CN109048074B

CN109048074B - Rotary chip fixture with inclination angle

Info

Publication number: CN109048074B
Application number: CN201811039605.6A
Authority: CN
Inventors: 徐文峰; 廖晓玲; 杨梅; 李文艺
Original assignee: Chongqing University of Science and Technology
Current assignee: Chongqing University of Science and Technology
Priority date: 2018-09-06
Filing date: 2018-09-06
Publication date: 2023-06-06
Anticipated expiration: 2038-09-06
Also published as: CN109048074A

Abstract

The invention provides a rotary chip fixture with an inclined angle, which consists of a fixed area, a rotary area, a telescopic area and a movable area, and is characterized in that: the elastic device in the chip fixing area can be adjusted in a telescopic way according to the size of the chip, so that the processing of chips of different types is satisfied; the rotating area can change the chip processing angle; the telescopic area can be telescopic and also has a supporting function, so that the stability of the device is ensured. The moving area can meet the requirement of effective movement of the operation platform in two-dimensional space. The device has the function of displaying the moving position and the rotating angle, is convenient for operators to take out the chip at any time to check the processing condition and reset to continue processing.

Description

Rotary chip fixture with inclination angle

Technical Field

The invention relates to a multifunctional chip clamp, in particular to a novel rotary chip clamp with an inclined angle, which is used in the work of a laser photoetching machine and a laser engraving machine.

Technical Field

The laser engraving machine is needed for processing chips with different shapes. The design is input to a computer and then lithographically onto a chip substrate through a series of processes. However, many laser engraving machines do not have a fixture, and do not have a special chip fixture, so that the chip substrate to be processed cannot be fixed. In addition, the chip substrate may be inadvertently touched during operation, which may cause a change in the position of the lithography and even a failure of the lithography. And some chips are subjected to photoetching once, multiple times of photoetching are needed, and each time of photoetching is completed, the chips are taken down to check the processing condition. Furthermore, some special structures require a certain inclination angle, however, the conventional engraving machine can only vertically process, so that the chip to be processed can only be inclined to complete the processing of the special structure. After processing, the wafer is returned to the initial horizontal state to process other structures on the wafer. For the above, a special fixture of this type for chip processing is required. If the chip cannot be accurately restored to the initial position, difficulty is brought to accurate processing.

At present, a special chip fixture is lacking, and the requirements of various photoetching processes of the chip cannot be met, so that the special chip fixture capable of fixing the chip and tilting the chip is needed.

Disclosure of Invention

The invention aims to provide a multifunctional clamp capable of rotating, stretching and contracting in height, moving and obliquely fixing a chip, so as to meet the requirements of various processing technologies of the chip.

The technical scheme of the invention is that the rotary chip fixture with the inclination angle is divided into four overlapped parts of a fixed area, a rotary area, a telescopic area and a movable area according to functions. The method is characterized by comprising the following steps of.

The fixed area comprises a fixed table of a cylindrical platform and a round table-shaped supporting table which is connected with the lower surface of the fixed table and has a diameter slightly larger than the diameter of the fixed table. The round mandrel of the round surface plane of the fixed table coincides with the vertical central shaft of the supporting table, and a fixed table fixing shaft is arranged on the axis; the fixed table and the supporting table are respectively connected to the two ends of the fixed table fixing shaft, and the fixed table is connected with the supporting table. The fixed table can horizontally rotate with the fixed table fixing shaft. An annular dial fixed on the supporting table is matched and processed on the same horizontal plane of the upper surface plane of the fixed table or an outer ring lower than the upper surface plane of the fixed table. On the upper surface plane of the fixed table, 4 elastic devices are uniformly distributed and installed. The elastic arms of the 4 elastic devices point to the circle center from the round edge of the surface plane on the fixed table, and the top ends of the elastic devices mutually prop up together at the circle center of the surface plane on the fixed table, so that the whole elastic device is in a cross shape in overlook. The top ends of the elastic arms of the 4 elastic devices are provided with fixed blocks. When the fixed table is placed without chips, the elastic device is in a free telescopic state, and the fixed block is pushed to the center position in four directions. After the chip is placed, the chip is placed at the center, so that the elastic device is compressed, and the chip can be fixed at the center because the chip bears the elastic force of the elastic device.

The rotating area consists of a fixed table, a supporting table, a universal ball arranged at the inner part of the bottom end of the supporting table and a telescopic column matched with the lower part of the universal ball. The supporting bench bottom processing has the ball chamber of universal ball cooperation, can be connected and slide with the universal ball cooperation. The vertical ball mandrel in the universal ball is provided with a universal ball fixing shaft, and the lower end of the universal ball fixing shaft is inserted into the axis in the telescopic column. The universal ball fixing shaft is used for fixing the universal ball at the concave surface of the top of the telescopic column. And a universal ball locking device is arranged at the position of the universal ball at the lower part of the supporting table, which is matched with the ball cavity. The invention changes the chip processing angle by rotating the fixing area of the fixed chip: the fixed table realizes plane two-dimensional rotation, and the universal ball realizes three-dimensional space rotation. The accurate processing is convenient for operators. The invention ensures that the fixed table is fixed on the supporting table and can only rotate horizontally independently, and ensures that the fixed table and the supporting table are linked together. The universal ball is fixed on the telescopic column and can not rotate, and it is ensured that the fixed table and the supporting table are linked together to have a unique position value. If the universal ball and the supporting table can rotate independently, the positions of the supporting table and the fixed table are the results of the change of the two, and the position value is not easy to determine.

The telescopic area consists of a telescopic column and an upper sliding groove fixedly connected with the telescopic column. The telescopic column is formed by matching an inner cylinder and an outer cylinder together in a matched mode through rotary threads in a snap fit mode, or is formed by matching an inner cylinder and an outer cylinder in a tightly matched mode in a hydraulic sealing mode, and the hydraulic control device is arranged at the middle lower portion of the telescopic column. The bottom end part of the telescopic column is arranged and fixed in the groove of the upper sliding groove. When the operation fixing table needs to ascend, slowly screwing out the inner cylinder along the spiral lines clockwise; on the contrary, when the fixed table descends, the fixed table is screwed in the anticlockwise direction and ascends or descends in a spiral mode. Alternatively, the hydraulic lifting is adopted by the control of the hydraulic control device. The bottom part of the telescopic column is installed and fixed in the groove of the upper sliding groove, the upper sliding groove and the telescopic column can play a role in telescoping, and also play a role in supporting, so that the stability of the device is ensured.

The moving area is composed of an upper sliding groove, a supporting column, a lower sliding groove and a base. The telescopic column installed in the upper sliding groove can move along the upper sliding groove, the bottom in the middle of the upper sliding groove is firmly connected with the top of the supporting column, and the bottom end part of the supporting column is installed and fixed in the lower sliding groove and can move along the lower sliding groove. The horizontal direction of the lower sliding groove is mutually perpendicular to the horizontal direction of the upper sliding groove, and the lower sliding groove is fixedly arranged on the base; the base is fixed on the engraving machine through a fixing nut. A display device for displaying the horizontal position, the rotation angle and the inclination angle of the fixed table is arranged on the base. The telescopic column of the telescopic zone is fixed in the upper sliding groove, and the fixed table is moved by moving the telescopic column. The support column is installed and is fixed in lower sliding tray, removes whole operation platform through the removal support column, and go up sliding tray and lower sliding tray and mark the scale moreover, and the track shape, the size and the scale of two sliding trays are the same, and the horizontal and the longitudinal track direction of two sliding trays just like X, Y axle can satisfy the effective removal of operation platform's fixed station in two-dimensional space.

In the technical scheme, the upper surface plane of the fixed table is outside the positions of the 4 elastic devices, 1-4 levels are embedded and installed on the outer side of the round plane, and the plane of the levels is flush with the round upper surface plane of the fixed table. The design is convenient for grasping the processing state at any time and does not influence the fixedly processed chip. The circle of the dial is provided with dial scales, and the round edge of the surface plane on the corresponding fixed table is provided with marks of initial position points. This is a good indication and knowledge of the angle of rotation of the chip.

In the technical scheme, the surface of the round table of the supporting table is made of a transparent material, and a circle of longitude scale is processed on the transparent material; latitude lines parallel to each other are processed below the longitude scale. The universal ball is arranged in the middle of the vertical shaft of the ball body, and the ball body surface passing through the horizontal central shaft plane of the ball center is provided with a central shaft luminous line, so that the central shaft luminous line can emit monochromatic strong light. The surface of the round table made of the transparent material of the supporting table is provided with a transparent lamellar inclination angle positioner. The inclination angle positioner is tightly matched with the surface of the supporting table, and a positioning cross line is processed at the center of the inclination angle positioner. The dip angle positioner is matched with a universal ball with a central axis luminous line. The invention is used for determining the inclination direction and the inclination angle of the fixed table by a direct reading mode of order receiving: when the horizontal line and the latitude line of the cross line are overlapped in parallel, the inclination angle can be read, and the vertical line of the cross line reads the numerical value of the longitude scale, namely the inclination direction.

In the above technical scheme, the elastic device can stretch out and draw back according to the size of chip and adjust, satisfies the processing of different model chips. The surface of the fixed block is provided with a flexible protective layer. Not only can the antiskid strengthen the fixed stability of chip, and the surface is soft moreover, can not harm the chip when the chip is fixed.

The invention has the following beneficial effects: the fixture solves the problem of fixing the chip. Secondly, the fixture has four functions of tilting, rotating, stretching and horizontally moving, and helps operators to process chips in multiple directions and angles. The device has the functions of displaying the moving position and the rotating angle, and is convenient for operators to take out the chip at any time and then to process the chip continuously after checking.

Drawings

Fig. 1 is a schematic front view of a fixed table and a dial of the present invention not in the same horizontal plane.

Fig. 2 is a schematic right-side view of a fixed table and a dial of the present invention not in the same horizontal plane.

Fig. 3 is a schematic top view of the fixing table of the present invention.

Fig. 4 is a schematic top view of a holding table for holding a chip according to the present invention.

Fig. 5 is a schematic perspective view of a fixed table and a dial in the same horizontal plane.

Fig. 6 is a schematic perspective view of the fixed table and the dial working at the same horizontal tilt angle.

FIG. 7 is a schematic top view of the upper and lower sliding channels and base portion of the present invention.

Fig. 8 is a schematic view of a part of a structure of a fixed table and a telescopic section of the present invention.

Fig. 9 is a schematic view showing a partial structure of a spin ball according to the present invention.

Fig. 10 is a schematic structural view of a rotating and fixing shaft of a fixing table and a universal ball according to the present invention.

FIG. 11 is a schematic view of a universal ball capable of illuminating and a mating tilt positioner according to the present invention.

FIG. 12 is a schematic view of a light-emitting universal ball of the present invention used in combination with a support table and a tilt positioner.

In the figure: 1. a fixed table; 2. a dial; 3. a support table; 4. a telescopic column; 5. an upper sliding groove; 6. a support column; 7. a lower sliding groove; 8. a base; 9. an elastic device; 10. a fixed block; 11. a chip; 12. a dial scale; 13. a fixing nut; 14. a display; 15. a universal ball; 16. a universal ball locking device; 17. a level gauge; 18. a universal ball fixing shaft; 19. a fixed table fixing shaft; 20. the central axis emits light; 21. an inclination angle positioner; 22. positioning a cross wire; 23. latitude lines; 24. longitude scales.

DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION

Referring to the shape structure in fig. 1 to 12, the present invention provides a rotation type chip fixture with inclination angle. The device is divided into four overlapped parts of a fixed area, a rotating area, a telescopic area and a moving area according to functions, and is characterized in that.

The fixed area comprises a fixed table 1 of a cylindrical platform and a round table-shaped supporting table 3 with a circular top surface and a slightly larger diameter than the diameter of the fixed table 1, which is connected below the fixed table 1. The round mandrel of the round surface plane of the fixed table 1 coincides with the vertical central axis of the supporting table 3, and a fixed table fixing shaft 19 is arranged on the axis; the fixed table 1 and the supporting table 3 are connected to both ends of the fixed table fixing shaft 19, respectively, and the fixed table 1 and the supporting table 3 are connected to each other, so that the fixed table 1 can horizontally rotate with the fixed table fixing shaft 19. An annular dial 2 fixed on a supporting table 3 is matched and processed on the same horizontal plane of the upper surface plane of the fixed table 1 or the outer ring lower than the upper surface plane of the fixed table 1. On the upper surface plane of the fixed table 1, 4 elastic devices 9 are uniformly distributed and installed. The elastic arms of the 4 elastic devices 9 point to the circle center from the round edge of the upper surface plane of the fixed table 1, and the top ends of the elastic devices 9 mutually prop up together at the circle center of the upper surface plane of the fixed table 1, so that the whole elastic device 9 is crossed in overlooking. The top ends of the elastic arms of the 4 elastic devices 9 are provided with fixed blocks 10. When the chip 11 is not placed on the fixed table 1, the elastic device 9 is in a free telescopic state, and the fixed block 10 is pushed to the central position in four directions, as shown in fig. 3; after the chip 11 is placed, the chip 11 is placed at the center, so that the elastic device 9 is compressed, and the chip 11 can be fixed at the center because the chip 11 bears the elastic force of the elastic device 9, as shown in fig. 4.

The rotating area consists of a fixed table 1, a supporting table 3, a universal ball 15 arranged at the inner part of the bottom end of the supporting table, and a telescopic column 4 matched with the lower part of the universal ball 15. The bottom of the supporting table 3 is provided with a universal ball 15 matched with a ball cavity, and can be matched with the universal ball 15 for connection and sliding. A universal ball fixing shaft 18 is arranged on the vertical ball mandrel in the universal ball 15, and the lower end of the universal ball fixing shaft 18 is inserted into the axis in the telescopic column 4. The ball fixing shaft 18 fixes the ball 15 at the top concave surface of the telescopic column 4. At the position of the universal ball 15 at the lower part of the supporting table 3, which is matched with the ball cavity, a universal ball locking device 16 is arranged.

The telescopic area consists of a telescopic column 4 and an upper sliding groove 5 fixedly connected with the telescopic column 4. The telescopic column 4 is formed by matching an inner cylinder and an outer cylinder together in a matched mode through rotary threads in a snap fit mode, or is formed by matching an inner cylinder and an outer cylinder in a tightly matched mode in a hydraulic sealing mode, and a hydraulic control device is arranged at the middle lower portion of the telescopic column 4. The bottom end part of the telescopic column 4 is installed and fixed in the groove of the upper sliding groove 5. The bottom part of the telescopic column 4 is installed and fixed in the groove of the upper sliding groove 5, the upper sliding groove 5 and the telescopic column 4 can play a telescopic role, and also play a supporting role, so that the stability of the device is ensured.

The moving area is respectively composed of an upper sliding groove 5, a supporting column 6, a lower sliding groove 7 and a base 8. The telescopic column 4 installed in the upper sliding groove 5 can move along the upper sliding groove 5, the middle bottom of the upper sliding groove 5 is firmly connected with the top of the supporting column 6, and the bottom end part of the supporting column 6 is installed and fixed in the lower sliding groove 7 and can move along the lower sliding groove 7. The horizontal direction of the lower sliding groove 7 is mutually perpendicular to the horizontal direction of the upper sliding groove 5, and is fixedly arranged on the base 8. The base 8 is fixed to the engraving machine by means of a fixing nut 13. A display 14 for displaying the horizontal position, the rotation angle and the inclination angle of the fixed table 1 is mounted on the base 8. The telescopic column 4 of the telescopic zone is fixed in the upper sliding groove 5, and the fixed table 1 is moved by moving the telescopic column 4. The support column 6 is installed and fixed in the lower sliding groove 7, the whole operation platform is moved by moving the support column 6, scales are marked on the upper sliding groove 5 and the lower sliding groove 7, the track shapes, the sizes and the scales of the two sliding grooves are the same, and the transverse and longitudinal track directions of the two sliding grooves just like a X, Y shaft can meet the effective movement of the operation platform in a two-dimensional space.

According to the technical scheme, the upper surface plane of the fixed table 1 is outside the positions of the 4 elastic devices 9, 1-4 levels 17 are embedded and installed on the outer side of the round plane, and the plane of each level 17 is flush with the round upper surface plane of the fixed table 1. The circle of the dial 2 is provided with a dial scale 12, and the round edge of the surface plane on the corresponding fixed table 1 is provided with marks of initial position points.

In the above technical solution, the surface of the round table of the supporting table 3 is made of a transparent material, and a circle of longitude scale 24 is processed on the transparent material; latitude lines 23 parallel to each other are processed below the longitude scale 24; the universal ball 15 is arranged in the middle of the vertical axis of the ball body and passes through the surface of the horizontal center axis plane of the ball body for one circle, a center axis luminous line 20 is processed on the surface of the ball body, and the center axis luminous line 20 can emit monochromatic strong light. The surface of the round table made of the transparent material of the supporting table 3 is provided with a transparent lamellar inclination angle positioner 21, the inclination angle positioner 21 is tightly matched with the surface of the supporting table 3, and a positioning cross line 22 is processed at the center of the inclination angle positioner. The tilt positioner 21 is used in conjunction with a universal ball 15 having a central axis light-emitting line 20.

According to the technical scheme, the elastic device 9 can be used for carrying out telescopic adjustment according to the size of the chip 11, and processing of chips 11 of different models is met. The surface of the fixing block 10 is provided with a flexible protection layer, so that the fixing block is not only skid-proof and enhances the fixing stability of the chip 11, but also is soft in surface, and the chip 11 is not damaged when the chip 11 is fixed.

Finally, it is noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present invention, which is intended to be covered by the scope of the claims of the present invention.

Claims

1. The utility model provides a take rotary-type chip fixture in inclination, divide into four parts that have the overlap of fixed zone, rotatory district, flexible district, removal district according to the function, its characterized in that:

the fixed area comprises a fixed table of a cylindrical platform and a round table-shaped supporting table, wherein the round table-shaped supporting table is connected with the lower surface of the fixed table, and the diameter of the round table-shaped supporting table is slightly larger than that of the fixed table; the round mandrel of the round surface plane of the fixed table coincides with the vertical central shaft of the supporting table, and a fixed table fixing shaft is arranged on the axis; the two ends of the fixed table fixing shaft are respectively connected with the fixed table and the supporting table, the fixed table is connected with the supporting table, and the fixed table can horizontally rotate by the fixed table fixing shaft; an annular dial fixed on the supporting table is matched and processed on the same horizontal plane of the upper surface plane of the fixed table or an outer ring lower than the upper surface plane of the fixed table; 4 elastic devices are uniformly distributed and installed on the upper surface plane of the fixed table; the elastic arms of the 4 elastic devices point to the circle center from the round edge of the surface plane on the fixed table, the top ends of the elastic devices meet each other at the circle center of the surface plane on the fixed table and are propped together, so that the whole elastic device is crossed in overlooking; the top ends of the elastic arms of the 4 elastic devices are provided with fixed blocks;

the rotating area consists of a fixed table, a supporting table, a universal ball arranged in the bottom end of the supporting table, and a telescopic column matched with the lower part of the universal ball; the bottom of the supporting table is provided with a universal ball matching ball cavity which can be matched with the universal ball for connection and sliding; a universal ball fixing shaft is arranged on the vertical ball mandrel in the universal ball, and the lower end of the universal ball fixing shaft is inserted into the axis in the telescopic column; the universal ball fixing shaft is used for fixing the universal ball at the concave surface of the top of the telescopic column; a universal ball locking device is arranged at the position of the universal ball at the lower part of the supporting table, which is matched with the ball cavity;

the telescopic area consists of a telescopic column and an upper sliding groove fixedly connected with the telescopic column; the telescopic column is formed by two cylinders sleeved together in a matched mode through rotary threads in a snap fit mode, or the two cylinders sleeved together in a tightly matched mode are formed by hydraulic sealing in a matched mode, and the hydraulic control device is arranged at the middle lower portion of the telescopic column; the bottom end part of the telescopic column is arranged and fixed in the groove of the upper sliding groove;

the moving area consists of an upper sliding groove, a supporting column, a lower sliding groove and a base respectively; the telescopic column arranged in the upper sliding groove can move along the upper sliding groove, the middle bottom of the upper sliding groove is firmly connected with the top of the supporting column, and the bottom end part of the supporting column is fixedly arranged in the lower sliding groove and can move along the lower sliding groove; the horizontal direction of the lower sliding groove is mutually perpendicular to the horizontal direction of the upper sliding groove, and the lower sliding groove is fixedly arranged on the base; the base is fixed on the engraving machine through a fixing nut; a display device for displaying the horizontal position, the rotation angle and the inclination angle of the fixed table is arranged on the base.

2. The tilting-angle rotary-type chip fixture according to claim 1, wherein: the upper surface plane of the fixed table is outside the positions of the 4 elastic devices, 1-4 levels are embedded and installed near the outer side of the round plane, and the plane of the levels is flush with the round upper surface plane of the fixed table; the circle of the dial is provided with dial scales, and the round edge of the surface plane on the corresponding fixed table is provided with marks of initial position points.

3. The tilting-angle rotary-type chip fixture according to claim 1, wherein: the surface of the round table of the supporting table is made of a transparent material, and a circle of longitude scale is processed on the transparent material; latitude lines parallel to each other are processed below the longitude scale; the universal ball is arranged in the middle of the vertical shaft of the ball body, and a circle of ball body surface passing through the horizontal central shaft plane of the ball center is processed with central shaft luminous lines which can emit monochromatic strong light; the transparent lamellar inclination angle positioner is arranged on the surface of the round table made of the transparent material of the supporting table; the inclination angle positioner is tightly matched with the surface of the supporting table, and a positioning cross line is processed at the center of the inclination angle positioner; the dip angle positioner is matched with a universal ball with a central axis luminous line.

4. The tilting-angle rotary-type chip fixture according to claim 1, wherein: the elastic device can be adjusted in a telescopic way according to the size of the chip; the surface of the fixed block is provided with a flexible protective layer.