CN105628616A - Extremely low temperature and high vacuum environment material micro-observation system - Google Patents
Extremely low temperature and high vacuum environment material micro-observation system Download PDFInfo
- Publication number
- CN105628616A CN105628616A CN201610098080.8A CN201610098080A CN105628616A CN 105628616 A CN105628616 A CN 105628616A CN 201610098080 A CN201610098080 A CN 201610098080A CN 105628616 A CN105628616 A CN 105628616A
- Authority
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- China
- Prior art keywords
- lens barrel
- ring flange
- high vacuum
- sleeve
- vacuum environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 19
- 238000007789 sealing Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
Abstract
The invention discloses an extremely low temperature and high vacuum environment material micro-observation system which comprises a flange, a lens barrel, an observation window and a microobjective.The lens barrel penetrates through the center of the plate surface of the flange and is in sliding fit with the flange, the flange and the lens barrel are sealed, the observation window is installed at one end of the lens barrel, and the microobjective is installed at the other end of the lens barrel.By means of the extremely low temperature and high vacuum environment material micro-observation system, the problem that high vacuum sealing and objective lens real-time focusing cannot be achieved simultaneously in the extremely low temperature and high vacuum environment is solved.
Description
Technical field
The present invention relates to experiment equipment manufacturing technology field, especially extremely low temperature, high vacuum environment material microscopic observation system.
Background technology
According to existing literature survey it can be seen that up to now, abroad under the low-temperature vacuum environment of pole, the observation program of optical microscope is broadly divided into (a) and (b) two kinds, as illustrated in fig. 1 and 2.
Relatively (a) and (b) two schemes, we have found that in (a) scheme, microcobjective is external, needing the distance considering sample to observation window, the thickness of observation window and microcobjective to the safe distance of observation window, therefore this device is only applicable to long working distance microcobjective. Increase however as operating distance, but reduce with the value of the numerical aperture of microcobjective under multiple, cause the physical resolution of reality to reduce. B in () scheme, device can use operating distance short, amplification is high, the microcobjective that numerical aperture is big, thus obtaining the physical resolution higher than (a) scheme. Therefore say that in (b) scheme, device is better than device in (a) scheme from physical resolution.
Say from adjusting angle, a in () scheme, device can regulate in real time, b in () scheme, device keeps fixing after only regulating in advance in low-temperature vacuum environment, but at experimentation, evacuation can cause that the crimp of O RunddichtringO causes the sedimentation of observation case package header, the decline that cooling (mainly utilizing liquid nitrogen/helium to lower the temperature) can cause sample stage thermal contraction to cause. If microcobjective is fixed on observation case shell, the first sedimentation causes that microcobjective and sample distance reduction cause image blurring, and the latter causes that microcobjective causes image blurring with sample distance increase. Therefore say that in (a) scheme, device is better than device in (b) scheme from degree of regulation.
At present, not yet have and overcome the equipment of problem in (a) and (b) two schemes simultaneously.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, it is proposed to extremely low temperature, high vacuum environment material microscopic observation system, solve the difficult problem simultaneously realizing keeping high vacuum seal and object lens Real-time Focusing under extremely low temperature, high vacuum environment.
In order to realize foregoing invention purpose, the present invention provides techniques below scheme:
Extremely low temperature, high vacuum environment material microscopic observation system, it is characterised in that include ring flange, lens barrel, observation window and microcobjective,
Described lens barrel is through described ring flange card center and is slidably matched with described ring flange, seals between described ring flange and described lens barrel,
Described lens barrel one end is provided with described observation window, the other end is connected with described microcobjective by inner thread sleeve.
Further, being provided with seal sleeve on described ring flange, described seal sleeve and described observation window are positioned at described ring flange the same side,
Described seal sleeve is positioned at outside described lens barrel, is provided with V-shaped seal ring between described lens barrel and described seal sleeve.
Further, in described seal sleeve, being provided with bearing between described ring flange and described V-shaped seal ring, described bearing holder (housing, cover) is outside described lens barrel.
Further, described seal sleeve port being provided with hold-down bolt, described hold-down bolt is enclosed within outside described lens barrel, and described V-shaped seal ring and bearing are between described hold-down bolt and described ring flange.
Further, being also equipped with being positioned at the inner thread sleeve outside described lens barrel on described ring flange, described inner thread sleeve and described microcobjective are positioned at described ring flange the same side,
Be connected by inner thread sleeve between described microcobjective with described lens barrel, the threaded upper ends of described inner thread sleeve and lower end screw thread respectively with described lens barrel external screw-thread and described microcobjective threaded engagement.
The extremely low temperature of the present invention, high vacuum environment material microscopic observation system, the advantage that this system combines (a) scheme and (b) scheme, solve the difficult problem simultaneously realizing keeping high vacuum seal and object lens Real-time Focusing under extremely low temperature, high vacuum environment, so that microscopic system is better applied to extremely low gentle vacuum environment.
Accompanying drawing explanation
Fig. 1 is the external schematic diagram of the observation program (a) of optical microscope under the low-temperature vacuum environment of pole of the present invention;
Fig. 2 is the external schematic diagram of the observation program (b) of optical microscope under the low-temperature vacuum environment of pole of the present invention;
Fig. 3 is the schematic diagram of the scheme of extremely low temperature of the present invention, high vacuum environment material microscopic observation system.
Specific embodiment party
Describing the present invention below in conjunction with accompanying drawing, the description of this part is only exemplary and explanatory, and protection scope of the present invention should not have any restriction effect.
Extremely low temperature as shown in Figure 3, high vacuum environment material microscopic observation system, including ring flange 5, lens barrel 2, observation window 1 and microcobjective 7,
Lens barrel 2 is through ring flange 5 card center and is slidably matched with ring flange 5, is welded seal between ring flange 5 and seal sleeve 3, by hold-down bolt 10, the extruding of V-shaped seal ring 9 is formed dynamic seal (packing) between seal sleeve 3 and lens barrel 2.
Lens barrel 2 one end is provided with observation window 1, the other end is connected with described microcobjective by inner thread sleeve, and ring flange 5 is fixed on observation tank shell, and microcobjective 7 stretches into inside observation tank shell, and observation window 1 is positioned at outside observation tank shell.
Being provided with seal sleeve 3 on ring flange 5, seal sleeve 3 and observation window 1 are positioned at ring flange 5 the same side,
Seal sleeve 3 is positioned at lens barrel 2 outside and axis overlaps with lens barrel 2 axis, V-shaped seal ring 9 it is provided with between lens barrel 2 and seal sleeve 3, seal sleeve 3 and there is extruding force between V-shaped seal ring 9, stop-leak compound is scribbled, to avoid the excessive obstruction lens barrel 2 of frictional force between V-shaped seal ring 9 and lens barrel 2 to rotate between V-shaped seal ring 9 and lens barrel 2.
Being provided with bearing 4 in seal sleeve 3, between ring flange 5 and V-shaped seal ring 9, it is outside that bearing 4 is enclosed within lens barrel 2, and bearing 4 can reduce the friction between lens barrel 2 and ring flange 5.
Seal sleeve 3 port is provided with hold-down bolt 10, and it is outside that hold-down bolt 10 is enclosed within lens barrel 2, and V-shaped seal ring 9 and bearing 4 are between hold-down bolt 10 and ring flange 5.
Being also equipped with the sleeve 6 being attached with guide rail being positioned at outside lens barrel 2 on ring flange 5, sleeve 6 is positioned at ring flange 5 the same side and axis and overlaps with lens barrel 2 axis with microcobjective 7,
Being provided with inner thread sleeve 8 between microcobjective 7 and lens barrel 2, inner thread sleeve 8 is coordinated by guide rail with sleeve 6, and track radially extends along sleeve 6. The top of inner thread sleeve 8 is coordinated by female thread and lens barrel lower end external screw thread, and the bottom of inner thread sleeve 8 is connected with microcobjective by screw thread. Wherein the top screw thread of inner thread sleeve plays main adjustment effect, and when rotating lens barrel 2, inner thread sleeve 8 can rise or fall on lens barrel 2 along track.
In the present invention, the size of each structure and material can be adjusted because of needs difference, are set as follows in the present embodiment:
Observation window 1 adopts K9 optical glass, diameter 25mm, thick 4mm, adopts O-shaped rubber ring to seal between observation window 1 and lens barrel 2; The material of ring flange 5, bearing 4, lens barrel 2, seal sleeve 3, inner thread sleeve 8, sleeve 6 and hold-down bolt 10 all adopts 304 nonmagnetic steel material processing; V-shaped seal ring 9, adopts elastomeric material, thick 15mm, internal diameter 16mm, external diameter 30mm; Lens barrel 2 overall length 100mm, internal diameter 14mm, external diameter 17mm; The internal diameter 30mm of seal sleeve 3 and sleeve 6, external diameter 40mm; Sleeve 6 is internal with guide rail groove; The internal diameter 18mm of hold-down bolt 10, external diameter 30mm; The external diameter 30mm of inner thread sleeve 8, long 30mm and lens barrel 2 junction internal diameter 17mm, with microcobjective 7 junction internal diameter 20.32mm, the outside nose with guide rail; Microcobjective 7 adopts containing infinity optical correction system, short working distance, high power, the microcobjective 7 of high-NA; Lens barrel 2 adjustment stroke 0 to 25mm.
During use, rotate lens barrel 2 and can realize the adjustment of microcobjective 7 and the spacing of sample.
The extremely low temperature of the present invention, high vacuum environment material microscopic observation system, the advantage that this system combines (a) scheme and (b) scheme, solve the difficult problem simultaneously realizing keeping high vacuum seal and object lens Real-time Focusing under extremely low temperature, high vacuum environment, so that microscopic system is better applied to extremely low gentle vacuum environment.
Claims (5)
1. extremely low temperature, high vacuum environment material microscopic observation system, it is characterised in that include ring flange, lens barrel, observation window and microcobjective,
Described lens barrel is through described ring flange card center and is slidably matched with described ring flange, seals between described ring flange and described lens barrel,
Described lens barrel one end is provided with described observation window, the other end is connected with described microcobjective.
2. extremely low temperature as claimed in claim 1, high vacuum environment material microscopic observation system, it is characterised in that being provided with seal sleeve on described ring flange, described seal sleeve and described observation window are positioned at described ring flange the same side,
Described seal sleeve is positioned at outside described lens barrel, is provided with V-shaped seal ring between described lens barrel and described seal sleeve.
3. extremely low temperature as claimed in claim 2, high vacuum environment material microscopic observation system, it is characterised in that in described seal sleeve, being provided with bearing between described ring flange and described V-shaped seal ring, described bearing holder (housing, cover) is outside described lens barrel.
4. extremely low temperature as claimed in claim 3, high vacuum environment material microscopic observation system, it is characterized in that, described seal sleeve port is provided with hold-down bolt, described hold-down bolt is enclosed within outside described lens barrel, and described V-shaped seal ring and bearing are between described hold-down bolt and described ring flange.
5. extremely low temperature, high vacuum environment material microscopic observation system as described in as arbitrary in Claims 1-4, it is characterised in that being also equipped with being positioned at the sleeve outside described lens barrel on described ring flange, described sleeve and described microcobjective are positioned at described ring flange the same side,
Be connected by inner thread sleeve between described microcobjective with described lens barrel, the threaded upper ends of described inner thread sleeve and lower end screw thread respectively with described lens barrel external screw-thread and described microcobjective threaded engagement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610098080.8A CN105628616B (en) | 2016-02-23 | 2016-02-23 | Extremely low temperature, high vacuum environment material microscopic observation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610098080.8A CN105628616B (en) | 2016-02-23 | 2016-02-23 | Extremely low temperature, high vacuum environment material microscopic observation system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105628616A true CN105628616A (en) | 2016-06-01 |
| CN105628616B CN105628616B (en) | 2018-06-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610098080.8A Expired - Fee Related CN105628616B (en) | 2016-02-23 | 2016-02-23 | Extremely low temperature, high vacuum environment material microscopic observation system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031576A (en) * | 2018-07-30 | 2018-12-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Object lens optical window formula flange and the vacuum chamber for using the flange |
| CN113917651A (en) * | 2021-09-29 | 2022-01-11 | 中国科学院西安光学精密机械研究所 | Focusing device of low-temperature optical system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH055841A (en) * | 1991-06-27 | 1993-01-14 | Ulvac Japan Ltd | Vacuum microscope |
| US5598888A (en) * | 1994-09-23 | 1997-02-04 | Grumman Aerospace Corporation | Cryogenic temperature gradient microscopy chamber |
| CN101231249A (en) * | 2008-02-26 | 2008-07-30 | 东北大学 | Vacuum low temperature microscopic visualizer |
| CN203745382U (en) * | 2013-11-19 | 2014-07-30 | 南京康曼电子科技有限公司 | In-situ pulsed high magnetic field transient microscopic imaging system |
| CN205374282U (en) * | 2016-02-23 | 2016-07-06 | 兰州大学 | Utmost point low temperature, micro - observation system of high vacuum environment material |
-
2016
- 2016-02-23 CN CN201610098080.8A patent/CN105628616B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH055841A (en) * | 1991-06-27 | 1993-01-14 | Ulvac Japan Ltd | Vacuum microscope |
| US5598888A (en) * | 1994-09-23 | 1997-02-04 | Grumman Aerospace Corporation | Cryogenic temperature gradient microscopy chamber |
| CN101231249A (en) * | 2008-02-26 | 2008-07-30 | 东北大学 | Vacuum low temperature microscopic visualizer |
| CN203745382U (en) * | 2013-11-19 | 2014-07-30 | 南京康曼电子科技有限公司 | In-situ pulsed high magnetic field transient microscopic imaging system |
| CN205374282U (en) * | 2016-02-23 | 2016-07-06 | 兰州大学 | Utmost point low temperature, micro - observation system of high vacuum environment material |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031576A (en) * | 2018-07-30 | 2018-12-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Object lens optical window formula flange and the vacuum chamber for using the flange |
| CN109031576B (en) * | 2018-07-30 | 2021-09-24 | 中国科学院苏州纳米技术与纳米仿生研究所 | Objective lens optical window type flange and vacuum cavity adopting same |
| CN113917651A (en) * | 2021-09-29 | 2022-01-11 | 中国科学院西安光学精密机械研究所 | Focusing device of low-temperature optical system |
| CN113917651B (en) * | 2021-09-29 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Focusing device of low-temperature optical system |
Also Published As
| Publication number | Publication date |
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| CN105628616B (en) | 2018-06-22 |
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