CN108982061A - Automate point source transmitance Stray Light Test system and method - Google Patents

Automate point source transmitance Stray Light Test system and method Download PDF

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CN108982061A
CN108982061A CN201810603452.7A CN201810603452A CN108982061A CN 108982061 A CN108982061 A CN 108982061A CN 201810603452 A CN201810603452 A CN 201810603452A CN 108982061 A CN108982061 A CN 108982061A
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computer
point source
detection system
optical
stray light
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CN108982061B (en
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汪洪源
刘祥
康文
颜志强
王秉文
郭雨桐
武少冲
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Harbin Institute of Technology Shenzhen
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    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract

自动化点源透过率杂散光测试系统及方法,涉及杂散光测试技术领域,为了解决采用手动操作测试系统测量点源透过率,测量精度低、效率低的问题。脉冲激光器出射的激光经光束整形器整形后入射至平行光管,激光经平行光管准直后入射至旋转台上的待测光学系统;第一探测系统位于待测光学系统的入瞳处,且固定在平移机构上;第二探测系统位于待测光学系统的焦面处,且位于旋转台上;第一探测系统和第二探测系统均用于测量辐照度,信号采集系统采集测量结果并将测量结果发送给计算机;计算机用于接收测量结果并计算点源透过率,还用于控制平移机构、旋转台和信号采集系统实现点源透过率的自动化测量。本发明适用于测试点源透过率。

An automated point source transmittance stray light testing system and method relate to the technical field of stray light testing, in order to solve the problems of low measurement accuracy and low efficiency in measuring point source transmittance using a manually operated test system. The laser light emitted by the pulse laser is reshaped by the beam shaper and then enters the collimator. The laser is collimated by the collimator and then enters the optical system to be tested on the rotating table; the first detection system is located at the entrance pupil of the optical system to be tested. And fixed on the translation mechanism; the second detection system is located at the focal plane of the optical system to be tested, and is located on the rotating platform; both the first detection system and the second detection system are used to measure the irradiance, and the signal acquisition system collects the measurement results And send the measurement results to the computer; the computer is used to receive the measurement results and calculate the point source transmittance, and is also used to control the translation mechanism, the rotary table and the signal acquisition system to realize the automatic measurement of the point source transmittance. The invention is suitable for testing point source transmittance.

Description

自动化点源透过率杂散光测试系统及方法Automatic point source transmittance stray light testing system and method

技术领域technical field

本发明涉及杂散光测试技术领域。The invention relates to the technical field of stray light testing.

背景技术Background technique

杂散光是指到达光学系统像面处的非成像光束,在探测元件上形成背景噪声。杂散光的存在影响光学系统成像质量,降低目标对比度,严重时会使光学系统无法正常工作。Stray light refers to the non-imaging light beam that reaches the image plane of the optical system and forms background noise on the detection element. The existence of stray light affects the imaging quality of the optical system, reduces the contrast of the target, and in severe cases, the optical system cannot work normally.

光学系统杂散光产生的原因错综复杂,不仅与制造工艺、材料有关,还与衍射现象、目标特性、背景特效有关。目前,杂散光测量方法主要有两种,即黑斑法和点源法。黑斑法装置实现困难且准确性较低。点源法精度高,符合空间光学技术发展的趋势。The causes of stray light in optical systems are intricate, not only related to manufacturing processes and materials, but also related to diffraction phenomena, target characteristics, and background special effects. At present, there are mainly two methods for measuring stray light, namely, the black spot method and the point source method. The black spot method device is difficult to implement and has low accuracy. The point source method has high precision and is in line with the development trend of space optics technology.

点源法通常使用点源透过率来评价系统的杂散光抑制水平。点源透过率(PST,Point Source Transmittance)定义为:光学系统视场外离轴角为θ的光源经过光学系统后在焦面上产生的辐照度Ed(θ,λ)与入射到光学系统入瞳处的辐照度Ei(θ,λ)的比值。The point source method usually uses the point source transmittance to evaluate the stray light suppression level of the system. Point source transmittance (PST, Point Source Transmittance) is defined as: the irradiance E d (θ, λ) generated on the focal plane after the light source with an off-axis angle θ outside the field of view of the optical system passes through the optical system The ratio of the irradiance E i (θ,λ) at the entrance pupil of the optical system.

现有的测试系统在测试过程中对不同离轴角度点源透过率的测量多为手动操作,过多的人为干预在一定程度上影响了测量精度,故现有的测试系统难以实现高精度、高效率地对系统进行测量。The measurement of point source transmittance at different off-axis angles in the existing test system is mostly manual operation, too much human intervention affects the measurement accuracy to a certain extent, so the existing test system is difficult to achieve high precision , Efficiently measure the system.

发明内容Contents of the invention

本发明的目的是为了解决采用手动操作测试系统测量点源透过率,测量精度低、效率低的问题,从而提供自动化点源透过率杂散光测试系统及方法。The purpose of the present invention is to solve the problems of low measurement accuracy and low efficiency in measuring point source transmittance by using a manually operated test system, thereby providing an automated point source transmittance stray light test system and method.

本发明所述的自动化点源透过率杂散光测试系统,包括脉冲激光器1、光束整形器2、平行光管3、第一探测系统4、平移机构5、旋转台6、第二探测系统7、信号采集系统8、计算机9和暗室10;The automatic point source transmittance stray light testing system of the present invention includes a pulsed laser 1, a beam shaper 2, a collimator 3, a first detection system 4, a translation mechanism 5, a rotary table 6, and a second detection system 7 , signal acquisition system 8, computer 9 and darkroom 10;

脉冲激光器1出射的激光经光束整形器2整形后入射至平行光管3,激光经平行光管3准直后入射至旋转台6上的待测光学系统11;The laser light emitted by the pulse laser 1 is shaped by the beam shaper 2 and then incident on the collimator 3, and the laser beam is collimated by the collimator 3 and then incident on the optical system 11 to be measured on the rotary table 6;

第一探测系统4位于待测光学系统11的入瞳处,且固定在平移机构5上;第二探测系统7位于待测光学系统11的焦面处,且位于旋转台6上;第一探测系统4和第二探测系统7均用于测量辐照度,信号采集系统8采集测量结果并将测量结果发送给计算机9;The first detection system 4 is located at the entrance pupil of the optical system 11 to be tested, and is fixed on the translation mechanism 5; the second detection system 7 is located at the focal plane of the optical system 11 to be measured, and is located on the rotary table 6; the first detection Both the system 4 and the second detection system 7 are used to measure the irradiance, and the signal acquisition system 8 collects the measurement results and sends the measurement results to the computer 9;

计算机9,用于接收测量结果并计算点源透过率;还用于控制平移机构5、旋转台6和信号采集系统8实现点源透过率的自动化测量;The computer 9 is used to receive the measurement results and calculate the point source transmittance; it is also used to control the translation mechanism 5, the rotary table 6 and the signal acquisition system 8 to realize the automatic measurement of the point source transmittance;

第一探测系统4、平移机构5、旋转台6、第二探测系统7、信号采集系统8和待测光学系统11均位于暗室10内。The first detection system 4 , the translation mechanism 5 , the rotary table 6 , the second detection system 7 , the signal collection system 8 and the optical system 11 to be tested are all located in the darkroom 10 .

优选的是,还包括第一光学衰减装置和第二光学衰减装置;Preferably, a first optical attenuation device and a second optical attenuation device are also included;

平行光管3出射的激光经第一光学衰减装置后入射至第一探测系统4,第一光学衰减装置与第一探测系统4固定连接;待测光学系统11出射的杂散光经第二光学衰减装置入射至第二探测系统7,第二光学衰减装置与第二探测系统7固定连接。The laser light emitted by the collimator 3 enters the first detection system 4 after passing through the first optical attenuation device, and the first optical attenuation device is fixedly connected with the first detection system 4; The device is incident to the second detection system 7 , and the second optical attenuation device is fixedly connected to the second detection system 7 .

优选的是,第二光学衰减装置的衰减倍数可变。Preferably, the attenuation factor of the second optical attenuation device is variable.

优选的是,计算机控制平移机构5、旋转台6和信号采集系统8实现点源透过率的自动化测量,具体为:Preferably, the computer controls the translation mechanism 5, the rotary table 6 and the signal acquisition system 8 to realize the automatic measurement of the point source transmittance, specifically:

用户在计算机9界面设定测量模式,当为入口照度测量模式时,计算机9控制平移机构5将第一探测系统4放置在待测光学系统11的入瞳处,待测光学系统11对入瞳处的辐照度进行测量,计算机9还控制信号采集系统8采集测量结果;当为焦面照度测量模式时,计算机9控制平移机构5将第一探测系统4移开,直至不再阻挡平行光管3出射的激光,计算机9还控制旋转台6转动,第二探测系统7对焦面处的辐照度进行测量,计算机9控制信号采集系统8采集测量结果。The user sets the measurement mode on the computer 9 interface. When it is the entrance illuminance measurement mode, the computer 9 controls the translation mechanism 5 to place the first detection system 4 at the entrance pupil of the optical system to be tested 11, and the optical system to be tested 11 is opposite to the entrance pupil. The computer 9 also controls the signal acquisition system 8 to collect the measurement results; when it is in the focal plane illuminance measurement mode, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the parallel light is no longer blocked The computer 9 also controls the rotation of the rotary table 6 for the laser emitted by the tube 3, the second detection system 7 measures the irradiance at the focal plane, and the computer 9 controls the signal acquisition system 8 to collect the measurement results.

优选的是,计算机9控制旋转台6由最大离轴角度开始转起。Preferably, the computer 9 controls the turntable 6 to start turning from the maximum off-axis angle.

优选的是,入口照度测量模式与焦面照度测量模式相互转换时第二光学衰减装置为不透光模式。Preferably, when the entrance illuminance measurement mode and the focal plane illuminance measurement mode are switched to each other, the second optical attenuation device is in a light-tight mode.

优选的是,第二光学衰减装置的衰减倍数初始为最大等级,计算机9控制第二光学衰减装置的衰减倍数逐渐减小,直至信号采集系统8采集的测量结果达到阈值。Preferably, the attenuation multiple of the second optical attenuation device is initially at the maximum level, and the computer 9 controls the attenuation multiple of the second optical attenuation device to gradually decrease until the measurement results collected by the signal collection system 8 reach a threshold.

本发明所述的自动化点源透过率杂散光测试方法,该方法包括以下步骤:The automatic point source transmittance stray light testing method of the present invention comprises the following steps:

步骤一、打开脉冲激光器1,等待脉冲激光器1稳定;Step 1. Turn on the pulse laser 1 and wait for the pulse laser 1 to stabilize;

步骤二、定位待测光学系统11,使平行光管3出射的平行光充满待测光学系统11入口,并使得待测光学系统11的中心位于旋转台6的旋转中心;Step 2, positioning the optical system 11 to be tested so that the parallel light emitted by the collimator 3 fills the entrance of the optical system 11 to be tested, and the center of the optical system 11 to be tested is located at the rotation center of the rotary table 6;

步骤三、第一探测系统4对待测光学系统11入瞳处的辐照度进行测量,信号采集系统8采集测量结果;Step 3, the first detection system 4 measures the irradiance at the entrance pupil of the optical system 11 to be measured, and the signal acquisition system 8 collects the measurement results;

步骤四、计算机9控制平移机构5将第一探测系统4移开,直至不再阻挡平行光管3出射的激光;Step 4, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the laser emitted by the collimator 3 is no longer blocked;

步骤五、计算机9控制第二光学衰减装置的衰减倍数初始化为最大等级;Step 5, the computer 9 controls the attenuation factor of the second optical attenuation device to be initialized to the maximum level;

步骤六、计算机9控制旋转台6转动到最大离轴角度;Step 6, the computer 9 controls the rotary table 6 to rotate to the maximum off-axis angle;

步骤七、第二探测系统7对焦面处的辐照度进行测量,信号采集系统8采集测量结果;Step 7, the second detection system 7 measures the irradiance at the focal plane, and the signal acquisition system 8 collects the measurement results;

步骤八、计算机9判断信号采集系统8采集的测量结果是否达到阈值,如果判断结果为是则计算机9记录测量结果,否则计算机9控制第二光学衰减装置的衰减倍数减小一个等级并返回步骤七;Step 8, the computer 9 judges whether the measurement result collected by the signal acquisition system 8 reaches the threshold value, if the judgment result is yes, the computer 9 records the measurement result, otherwise the computer 9 controls the attenuation factor of the second optical attenuation device to decrease by one level and returns to step 7 ;

步骤九、计算机9控制旋转台6按设定规则转动到下一个离轴角度;Step 9, the computer 9 controls the rotary table 6 to rotate to the next off-axis angle according to the set rules;

步骤十、重复步骤七至步骤九,计算机9根据测量结果计算不同离轴角度下的点源透过率;Step ten, repeating steps seven to nine, the computer 9 calculates the point source transmittance at different off-axis angles according to the measurement results;

步骤十一、绘制不同离轴角度下的点源透过率曲线,根据该曲线评价待测光学系统11的杂散光抑制能力。Step 11: Draw point source transmittance curves at different off-axis angles, and evaluate the stray light suppression capability of the optical system 11 under test according to the curves.

优选的是,步骤九所述的设定规则具体为:旋转台6由正向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到正向最小离轴角度,再由反向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到反向最小离轴角度。Preferably, the setting rule described in step nine is specifically: the turntable 6 starts to rotate from the maximum positive off-axis angle, and gradually reduces the off-axis angle according to the set step until it reaches the minimum positive off-axis angle , and then start to rotate from the reverse maximum off-axis angle, and gradually decrease the off-axis angle according to the set step until it reaches the reverse minimum off-axis angle.

本发明将点源透过率杂散光测试系统的机械部分的平移机构及旋转台以及信号采集系统进行软件集成,实现点源透过率杂散光测试系统的计算机自动测量。本发明减少了测量过程中的人为干预,降低了操作难度,实现了高速度、高精度的点源透过率测量。The invention integrates the translation mechanism, the rotating platform and the signal acquisition system of the mechanical part of the point source transmittance stray light test system with software, and realizes the computer automatic measurement of the point source transmittance stray light test system. The invention reduces human intervention in the measurement process, lowers the difficulty of operation, and realizes high-speed, high-precision point source transmittance measurement.

附图说明Description of drawings

图1是具体实施方式一所述的自动化点源透过率杂散光测试系统的结构示意图;Fig. 1 is a schematic structural view of the automated point source transmittance stray light testing system described in Embodiment 1;

图2是具体实施方式一中的通过计算机控制实现自动化测量的原理框图。Fig. 2 is a functional block diagram of realizing automatic measurement through computer control in the first embodiment.

具体实施方式Detailed ways

具体实施方式一:结合图1和图2具体说明本实施方式,本实施方式所述的自动化点源透过率杂散光测试系统,包括脉冲激光器1、光束整形器2、平行光管3、第一探测系统4、平移机构5、旋转台6、第二探测系统7、信号采集系统8、计算机9和暗室10;Specific Embodiment 1: This embodiment will be specifically described in conjunction with FIG. 1 and FIG. 2. The automated point source transmittance stray light test system described in this embodiment includes a pulsed laser 1, a beam shaper 2, a collimator 3, a A detection system 4, a translation mechanism 5, a rotary table 6, a second detection system 7, a signal acquisition system 8, a computer 9 and a darkroom 10;

脉冲激光器1出射的激光经光束整形器2整形后入射至平行光管3,激光经平行光管3准直后入射至旋转台6上的待测光学系统11;经待测光学系统11的元件和机械结构的反射、折射、散射或衍射到达待测光学系统11的焦面;The laser light emitted by the pulse laser 1 is reshaped by the beam shaper 2 and then incident on the collimator 3. The laser beam is collimated by the collimator 3 and then incident on the optical system 11 to be tested on the rotary table 6; the components of the optical system 11 to be tested are The reflection, refraction, scattering or diffraction of the mechanical structure reaches the focal plane of the optical system 11 to be tested;

第一探测系统4位于待测光学系统11的入瞳处,且固定在平移机构5上;第二探测系统7位于待测光学系统11的焦面处,且位于旋转台6上;第一探测系统4和第二探测系统7均用于测量辐照度,信号采集系统8采集测量结果并将测量结果发送给计算机9;The first detection system 4 is located at the entrance pupil of the optical system 11 to be tested, and is fixed on the translation mechanism 5; the second detection system 7 is located at the focal plane of the optical system 11 to be measured, and is located on the rotary table 6; the first detection Both the system 4 and the second detection system 7 are used to measure the irradiance, and the signal acquisition system 8 collects the measurement results and sends the measurement results to the computer 9;

计算机9,用于接收测量结果并计算点源透过率;还用于控制平移机构5、旋转台6和信号采集系统8实现点源透过率的自动化测量。旋转台6带动待测光学系统11旋转实现不同离轴角度的杂散光测量。The computer 9 is used to receive the measurement results and calculate the point source transmittance; it is also used to control the translation mechanism 5, the rotary table 6 and the signal acquisition system 8 to realize the automatic measurement of the point source transmittance. The rotating table 6 drives the optical system 11 to rotate to realize the measurement of stray light at different off-axis angles.

为了拓展杂散光测试系统的动态范围,该测试系统还包括光衰减装置。在待测光学系统11入瞳处放置第一光学衰减装置,以保护探测系统;在焦面处放置衰减倍数可变的第二光学衰减装置,实现拓展杂散光测试系统的动态范围。In order to expand the dynamic range of the stray light test system, the test system also includes a light attenuation device. A first optical attenuation device is placed at the entrance pupil of the optical system 11 to be tested to protect the detection system; a second optical attenuation device with a variable attenuation factor is placed at the focal plane to expand the dynamic range of the stray light test system.

第一探测系统4、平移机构5、旋转台6、第二探测系统7、信号采集系统8、待测光学系统11、第一光学衰减装置和第二光学衰减装置均位于暗室10内。以降低环境内壁散射对测量结果的影响。The first detection system 4 , the translation mechanism 5 , the rotary table 6 , the second detection system 7 , the signal acquisition system 8 , the optical system to be tested 11 , the first optical attenuation device and the second optical attenuation device are located in the darkroom 10 . In order to reduce the impact of ambient inner wall scattering on the measurement results.

此测试系统拥有两套探测系统,一套探测系统位于待测光学系统11入瞳处,入瞳处探测系统搭载在平移机构5上,可通过控制平移机构5将入瞳处探测系统移开。另一套探测系统位于待测光学系统11的焦面处,信号采集系统8分别采集入瞳处和焦面探测系统的信号。This test system has two sets of detection systems. One detection system is located at the entrance pupil of the optical system to be tested 11. The detection system at the entrance pupil is mounted on the translation mechanism 5, and the detection system at the entrance pupil can be moved away by controlling the translation mechanism 5. Another detection system is located at the focal plane of the optical system 11 to be tested, and the signal collection system 8 collects signals from the entrance pupil and the focal plane detection system respectively.

对于非对称的待测光学系统11,测试系统需要具备正负离轴角对应点源透过率的测量功能。为了实现正负离轴角的光学系统点源透过率的测量,需要在角度接近视场角时保护探测系统,因此在实现正负离轴角度转换时,焦面处的第二光学衰减装置为不透光模式。For the asymmetrical optical system 11 to be tested, the test system needs to have the function of measuring the transmittance of the point source corresponding to the positive and negative off-axis angles. In order to realize the measurement of the point source transmittance of the optical system at positive and negative off-axis angles, it is necessary to protect the detection system when the angle is close to the field of view. Therefore, when realizing the conversion of positive and negative off-axis angles, the second optical attenuation device at the focal plane For opaque mode.

计算机9的控制包括入口照度测量模式和焦面照度测量模式,焦面照度测量模式又分为正离轴角杂散光测量和负离轴角杂散光测量,用户只需在计算机界面设置离轴范围、采集数据个数等参数,即可实现待测光学系统11点源透过率自动化测量。The control of the computer 9 includes entrance illuminance measurement mode and focal plane illuminance measurement mode. The focal plane illuminance measurement mode is further divided into positive off-axis angle stray light measurement and negative off-axis angle stray light measurement. The user only needs to set the off-axis range on the computer interface , the number of collected data and other parameters, the automatic measurement of 11-point source transmittance of the optical system to be tested can be realized.

用户在计算机9界面设定测量模式,当为入口照度测量模式时,计算机9控制平移机构5将第一探测系统4放置在待测光学系统11的入瞳处,待测光学系统11对入瞳处的辐照度进行测量,计算机9还控制信号采集系统8采集测量结果;当为焦面照度测量模式时,计算机9控制平移机构5将第一探测系统4移开,直至不再阻挡平行光管3出射的激光,计算机9还控制旋转台6转动,第二探测系统7对焦面处的辐照度进行测量,计算机9控制信号采集系统8采集测量结果。The user sets the measurement mode on the computer 9 interface. When it is the entrance illuminance measurement mode, the computer 9 controls the translation mechanism 5 to place the first detection system 4 at the entrance pupil of the optical system to be tested 11, and the optical system to be tested 11 is opposite to the entrance pupil. The computer 9 also controls the signal acquisition system 8 to collect the measurement results; when it is in the focal plane illuminance measurement mode, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the parallel light is no longer blocked The computer 9 also controls the rotation of the rotary table 6 for the laser emitted by the tube 3, the second detection system 7 measures the irradiance at the focal plane, and the computer 9 controls the signal acquisition system 8 to collect the measurement results.

计算机9控制旋转台6由最大离轴角度开始转起,转向小离轴角。第二光学衰减装置的衰减倍数初始为最大等级即不透光模式,计算机9控制第二光学衰减装置的衰减倍数逐渐减小,直至信号采集系统8采集的测量结果达到阈值。有效地保护了探测系统。The computer 9 controls the turntable 6 to turn from the maximum off-axis angle to a small off-axis angle. The attenuation multiple of the second optical attenuation device is initially at the maximum level, that is, the opaque mode, and the computer 9 controls the attenuation multiple of the second optical attenuation device to gradually decrease until the measurement results collected by the signal acquisition system 8 reach the threshold. Effectively protect the detection system.

具体实施方式二:本实施方式所述的自动化点源透过率杂散光测试方法,基于具体实施方式一所述的自动化点源透过率杂散光测试系统实现,该方法包括以下步骤:Embodiment 2: The automated point source transmittance stray light test method described in this embodiment is implemented based on the automated point source transmittance stray light test system described in Embodiment 1. The method includes the following steps:

步骤一、打开脉冲激光器1,等待脉冲激光器1稳定;Step 1. Turn on the pulse laser 1 and wait for the pulse laser 1 to stabilize;

步骤二、定位待测光学系统11,使平行光管3出射的平行光充满待测光学系统11入口,并使得待测光学系统11的中心位于旋转台6的旋转中心;Step 2, positioning the optical system 11 to be tested so that the parallel light emitted by the collimator 3 fills the entrance of the optical system 11 to be tested, and the center of the optical system 11 to be tested is located at the rotation center of the rotary table 6;

步骤三、第一探测系统4对待测光学系统11入瞳处的辐照度进行测量,信号采集系统8采集测量结果;Step 3, the first detection system 4 measures the irradiance at the entrance pupil of the optical system 11 to be measured, and the signal acquisition system 8 collects the measurement results;

步骤四、计算机9控制平移机构5将第一探测系统4移开,直至不再阻挡平行光管3出射的激光;Step 4, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the laser emitted by the collimator 3 is no longer blocked;

步骤五、计算机9控制第二光学衰减装置的衰减倍数初始化为最大等级;Step 5, the computer 9 controls the attenuation factor of the second optical attenuation device to be initialized to the maximum level;

步骤六、计算机9控制旋转台6转动到最大离轴角度;Step 6, the computer 9 controls the rotary table 6 to rotate to the maximum off-axis angle;

步骤七、第二探测系统7对焦面处的辐照度进行测量,信号采集系统8采集测量结果;Step 7, the second detection system 7 measures the irradiance at the focal plane, and the signal acquisition system 8 collects the measurement results;

步骤八、计算机9判断信号采集系统8采集的测量结果是否达到阈值,如果判断结果为是则计算机9记录测量结果,否则计算机9控制第二光学衰减装置的衰减倍数减小一个等级并返回步骤七;Step 8, the computer 9 judges whether the measurement result collected by the signal acquisition system 8 reaches the threshold value, if the judgment result is yes, the computer 9 records the measurement result, otherwise the computer 9 controls the attenuation factor of the second optical attenuation device to decrease by one level and returns to step 7 ;

步骤九、计算机9控制旋转台6按设定规则转动到下一个离轴角度;Step 9, the computer 9 controls the rotary table 6 to rotate to the next off-axis angle according to the set rules;

步骤十、重复步骤七至步骤九,计算机9根据测量结果计算不同离轴角度下的点源透过率;Step ten, repeating steps seven to nine, the computer 9 calculates the point source transmittance at different off-axis angles according to the measurement results;

步骤十一、绘制不同离轴角度下的点源透过率曲线,根据该曲线评价待测光学系统11的杂散光抑制能力。Step 11: Draw point source transmittance curves at different off-axis angles, and evaluate the stray light suppression capability of the optical system 11 under test according to the curves.

步骤九所述的设定规则具体为:旋转台6由正向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到正向最小离轴角度,再由反向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到反向最小离轴角度。The setting rules described in Step 9 are as follows: the turntable 6 starts to rotate from the maximum off-axis angle in the positive direction, gradually decreases the off-axis angle according to the set step, until it reaches the minimum off-axis angle in the forward direction, and then rotates from the reverse Start to rotate towards the maximum off-axis angle, and gradually reduce the off-axis angle according to the set step, until reaching the reverse minimum off-axis angle.

Claims (9)

1.自动化点源透过率杂散光测试系统,其特征在于,包括脉冲激光器(1)、光束整形器(2)、平行光管(3)、第一探测系统(4)、平移机构(5)、旋转台(6)、第二探测系统(7)、信号采集系统(8)、计算机(9)和暗室(10);1. The automatic point source transmittance stray light test system is characterized in that it comprises a pulsed laser (1), a beam shaper (2), a collimator (3), a first detection system (4), and a translation mechanism (5 ), rotary table (6), second detection system (7), signal acquisition system (8), computer (9) and darkroom (10); 脉冲激光器(1)出射的激光经光束整形器(2)整形后入射至平行光管(3),激光经平行光管(3)准直后入射至旋转台(6)上的待测光学系统(11);The laser light emitted by the pulse laser (1) is shaped by the beam shaper (2) and then incident on the collimator (3), the laser is collimated by the collimator (3) and then incident on the optical system to be tested on the rotary table (6) (11); 第一探测系统(4)位于待测光学系统(11)的入瞳处,且固定在平移机构(5)上;第二探测系统(7)位于待测光学系统(11)的焦面处,且位于旋转台(6)上;第一探测系统(4)和第二探测系统(7)均用于测量辐照度,信号采集系统(8)采集测量结果并将测量结果发送给计算机(9);The first detection system (4) is positioned at the entrance pupil of the optical system to be measured (11), and is fixed on the translation mechanism (5); the second detection system (7) is positioned at the focal plane of the optical system to be measured (11), And be located on the rotary platform (6); The first detection system (4) and the second detection system (7) are used for measuring the irradiance, and the signal acquisition system (8) collects the measurement results and sends the measurement results to the computer (9 ); 计算机(9),用于接收测量结果并计算点源透过率;还用于控制平移机构(5)、旋转台(6)和信号采集系统(8)实现点源透过率的自动化测量;The computer (9) is used to receive the measurement results and calculate the point source transmittance; it is also used to control the translation mechanism (5), the rotary table (6) and the signal acquisition system (8) to realize the automatic measurement of the point source transmittance; 第一探测系统(4)、平移机构(5)、旋转台(6)、第二探测系统(7)、信号采集系统(8)和待测光学系统(11)均位于暗室(10)内。The first detection system (4), the translation mechanism (5), the rotary table (6), the second detection system (7), the signal collection system (8) and the optical system to be measured (11) are all located in the darkroom (10). 2.根据权利要求1所述的自动化点源透过率杂散光测试系统,其特征在于,还包括第一光学衰减装置和第二光学衰减装置;2. The automated point source transmittance stray light testing system according to claim 1, further comprising a first optical attenuation device and a second optical attenuation device; 平行光管(3)出射的激光经第一光学衰减装置后入射至第一探测系统(4),第一光学衰减装置与第一探测系统(4)固定连接;待测光学系统(11)出射的杂散光经第二光学衰减装置入射至第二探测系统(7),第二光学衰减装置与第二探测系统(7)固定连接。The laser light emitted by the collimator (3) is incident on the first detection system (4) after passing through the first optical attenuation device, and the first optical attenuation device is fixedly connected with the first detection system (4); the optical system to be tested (11) emits The stray light is incident on the second detection system (7) through the second optical attenuation device, and the second optical attenuation device is fixedly connected with the second detection system (7). 3.根据权利要求2所述的自动化点源透过率杂散光测试系统,其特征在于,第二光学衰减装置的衰减倍数可变。3. The automated point source transmittance stray light testing system according to claim 2, wherein the attenuation factor of the second optical attenuation device is variable. 4.根据权利要求3所述的自动化点源透过率杂散光测试系统,其特征在于,计算机控制平移机构(5)、旋转台(6)和信号采集系统(8)实现点源透过率的自动化测量,具体为:4. The automated point source transmittance stray light test system according to claim 3, characterized in that the computer controls the translation mechanism (5), the rotary table (6) and the signal acquisition system (8) to realize the point source transmittance Automated measurements of , specifically: 用户在计算机(9)界面设定测量模式,当为入口照度测量模式时,计算机(9)控制平移机构(5)将第一探测系统(4)放置在待测光学系统(11)的入瞳处,待测光学系统(11)对入瞳处的辐照度进行测量,计算机(9)还控制信号采集系统(8)采集测量结果;当为焦面照度测量模式时,计算机(9)控制平移机构(5)将第一探测系统(4)移开,直至不再阻挡平行光管(3)出射的激光,计算机(9)还控制旋转台(6)转动,第二探测系统(7)对焦面处的辐照度进行测量,计算机(9)控制信号采集系统(8)采集测量结果。The user sets the measurement mode on the computer (9) interface, and when it is the entrance illumination measurement mode, the computer (9) controls the translation mechanism (5) to place the first detection system (4) on the entrance pupil of the optical system (11) to be measured , the optical system to be tested (11) measures the irradiance at the entrance pupil, and the computer (9) also controls the signal acquisition system (8) to collect the measurement results; when it is in the focal plane illuminance measurement mode, the computer (9) controls The translation mechanism (5) moves the first detection system (4) away until the laser emitted by the collimator (3) is no longer blocked, and the computer (9) also controls the rotation of the rotary table (6), and the second detection system (7) The irradiance at the focal plane is measured, and the computer (9) controls the signal collection system (8) to collect measurement results. 5.根据权利要求4所述的自动化点源透过率杂散光测试系统,其特征在于,计算机(9)控制旋转台(6)由最大离轴角度开始转起。5. The automated point source transmittance stray light testing system according to claim 4, characterized in that the computer (9) controls the rotating table (6) to start turning from the maximum off-axis angle. 6.根据权利要求4所述的自动化点源透过率杂散光测试系统,其特征在于,入口照度测量模式与焦面照度测量模式相互转换时第二光学衰减装置为不透光模式。6 . The automated point source transmittance stray light testing system according to claim 4 , wherein the second optical attenuation device is in an opaque mode when the entrance illuminance measurement mode and the focal plane illuminance measurement mode are converted to each other. 7.根据权利要求4所述的自动化点源透过率杂散光测试系统,其特征在于,第二光学衰减装置的衰减倍数初始为最大等级,计算机(9)控制第二光学衰减装置的衰减倍数逐渐减小,直至信号采集系统(8)采集的测量结果达到阈值。7. The automated point source transmittance stray light testing system according to claim 4, characterized in that, the attenuation multiple of the second optical attenuation device is initially the maximum level, and the computer (9) controls the attenuation multiple of the second optical attenuation device gradually decreases until the measurement result collected by the signal collection system (8) reaches the threshold. 8.自动化点源透过率杂散光测试方法,其特征在于,该方法包括以下步骤:8. An automated point source transmittance stray light testing method, characterized in that the method comprises the following steps: 步骤一、打开脉冲激光器(1),等待脉冲激光器(1)稳定;Step 1, turn on the pulse laser (1), and wait for the pulse laser (1) to stabilize; 步骤二、定位待测光学系统(11),使平行光管(3)出射的平行光充满待测光学系统(11)入口,并使得待测光学系统(11)的中心位于旋转台(6)的旋转中心;Step 2. Position the optical system to be tested (11), so that the parallel light emitted by the collimator (3) fills the entrance of the optical system to be tested (11), and make the center of the optical system to be tested (11) be located on the rotating table (6) the center of rotation; 步骤三、第一探测系统(4)对待测光学系统(11)入瞳处的辐照度进行测量,信号采集系统(8)采集测量结果;Step 3, the first detection system (4) measures the irradiance at the entrance pupil of the optical system to be measured (11), and the signal acquisition system (8) collects the measurement results; 步骤四、计算机(9)控制平移机构(5)将第一探测系统(4)移开,直至不再阻挡平行光管(3)出射的激光;Step 4, the computer (9) controls the translation mechanism (5) to move the first detection system (4) away until the laser emitted by the collimator (3) is no longer blocked; 步骤五、计算机(9)控制第二光学衰减装置的衰减倍数初始化为最大等级;Step five, the computer (9) controls the attenuation factor of the second optical attenuation device to be initialized to the maximum level; 步骤六、计算机(9)控制旋转台(6)转动到最大离轴角度;Step 6, the computer (9) controls the rotary table (6) to rotate to the maximum off-axis angle; 步骤七、第二探测系统(7)对焦面处的辐照度进行测量,信号采集系统(8)采集测量结果;Step 7, the second detection system (7) measures the irradiance at the focal plane, and the signal acquisition system (8) collects the measurement results; 步骤八、计算机(9)判断信号采集系统(8)采集的测量结果是否达到阈值,如果判断结果为是则计算机(9)记录测量结果,否则计算机(9)控制第二光学衰减装置的衰减倍数减小一个等级并返回步骤七;Step 8, the computer (9) judges whether the measurement result collected by the signal acquisition system (8) reaches the threshold value, if the judgment result is yes, then the computer (9) records the measurement result, otherwise the computer (9) controls the attenuation multiple of the second optical attenuation device Decrease one grade and return to step seven; 步骤九、计算机(9)控制旋转台(6)按设定规则转动到下一个离轴角度;Step 9, the computer (9) controls the rotating table (6) to rotate to the next off-axis angle according to the set rules; 步骤十、重复步骤七至步骤九,计算机(9)根据测量结果计算不同离轴角度下的点源透过率;Step ten, repeating steps seven to nine, the computer (9) calculates the point source transmittance under different off-axis angles according to the measurement results; 步骤十一、绘制不同离轴角度下的点源透过率曲线,根据该曲线评价待测光学系统(11)的杂散光抑制能力;Step 11, draw point source transmittance curves under different off-axis angles, and evaluate the stray light suppression ability of the optical system to be tested (11) according to the curves; 该方法基于权利要求2所述的自动化点源透过率杂散光测试系统实现。The method is realized based on the automatic point source transmittance stray light testing system described in claim 2. 9.根据权利要求8所述的自动化点源透过率杂散光测试方法,其特征在于,步骤九所述的设定规则具体为:旋转台(6)由正向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到正向最小离轴角度,再由反向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到反向最小离轴角度。9. The automated point source transmittance stray light testing method according to claim 8, characterized in that the setting rule described in step 9 is specifically: the rotating table (6) starts to rotate from the maximum off-axis angle in the forward direction , gradually reduce the off-axis angle according to the set step until it reaches the minimum positive off-axis angle, and then start to turn from the reverse maximum off-axis angle, and gradually reduce the off-axis angle according to the set step until it reaches Reverse minimum off-axis angle.
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CN112697397B (en) * 2020-12-08 2022-03-01 中国科学院长春光学精密机械与物理研究所 A DMD stray light detection device and detection method
CN114236510A (en) * 2021-12-02 2022-03-25 桂林理工大学 System for testing laser radar transmittance stray light in water depth measurement
CN115753017A (en) * 2022-11-09 2023-03-07 中国科学院长春光学精密机械与物理研究所 Method for determining stray light of point source of space telescope, optical equipment and medium
CN118424660A (en) * 2024-04-29 2024-08-02 长光卫星技术股份有限公司 Space camera point source transmittance test device and method based on reverse light path principle

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116365A2 (en) * 2006-04-07 2007-10-18 Ecole Polytechnique Federale De Lausanne (Epfl) Method and apparatus to measure and compute the amplitude point spread function and associated parameters of a coherent optical imaging system
JP2009076525A (en) * 2007-09-19 2009-04-09 Anritsu Corp Optical transmission testing device
CN102175431A (en) * 2011-01-28 2011-09-07 哈尔滨工业大学 Device for measuring point source stray light transmission coefficient in large dynamic range
CN203479497U (en) * 2013-08-26 2014-03-12 中国科学院西安光学精密机械研究所 Stray light coefficient and point source transmittance composite test system
CN106596053A (en) * 2016-10-28 2017-04-26 中国科学院西安光学精密机械研究所 Point source transmittance stray light testing system and method with synchronous control function
EP3187820A1 (en) * 2015-12-30 2017-07-05 Difrotec Oü Two-channel point-diffraction interferometer
CN107144421A (en) * 2017-06-12 2017-09-08 中国科学院西安光学精密机械研究所 System and method for testing stray light of point source transmittance based on time resolution
CN206906000U (en) * 2017-06-12 2018-01-19 中国科学院西安光学精密机械研究所 Point source transmittance stray light test system based on time resolution

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116365A2 (en) * 2006-04-07 2007-10-18 Ecole Polytechnique Federale De Lausanne (Epfl) Method and apparatus to measure and compute the amplitude point spread function and associated parameters of a coherent optical imaging system
JP2009076525A (en) * 2007-09-19 2009-04-09 Anritsu Corp Optical transmission testing device
CN102175431A (en) * 2011-01-28 2011-09-07 哈尔滨工业大学 Device for measuring point source stray light transmission coefficient in large dynamic range
CN203479497U (en) * 2013-08-26 2014-03-12 中国科学院西安光学精密机械研究所 Stray light coefficient and point source transmittance composite test system
EP3187820A1 (en) * 2015-12-30 2017-07-05 Difrotec Oü Two-channel point-diffraction interferometer
CN106596053A (en) * 2016-10-28 2017-04-26 中国科学院西安光学精密机械研究所 Point source transmittance stray light testing system and method with synchronous control function
CN107144421A (en) * 2017-06-12 2017-09-08 中国科学院西安光学精密机械研究所 System and method for testing stray light of point source transmittance based on time resolution
CN206906000U (en) * 2017-06-12 2018-01-19 中国科学院西安光学精密机械研究所 Point source transmittance stray light test system based on time resolution

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
徐亮 等: "基于点源透过率测试系统的杂散光标定", 《光学精密工程》 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113661443A (en) * 2019-04-02 2021-11-16 伟摩有限责任公司 Stray Light Test Station
CN113661443B (en) * 2019-04-02 2023-03-14 伟摩有限责任公司 Stray light test station
US11635326B2 (en) 2019-04-02 2023-04-25 Waymo Llc Stray-light testing station
US11933666B2 (en) 2019-04-02 2024-03-19 Waymo Llc Stray-light testing station
US12332113B2 (en) 2019-04-02 2025-06-17 Waymo Llc Stray-light testing station
CN111487040A (en) * 2020-04-27 2020-08-04 中国科学院长春光学精密机械与物理研究所 Point source transmittance measuring method and system of optical system
CN111487040B (en) * 2020-04-27 2021-08-03 中国科学院长春光学精密机械与物理研究所 Method and system for measuring point source transmittance of an optical system
CN112697397B (en) * 2020-12-08 2022-03-01 中国科学院长春光学精密机械与物理研究所 A DMD stray light detection device and detection method
CN114236510A (en) * 2021-12-02 2022-03-25 桂林理工大学 System for testing laser radar transmittance stray light in water depth measurement
CN114236510B (en) * 2021-12-02 2023-06-23 桂林理工大学 Depth measurement lidar transmittance stray light test system
CN115753017A (en) * 2022-11-09 2023-03-07 中国科学院长春光学精密机械与物理研究所 Method for determining stray light of point source of space telescope, optical equipment and medium
CN118424660A (en) * 2024-04-29 2024-08-02 长光卫星技术股份有限公司 Space camera point source transmittance test device and method based on reverse light path principle

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