CN109029730A - A kind of optics thermal detector that the polarization direction for linearly polarized light detects - Google Patents
A kind of optics thermal detector that the polarization direction for linearly polarized light detects Download PDFInfo
- Publication number
- CN109029730A CN109029730A CN201810912405.0A CN201810912405A CN109029730A CN 109029730 A CN109029730 A CN 109029730A CN 201810912405 A CN201810912405 A CN 201810912405A CN 109029730 A CN109029730 A CN 109029730A
- Authority
- CN
- China
- Prior art keywords
- thermo
- polarized light
- linearly polarized
- polarization direction
- responsive line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052681 coesite Inorganic materials 0.000 claims description 11
- 229910052906 cristobalite Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 11
- 229910052682 stishovite Inorganic materials 0.000 claims description 11
- 229910052905 tridymite Inorganic materials 0.000 claims description 11
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 239000002105 nanoparticle Substances 0.000 claims description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
The present invention relates to a kind of optics thermal detectors that the polarization direction for linearly polarized light detects, including thermo-responsive line, positive/negative electrode is provided at left and right sides of the thermo-responsive line, the upper surface of the thermo-responsive line is provided with a plurality of groove, and the upper surface of the thermo-responsive line, the surface of groove are all covered with metal film;The optics thermal detector that the polarization direction for being used for linearly polarized light detects, by the way that grating is arranged on thermo-responsive line surface, when linearly polarized light incidence, it can be in the case where coincideing with grating setting direction, absorptivity highest, the light absorbed can be converted to thermal energy to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive line, by loading external power supply at thermo-responsive line both ends, pass through the curent change of thermo-responsive line, by detecting to judge the direction of linearly polarized light.
Description
Technical field
The present invention relates to photodetector technical fields, and in particular to what a kind of polarization direction for linearly polarized light detected
Optics thermal detector.
Background technique
The physical effect of photodetector is generally divided into photon effect and photo-thermal effect, and corresponding detector is referred to as light
Subtype detector and photo-thermal type detector.The common trait of various photon type detectors is using semiconductor energy carrying material, photon
Energy has generated directly effect to photoelectronic in detection material, therefore photon type detector has cut-off response frequency or wavelength,
And spectral response is limited to a certain wave band, therefore different material systems determines that detector has different response wave length scopes,
Generally it is difficult to use in wide range or multispectral section of detection.Photo-thermal type detector is not caused directly after absorbing optical radiation energy
The change of internal electron state, but the luminous energy of absorption is become the energy of thermal motion of lattice, cause detecting element temperature to rise,
It changes so as to cause the electrical properties of detecting element or other physical properties, therefore the size of photo-thermal effect and photon energy does not have
There is direct relation, photo-thermal type detector is in principle to frequency without selectivity.Due to infrared band especially in LONG WAVE INFRARED with
The photo-thermal effect of upper wave band becomes apparent from compared to Uv and visible light, therefore optothermal detector is commonly used in the spy of middle long wave optical radiation
It surveys, typical photo-thermal type detector includes the types such as micro-metering bolometer, pyroelectric detector and thermocouple detector.Due to temperature
Raising is the effect of heat accumulation, and the general response speed of thermal detector based on photo-thermal effect is slower, in millisecond magnitude.
However, existing optothermal detector be primarily used to detection light intensity, main improvement direction also embody be
It is lower to the susceptibility of linearly polarized light in terms of the intensity for the light how to detect, it can not especially confirm the polarization side of linearly polarized light
To.
Summary of the invention
In view of the above-mentioned problems, present invention aim to address optothermal detector can not method confirmation linearly polarized light polarization direction
The problem of.
For this purpose, the present invention provides a kind of optics thermal detector that the polarization direction for linearly polarized light detects, including heat
Sensitive line is provided with positive/negative electrode at left and right sides of the thermo-responsive line, and the upper surface of the thermo-responsive line is provided with a plurality of
Groove, the upper surface of the thermo-responsive line, the surface of groove are all covered with metal film.
The a plurality of groove is longitudinal or transversely arranged in thermo-responsive line upper surface.
Conductive plate is provided between the thermo-responsive line and positive/negative electrode.
The metal film is the nano-particle layer that gold, silver are formed.
The inside grooves are additionally provided with SiO2Ball.
The bottom surface of the metal film, thermo-responsive line upper surface be all covered with SiO2Layer;The SiO2The top of layer is also set
It is equipped with TiO2。
The left side wall of the groove and the angle of bottom surface are less than 90 °, the angle of right side wall and bottom surface and left side wall and bottom surface
Angle be axial symmetry.
The thermo-responsive wire material includes VOx, Si, SiGe, YBCO or NiO.
Beneficial effects of the present invention: the optical thermal that this polarization direction for linearly polarized light provided by the invention detects is visited
Device is surveyed, solves the problems, such as that optothermal detector can not carry out the polarization direction detection of linearly polarized light, by setting on thermo-responsive line surface
Grating is set, it, can be in the case where coincideing with grating setting direction when linearly polarized light incidence, absorptivity highest is absorbed
Light can be converted to thermal energy to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive line, by temperature-sensitive
Feel line both ends and load external power supply, passes through the curent change of thermo-responsive line, to judge the direction of linearly polarized light, the use by detecting
There is easy to operate, cost compared to existing optical detector in the optics thermal detector that the polarization direction of linearly polarized light detects
Low feature.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is the optical thermal panel detector structure top view detected for the polarization direction of linearly polarized light.
Fig. 2 is the optical thermal detector side view one detected for the polarization direction of linearly polarized light.
Fig. 3 is the optical thermal detector side view two detected for the polarization direction of linearly polarized light.
Fig. 4 is the optical thermal detector side view three detected for the polarization direction of linearly polarized light.
Fig. 5 is the optical thermal detector side view four detected for the polarization direction of linearly polarized light.
In figure: 1, thermo-responsive line;2, groove;3, metal film;4, positive/negative electrode;5, conductive plate;6,SiO2Ball;7,SiO2
Layer;8,TiO2;9, the angle of left side wall and bottom surface;10, the angle of right side wall and bottom surface.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality
Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
In order to solve the problems, such as that optothermal detector can not confirm the polarization direction of linearly polarized light.The present invention provides one kind such as
The optics thermal detector that Fig. 1, the polarization direction shown in Fig. 2 for linearly polarized light detect, including thermo-responsive line 1, the temperature-sensitive
The left and right sides of sense line 1 is provided with positive/negative electrode 4, and the positive/negative electrode 4 is for accessing external detection power supply, to provide line
Power supply needed for the polarization direction of polarised light;The upper surface of the thermo-responsive line 1 is provided with a plurality of groove 2, described thermo-responsive
The upper surface of line 1, the surface of groove 2 are all covered with metal film 3.
The a plurality of groove 2 in thermo-responsive 1 upper surface of line be it is longitudinal or transversely arranged, when incident linearly polarized light with
When the direction for the grating that groove 2 is constituted is consistent, maximum absorptivity is had, changes the resistivity of thermo-responsive line 1 at this time most
Greatly, the curent change after causing external power supply to connect thermo-responsive line 1 is maximum, by detecting the variation of electric current it may determine that line is inclined
The direction of vibration light.
In order to enable the electric energy for the external power supply that thermo-responsive line 1 is loaded can be more uniform by thermo-responsive line 1,
Conductive plate 5 is provided between the thermo-responsive line 1 and positive/negative electrode 4, the electric energy of such external power supply can be in thermo-responsive line
More uniform electric field is formed between 1 both ends.
The metal film 3 is the nano-particle layer that gold, silver are formed, and it is inclined to incident ray which mainly enhances grating
The absorption of vibration light, so as to the variation of electric current preferably be detected, so that the direction determining of linearly polarized light is more sensitive, quasi-
Really.
Further, SiO can be additionally provided with inside the groove 22Ball 6, the light that can be enhanced in groove 2 in this way are inhaled
It receives, as shown in Figure 2.
Further, the bottom surface of the metal film 3, the upper surface of thermo-responsive line 1 have been all covered with SiO2Layer 7;The SiO2
The top of layer 7 is additionally provided with TiO28, the structure for being similar to greenhouse heat insulation space can be formed in this way, also for mentioning
Absorption of the height to incident ray polarized light, as shown in Figure 3.
Further, the left side wall of the groove 2 and the angle 9 of bottom surface be less than 90 °, the angle 10 of right side wall and bottom surface with
Left side wall and the angle of bottom surface 9 are mirror symmetry, in this way, being formed the slightly big space in a small, bottom of opening, existing simultaneously
2 outer wall of groove is provided with metal film 3, can also be improved the absorption to incident ray polarized light, as shown in Figure 5.
Three of the above improves the mode of the absorptivity of linearly polarized light, can be used alone, can also be used together;Such as Fig. 4
The upper surface of the bottom surface, thermo-responsive line 1 that show metal film 3 has been all covered with SiO2Layer 7;The SiO2The top of layer 7 is also set up
There is TiO2SiO is additionally provided with inside 8 this modes and groove 22The schematic diagram that this mode of ball 6 is used together;It is same to have very well
Effect of the promotion to Absorption of linearly polarized light.
1 material of thermo-responsive line includes VOx, Si, SiGe, YBCO or NiO, and the requirement of the material of thermo-responsive line 1 is pair
Change in resistance can occur in fuel factor, above-mentioned material generally has relatively high temperature-coefficient of electrical resistance (TCR), absolutely
Value be greater than 1%/DEG C;In addition, existing other heat-sensitive materials for perceiving thermal change such as existing pyroelectricity material, thermocouple
It can also serve as the making material of thermo-responsive line 1.
When practical application, the setting 2 of groove 2 can be set to horizontal direction or vertical direction, by linearly polarized light
Incidence is carried out along direction identical with groove 2, in the load external power supply of the electrode at thermo-responsive 1 both ends of line, electric current is carried out
It detects and record current is A1, linearly polarized light is subjected to incidence along the direction vertical with groove 2, at thermo-responsive 1 both ends of line
The load external power supply of electrode, detect to electric current and record current is A2, compares the size of electric current A1 and A2, if A1 <
A2, then linearly polarized light along polarization direction it is identical as the direction of groove arrangement;If A1 > A2, linearly polarized light along polarization
Direction and the direction of groove arrangement are perpendicular.
It should be noted that the polarization direction of above-mentioned judgement linearly polarized light as a result, be resistance based on thermo-responsive line 1 with
The case where temperature (thermal resistivity) is positive coefficient relationship, i.e., the resistance value of thermo-responsive line 1 increases with temperature and become larger;If temperature-sensitive
The resistance and temperature (thermal resistivity) for feeling line 1 are negative coefficient relationships, i.e., the resistance value of thermo-responsive line 1 increases with temperature and become smaller
Situation, then result is just opposite.
In conclusion the optics thermal detector that this polarization direction for linearly polarized light provided in this embodiment detects,
Solve the problems, such as that optothermal detector can not carry out the polarization direction detection of linearly polarized light, by the way that light is arranged on thermo-responsive 1 surface of line
Grid can be in the case where coincideing when linearly polarized light incidence with grating setting direction, absorptivity highest, the light absorbed
Thermal energy can be converted to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive 1 line, by thermo-responsive 1
Line both ends load external power supply, and detection passes through the curent change of thermo-responsive line, and to judge the direction of linearly polarized light, it is inclined that this is used for line
The optics thermal detector that the polarization direction of light detects that shakes has spy easy to operate, at low cost compared to existing optical detector
Point.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (8)
1. a kind of optics thermal detector that the polarization direction for linearly polarized light detects, it is characterised in that: including thermo-responsive line
(1), it is provided with positive/negative electrode (4) at left and right sides of the thermo-responsive line (1), the upper surface of the thermo-responsive line (1) is provided with
A plurality of groove (2), the upper surface of the thermo-responsive line (1), the surface of groove (2) are all covered with metal film (3).
2. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: a plurality of groove (2) is longitudinal or transversely arranged in thermo-responsive line (1) upper surface.
3. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: it is provided between the thermo-responsive line (1) and positive/negative electrode (4) conductive plate (5).
4. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: the metal film (3) is the nano-particle layer that gold, silver are formed.
5. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: SiO is additionally provided with inside the groove (2)2Ball (6).
6. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: the bottom surface of the metal film (3), the upper surface of thermo-responsive line (1) have been all covered with SiO2Layer (7);The SiO2Layer (7)
Top is additionally provided with TiO2(8)。
7. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: the left side wall of the groove (2) and the angle (9) of bottom surface less than 90 °, the angle (10) of right side wall and bottom surface and left side wall with
The angle (9) of bottom surface is axial symmetry.
8. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist
In: thermo-responsive line (1) material includes VOx, Si, SiGe, YBCO or NiO.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810912405.0A CN109029730A (en) | 2018-08-11 | 2018-08-11 | A kind of optics thermal detector that the polarization direction for linearly polarized light detects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810912405.0A CN109029730A (en) | 2018-08-11 | 2018-08-11 | A kind of optics thermal detector that the polarization direction for linearly polarized light detects |
Publications (1)
Publication Number | Publication Date |
---|---|
CN109029730A true CN109029730A (en) | 2018-12-18 |
Family
ID=64633728
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810912405.0A Withdrawn CN109029730A (en) | 2018-08-11 | 2018-08-11 | A kind of optics thermal detector that the polarization direction for linearly polarized light detects |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109029730A (en) |
-
2018
- 2018-08-11 CN CN201810912405.0A patent/CN109029730A/en not_active Withdrawn
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101922119B1 (en) | Infrared detector and method for detecting infrared using the same | |
CN105977335B (en) | Shortwave optics thermal detector and its focal plane array device | |
KR101910575B1 (en) | Infrared detector and infrared image sensor | |
JP6093921B1 (en) | Electromagnetic wave detector, electromagnetic wave detector array, and gas analyzer | |
KR20110074605A (en) | Nanowire bolometer photodetector | |
CN109309140B (en) | Polarized non-refrigeration infrared focal plane detector | |
CN208420680U (en) | It is a kind of for detecting the optics thermal detector of chiral molecules | |
Dem’yanenko et al. | Application of uncooled microbolometer detector arrays for recording radiation of the terahertz spectral range | |
CN105393097A (en) | An apparatus for sensing | |
CN105486412A (en) | Uncooled infrared focal plane array detector with overlap vertical bridge legs | |
CN109030375A (en) | It is a kind of for detecting the optics thermal detector of chiral molecules | |
KR101570445B1 (en) | Infrared Detector | |
CN208399013U (en) | A kind of optics thermal detector that the polarization direction for linearly polarized light detects | |
CN109029730A (en) | A kind of optics thermal detector that the polarization direction for linearly polarized light detects | |
CN208765847U (en) | A kind of optical detector enhancing light absorption | |
CN109192866A (en) | A kind of circularly polarized light detector based on Schottky barrier | |
CN108871580A (en) | It is a kind of for detecting the optics thermal detector in circularly polarized light direction | |
JP3303786B2 (en) | Bolometer type infrared sensor | |
CN208520482U (en) | It is a kind of for detecting the optics thermal detector in circularly polarized light direction | |
CN208738306U (en) | A kind of circularly polarized light detector based on Schottky barrier | |
CN109186758A (en) | A kind of optical detector enhancing light absorption | |
Bartmann et al. | Germanium nanowire microbolometer | |
US6531699B1 (en) | Heat detector with a limited angle of vision | |
CN208520478U (en) | A kind of optothermal detector of detectable optical field distribution | |
CN202453088U (en) | Spectrum micro-bolometer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WW01 | Invention patent application withdrawn after publication | ||
WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181218 |