CN109000597A - A kind of surface roughness measuring method based on laser induced breakdown spectroscopy - Google Patents
A kind of surface roughness measuring method based on laser induced breakdown spectroscopy Download PDFInfo
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- CN109000597A CN109000597A CN201810898087.7A CN201810898087A CN109000597A CN 109000597 A CN109000597 A CN 109000597A CN 201810898087 A CN201810898087 A CN 201810898087A CN 109000597 A CN109000597 A CN 109000597A
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- surface roughness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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Abstract
A kind of composite material surface roughness measurement method based on laser induced breakdown spectroscopy, comprising: S1, prepare the composite sample that material is same or similar but surface roughness is different, and obtain the surface roughness of each sample；S2, using laser induced breakdown spectroscopy method, the surface of each composite sample is irradiated with pulsed laser beam, obtains plasma characteristics spectroscopic data；S3, the calibration relation for establishing plasma characteristics spectroscopic data with corresponding roughness；S4, using laser induced breakdown spectroscopy method, the surface of composite material to be measured is irradiated with pulsed laser beam, obtains plasma characteristic spectrum data；S5, the plasma characteristics spectroscopic data obtained according to S4, the calibration relation obtained using step S3 determine the surface roughness of composite material to be measured.The on-the-spot test that can carry out long-range electrification to composite insulating material using this method, is quickly obtained accurate composite material surface roughness.
Description
Technical field
The invention belongs to material surface roughness concentration technologies, and in particular to one kind is based on laser induced breakdown spectroscopy
Surface roughness measuring method.
Background technique
The measurement most common method of material surface roughness is surveyed using the roughness tester of probe contact at present
It measures, needs for instrument to be placed in sample surfaces in measurement process, and need to guarantee that surface is more smooth.It is difficult to connect for some
Touch measurement or the irregular situation of material surface, such as the composite insulator of ultra-high-tension power transmission line, surface roughness is table
One of the important feature amount of material aging is levied, material aging can threaten the normal operation of electric system.And these traditional means without
Method provides on-site on-line measurement, they need to carry out insulation sub-sampling in route outage, belongs to destructive measurement.
Laser induced breakdown spectroscopy (Laser-induce Breakdown Spectroscopy, abbreviation LIBS) is
By the way that pulse laser focusing to sample to be tested surface is carried out ablation, to generate plasma, plasma issues when cooling
There is the characteristic spectrum being closely connected with constituent content, using spectrometer collection characteristic spectrum, the ingredient point to sample may be implemented
Analysis.
Summary of the invention
When the present invention is primarily directed to composite material surface roughness is measured with conventional method such as roughness tester etc., need
Isolator material sampling is carried out in route outage, need to contact with sample and need to guarantee the deficiencies of sample surfaces are smooth
Place proposes a kind of surface roughness measuring method based on laser induced breakdown spectroscopy, can carry out long-range, electrification
On-the-spot test rapidly and precisely measures composite material surface roughness.
To achieve the above object, the invention adopts the following technical scheme:
A kind of composite material surface roughness measurement method based on laser induced breakdown spectroscopy, including following step
It is rapid:
S1, prepare the composite sample that material is same or similar but surface roughness is different, and obtain the table of each sample
Surface roughness；
S2, using laser induced breakdown spectroscopy method, the surface of each composite sample is irradiated with pulsed laser beam, is obtained
Obtain the corresponding plasma characteristics spectroscopic data of each sample surface roughness；
S3, establish same or similar material different roughness ablated surface generate plasma characteristics spectroscopic data with
The calibration relation of corresponding roughness；
S4, using laser induced breakdown spectroscopy method, the surface of composite material to be measured is irradiated with pulsed laser beam, obtain
Plasma characteristics spectroscopic data corresponding to composite material surface roughness to be measured；
S5, according to composite material surface to be measured generate plasma characteristics spectroscopic data, using step S3 obtain etc.
The calibration relation of gas ions characteristic spectrum data and corresponding roughness determines the surface roughness of composite material to be measured.
In step S1, the surface roughness of each sample is obtained by roughness tester measurement or non-passes through roughness test
Instrument obtains.
In step S1, label has the multipair point of preset space length on each surface to be measured, is existed using roughness tester
It is measured on the line segment that each pair of point is linked to be, records corresponding roughness value；In step S2, equably select on each line segment
It takes multiple points to carry out laser induced breakdown spectroscopy test, obtains corresponding spectroscopic data.
The plasma characteristics spectroscopic data includes the intensity of spectral line or plasma parameter.
In step S3, the calibration relation utilizes multiple regression, univariable fitting, Partial Least Squares or neural network side
Method is established.
The plasma characteristics spectroscopic data is pre-processed before step S3, including removes background, normalization, spectral line
With one of Match of elemental composition or a variety of.
In step S3, using the intensity of spectral line ratio of two kinds of selected elements as independent variable, roughness is dependent variable, is carried out
Multiple regression obtains the calibration relation of spectroscopic data and roughness.
The spectral line of described two elements includes the atomic spectral line and energy level phase of the first element of the high s/n ratio with setting
Atomic spectral line close to the second element in range is being set for the atomic spectral line of first element.
Described two elements include Si and Al.
A kind of composite material degree of aging detection method is measured using the composite material surface roughness measurement method
The surface roughness of composite material characterizes the degree of aging of material by the surface roughness, so that it is determined that tested composite wood
The degree of aging of material.
Beneficial effects of the present invention:
The present invention is utilized in the case where laser energy is constant, and the surface roughness of material will affect material to laser energy
Absorption process, the principle for causing spectral signal also to change, by establishing same or similar materials different roughness surface
By LIBS signal and the calibration relation of corresponding surface roughness that pulse laser ablation generates, realization passes through laser-induced breakdown light
Measurement of the spectral technology to composite material surface roughness.
Specifically, the present invention utilizes laser induced breakdown spectroscopy, and high energy pulse is focused on same material difference
Ablation is carried out on roughness surface, generates plasma, and the plasma of different surface roughness is corresponded to using spectrometer collection
Body characteristics spectroscopic data establishes the functional relation of spectral information and roughness, obtains calibration curve, then to unknown same of roughness
Kind material carries out LIBS measurement, so as to obtain the roughness on ablation point surface using calibration curve.Present invention can apply to
Roughness concentration is carried out to long-range, electrification the composite insulating material surface at scene, rapidly judges that composite insulating material is for example exhausted
The surface roughness of edge material obtains its operating status.
Compared to existing detection method and instrument, method of the invention has without especially sampling, easy to operate, analysis speed
Fast advantage is spent, table can be carried out to multiple full skirts of multiple insulator chains of shaft tower and single branch insulator during interruption maintenance
Surface roughness detection, and its degree of aging is judged by the measurement result of surface roughness.Application through the invention, can be fast
Speed determine transmission line of electricity composite insulating material surface roughness and degree of aging, according to the actual situation carry out device replacement or
Person's maintenance, guarantees the safe operation of electric system.
Detailed description of the invention
Fig. 1 is that the present invention is based on a kind of realities of composite material surface roughness measurement method of laser induced breakdown spectroscopy
Apply the flow chart of example.
Specific embodiment
It elaborates below to embodiments of the present invention.It is emphasized that following the description is only exemplary,
The range and its application being not intended to be limiting of the invention.
Refering to fig. 1, in one embodiment, a kind of composite material surface based on laser induced breakdown spectroscopy is coarse
Spend measurement method, comprising the following steps:
S1, prepare the composite sample that material is same or similar but surface roughness is different, and obtain the table of each sample
Surface roughness；
S2, using laser induced breakdown spectroscopy method, the surface of each composite sample is irradiated with pulsed laser beam, is obtained
Obtain the corresponding plasma characteristics spectroscopic data of each sample surface roughness；
S3, establish same or similar material different roughness ablated surface generate plasma characteristics spectroscopic data with
The calibration relation of corresponding roughness；
S4, using laser induced breakdown spectroscopy method, the surface of composite material to be measured is irradiated with pulsed laser beam, obtain
Plasma characteristics spectroscopic data corresponding to composite material surface roughness to be measured；
S5, according to composite material surface to be measured generate plasma characteristics spectroscopic data, using step S3 obtain etc.
The calibration relation of gas ions characteristic spectrum data and corresponding roughness determines the surface roughness of composite material to be measured.
In various embodiments, in step S1, the surface roughness of each sample can be measured by roughness tester
It obtains, can not also be obtained by roughness tester using other modes.
In a preferred embodiment, in step S1, label has preset space length (preferably 1 centimetre) on each surface to be measured
Multipair point, measured on the line segment that each pair of point (preferably three pairs of points) is linked to be using roughness tester, record is corresponding
Roughness value；In step S2, it is evenly spaced apart to choose multiple points (preferably three to five points) progress laser on each line segment
Induced breakdown spectroscopy test, obtains corresponding spectroscopic data.
In various embodiments, the plasma characteristics spectroscopic data may include the intensity of spectral line or plasma ginseng
Number.
In various embodiments, in step S3, the calibration relation can using multiple regression, univariable fitting, partially most
Small square law or neural network method are established.
In a preferred embodiment, the plasma characteristics spectroscopic data is pre-processed before step S3, including
Remove one of background, normalization, spectral line and Match of elemental composition or a variety of.
In a preferred embodiment, in step S3, using the intensity of spectral line ratio of two kinds of selected elements as independent variable, slightly
Rugosity is dependent variable, carries out multiple regression, obtains the calibration relation of spectroscopic data and roughness.
In a more preferred embodiment, the spectral line of described two elements includes the first element of the high s/n ratio with setting
Atomic spectral line and energy level relative to first element atomic spectral line setting close to the second element in range atom
Spectral line.
In a particular preferred embodiment, described two elements include Si and Al.
In another embodiment, a kind of composite material degree of aging detection method, uses the composite material surface
Roughness measurement method measures the surface roughness of composite material, and the degree of aging of material is characterized by the surface roughness,
So that it is determined that the degree of aging of tested composite material.
The principle of the present invention, feature and advantage is described below in conjunction with specific embodiment.
A kind of surface roughness measuring method based on laser induced breakdown spectroscopy, specific implementation are as follows:
LIBS device
LIBS device mainly includes laser, spectrometer, delay controller, optical element etc..Select suitable laser energy
Amount, the spectrometer time of integration and acquisition are delayed, to obtain the higher spectral signal of signal-to-noise ratio, signal-to-background ratio.
Calibration process
Prepare multiple material samples same or similar with detected materials, is carried out its surface using the sand paper of different meshes
Polishing, obtains multiple samples with different roughness surface.Three pairs of points that label spacing is 1 centimetre on each surface, benefit
It is measured on the line segment formed by each pair of point with roughness tester, records corresponding roughness value.To above-mentioned all line segments
It equably chooses three to five points and carries out LIBS test, obtain corresponding spectroscopic data.
Spectroscopic data processing
Necessary pretreatment is carried out to spectroscopic data and such as goes background, normalization, spectral line and Match of elemental composition process, selects it
The middle higher main element atomic spectral line of signal-to-noise ratio, the spectral line close to upper energy level seek ratio.Finally with the intensity of spectral line ratio work
For independent variable, roughness is dependent variable, carries out multiple regression, obtains the calibration relation of spectroscopic data and roughness.
Roughness concentration
LIBS test is carried out under same instruments parameter to sample to be tested, finds out corresponding argument value, using above-mentioned more
First regression coefficient calculates roughness value.
1 multiple regression fitting result of table
Table 2 measures the result of aging insulation subsample using LIBS
Example is as it appears from the above, carry out multiple regression to spectral line strength ratio shown in table 1 and roughness, by aging insulator
LIBS spectroscopic data obtains the measurement result of table 2 after substituting into, it can be seen that absolute value of the bias is at 0.5 μm or so.
The above content is combine it is specific/further detailed description of the invention for preferred embodiment, cannot recognize
Fixed specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
Without departing from the inventive concept of the premise, some replacements or modifications can also be made to the embodiment that these have been described,
And these substitutions or variant all shall be regarded as belonging to protection scope of the present invention.
Claims (10)
1. a kind of composite material surface roughness measurement method based on laser induced breakdown spectroscopy, which is characterized in that packet
Include following steps:
S1, prepare the composite sample that material is same or similar but surface roughness is different, and the surface for obtaining each sample is thick
Rugosity；
S2, using laser induced breakdown spectroscopy method, the surface of each composite sample is irradiated with pulsed laser beam, is obtained each
The corresponding plasma characteristics spectroscopic data of sample surfaces roughness；
S3, establish same or similar material different roughness ablated surface generate plasma characteristics spectroscopic data with it is corresponding
The calibration relation of roughness；
S4, using laser induced breakdown spectroscopy method, the table of composite material to be measured is irradiated with the pulsed laser beam of identical parameters
Face obtains the plasma characteristics spectroscopic data for corresponding to composite material surface roughness to be measured；
S5, the plasma characteristics spectroscopic data generated according to composite material surface to be measured, the plasma obtained using step S3
The calibration relation of body characteristics spectroscopic data and corresponding roughness determines the surface roughness of composite material to be measured.
2. composite material surface roughness measurement method as described in claim 1, which is characterized in that in step S1, each sample
Surface roughness obtained or non-obtained by roughness tester by roughness tester measurement.
3. composite material surface roughness measurement method as described in claim 1, which is characterized in that in step S1, each
Label has the multipair point of preset space length on surface to be measured, is carried out on the line segment that each pair of point is linked to be using roughness tester
Measurement, records corresponding roughness value；In step S2, multiple points are equably chosen on each line segment and carry out laser-induced breakdown
Spectrum test obtains corresponding spectroscopic data.
4. composite material surface roughness measurement method as described in any one of claims 1 to 3, which is characterized in that described etc.
Gas ions characteristic spectrum data include the intensity of spectral line or plasma parameter.
5. such as the described in any item composite material surface roughness measurement methods of Claims 1-4, which is characterized in that step S3
In, the calibration relation is established using multiple regression, univariable fitting, Partial Least Squares or neural network method.
6. such as composite material surface roughness measurement method described in any one of claim 1 to 5, which is characterized in that step S3
The plasma characteristics spectroscopic data is pre-processed before, including going in background, normalization, spectral line and Match of elemental composition
It is one or more.
7. such as composite material surface roughness measurement method as claimed in any one of claims 1 to 6, which is characterized in that step S3
In, using the intensity of spectral line ratio of two kinds of selected elements as independent variable, roughness is dependent variable, carries out multiple regression, obtains
The calibration relation of spectroscopic data and roughness.
8. composite material surface roughness measurement method as claimed in claim 7, which is characterized in that the spectrum of described two elements
Line includes the atomic spectra of the atomic spectral line and energy level of the first element of the high s/n ratio with setting relative to first element
Line is setting the atomic spectral line close to the second element in range.
9. composite material surface roughness measurement method as claimed in claim 7 or 8, which is characterized in that described two elements
Including Si and Al.
10. a kind of composite material degree of aging detection method, which is characterized in that using as described in any one of claim 1 to 9
Composite material surface roughness measurement method measures the surface roughness of composite material, characterizes material by the surface roughness
Degree of aging, so that it is determined that the degree of aging of tested composite material.
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| CN111044505A (en) * | 2019-12-13 | 2020-04-21 | 国网山西省电力公司电力科学研究院 | Method for detecting hygroscopic filthy aluminum phosphate |
| CN111044506A (en) * | 2019-12-13 | 2020-04-21 | 国网山西省电力公司电力科学研究院 | Method for detecting water content of aluminum phosphate dirt |
| CN112578244A (en) * | 2020-12-08 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | Method for evaluating internal defect discharge of GIS (gas insulated switchgear) by utilizing ultraviolet light |
| CN114798597A (en) * | 2021-09-26 | 2022-07-29 | 中国电力科学研究院有限公司武汉分院 | Laser cleaning method for improving surface adhesion of conductor |
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| CN114798597A (en) * | 2021-09-26 | 2022-07-29 | 中国电力科学研究院有限公司武汉分院 | Laser cleaning method for improving surface adhesion of conductor |
| CN114798597B (en) * | 2021-09-26 | 2023-08-11 | 中国电力科学研究院有限公司武汉分院 | Laser cleaning method for improving adhesive force of conductor surface |
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