CN109015546B - Air-floatation four-dimensional adjusting table - Google Patents
Air-floatation four-dimensional adjusting table Download PDFInfo
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- CN109015546B CN109015546B CN201811203079.2A CN201811203079A CN109015546B CN 109015546 B CN109015546 B CN 109015546B CN 201811203079 A CN201811203079 A CN 201811203079A CN 109015546 B CN109015546 B CN 109015546B
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- 238000013519 translation Methods 0.000 claims abstract description 70
- 238000009434 installation Methods 0.000 claims abstract description 35
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 238000007664 blowing Methods 0.000 claims description 20
- 238000007667 floating Methods 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 2
- 208000004350 Strabismus Diseases 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 239000004579 marble Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Abstract
The invention provides an air floatation four-dimensional adjusting table, which belongs to the field of air floatation equipment and comprises an installation base and a translation sliding table, wherein the installation base is hollow and cylindrical, the translation sliding table comprises an air floatation plate at the upper end and a translation column vertically arranged below the air floatation plate, the translation column and the installation base are coaxially provided with a movement gap, an air floatation plate cover is arranged on the upper end surface of the installation base, an air floatation surface is arranged between the air floatation plate cover and the installation base, an adjusting screw rod in threaded connection is arranged on the installation base, the adjusting screw rod is arranged in contact with the translation sliding table after penetrating through the installation base, the number of the adjusting screw rods is at least two, the two adjusting screw rods are intersected into 90-degree arrangement on the same horizontal plane, the upper end of the translation sliding table is provided with an angle sliding table in spherical contact with the angle sliding table, and the air floatation surface is arranged between the two translation sliding tables, and the rotation adjustment is realized through an angle adjusting rod. The invention can realize accurate micro-adjustment of the clamping position of the workpiece in the processing, measuring and precise repairing of the part, and improve the manufacturing and measuring precision of the part.
Description
Technical Field
The invention belongs to the field of air floatation equipment, and relates to an air floatation four-dimensional adjusting table.
Background
The application of the air floatation mechanical equipment is wider and wider, the friction force between two parts can be greatly reduced, the stability of the relative motion of the parts is ensured, the energy consumption is saved, the working principle of air floatation is that an air floatation channel is arranged on the lower part, the air is blown downwards through the air floatation channel, the friction force between the upper part and the lower part is greatly reduced under the action of air, and the micro adjustment of the upper part is facilitated.
At present, accurate positioning and adjustment are needed in the processing and detection process of large-caliber high-precision complex parts, locking is needed after adjustment, the traditional thinking purely mechanical type is adopted, the adjustment speed is low, the adjustment precision is not easy to ensure, and when the size or the weight of the large-size complex parts are large, the requirement on the power of a driving source for adjustment is high, and the energy consumption is high.
Disclosure of Invention
The invention aims to solve the problem of providing an air floatation four-dimensional adjusting table which can realize accurate micro-adjustment of the clamping position of a workpiece in the process of processing, measuring and precisely repairing the workpiece and improve the manufacturing and measuring precision of the workpiece.
In order to solve the technical problems, the invention adopts the following technical scheme: the air floatation four-dimensional adjusting table comprises a mounting base and a translation sliding table, wherein the mounting base is hollow and cylindrical, the translation sliding table comprises an air floatation plate at the upper end and a translation column vertically arranged below the air floatation plate, the translation column and the mounting base are coaxially arranged, a moving gap is arranged between the translation column and the mounting base, and the air floatation plate is covered on the upper end face of the mounting base, and an air floatation surface is arranged between the air floatation plate and the mounting base;
the mounting base is provided with adjusting screws in threaded connection, the adjusting screws are arranged in contact with the translation sliding table after penetrating through the mounting base, the number of the adjusting screws is at least two, and the adjusting screws are intersected on the same horizontal plane to form 90 degrees;
the upper end face of the translation sliding table is concave spherical, the upper end of the translation sliding table is provided with an angle sliding table in contact with the spherical surface of the translation sliding table, an air floatation surface is arranged between the two, the outer ring of the translation sliding table is hinged with a rotating seat, an angle adjusting rod is connected to the rotating seat in a threaded mode, and the angle adjusting rod passes through the rotating seat and then is in contact with the angle sliding table.
Further, the axis of adjusting screw passes the axle center setting of installation base, adjusting screw is in the thickness direction setting placed in the middle of installation base, the outer lane of translation slip table is equipped with fixed lug, one the roating seat with two fixed lug is supporting to be set up, the roating seat is established two between the fixed lug and articulated rather than, the up end of angle slip table is equipped with a plurality of lock screw.
Further, a first fixing and locking plane is arranged in the area, corresponding to the adjusting screw, of the mounting base, a first top driving plane is arranged in the area, corresponding to the screw, of the translation sliding table, the first fixing and locking plane is arranged in parallel with the first top driving plane, and a second top driving plane is arranged in the area, corresponding to the angle sliding table and the angle adjusting rod, of the angle sliding table.
Further, a precise line rail is arranged on the first top driving plane, a rail part of the precise line rail is fixedly locked on the first top driving plane, a sliding part of the precise line rail is in contact with the adjusting screw, the precise line rail is perpendicular to the adjusting screw, and one precise line rail is arranged in a matching way by the adjusting screw.
Further, a circular sliding rail is arranged on the second top drive plane, a rail part of the circular sliding rail is fixedly connected with the angle sliding table, a sliding part of the circular sliding rail is in contact with the angle adjusting rod, the sliding direction of the circular sliding rail is perpendicular to the axis direction of the angle adjusting rod, and one of the angle adjusting rods is configured with one of the circular sliding rail.
Further, a coaxial bushing is arranged between the adjusting screw and the mounting base, one end of the bushing, which is T-shaped and provided with a big end, is arranged on the outer ring of the mounting base, and one end of the small end penetrates through the mounting base and then continues to extend towards the translation sliding table.
Further, a plurality of air blowing holes for blowing air to the installation base are formed in the lower end face of the air floating plate, the air blowing holes are communicated with an external air supply device, and a plurality of air blowing holes blow air downwards to form an air floating surface between the air floating plate and the installation base.
Further, a first fixing and locking plane is arranged in the area, corresponding to the adjusting screw, of the mounting base, a first top driving plane is arranged in the area, corresponding to the screw, of the translation sliding table, the first fixing and locking plane is arranged in parallel with the first top driving plane, and a mechanical air valve for controlling on-off of the air supply pipeline of the air blowing hole is arranged on the first fixing and locking plane.
Further, the number of the adjusting screws is four, and the adjusting screws are uniformly distributed relative to the axis of the mounting base.
Further, be equipped with a plurality of exhaust holes on the angle slip table, exhaust hole and outside air feeder intercommunication, a plurality of exhaust hole down exhaust is in form the air supporting face between angle slip table and the translation revolving stage, the exhaust hole is through the gas blowing and the outage action of control valve realization exhaust hole, the quantity of angle regulation pole is two at least and interval 90 degrees setting, the axis of angle regulation pole is crossed the center setting of angle slip table.
Compared with the prior art, the invention has the following advantages and positive effects.
1. According to the invention, the translation sliding table and the mounting base which are vertically corresponding are arranged, the air floatation surface is arranged between the two, the friction coefficient between the two is reduced, the adjustment of the translation sliding table relative to the mounting base is facilitated, the adjusting screws are arranged, the number of the adjusting screws is at least two, the two adjusting screws are intersected into 90-degree arrangement on the same horizontal plane, the adjustment of the distance in two directions is realized, the requirement of two-dimensional adjustment is met, the knob is arranged at one end of the adjusting screw, which is far away from the translation sliding table, the precession distance is conveniently confirmed, and the adjustment precision is improved;
on the basis of the two-dimensional linear adjustment, an angle sliding table is arranged at the upper end of the translation sliding table, an angle adjusting rod is arranged, the overturning of the angle sliding table is realized by adjusting the pitching angle of the angle adjusting rod, the rotation along the axis of the angle sliding table is realized, the linear adjustment and the overturning angle adjustment of the part fixed above the angle sliding table are realized by combining the structures, the positioning is more accurate, and the manufacturing and measuring precision of the part are improved;
2. the axis of the adjusting screw rod penetrates through the axis of the mounting base to ensure concentricity of the translation sliding table and the mounting base as much as possible, so that the gravity center of the whole structure cannot deviate too much, the stability of the translation sliding table in a bearing state is improved, the adjusting screw rod is arranged in the middle of the thickness direction of the mounting base, the middle stress of the translation column is ensured as much as possible, the skew is avoided in the adjusting process, and the stability is further improved;
3. one adjusting screw is matched with one precise line rail, after the precise line rail is arranged, the moving along the precise line rail which is arranged at 90 degrees different in the moving process of the adjusting screw can be ensured, the adjusting precision is improved, and the problem of mechanical interference caused by simultaneous adjustment is avoided;
4. the bushing is arranged, the strength of the adjusting screw is increased, the bushing can be replaced on the premise of being worn, the cost is relatively low, if the bushing is not arranged, the cost for repairing the worn mounting base is too high, the maintenance cost of the bushing reducing device is reduced, the fixing lug and the rotating seat are arranged, the angle adjusting rod can be replaced conveniently, the damage to the translation sliding table caused by the angle adjusting rod is avoided, and the maintenance cost is further reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of an air-floatation four-dimensional adjustment station according to the present invention;
FIG. 2 is a bottom view of the air floatation four-dimensional adjustment station of the present invention;
FIG. 3 is a cross-sectional view A-A of FIG. 2 in accordance with the present invention;
fig. 4 is a sectional view of the G-G of fig. 3 according to the present invention.
Reference numerals:
1-mounting a base; 11-a first locking plane; 2-translating the sliding table; 21-an air floating plate; 22-translating the column; 23-a first top drive plane; 24-blow holes; 25-a control valve; 26-fixing lugs; 3-adjusting the screw; 4-lining; 5-a mechanical air valve; 7-an angle sliding table; 71-exhaust holes; 72-a second top drive plane; 8, an angle adjusting rod; 81-rotating seat; 9-round slide rail.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1, 2 and 3, the invention is an air floatation four-dimensional adjusting table, which comprises a mounting base 1 and a translation sliding table 2, wherein the mounting base 1 is hollow and cylindrical, the translation sliding table 2 comprises an air floatation plate at the upper end and a translation column 22 vertically arranged below the air floatation plate, the translation column 22 and the mounting base 1 are coaxially arranged, a moving gap is arranged between the translation column and the mounting base 1, and an air floatation plate cover is arranged on the upper end surface of the mounting base 1 and an air floatation surface is arranged between the translation column and the mounting base;
the adjusting screw 3 is arranged on the installation base 1 in a threaded connection mode, the threaded connection between the installation base 1 and the adjusting screw 3 is of a precise threaded pair structure, the adjusting screw 3 is in contact with the translation sliding table 2 after penetrating through the installation base 1, the adjusting screw 3 is at least two in quantity and is intersected into 90-degree on the same horizontal plane, adjustment of distances in two directions is achieved, the requirement of two-dimensional adjustment is met, a knob is arranged at one end, away from the translation sliding table 2, of the adjusting screw 3, the screwing distance is confirmed conveniently, and the adjusting precision is improved.
Preferably, the axis of adjusting screw 3 passes the axle center setting of installation base 1, guarantees translation slip table and the concentricity of installation base 1 as far as possible for the focus of overall structure can not squint too much, promotes translation slip table 2 and bears the stability under the state, and adjusting screw 3 sets up in the middle of the thickness direction of installation base 1, guarantees translation post 22's middle part atress as far as possible, avoids producing askew in the adjustment process, further promotes stability.
Preferably, the region that installation base 1 and adjusting screw 3 correspond is equipped with first solid locking plane 11, makes things convenient for adjusting screw 3's installation and fixed, and translation slip table 2 and adjusting screw 3 correspond the region be equipped with first top and drive plane 23, make things convenient for adjusting screw 3 and translation post 22 to be the face contact, enlarge area of contact, promote the stability of adjusting, first solid locking plane 11 and the parallel arrangement of first top drive plane 23 guarantee adjusting screw 3 pass behind the installation base 1 with first top drive plane 23 face contact.
Preferably, the first top driving plane 23 is provided with a precise line rail, a track part of the precise line rail is fixedly locked on the first top driving plane 23, a sliding part of the precise line rail is in contact with the adjusting screw 3, the precise line rail is vertically arranged with the adjusting screw 3, one adjusting screw 3 is matched with the precise line rail, after the precise line rail is arranged, the adjusting screw 3 can be ensured to move along the precise line rail which is arranged at 90 degrees different, the adjusting precision is improved, and the problem of mechanical interference caused by simultaneous adjustment is also avoided.
Preferably, be equipped with coaxial bush 4 between adjusting screw 3 and the installation base 1, bush 4 is T type and the one end of big end is established at the outer lane of installation base 1, and the one end of little end passes installation base 1 and continues to extend to translation slip table 2 and set up, firstly increases adjusting screw 3's intensity, and second can change under the prerequisite of bush 4 wearing and tearing, and the cost is lower relatively, if not set up bush 4, and the cost of repairing after the installation base 1 is worn and tearing is too high, sets up bush 4 and reduces the maintenance cost of equipment.
Preferably, the lower end surface of the air floating plate is provided with a plurality of air blowing holes 24 blowing to the mounting base 1, the air blowing holes 24 are communicated with an external air supply device, the air floating surface is formed between the air floating plate 21 and the mounting base 1 by downward blowing of the air blowing holes 24, the friction coefficient between the air floating plate 21 and the mounting base 1 is reduced, and the adjustment of the movable sliding table is facilitated; more preferably, the area of the installation base 1 corresponding to the adjusting screw 3 is provided with a first fixed locking plane 11, the area of the translation sliding table 2 corresponding to the adjusting screw 3 is provided with a first top driving plane 23, the first fixed locking plane 11 and the first top driving plane 23 are arranged in parallel, the first fixed locking plane 11 is provided with a mechanical air valve 5 for controlling the on-off of an air supply pipeline of the air blowing hole 24, and after the mechanical air valve 5 is arranged, the on-off of the air blowing hole 24 is conveniently controlled, so that a control program is simplified.
Preferably, the quantity of adjusting screw 3 is four and the axis equipartition setting of relative installation base 1, and every adjusting screw 3 is supporting to set up a accurate linear rail, and the supporting adjusting screw 3 axis that sets up perpendicularly with accurate linear rail direction of movement's axis, has effectively avoided the mechanical interference that produces when two axial mutual adjustment, has guaranteed the precision of adjusting, and a plurality of directions are adjusted, enlarge accommodation.
Preferably, the up end of translation slip table 2 is the spherical of indent, the upper end of translation slip table 2 is equipped with rather than the supporting setting of two fixed lugs 26, the reducible angle slip table 7 and the frictional force between the translation slip table 2 of being equipped with the air supporting face between the two, make things convenient for the angle regulation of angle slip table 7, the outer lane of translation slip table 2 articulates there is roating seat 81, threaded connection has angle regulation pole 8 on the roating seat 81, angle regulation pole 8 passes roating seat 81 back and angle slip table 7 contact setting, adjust the every single pitch angle of angle regulation pole 8, can drive the angle rotation of angle slip table 7, the regulation of angle rotation has been accomplished, the outer lane of translation slip table 2 is equipped with fixed lugs 26, a roating seat 81 sets up between two fixed lugs 26 and articulated with it, the symmetry sets up, the atress is balanced, stability is high, the up end of angle slip table 7 is equipped with a plurality of lock screw, conveniently carry out the solid lock setting of part, the region that angle slip table 7 and angle regulation pole 8 correspond is equipped with second top drive plane 72, be equipped with circular slide rail 9 on the second top drive plane 72, the track portion of circular slide rail 9 and the angle regulation pole 9, the track portion of angle regulation pole 9 is fixed connection with angle regulation pole 9, the angle setting up the circular slide rail 9 is more perpendicular to the angle regulation pole 8, the angle setting up direction of angle regulation slide rail 9 is more set up the angle regulation 9.
Preferably, be equipped with a plurality of exhaust holes 71 on the angle slip table, exhaust hole 71 and outside air feeder intercommunication, a plurality of exhaust holes 71 down exhaust forms the air supporting face between angle slip table and translation revolving stage, exhaust hole 71 passes through the control valve and realizes the action of blowing and the outage of exhaust hole 71, the quantity of angle regulation pole 8 is two at least and the interval 90 degrees setting, every angle regulation pole 8 all can realize the rotation regulation of angle slip table 7 around an axle, set up N and can realize the angle rotation regulation around N axles, adjust according to the actual conditions, the axis of angle regulation pole 8 passes the center setting of angle slip table 7, the upper and lower focus position of assurance structure is unchangeable basically, promote the stability of structure.
In the actual working process, firstly, the mounting base 1 is fixedly locked on the upper end face of the air floatation turntable or the table top of the marble platform through the screw arranged in the countersink, the translation sliding table 2 is arranged on the upper end face of the mounting base 1, the angle sliding table 7 is arranged on the upper end face of the translation sliding table, the upper end of the angle sliding table 7 is provided with a plurality of threaded hole annular uniform distribution, a part to be repaired can be assembled and clamped, the mechanical air valve 5 is opened, then an external air supply device supplies air to the air blowing hole 24, an air floatation surface is formed between the air floatation plate 21 and the mounting base 1, then micro-adjustment of the translation sliding table 2 in different directions is carried out through the adjusting screw 3, due to the fact that a precise linear rail is arranged, mechanical interference generated during mutual adjustment in two axial directions is effectively avoided, the adjustment precision is guaranteed, the control valve 25 is opened, the external air supply device supplies air to the exhaust hole 71, the angle sliding table 7 and the translation sliding table 2 form the air floatation surface, the adjustment of different direction angles of the angle sliding table 7 is realized through the adjustment of the pitching angle adjusting rod 8, meanwhile, the degree of freedom of the angle sliding table 9 is further increased, the angle of the angle sliding table 7 is adjusted, the position of the whole sliding table can be adjusted accurately, the workpiece is adjusted, the precision of the workpiece is adjusted, and the precision of the workpiece can be manufactured, and the position of the workpiece can be adjusted accurately, and the workpiece can be adjusted, and the precision position of the workpiece can be well can be adjusted, and the precision position can be well be adjusted, and the position can be adjusted.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (10)
1. Air supporting four-dimensional adjustment platform, its characterized in that: the device comprises a mounting base and a translation sliding table, wherein the mounting base is hollow and cylindrical, the translation sliding table comprises an air floating plate at the upper end and a translation column vertically arranged below the air floating plate, the translation column and the mounting base are coaxially arranged, a moving gap is arranged between the translation column and the mounting base, and the air floating plate is covered on the upper end face of the mounting base and an air floating surface is arranged between the air floating plate and the mounting base; the mounting base is provided with adjusting screws in threaded connection, the adjusting screws are arranged in contact with the translation sliding table after penetrating through the mounting base, the number of the adjusting screws is at least two, and the adjusting screws are intersected on the same horizontal plane to form 90 degrees; the upper end face of the translation sliding table is concave spherical, the upper end of the translation sliding table is provided with an angle sliding table in contact with the spherical surface of the translation sliding table, an air floatation surface is arranged between the two, the outer ring of the translation sliding table is hinged with a rotating seat, an angle adjusting rod is connected to the rotating seat in a threaded mode, and the angle adjusting rod passes through the rotating seat and then is in contact with the angle sliding table.
2. The air-floatation four-dimensional adjustment station of claim 1, wherein: the axis of adjusting screw passes the axle center setting of installation base, adjusting screw is in the thickness direction setting placed in the middle of installation base, the outer lane of translation slip table is equipped with fixed lug, one the roating seat with two fixed lug is supporting to be set up, the roating seat is established two between the fixed lug and articulated rather than, the up end of angle slip table is equipped with a plurality of solid lock screw.
3. The air-floatation four-dimensional adjustment station of claim 1, wherein: the installation base with the region that adjusting screw corresponds is equipped with first solid locking plane, translation slip table with the region that the screw corresponds is equipped with first top and drives the plane, first solid locking plane with first top drives the plane parallel arrangement, the angle slip table with the region that the angle adjusting lever corresponds is equipped with the second top and drives the plane.
4. The air-floatation four-dimensional adjusting table according to claim 3, wherein a precise wire rail is arranged on the first top driving plane, a rail part of the precise wire rail is fixedly locked on the first top driving plane, a sliding part of the precise wire rail is in contact with the adjusting screw rod, the precise wire rail is perpendicular to the adjusting screw rod, and one precise wire rail is arranged in a matching way by one adjusting screw rod.
5. The air-floatation four-dimensional adjusting table according to claim 3, wherein a circular sliding rail is arranged on the second top driving plane, a rail portion of the circular sliding rail is fixedly connected with the angle sliding table, a sliding portion of the circular sliding rail is in contact with the angle adjusting rod, a sliding direction of the circular sliding rail is perpendicular to an axis direction of the angle adjusting rod, and one of the circular sliding rail is arranged in a configuration of the angle adjusting rod.
6. The air-floatation four-dimensional adjustment station of claim 1, wherein: the adjusting screw rod with be equipped with coaxial bush between the installation base, the bush is T and one end of big head is established the outer lane of installation base, little head one end is passed after the installation base continue to the translation slip table extends the setting.
7. The air-floatation four-dimensional adjustment station according to any one of claims 1 to 6, wherein: the lower end face of the air floating plate is provided with a plurality of air blowing holes for blowing air to the installation base, the air blowing holes are communicated with an external air supply device, and the air blowing holes blow air downwards to form an air floating surface between the air floating plate and the installation base.
8. The air-floatation four-dimensional adjustment station of claim 7, wherein: the installation base with the region that adjusting screw corresponds is equipped with first solid locking plane, translation slip table with the region that adjusting screw corresponds is equipped with first top and drives the plane, first solid locking plane with first top drives plane parallel arrangement, be equipped with the control on the first solid locking plane the mechanical air valve of gas pocket air feed pipeline break-make.
9. The air-floatation four-dimensional adjustment station according to any one of claims 1 to 6, wherein: the number of the adjusting screws is four, and the adjusting screws are uniformly distributed relative to the axis of the mounting base.
10. The air-floatation four-dimensional adjustment station according to any one of claims 1 to 6, wherein: the angle sliding table is provided with a plurality of exhaust holes, the exhaust holes are communicated with an external air supply device, the exhaust holes are used for exhausting downwards to form an air floating surface between the angle sliding table and the translation rotating table, the exhaust holes realize the air blowing and air breaking actions of the exhaust holes through control valves, the number of the angle adjusting rods is at least two and the interval is 90 degrees, and the axis of the angle adjusting rods passes through the center of the angle sliding table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811203079.2A CN109015546B (en) | 2018-10-16 | 2018-10-16 | Air-floatation four-dimensional adjusting table |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811203079.2A CN109015546B (en) | 2018-10-16 | 2018-10-16 | Air-floatation four-dimensional adjusting table |
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| CN109015546A CN109015546A (en) | 2018-12-18 |
| CN109015546B true CN109015546B (en) | 2024-03-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109916344A (en) * | 2019-04-08 | 2019-06-21 | 天津中精微仪器设备有限公司 | Air-flotation type link rod measuring appliance |
| CN113309785B (en) * | 2020-02-27 | 2022-09-02 | 上海微电子装备（集团）股份有限公司 | Air bearing device, motion table and photoetching equipment |
| CN111805495A (en) * | 2020-06-22 | 2020-10-23 | 青岛前哨精密仪器有限公司 | High-precision angle fine-tuning mechanism |
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| CN101303532A (en) * | 2008-06-10 | 2008-11-12 | 上海微电子装备有限公司 | Six-freedom degree precision positioning platform capable of switching station |
| CN103345126A (en) * | 2013-06-29 | 2013-10-09 | 中国科学院光电技术研究所 | Three degree-of-freedom nanometer positioning micro-motion wafer stage |
| CN103617813A (en) * | 2013-11-22 | 2014-03-05 | 贵州航天南海科技有限责任公司 | Combined five-dimension adjuster |
| CN105173129A (en) * | 2015-09-18 | 2015-12-23 | 南京航空航天大学 | Triaxial air bearing table leveling system and method |
| CN205764953U (en) * | 2016-05-26 | 2016-12-07 | 杭州电子科技大学 | A kind of air-float guide rail platform with loading compensation function |
| CN206578728U (en) * | 2016-10-31 | 2017-10-24 | 浙江康隆达特种防护科技股份有限公司 | Detect the air supporting rotary table structure of glove mould cambered surface experimental facilities |
| KR20180073203A (en) * | 2016-12-22 | 2018-07-02 | 주식회사 포스코 | Base frame for heavy weight body |
| CN208992648U (en) * | 2018-10-16 | 2019-06-18 | 天津中精微仪器设备有限公司 | The air bearing four-dimension adjusts platform |
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