CN109029730A - A kind of optics thermal detector that the polarization direction for linearly polarized light detects - Google Patents

A kind of optics thermal detector that the polarization direction for linearly polarized light detects Download PDF

Info

Publication number
CN109029730A
CN109029730A CN201810912405.0A CN201810912405A CN109029730A CN 109029730 A CN109029730 A CN 109029730A CN 201810912405 A CN201810912405 A CN 201810912405A CN 109029730 A CN109029730 A CN 109029730A
Authority
CN
China
Prior art keywords
thermo
polarized light
linearly polarized
polarization direction
responsive line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201810912405.0A
Other languages
Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongshan Technology Technology Co Ltd
Original Assignee
Zhongshan Technology Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongshan Technology Technology Co Ltd filed Critical Zhongshan Technology Technology Co Ltd
Priority to CN201810912405.0A priority Critical patent/CN109029730A/en
Publication of CN109029730A publication Critical patent/CN109029730A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • G01J4/04Polarimeters using electric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

The present invention relates to a kind of optics thermal detectors that the polarization direction for linearly polarized light detects, including thermo-responsive line, positive/negative electrode is provided at left and right sides of the thermo-responsive line, the upper surface of the thermo-responsive line is provided with a plurality of groove, and the upper surface of the thermo-responsive line, the surface of groove are all covered with metal film;The optics thermal detector that the polarization direction for being used for linearly polarized light detects, by the way that grating is arranged on thermo-responsive line surface, when linearly polarized light incidence, it can be in the case where coincideing with grating setting direction, absorptivity highest, the light absorbed can be converted to thermal energy to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive line, by loading external power supply at thermo-responsive line both ends, pass through the curent change of thermo-responsive line, by detecting to judge the direction of linearly polarized light.

Description

A kind of optics thermal detector that the polarization direction for linearly polarized light detects
Technical field
The present invention relates to photodetector technical fields, and in particular to what a kind of polarization direction for linearly polarized light detected Optics thermal detector.
Background technique
The physical effect of photodetector is generally divided into photon effect and photo-thermal effect, and corresponding detector is referred to as light Subtype detector and photo-thermal type detector.The common trait of various photon type detectors is using semiconductor energy carrying material, photon Energy has generated directly effect to photoelectronic in detection material, therefore photon type detector has cut-off response frequency or wavelength, And spectral response is limited to a certain wave band, therefore different material systems determines that detector has different response wave length scopes, Generally it is difficult to use in wide range or multispectral section of detection.Photo-thermal type detector is not caused directly after absorbing optical radiation energy The change of internal electron state, but the luminous energy of absorption is become the energy of thermal motion of lattice, cause detecting element temperature to rise, It changes so as to cause the electrical properties of detecting element or other physical properties, therefore the size of photo-thermal effect and photon energy does not have There is direct relation, photo-thermal type detector is in principle to frequency without selectivity.Due to infrared band especially in LONG WAVE INFRARED with The photo-thermal effect of upper wave band becomes apparent from compared to Uv and visible light, therefore optothermal detector is commonly used in the spy of middle long wave optical radiation It surveys, typical photo-thermal type detector includes the types such as micro-metering bolometer, pyroelectric detector and thermocouple detector.Due to temperature Raising is the effect of heat accumulation, and the general response speed of thermal detector based on photo-thermal effect is slower, in millisecond magnitude.
However, existing optothermal detector be primarily used to detection light intensity, main improvement direction also embody be It is lower to the susceptibility of linearly polarized light in terms of the intensity for the light how to detect, it can not especially confirm the polarization side of linearly polarized light To.
Summary of the invention
In view of the above-mentioned problems, present invention aim to address optothermal detector can not method confirmation linearly polarized light polarization direction The problem of.
For this purpose, the present invention provides a kind of optics thermal detector that the polarization direction for linearly polarized light detects, including heat Sensitive line is provided with positive/negative electrode at left and right sides of the thermo-responsive line, and the upper surface of the thermo-responsive line is provided with a plurality of Groove, the upper surface of the thermo-responsive line, the surface of groove are all covered with metal film.
The a plurality of groove is longitudinal or transversely arranged in thermo-responsive line upper surface.
Conductive plate is provided between the thermo-responsive line and positive/negative electrode.
The metal film is the nano-particle layer that gold, silver are formed.
The inside grooves are additionally provided with SiO2Ball.
The bottom surface of the metal film, thermo-responsive line upper surface be all covered with SiO2Layer;The SiO2The top of layer is also set It is equipped with TiO2
The left side wall of the groove and the angle of bottom surface are less than 90 °, the angle of right side wall and bottom surface and left side wall and bottom surface Angle be axial symmetry.
The thermo-responsive wire material includes VOx, Si, SiGe, YBCO or NiO.
Beneficial effects of the present invention: the optical thermal that this polarization direction for linearly polarized light provided by the invention detects is visited Device is surveyed, solves the problems, such as that optothermal detector can not carry out the polarization direction detection of linearly polarized light, by setting on thermo-responsive line surface Grating is set, it, can be in the case where coincideing with grating setting direction when linearly polarized light incidence, absorptivity highest is absorbed Light can be converted to thermal energy to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive line, by temperature-sensitive Feel line both ends and load external power supply, passes through the curent change of thermo-responsive line, to judge the direction of linearly polarized light, the use by detecting There is easy to operate, cost compared to existing optical detector in the optics thermal detector that the polarization direction of linearly polarized light detects Low feature.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is the optical thermal panel detector structure top view detected for the polarization direction of linearly polarized light.
Fig. 2 is the optical thermal detector side view one detected for the polarization direction of linearly polarized light.
Fig. 3 is the optical thermal detector side view two detected for the polarization direction of linearly polarized light.
Fig. 4 is the optical thermal detector side view three detected for the polarization direction of linearly polarized light.
Fig. 5 is the optical thermal detector side view four detected for the polarization direction of linearly polarized light.
In figure: 1, thermo-responsive line;2, groove;3, metal film;4, positive/negative electrode;5, conductive plate;6,SiO2Ball;7,SiO2 Layer;8,TiO2;9, the angle of left side wall and bottom surface;10, the angle of right side wall and bottom surface.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
In order to solve the problems, such as that optothermal detector can not confirm the polarization direction of linearly polarized light.The present invention provides one kind such as The optics thermal detector that Fig. 1, the polarization direction shown in Fig. 2 for linearly polarized light detect, including thermo-responsive line 1, the temperature-sensitive The left and right sides of sense line 1 is provided with positive/negative electrode 4, and the positive/negative electrode 4 is for accessing external detection power supply, to provide line Power supply needed for the polarization direction of polarised light;The upper surface of the thermo-responsive line 1 is provided with a plurality of groove 2, described thermo-responsive The upper surface of line 1, the surface of groove 2 are all covered with metal film 3.
The a plurality of groove 2 in thermo-responsive 1 upper surface of line be it is longitudinal or transversely arranged, when incident linearly polarized light with When the direction for the grating that groove 2 is constituted is consistent, maximum absorptivity is had, changes the resistivity of thermo-responsive line 1 at this time most Greatly, the curent change after causing external power supply to connect thermo-responsive line 1 is maximum, by detecting the variation of electric current it may determine that line is inclined The direction of vibration light.
In order to enable the electric energy for the external power supply that thermo-responsive line 1 is loaded can be more uniform by thermo-responsive line 1, Conductive plate 5 is provided between the thermo-responsive line 1 and positive/negative electrode 4, the electric energy of such external power supply can be in thermo-responsive line More uniform electric field is formed between 1 both ends.
The metal film 3 is the nano-particle layer that gold, silver are formed, and it is inclined to incident ray which mainly enhances grating The absorption of vibration light, so as to the variation of electric current preferably be detected, so that the direction determining of linearly polarized light is more sensitive, quasi- Really.
Further, SiO can be additionally provided with inside the groove 22Ball 6, the light that can be enhanced in groove 2 in this way are inhaled It receives, as shown in Figure 2.
Further, the bottom surface of the metal film 3, the upper surface of thermo-responsive line 1 have been all covered with SiO2Layer 7;The SiO2 The top of layer 7 is additionally provided with TiO28, the structure for being similar to greenhouse heat insulation space can be formed in this way, also for mentioning Absorption of the height to incident ray polarized light, as shown in Figure 3.
Further, the left side wall of the groove 2 and the angle 9 of bottom surface be less than 90 °, the angle 10 of right side wall and bottom surface with Left side wall and the angle of bottom surface 9 are mirror symmetry, in this way, being formed the slightly big space in a small, bottom of opening, existing simultaneously 2 outer wall of groove is provided with metal film 3, can also be improved the absorption to incident ray polarized light, as shown in Figure 5.
Three of the above improves the mode of the absorptivity of linearly polarized light, can be used alone, can also be used together;Such as Fig. 4 The upper surface of the bottom surface, thermo-responsive line 1 that show metal film 3 has been all covered with SiO2Layer 7;The SiO2The top of layer 7 is also set up There is TiO2SiO is additionally provided with inside 8 this modes and groove 22The schematic diagram that this mode of ball 6 is used together;It is same to have very well Effect of the promotion to Absorption of linearly polarized light.
1 material of thermo-responsive line includes VOx, Si, SiGe, YBCO or NiO, and the requirement of the material of thermo-responsive line 1 is pair Change in resistance can occur in fuel factor, above-mentioned material generally has relatively high temperature-coefficient of electrical resistance (TCR), absolutely Value be greater than 1%/DEG C;In addition, existing other heat-sensitive materials for perceiving thermal change such as existing pyroelectricity material, thermocouple It can also serve as the making material of thermo-responsive line 1.
When practical application, the setting 2 of groove 2 can be set to horizontal direction or vertical direction, by linearly polarized light Incidence is carried out along direction identical with groove 2, in the load external power supply of the electrode at thermo-responsive 1 both ends of line, electric current is carried out It detects and record current is A1, linearly polarized light is subjected to incidence along the direction vertical with groove 2, at thermo-responsive 1 both ends of line The load external power supply of electrode, detect to electric current and record current is A2, compares the size of electric current A1 and A2, if A1 < A2, then linearly polarized light along polarization direction it is identical as the direction of groove arrangement;If A1 > A2, linearly polarized light along polarization Direction and the direction of groove arrangement are perpendicular.
It should be noted that the polarization direction of above-mentioned judgement linearly polarized light as a result, be resistance based on thermo-responsive line 1 with The case where temperature (thermal resistivity) is positive coefficient relationship, i.e., the resistance value of thermo-responsive line 1 increases with temperature and become larger;If temperature-sensitive The resistance and temperature (thermal resistivity) for feeling line 1 are negative coefficient relationships, i.e., the resistance value of thermo-responsive line 1 increases with temperature and become smaller Situation, then result is just opposite.
In conclusion the optics thermal detector that this polarization direction for linearly polarized light provided in this embodiment detects, Solve the problems, such as that optothermal detector can not carry out the polarization direction detection of linearly polarized light, by the way that light is arranged on thermo-responsive 1 surface of line Grid can be in the case where coincideing when linearly polarized light incidence with grating setting direction, absorptivity highest, the light absorbed Thermal energy can be converted to greatest extent, and then maximum influence is caused on the resistivity of thermo-responsive 1 line, by thermo-responsive 1 Line both ends load external power supply, and detection passes through the curent change of thermo-responsive line, and to judge the direction of linearly polarized light, it is inclined that this is used for line The optics thermal detector that the polarization direction of light detects that shakes has spy easy to operate, at low cost compared to existing optical detector Point.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention Protection scope.

Claims (8)

1. a kind of optics thermal detector that the polarization direction for linearly polarized light detects, it is characterised in that: including thermo-responsive line (1), it is provided with positive/negative electrode (4) at left and right sides of the thermo-responsive line (1), the upper surface of the thermo-responsive line (1) is provided with A plurality of groove (2), the upper surface of the thermo-responsive line (1), the surface of groove (2) are all covered with metal film (3).
2. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: a plurality of groove (2) is longitudinal or transversely arranged in thermo-responsive line (1) upper surface.
3. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: it is provided between the thermo-responsive line (1) and positive/negative electrode (4) conductive plate (5).
4. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: the metal film (3) is the nano-particle layer that gold, silver are formed.
5. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: SiO is additionally provided with inside the groove (2)2Ball (6).
6. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: the bottom surface of the metal film (3), the upper surface of thermo-responsive line (1) have been all covered with SiO2Layer (7);The SiO2Layer (7) Top is additionally provided with TiO2(8)。
7. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: the left side wall of the groove (2) and the angle (9) of bottom surface less than 90 °, the angle (10) of right side wall and bottom surface and left side wall with The angle (9) of bottom surface is axial symmetry.
8. the optics thermal detector that a kind of polarization direction for linearly polarized light as described in claim 1 detects, feature exist In: thermo-responsive line (1) material includes VOx, Si, SiGe, YBCO or NiO.
CN201810912405.0A 2018-08-11 2018-08-11 A kind of optics thermal detector that the polarization direction for linearly polarized light detects Withdrawn CN109029730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810912405.0A CN109029730A (en) 2018-08-11 2018-08-11 A kind of optics thermal detector that the polarization direction for linearly polarized light detects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810912405.0A CN109029730A (en) 2018-08-11 2018-08-11 A kind of optics thermal detector that the polarization direction for linearly polarized light detects

Publications (1)

Publication Number Publication Date
CN109029730A true CN109029730A (en) 2018-12-18

Family

ID=64633728

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810912405.0A Withdrawn CN109029730A (en) 2018-08-11 2018-08-11 A kind of optics thermal detector that the polarization direction for linearly polarized light detects

Country Status (1)

Country Link
CN (1) CN109029730A (en)

Similar Documents

Publication Publication Date Title
KR101922119B1 (en) Infrared detector and method for detecting infrared using the same
CN105977335B (en) Shortwave optics thermal detector and its focal plane array device
KR101910575B1 (en) Infrared detector and infrared image sensor
JP6093921B1 (en) Electromagnetic wave detector, electromagnetic wave detector array, and gas analyzer
KR20110074605A (en) Nanowire bolometer photodetector
CN109309140B (en) Polarized non-refrigeration infrared focal plane detector
CN208420680U (en) It is a kind of for detecting the optics thermal detector of chiral molecules
Dem’yanenko et al. Application of uncooled microbolometer detector arrays for recording radiation of the terahertz spectral range
CN105393097A (en) An apparatus for sensing
CN105486412A (en) Uncooled infrared focal plane array detector with overlap vertical bridge legs
CN109030375A (en) It is a kind of for detecting the optics thermal detector of chiral molecules
KR101570445B1 (en) Infrared Detector
CN208399013U (en) A kind of optics thermal detector that the polarization direction for linearly polarized light detects
CN109029730A (en) A kind of optics thermal detector that the polarization direction for linearly polarized light detects
CN208765847U (en) A kind of optical detector enhancing light absorption
CN109192866A (en) A kind of circularly polarized light detector based on Schottky barrier
CN108871580A (en) It is a kind of for detecting the optics thermal detector in circularly polarized light direction
JP3303786B2 (en) Bolometer type infrared sensor
CN208520482U (en) It is a kind of for detecting the optics thermal detector in circularly polarized light direction
CN208738306U (en) A kind of circularly polarized light detector based on Schottky barrier
CN109186758A (en) A kind of optical detector enhancing light absorption
Bartmann et al. Germanium nanowire microbolometer
US6531699B1 (en) Heat detector with a limited angle of vision
CN208520478U (en) A kind of optothermal detector of detectable optical field distribution
CN202453088U (en) Spectrum micro-bolometer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication
WW01 Invention patent application withdrawn after publication

Application publication date: 20181218