CN109031576A - Object lens optical window formula flange and the vacuum chamber for using the flange - Google Patents
Object lens optical window formula flange and the vacuum chamber for using the flange Download PDFInfo
- Publication number
- CN109031576A CN109031576A CN201810853516.9A CN201810853516A CN109031576A CN 109031576 A CN109031576 A CN 109031576A CN 201810853516 A CN201810853516 A CN 201810853516A CN 109031576 A CN109031576 A CN 109031576A
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- China
- Prior art keywords
- object lens
- optical window
- flange
- lens
- window formula
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
Abstract
The present invention provides a kind of object lens optical window formula flange and the vacuum chamber using the flange, including a ring flange and a lens, the ring flange center has a through-hole, the through-hole forms a path channels, the lens are arranged in the path channels, optical window is formed, the lens are used as the object lens front lens of an optical system.It is an advantage of the current invention that object lens and flange are integrated into a whole.Optical window on conventional flange is replaced with object lens, light beam is not needed after object lens transmit using planar lens optical window, to reduce the loss of energy of light source caused by the reflection of optical window, while object lens operating distance can be made to shorten, the numerical aperture of the short object lens of operating distance is big, high resolution.
Description
Technical field
The present invention relates to optical design arts more particularly to a kind of object lens optical window formula flange and using the vacuum of the flange
Chamber.
Background technique
Low-temperature photoluminescence (PL) spectrum can test the basic physical property of semiconductor material.Sample in low temperature sample room
Product shine under the laser focus on light beam irradiation that excitation light source energy is greater than measured material forbidden bandwidth, and the light of sending is received through lens
It is received and identified after collection by optical detector.The photoluminescent process of semiconductor contains material structure and component information, is a variety of multiple
The concentrated expression of miscellaneous physical process.Therefore a variety of essential informations of studied material can be obtained using photoluminescence spectra.
Periodic electric current is injected into test sample by atomic force microscope (AFM) conducting probe by contacting with sample to be tested
The Carrier recombination on product surface, the electric current of the majority carrier and injection of sample surfaces generates periodic electroluminescent.Optics
The electroluminescence signal that microscopic system collects sample surfaces obtains the electroluminescence characters of sample local, obtains sample surfaces current-carrying
Sub- composite attribute and defect information.
It is metal using the luminous method of scanning tunneling microscope (STM) luminescent spectrum measurement material surface local electrical pumping
The tunnel knot for being less than 1nm is formed between the several atoms and sample surfaces atom of silk probe front end, in needle point and sample room
Tunnelling current is generated after biasing, keeps the constant then tunnel knot width of tunnelling current constant.The current-carrying of tunnelling current and semiconductor
The compound generation radioluminescence of son obtains STM luminescent spectrum by spectral measurement device collection material surface emissivity light.
The test of above-mentioned photoelectric respone requires to collect luminous signal or by laser signal by focusing micro optical system
It focuses on sample.Vacuum environment can satisfy some facile hydrolysis in an atmosphere, easy oxygen with substances such as starvation, moisture
Change, is unstable, the test request of the material more harsh to test environmental requirement.And under vacuum conditions, optical signalling is focusing
Transmission between micro optical system and vacuum chamber has to pass through optical window.Optical window, that is, vacuum observation window on vacuum flange (is called
Vacuum form) it is used to monitor vacuum chamber situation or transmission light source, which is mounted in chamber walls, is used for transmission light source
Optical window be a planar lens, material is using rigid optical glass, sapphire, quartz etc..
Fig. 1 is the test schematic diagram of existing system.Wherein, object lens 10 of the optical signalling through over-focusing micro optical system
Front lens 11 after, the optical window 13 on vacuum flange 12, and then on the sample 15 being radiated in vacuum chamber 14.True
Under empty or ultra-high vacuum environment during the luminescent spectrum and photovoltaic spectrum of test material, optical signalling is focusing micro- light
Energy loss caused by the reflection of optical window is had in transmission process between system and vacuum chamber, cannot maximumlly utilize spy
The long performance of standing wave, in addition, optical signalling after object lens using optical window, the operating distance of object lens is long, numerical aperture of objective
Small, resolution ratio is low.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of object lens optical window formula flange and using the vacuum of the flange
Chamber can reduce the loss of energy of light source caused by the reflection of optical window, improve the resolution ratio of object lens.
To solve the above-mentioned problems, the present invention provides a kind of object lens optical window formula flange, including a ring flange and a lens,
The ring flange center has a through-hole, and the through-hole forms a path channels, and the lens are arranged in the path channels,
Optical window is formed, the lens are used as the object lens front lens of an optical system.
In one embodiment, the lens seals are mounted on the side wall of the through-hole.
In one embodiment, the edge of the lens is surrounded by a metal enclosure, the metal enclosure and the through-hole
Sidewall weld.
In one embodiment, the ring flange is an edge of a knife ring flange, and the inside of the edge of a knife ring flange has an edge of a knife.
In one embodiment, multiple connecting holes are provided on the ring flange, connecting elements passes through the connecting hole for institute
Ring flange is stated to be connected on external device (ED).
In one embodiment, the inner wall of the ring flange has an outwardly extending extended segment, and the lens are arranged in institute
State the end of extended segment.
In one embodiment, the object lens optical window formula flange further includes an object lens shell, described in the object lens shell insertion
In path channels, and the end of the object lens shell is arranged in the lens, and the front lens as the object lens uses.
The present invention also provides a kind of vacuum cavities, including the above-mentioned object lens optical window formula flange of a cavity and one, in the chamber
The side wall of body has an opening, and the object lens optical window formula flange is mounted on the opening, the ring flange and the cavity
Lateral wall connection, the lens correspond to the opening setting, to form the optical window of vacuum cavity.
In one embodiment, the side wall of the opening is edge of a knife shape, is pressed with the edge of a knife of the object lens optical window formula flange
One washer, and then seal the opening.
It is an advantage of the current invention that object lens and flange are integrated into a whole.By the optical window object lens on conventional flange
Instead of light beam is not needed after object lens transmit using planar lens optical window, to reduce light source caused by the reflection of optical window
Energy loss, while object lens operating distance can be made to shorten, the numerical aperture of the short object lens of operating distance is big, high resolution.
Detailed description of the invention
Fig. 1 is the test schematic diagram of existing system；
Fig. 2 is the structural schematic diagram of the first embodiment of object lens optical window formula flange of the present invention；
Fig. 3 is the structural schematic diagram of the second embodiment of object lens optical window formula flange of the present invention；
Fig. 4 is the structural schematic diagram of one embodiment of vacuum chamber of the present invention；
Fig. 5 is schematic diagram of the embodiment of vacuum chamber of the present invention for test.
Specific embodiment
It elaborates with reference to the accompanying drawing to the specific embodiment of object lens optical window formula flange provided by the invention, wherein
The size of technical solution of the present invention for a clear description, part-structure is exaggerated, and does not represent the actual size of the structure, attached
Figure is only used for showing the connection relationship between each structure.
Fig. 2 is the structural schematic diagram of the first embodiment of object lens optical window formula flange of the present invention.Referring to Fig. 2, object of the present invention
Mirror optical window formula flange includes a ring flange 20 and a lens 21.
Ring flange 20 is connect with external device (ED), and the flange is fixed on external device (ED).In the present embodiment, described
Multiple connecting holes 24 are provided on ring flange 20.Connecting elements 25 (being illustrated in Fig. 4) is by the connecting hole 24 by the method
Blue disk 20 is connected on external device (ED), and then the flange is fixed on external device (ED).The connecting elements 25 includes but not
It is limited to bolt.In the present embodiment, the ring flange 20 is an edge of a knife ring flange, and the inside of the edge of a knife ring flange has a knife
Mouth 23.The edge of a knife ring flange is the conventional structure of this field, and those skilled in the art can obtain its structure from the prior art.
20 center of ring flange has a through-hole 22, and the through-hole 22 of the ring flange 20 runs through the ring flange 20, forms an optical path
Channel.
The lens 21 are arranged in the path channels, form optical window.What external light source (such as laser light source) occurred
Light may pass through the lens 21.The lens 21 are used as the object lens front lens of an optical system.I.e. optical system emits
The light beams such as laser can be reflexed to directly in object lens optical window formula flange from light source, exposed to sample by the lens 21, no longer needed
It will be by other object lens.The lens 21 include but is not limited to convex lens.
In the present embodiment, the lens 21 are sealingly mounted on the side wall of the through-hole 22.The lens 21 with it is described
The side wall of through-hole 22 is permanent seal connection.In one embodiment, the edge of the lens 21 by a metal enclosure (in attached drawing not
It is painted) it surrounds, the sidewall weld of the metal enclosure and the through-hole 22, for example, the metal enclosure is cobalt alloy, the cobalt
The ring flange 20 of alloy and stainless steel is sealed by argon arc welding, close using glass machining technique between the cobalt alloy and lens
Envelope, and then realize the sealing between the lens 21 and the ring flange 20.
Further, the object lens optical window formula flange further includes an object lens shell 26, and the object lens shell 26 is inserted into the light
In paths, and the end of the object lens shell 26 is arranged in the lens 21, and the front lens as object lens uses.Light beam can be through
The object lens shell 26 is crossed to be incident on lens 21.The object lens shell 26 can prevent from dissipating outside light beam, and can prevent outside
The influence of the light beam of environment.
The present invention also provides the second embodiments of an object lens optical window formula flange.Fig. 3 is object lens optical window formula flange of the present invention
The structural schematic diagram of second embodiment, referring to Fig. 3, the difference of the second embodiment and first embodiment of object lens optical window formula flange
It is, the inner wall of the ring flange 20 has an outwardly extending extended segment 27, and the lens 21 are arranged in the extended segment 27
End, the through-hole 22 also extends through the extended segment 27, and then elongates the object lens optical window formula flange, to form sunk type
Object lens optical window formula flange.In the present embodiment, object lens shell 26 extends into the extended segment 27, by 21 conduct of lens
Object lens front lens uses.
The present invention also provides a kind of vacuum chambers.Fig. 4 is the structural schematic diagram of one embodiment of vacuum chamber of the present invention.It please join
Fig. 4 is read, the vacuum chamber includes a cavity 40 and an above-mentioned object lens optical window formula flange 41.The cavity 40 is for placing test
Sample.There is an opening 42 in the side wall of the cavity 40.The object lens optical window formula flange 41 is mounted at the opening 42.
The ring flange 20 is connect with the lateral wall of the cavity 40, for example, multiple connecting elements 25 pass through the connecting hole 24 for institute
It states ring flange 20 to be connected on the lateral wall of cavity 40, and then the object lens optical window formula flange 41 is fixed on the cavity 40
On lateral wall.Corresponding 42 setting of opening of the lens 21, to form the optical window of vacuum chamber.Wherein, sunk type of the present invention
The flange that object lens optical window formula flange can also be used as vacuum chamber uses, and no longer describes to its structure.
In the present embodiment, the side wall of the opening 42 is edge of a knife shape structure 43, with the object lens optical window formula flange 41
The edge of a knife 23 press a washer 44, and then seal it is described opening 42 at.I.e. it is described opening 42 side wall edge of a knife shape structure 43 with
The edge of a knife 23 of the object lens optical window formula flange 41 compresses the two sides of the washer 44 respectively, and then forms sealing structure.The pad
Circle 44 includes but is not limited to oxygenless copper washer.It is described opening 42 at, the vacuum chamber be sealing structure, will not because opening 42 and
The presence of object lens optical window formula flange 41 and the leakproofness for influencing vacuum chamber.
Fig. 5 is schematic diagram of the embodiment of vacuum chamber of the present invention for test.Referring to Fig. 5, in the present embodiment, institute
The lateral wall for stating ring flange 20 and the cavity 40 is tightly connected.Sample 50 is located in the cavity 40 of the vacuum chamber.One laser
The laser beam L that light source S is issued enters the path channels after the reflection of CCD imaging system 60, and passes through the object lens
It is radiated at after the focusing of the lens 21 of optical window formula flange 41 on the sample 50.Detection system in the vacuum chamber is (attached
It is not painted in figure) sample can be detected.
Object lens and flange are integrated into a whole by object lens optical window formula flange of the present invention.By the optical window object on conventional flange
Mirror replaces, and light beam is not needed using planar lens optical window after object lens transmit to reduce light source caused by the reflection of optical window
Energy loss, the present invention can be such that object lens operating distance shortens.The numerical aperture of the short object lens of the operating distance known to formula (1)
Greatly, high resolution, wherein NA is numerical aperture in formula (1), n is the refractive index between object lens and object point, and θ is angular aperture).
In addition, the present invention known to formula (2) has been improved particularly the resolution ratio that infrared laser irradiates lower object lens.Wherein in formula (2),
It is wavelength that R, which is resolution ratio (between two objects minimum distinguishable distance), λ, and NA is numerical aperture.
NA=nSin θ (1)
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (9)
1. a kind of object lens optical window formula flange, which is characterized in that including a ring flange and a lens, the ring flange center has one
Through-hole, the through-hole form a path channels, and the lens are arranged in the path channels, form optical window, and the lens are made
It is used for the object lens front lens of an optical system.
2. object lens optical window formula flange according to claim 1, which is characterized in that the lens seals are mounted on the through-hole
Side wall on.
3. object lens optical window formula flange according to claim 1, which is characterized in that the edge of the lens is by a metal enclosure
It surrounds, the sidewall weld of the metal enclosure and the through-hole.
4. object lens optical window formula flange according to claim 1, which is characterized in that the ring flange is an edge of a knife ring flange,
The inside of the edge of a knife ring flange has an edge of a knife.
5. object lens optical window formula flange according to claim 1, which is characterized in that be provided with multiple connections on the ring flange
The ring flange is connected on external device (ED) by hole, connecting elements by the connecting hole.
6. object lens optical window formula flange according to claim 1, which is characterized in that the inner wall of the ring flange is outside with one
The end of the extended segment is arranged in the extended segment of extension, the lens.
7. object lens optical window formula flange according to claim 1, which is characterized in that the object lens optical window formula flange further includes one
Object lens shell, the object lens shell is inserted into the path channels, and the end of the object lens shell is arranged in the lens, is made
It is used for the front lens of the object lens.
8. a kind of vacuum chamber, which is characterized in that including object lens optical window described in a cavity and claim 1~7 any one
Formula flange has an opening in the side wall of the cavity, and the object lens optical window formula flange is mounted on the opening, the flange
Disk is connect with the lateral wall of the cavity, and the lens correspond to the opening setting, to form the optical window of vacuum cavity.
9. vacuum cavity according to claim 8, which is characterized in that the side wall of the opening is edge of a knife shape, and described
The edge of a knife of object lens optical window formula flange presses a washer, and then seals the opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810853516.9A CN109031576B (en) | 2018-07-30 | 2018-07-30 | Objective lens optical window type flange and vacuum cavity adopting same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810853516.9A CN109031576B (en) | 2018-07-30 | 2018-07-30 | Objective lens optical window type flange and vacuum cavity adopting same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109031576A true CN109031576A (en) | 2018-12-18 |
| CN109031576B CN109031576B (en) | 2021-09-24 |
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ID=64647689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810853516.9A Active CN109031576B (en) | 2018-07-30 | 2018-07-30 | Objective lens optical window type flange and vacuum cavity adopting same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109031576B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012016347A1 (en) * | 2012-08-16 | 2014-05-15 | Carl Zeiss Microscopy Gmbh | Microscope for single plane illumination microscopy (SPIM) has sample chamber having screw-in insert fittable annular opening in which sealing ring for fitting detector and/or illumination lens and/or lens mount or holder is placed |
| CN105628616A (en) * | 2016-02-23 | 2016-06-01 | 兰州大学 | Extremely low temperature and high vacuum environment material micro-observation system |
| DE102015014110A1 (en) * | 2015-11-05 | 2017-05-11 | Hajo Suhr | Adjustment-free in situ microscopy of suspensions |
-
2018
- 2018-07-30 CN CN201810853516.9A patent/CN109031576B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012016347A1 (en) * | 2012-08-16 | 2014-05-15 | Carl Zeiss Microscopy Gmbh | Microscope for single plane illumination microscopy (SPIM) has sample chamber having screw-in insert fittable annular opening in which sealing ring for fitting detector and/or illumination lens and/or lens mount or holder is placed |
| DE102015014110A1 (en) * | 2015-11-05 | 2017-05-11 | Hajo Suhr | Adjustment-free in situ microscopy of suspensions |
| CN105628616A (en) * | 2016-02-23 | 2016-06-01 | 兰州大学 | Extremely low temperature and high vacuum environment material micro-observation system |
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| Publication number | Publication date |
|---|---|
| CN109031576B (en) | 2021-09-24 |
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