held
Row mechanism carries out barreling operation to the surface of silicon crystal bar, executes barreling motor control execution barreling band and adds to silicon crystal bar surface
Work, the dedusting on dedusting mechanism adjust cylinder control dust excluding hood and stick on silicon crystal bar, and dedusting ball can during operation
It being sticked on silicon crystal bar and is rotated with assisted dust-collecting cover, the particle fallen in tumbling process is transported in dust settling pocket by dust excluding hood,
And during barreling operation, according to actual operation, it is driven by adjusting rotor plate control and regulation to adjust work drive motor
Bar carries out rotation adjusting, adjust follower lever and adjust cooperate to control between interlocking bar execute barreling band to silicon crystal bar into
The effective barreling operation of row, it is ensured that the error of silicon crystal bar can control in effective range after barreling, and silicon may be implemented
Crystal bar automates the function of accurate barrel finishing.
The beneficial effects of the present invention are:
1, the present invention can solve existing silicon crystal bar during barrel finishing needs manually by existing equipment pair
Silicon crystal bar carries out barreling processing, needs manually to detect silicon crystal bar, needs that manually silicon crystal bar is fixed, for difference
The silicon crystal bar of specification needs manual adjustment setting tool, complicated for operation, manually irregular to silicon crystal bar progress barreling by tool,
The accuracy that not can guarantee silicon crystal bar barreling needs to carry out secondary detection to the silicon crystal bar after barreling, influences the use of silicon crystal bar
Effect, and the particle that falls of silicon crystal bar barreling need it is artificial carry out clearing and retrieving, the problems such as large labor intensity is low with working efficiency can
To realize the function that silicon crystal bar automates accurate barrel finishing, without human intervention, it can guarantee the accurate of silicon crystal bar barreling
Property, and have many advantages, such as that easy to operate, labor intensity is small and work efficiency is high.
2, the present invention devises the fixed device of barreling and barreling auxiliary device, the fixed device of barreling and barreling auxiliary device it
Between the movement that cooperates clamping operation can be fixed for the silicon crystal bar of different size, it can be ensured that silicon crystal bar is made in barreling
Stability during industry is not necessarily to manual control stationary fixture, and easy to operate.
3, the present invention devises barreling executive device, mistake of the barreling reference frame in barreling executive device in barreling silicon crystal bar
Play the role of in journey reference guarantee silicon crystal bar can a barreling molding, it is ensured that the accuracy of silicon crystal bar barreling, can from
The silicon crystal bar particle that dynamicization recycling barreling is fallen reduces the labor intensity of staff, improves without manually carrying out cleaning collection
The efficiency of work.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the structural schematic diagram between barreling rotor plate of the present invention and barreling executive device；
Fig. 3 is the structural schematic diagram between barreling rotor plate of the present invention and the fixed device of barreling；
Specific embodiment
In order to be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, tie below
Conjunction is specifically illustrating, and the present invention is further explained.
As shown in Fig. 1 to Fig. 3, a kind of LED makes dedicated wafer barreling process equipment, including bottom plate 1, leads on bottom plate 1
It crosses motor cabinet and rotary electric machine 2 is installed, barreling rotor plate 3, the right side of barreling rotor plate 3 are installed on the output shaft of rotary electric machine 2
End is equipped with barreling executive device 4, the fixed device 5 of barreling is equipped in the middle part of barreling rotor plate 3, the left end of bottom plate 1 is equipped with rolling
Auxiliary device 6 is ground, the lower end of the barreling rotor plate 3 is provided with barreling rotating bar 31, and the lower end of barreling rotating bar 31 passes through cunning
Dynamic fit system is connected with barreling sliding slot 32, and barreling sliding slot 32 is mounted on bottom plate 1, is placed into silicon crystal bar by existing equipment
On the fixed device 5 of barreling, the fixed device 5 of barreling can be fixed the lower end of silicon crystal bar, and barreling auxiliary device 6 is to silicon crystal bar
Upper end pushed against, rotary electric machine 2 work drive barreling executive device 4 rotate, barreling executive device 4 is in the course of rotation
Carry out barreling operation to the surface of silicon crystal bar reduces the labor intensity of staff, improves work without human intervention
Efficiency.
The fixed device 5 of the barreling includes the fixation column spinner 51 being mounted on barreling rotor plate 3 by bearing, fixed rotation
Rotary column 51 is hollow shell structure, is evenly arranged with secured adjusted slot along its circumferential direction on fixed column spinner 51, in secured adjusted slot
It is provided with secured adjusted mechanism 52, fixed pusher cylinder 53, fixed pusher cylinder 53 are installed on the inner wall of fixed column spinner 51
Top be mounted on fixed bogie 54 by flange, cooperate and transport between fixed bogie 54 and secured adjusted mechanism 52
It is dynamic.The secured adjusted mechanism 52 includes the fixed feeding frame 521 being mounted in secured adjusted slot by sliding matching mode, Gu
Surely the lower end for feeding frame 521 is equipped with secured adjusted block 522, secured adjusted block 522 from it is interior be outward upward incline structure, it is fixed
Fixed telescopic rod 523 is installed between adjusting block 522 and the inner wall of fixed column spinner 51, is arranged on fixed telescopic rod 523 solid
Determine reset spring 524, fixed telescopic rod 523 plays the role of limit to secured adjusted block 522, fixed to feed the upper of frame 521
End is equipped with fixed board 525, and fixed operation slot is provided on fixed board 525, is equipped on the side wall of fixed board 525 solid
It is set for industry cylinder 526, the top of fixed operation cylinder 526 is mounted on fixed falsework 527, fixed falsework 527 by flange
Positioned at fixing in work nest, it is convex structure that fixed falsework 527, which is located at one end on the inside of fixed work nest, and fixes work
Rubber block is provided on the side wall of frame 527, the fixed bogie 54 is in cross-shaped structure, and the top end of fixed bogie 54 is equal
Fixed driven roller 541 is installed by bearing, and fixed driven roller 541 is resisted against on secured adjusted block 522, passes through existing equipment
Silicon crystal bar is placed on fixed column spinner 51, fixed pusher cylinder 53 controls fixed bogie 54 and carries out elevating movement, fixed
The mutual cooperation operation between fixed reset spring 524 drives fixed feeding frame 521 to carry out to bogie 54 in the process of movement
Movement is adjusted, fixed operation cylinder 526 drives the fixed work of falsework 527 to carry out gripping operation to the lower end of silicon crystal bar,
Ensure the carry out barreling operation that silicon crystal bar can be stable, can effectively improve the efficiency of work, reduce the labor of staff
Fatigue resistance.
The barreling executive device 4 includes the barreling reference frame 41 being mounted on barreling rotor plate 3, and barreling is referring to frame 41
Middle part is provided with barreling regulating tank, barreling regulating mechanism 7 is provided in barreling regulating tank, barreling is referring to frame 41 and barreling rotor plate
It is connected between 3 by sliding matching mode and executes mounting rack 42, executed between the inner wall of mounting rack 42 and barreling referring to frame 41
It is connected with and executes spring 43, execute and execution driving motor 44 is equipped with by motor cabinet on the inner wall of mounting rack 42, execute driving
It is connected by shaft coupling with the lower end for executing lead screw 45 on the output shaft of motor 44, the upper end for executing lead screw 45 is installed by bearing
On executing mounting rack 42, executes and be provided with execution sliding block 46 on lead screw 45, execute sliding block 46 by sliding matching mode and hold
Row mounting rack 42 is connected, and executes and is equipped with execution operation frame 47 on sliding block 46, executes and is provided with dedusting on the side wall of operation frame 47
Mouthful, design has dedusting mechanism 48 at dust removal port, executes and is provided with executing agency 49 on operation frame 47, executing agency 49 is located at dedusting
The surface of mechanism 48, the barreling regulating mechanism 7 include being mounted on the adjusting interlocking bar 71 executed on sliding block 46, adjust linkage
Bar 71 is located in barreling regulating tank, adjusts and is connected with adjusting follower lever 72 by pin shaft in interlocking bar 71, it is logical to adjust follower lever 72
It crosses bearing to be mounted on adjusting rotor plate 73, adjusts rotor plate 73 and be mounted on the output shaft for adjusting work drive motor 74, adjust work
Make motor 74 and barreling is mounted on referring on frame 41 by motor cabinet, the dedusting mechanism 48 includes the dedusting being mounted in dust removal port
Pipe 481, the lower end of dust removing tube 481, which is threadably secured, is connected with dust settling pocket 482, executes and is connected on operation frame 47 by bearing pin chain
The upper end of dust excluding hood 483, dust excluding hood 483 is arc-shaped bend structure, and dedusting ball is provided on the side wall of dust excluding hood 483
484, dedusting is connected to by bearing pin chain between dust excluding hood 483 and execution operation frame 47 and adjusts cylinder 485.The executing agency 49 wraps
The two execution fixed frames 491 for being mounted on and executing on operation frame 47 are included, two execution fixed frames 491 are symmetrically positioned in execution operation frame
47 front and rear sides are equipped with an execution barreling roller 492 by bearing on each execution fixed frame 491, are mounted on two
It executes to be provided between the execution barreling roller 492 on barreling frame and executes barreling band 493, positioned at the execution for executing 47 front end of operation frame
Barreling roller 492 is connected by shaft coupling with the output shaft for executing barreling motor 494, is executed barreling motor 494 and is pacified by motor cabinet
Mounted in executing on fixed frame 491, barreling plays the role of reference during barreling silicon crystal bar referring to frame 41, executes driving
The control of motor 44 executes sliding block 46 and moves up and down, and executes sliding block 46 and drives executing agency 49 to silicon wafer in the process of moving
The surface of stick carries out barreling operation, executes the control execution barreling band 493 of barreling motor 494 and processes to silicon crystal bar surface, removes
Dedusting in dirt mechanism 48 adjusts the control dust excluding hood 483 of cylinder 485 and sticks on silicon crystal bar, mistake of the dedusting ball 484 in operation
Cheng Zhongke is sticked on silicon crystal bar with assisted dust-collecting cover 483 and is rotated, and the particle fallen in tumbling process is conveyed by dust excluding hood 483
Into dust settling pocket 482, and during barreling operation, according to actual operation, adjusts work drive motor 74 and turned by adjusting
Movable plate 73 controls to adjust follower lever 72 and carries out rotation adjusting, adjust follower lever 72 and adjust cooperate between interlocking bar 71 to
Control executes barreling band 493 and carries out effective barreling operation to silicon crystal bar, it is ensured that the error of silicon crystal bar can be controlled after barreling
In effective range, automation adjusts operation and improves the precision of silicon crystal bar barreling without human intervention, reduce work system
The labor intensity for making personnel improves the efficiency of work.
The barreling auxiliary device 6 includes the assisted diversion motor 61 being mounted on bottom plate 1 by motor cabinet, assisted diversion
Assisted diversion plate 62 is installed on the output shaft of motor 61, assistance for lifting cylinder 63 is installed on assisted diversion plate 62, auxiliary rises
The top of sending down abnormally ascending cylinder 63 is mounted on assistance for lifting frame 64 by flange, is equipped with auxiliary telescopic on the side wall of assistance for lifting frame 64
The top of cylinder 65, auxiliary telescopic cylinder 65 is mounted on auxiliary support frame 66 by flange, is provided on auxiliary support frame 66
Less important work hole is equipped with auxiliary against frame 67 by sliding matching mode in less important work hole, and auxiliary is against frame 67 in inverted T shaped
Structure, and assist being enclosed with rubber against the lower end of frame 67, auxiliary is provided with auxiliary between frame 67 and auxiliary support frame 66
Reset spring 68, auxiliary are provided with help roll 69 by bearing against the upper end of frame 67, are set on auxiliary support frame 66 by pin shaft
It is equipped with back work plate 610, back work plate 610 is resisted against on the outer wall of help roll 69, and back work plate 610 and auxiliary branch
Back work cylinder 611 is connected with by pin shaft between support 66.The auxiliary is less than less important work hole against the diameter of frame 67
Diameter, mutual cooperation operation can control between assisted diversion motor 61, assistance for lifting cylinder 63 and auxiliary telescopic cylinder 65
Auxiliary support frame 66 rotated, goes up and down adjusting with flexible three degree of freedom, to guarantee that auxiliary moves to finger against frame 67
Fixed operating position, back work cylinder 611 control back work plate 610 and operation, back work plate 610 and auxiliary are adjusted
Mutual cooperation operation carries out abutting fixed operation against upper end of the frame 67 to silicon crystal bar with dynamic auxiliary between reset spring 68, is not necessarily to
Manual operation reduces the labor intensity of staff, improves the efficiency of work.
When work, silicon crystal bar is placed on fixed column spinner 51 by existing equipment first, fixed pusher cylinder 53 is controlled
It makes fixed bogie 54 and carries out elevating movement, fix the phase between fixed reset spring 524 in the process of movement of bogie 54
Mutual coordinating operation drives fixed feeding frame 521 that movement is adjusted, and fixed operation cylinder 526 drives fixed falsework 527 to work
The lower end of silicon crystal bar is carried out gripping operation, it is ensured that the carry out barreling operation that silicon crystal bar can be stable, barreling auxiliary device 6
On assisted diversion motor 61, mutual cooperation operation can control auxiliary between assistance for lifting cylinder 63 and auxiliary telescopic cylinder 65
Support frame 66 rotated, goes up and down adjusting with flexible three degree of freedom, to guarantee to assist moving to against frame 67 specified
Operating position, back work cylinder 611 control back work plate 610 and operation, back work plate 610 and auxiliary reset are adjusted
Mutual cooperation operation carries out abutting fixed operation against upper end of the frame 67 to silicon crystal bar with dynamic auxiliary between spring 68, and barreling executes
Device 4 works, and barreling plays the role of reference referring to frame 41 during barreling silicon crystal bar, executes driving motor 44 and controls
Sliding block 46 is executed to move up and down, execute sliding block 46 drive in the process of moving executing agency 49 to the surface of silicon crystal bar into
Row barreling operation executes the control execution barreling band 493 of barreling motor 494 and processes to silicon crystal bar surface, on dedusting mechanism 48
Dedusting adjust cylinder 485 control dust excluding hood 483 stick on silicon crystal bar, dedusting ball 484 can be auxiliary during operation
It helps dust excluding hood 483 to stick on silicon crystal bar to rotate, the particle fallen in tumbling process is transported to dust settling pocket by dust excluding hood 483
In 482, and during barreling operation, according to actual operation, adjusts work drive motor 74 and controlled by adjusting rotor plate 73
System adjusts follower lever 72 and carries out rotation adjusting, adjusts and cooperates to control execution between follower lever 72 and adjusting interlocking bar 71
Barreling band 493 carries out effective barreling operation to silicon crystal bar, it is ensured that the error of silicon crystal bar can be controlled effective after barreling
In the range of, the function that silicon crystal bar automates accurate barrel finishing is realized, solves existing silicon crystal bar in barrel finishing process
In needs manually by existing equipment to silicon crystal bar carry out barreling processing, need manually to detect silicon crystal bar, need
Manually silicon crystal bar is fixed, manual adjustment setting tool is needed for the silicon crystal bar of different size, manually by tool pair
Silicon crystal bar progress barreling is irregular, not can guarantee the accuracy of silicon crystal bar barreling, influences the using effect of silicon crystal bar, and silicon crystal bar
Particle that barreling is fallen needs manually to carry out the problems such as recycling large labor intensity is low with working efficiency, has reached purpose.
The basic principles, main features and advantages of the invention have been shown and described above.The technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, and only illustrating for the description in above embodiments and description is of the invention
Principle, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these change and change
Into all fall within the protetion scope of the claimed invention.The claimed scope of the invention is by appended claims and its equivalent
It defines.
Claims (8)
1. a kind of LED makes dedicated wafer barreling process equipment, including bottom plate (1), it is characterised in that: bottom plate passes through on (1)
Motor cabinet is equipped with rotary electric machine (2), and barreling rotor plate (3), barreling rotor plate are equipped on the output shaft of rotary electric machine (2)
(3) right end is equipped with barreling executive device (4), and barreling is equipped in the middle part of barreling rotor plate (3) and fixes device (5), bottom plate (1)
Left end barreling auxiliary device (6) are installed；
The barreling fixed device (5) includes the fixation column spinner (51) being mounted on barreling rotor plate (3) by bearing, fixed
Column spinner (51) is hollow shell structure, is evenly arranged with secured adjusted slot along its circumferential direction on fixed column spinner (51), fixed to adjust
It is provided with secured adjusted mechanism (52) in section slot, fixed pusher cylinder (53) is installed on the inner wall of fixed column spinner (51), Gu
The top for determining pusher cylinder (53) is mounted on fixed bogie (54) by flange, fixed bogie (54) and secured adjusted machine
Cooperate movement between structure (52)；
The barreling auxiliary device (6) includes the assisted diversion motor (61) being mounted on bottom plate (1) by motor cabinet, and auxiliary turns
It is equipped on the output shaft of motor (61) assisted diversion plate (62), assisted diversion plate is equipped with assistance for lifting cylinder on (62)
(63), the top of assistance for lifting cylinder (63) is mounted on assistance for lifting frame (64) by flange, the side of assistance for lifting frame (64)
It is equipped on wall auxiliary telescopic cylinder (65), the top of auxiliary telescopic cylinder (65) is mounted on auxiliary support frame (66) by flange
On, it is provided with less important work hole on auxiliary support frame (66), auxiliary is equipped with by sliding matching mode in less important work hole and is supported
By frame (67), auxiliary is in inverted T-type structure against frame (67), and assists being enclosed with rubber against the lower end of frame (67), auxiliary against
It is provided between frame (67) and auxiliary support frame (66) spring-assisted reduction (68), auxiliary passes through bearing against the upper end of frame (67)
It is provided with help roll (69), back work plate (610), back work plate is provided with by pin shaft on auxiliary support frame (66)
(610) it is resisted against on the outer wall of help roll (69), and is connected between back work plate (610) and auxiliary support frame (66) by pin shaft
It is connected to back work cylinder (611)；
The barreling executive device (4) includes barreling reference frame (41) being mounted on barreling rotor plate (3), and barreling is referring to frame
(41) be provided with barreling regulating tank in the middle part of, be provided in barreling regulating tank barreling regulating mechanism (7), barreling referring to frame (41) with
It is connected between barreling rotor plate (3) by sliding matching mode and executes mounting rack (42), executed mounting rack (42) and barreling is joined
Spring (43) are executed according to being connected between the inner wall of frame (41), executes to be equipped on the inner wall of mounting rack (42) by motor cabinet and hold
Row driving motor (44) executes and is connected by shaft coupling with the lower end for executing lead screw (45) on the output shaft of driving motor (44),
The upper end for executing lead screw (45) is mounted on by bearing to be executed on mounting rack (42), is executed and is provided with execution sliding block on lead screw (45)
(46), sliding block (46) are executed and are connected by sliding matching mode with mounting rack (42) are executed, executes to be equipped on sliding block (46) and hold
Row operation frame (47) executes and is provided with dust removal port on the side wall of operation frame (47), and design has dedusting mechanism (48) at dust removal port, holds
It is provided on row operation frame (47) executing agency (49), executing agency (49) is located at the surface of dedusting mechanism (48).
2. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: the rolling
Mill regulating mechanism (7) includes being mounted on the adjusting interlocking bar (71) executed on sliding block (46), adjusts interlocking bar (71) and is located at barreling
It in regulating tank, adjusts and adjusting follower lever (72) is connected with by pin shaft on interlocking bar (71), adjust follower lever (72) and pass through bearing
It is mounted on and adjusts on rotor plate (73), adjust rotor plate (73) and be mounted on the output shaft for adjusting work drive motor (74), adjust work
Make motor (74) and barreling is mounted on referring on frame (41) by motor cabinet.
3. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: described to remove
Dirt mechanism (48) includes the dust removing tube (481) being mounted in dust removal port, and the lower end of dust removing tube (481), which is threadably secured, to be connected with
Dust settling pocket (482) is executed and is connected to dust excluding hood (483) on operation frame (47) by bearing pin chain, and the upper end of dust excluding hood (483) is circular arc
Sigmoid structure, and dedusting ball (484) are provided on the side wall of dust excluding hood (483), dust excluding hood (483) and execution operation frame
(47) dedusting is connected to by bearing pin chain between and adjusts cylinder (485).
4. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: described to hold
Row mechanism (49) includes being mounted on the two execution fixed frames (491) executed on operation frame (47), two execution fixed frames (491)
The front and rear sides for executing operation frame (47) are symmetrically positioned in, one is equipped with by bearing on each execution fixed frame (491) and holds
Row barreling roller (492) is mounted between the execution barreling roller (492) that two execute on barreling frame and is provided with execution barreling band
(493), it is located at the execution barreling roller (492) for executing operation frame (47) front end by shaft coupling and executes barreling motor (494)
Output shaft is connected, and executes barreling motor (494) and is mounted in execution fixed frame (491) by motor cabinet.
5. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: described solid
Determining regulating mechanism (52) includes fixed feeding frame (521) being mounted in secured adjusted slot by sliding matching mode, it is fixed into
Be equipped with secured adjusted block (522) to the lower end of frame (521), secured adjusted block (522) from it is interior outward be upward incline structure, Gu
It is equipped with fixed telescopic rod (523) between locking nub of setting the tone (522) and the inner wall of fixed column spinner (51), fixed telescopic rod (523)
On be arranged with fixed reset spring (524), the upper end of fixed feeding frame (521) is equipped with fixed board (525), fixed board
(525) it is provided with fixed operation slot on, fixed operation cylinder (526), fixed operation are installed on the side wall of fixed board (525)
The top of cylinder (526) is mounted on fixed falsework (527) by flange, and fixed falsework (527) are located in fixed work nest,
It is convex structure that fixed falsework (527), which are located at one end on the inside of fixed work nest, and on the side wall of fixed falsework (527)
It is provided with rubber block.
6. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: described solid
Bogie (54) are determined in cross-shaped structure, and the top end of fixed bogie (54) passes through bearing and is equipped with fixed driven roller
(541), and fixed driven roller (541) are resisted against on secured adjusted block (522).
7. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: described auxiliary
Help the diameter for being less than less important work hole against the diameter of frame (67).
8. a kind of LED according to claim 1 makes dedicated wafer barreling process equipment, it is characterised in that: the rolling
The lower end of mill rotor plate (3) is provided with barreling rotating bar (31), the lower end of barreling rotating bar (31) by sliding matching mode with
Barreling sliding slot (32) is connected, and barreling sliding slot (32) is mounted on bottom plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810966036.3A CN109048658A (en) | 2018-08-23 | 2018-08-23 | A kind of dedicated wafer barreling process equipment of LED production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810966036.3A CN109048658A (en) | 2018-08-23 | 2018-08-23 | A kind of dedicated wafer barreling process equipment of LED production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109048658A true CN109048658A (en) | 2018-12-21 |
Family
ID=64756597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810966036.3A Pending CN109048658A (en) | 2018-08-23 | 2018-08-23 | A kind of dedicated wafer barreling process equipment of LED production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109048658A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112872964A (en) * | 2021-01-27 | 2021-06-01 | 李国筹 | Circular chopping board single-side grinding and chamfering device for wood processing |
| CN115070594A (en) * | 2022-05-07 | 2022-09-20 | 朱浩波 | Tapered roller quadruplex position precision molding system |
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| CN2880443Y (en) * | 2006-01-26 | 2007-03-21 | 秦建国 | Monocrystalline silicon rod square cutting and barelling processing machine tool |
| CN104440465A (en) * | 2014-09-03 | 2015-03-25 | 丁开明 | Angle head grinding machine |
| CN105014536A (en) * | 2015-08-14 | 2015-11-04 | 麦斯克电子材料有限公司 | Centering device for crystal bar before barrelling |
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| CN108067990A (en) * | 2017-12-11 | 2018-05-25 | 郑州国知网络技术有限公司 | A kind of high-efficiency rotating sanding apparatus |
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| CN2880443Y (en) * | 2006-01-26 | 2007-03-21 | 秦建国 | Monocrystalline silicon rod square cutting and barelling processing machine tool |
| CN104440465A (en) * | 2014-09-03 | 2015-03-25 | 丁开明 | Angle head grinding machine |
| CN105014536A (en) * | 2015-08-14 | 2015-11-04 | 麦斯克电子材料有限公司 | Centering device for crystal bar before barrelling |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112872964A (en) * | 2021-01-27 | 2021-06-01 | 李国筹 | Circular chopping board single-side grinding and chamfering device for wood processing |
| CN115070594A (en) * | 2022-05-07 | 2022-09-20 | 朱浩波 | Tapered roller quadruplex position precision molding system |
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Application publication date: 20181221 |