CN108982061A - Automate point source transmitance Stray Light Test system and method - Google Patents
Automate point source transmitance Stray Light Test system and method Download PDFInfo
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Abstract
Point source transmitance Stray Light Test system and method is automated, Stray Light Test technical field is related to, in order to solve the problem of the low, low efficiency using manual operation test macro measurement point source transmitance measurement accuracy.The laser of pulse laser outgoing is incident to parallel light tube after beam shaping shaping, and laser is incident to the optical system to be measured on turntable after parallel light tube collimates；First detection system is located at the entrance pupil of optical system to be measured, and is fixed on translation mechanism；Second detection system is located at the focal plane of optical system to be measured, and is located on turntable；First detection system and the second detection system are used to measurement irradiation level, and measurement result is simultaneously sent to computer by signal acquiring system acquisition measurement result；Computer is also used to control the automatic measurement that translation mechanism, turntable and signal acquiring system realize point source transmitance for receiving measurement result and calculating point source transmitance.The present invention is suitable for test point source transmitance.
Description
Technical field
The present invention relates to Stray Light Test technical fields.
Background technique
Stray light refers to the non-imaged light beam reached at optical system image planes, and ambient noise is formed on detecting element.It is miscellaneous
The presence of astigmatism influences optical system imaging quality, reduces target contrast, optical system can be made to can not work normally when serious.
Optical system stray light Producing reason is intricate, not only related with manufacturing process, material, also existing with diffraction
As, target property, background special efficacy are related.Currently, there are mainly two types of stray light measurement methods, i.e. black-spot method and point source method.Blackspot
Subtraction unit realizes that difficult and accuracy is lower.Point source method precision is high, meets the trend of space optics technology development.
Point source method carrys out the stray light suppression level of evaluation system usually using point source transmitance.Point source transmitance (PST,
Point Source Transmittance) is defined as: the outer off-axis angle of optical system field of view is the light source of θ after optical system
The irradiation level E generated on focal planed(θ, λ) and the irradiation level E being incident at optical system entrance pupiliThe ratio of (θ, λ).
Existing test macro is mostly during the test to be manually operated to the measurement of different off-axis angle point source transmitances,
Excessive human intervention affects measurement accuracy to a certain extent, therefore existing test macro is difficult to realize in high precision, efficiently
Rate system is measured.
Summary of the invention
The purpose of the present invention is to solve point source transmitance is measured using manual operation test macro, measurement accuracy is low,
The problem of low efficiency, to provide automation point source transmitance Stray Light Test system and method.
Automation point source transmitance Stray Light Test system of the present invention, including pulse laser 1, beam shaping
2, parallel light tube 3, the first detection system 4, translation mechanism 5, turntable 6, the second detection system 7, signal acquiring system 8, calculating
Machine 9 and darkroom 10；
The laser that pulse laser 1 is emitted is incident to parallel light tube 3 after 2 shaping of beam shaping, and laser is through directional light
Pipe 3 is incident to the optical system to be measured 11 on turntable 6 after collimating；
First detection system 4 is located at the entrance pupil of optical system 11 to be measured, and is fixed on translation mechanism 5；Second detection
System 7 is located at the focal plane of optical system 11 to be measured, and is located on turntable 6；First detection system 4 and the second detection system 7
It is used to measurement irradiation level, signal acquiring system 8 acquires measurement result and measurement result is sent to computer 9；
Computer 9, for receiving measurement result and calculating point source transmitance；It is also used to control translation mechanism 5, turntable 6
The automatic measurement of point source transmitance is realized with signal acquiring system 8；
First detection system 4, translation mechanism 5, turntable 6, the second detection system 7, signal acquiring system 8 and to photometry
System 11 is respectively positioned in darkroom 10.
It preferably, further include the first optical attenuator device and the second optical attenuator device；
The laser that parallel light tube 3 is emitted is incident to the first detection system 4 after the first optical attenuator device, and the first optics declines
Subtract device to be fixedly connected with the first detection system 4；The stray light that optical system 11 to be measured is emitted enters through the second optical attenuator device
It is incident upon the second detection system 7, the second optical attenuator device is fixedly connected with the second detection system 7.
Preferably, the attenuation multiple of the second optical attenuator device is variable.
Preferably, computer control translation mechanism 5, turntable 6 and signal acquiring system 8 realize oneself of point source transmitance
Dynamicization measurement, specifically:
User is in 9 interface setting measurement pattern of computer, when for entrance illumination measurement mode, the control translation of computer 9
First detection system 4 is placed at the entrance pupil of optical system 11 to be measured by mechanism 5, and optical system 11 to be measured is to the irradiation at entrance pupil
Degree measures, and computer 9 also controls signal acquiring system 8 and acquires measurement result；When for focal plane illumination measurement mode, calculate
Machine 9 controls translation mechanism 5 and removes the first detection system 4, until the laser for no longer parallel light tube 3 being stopped to be emitted, computer 9 is also
It controls turntable 6 to rotate, the irradiation level at 7 focusing plane of the second detection system measures, and computer 9 controls signal acquiring system
8 acquisition measurement results.
Preferably, computer 9 controls turntable 6 and starts to turn by maximal off-axis angles degree.
Preferably, the second optical attenuator device when entrance illumination measurement mode and focal plane illumination measurement mode are mutually converted
For impermeable optical mode.
Preferably, the attenuation multiple of the second optical attenuator device is initially greatest level, and computer 9 controls the second optics
The attenuation multiple of attenuating device is gradually reduced, until the measurement result that signal acquiring system 8 acquires reaches threshold value.
Automation point source transmitance Stray Light Test method of the present invention, method includes the following steps:
Step 1: opening pulse laser 1, pulse laser 1 is waited to stablize；
Step 2: positioning optical system 11 to be measured, the directional light for being emitted parallel light tube 3 enters full of optical system 11 to be measured
Mouthful, and the center of optical system 11 to be measured is made to be located at the rotation center of turntable 6；
Step 3: the irradiation level that the first detection system 4 treats at 11 entrance pupil of photometry system measures, signal acquisition system
8 acquisition measurement result of system；
First detection system 4 is removed Step 4: computer 9 controls translation mechanism 5, until no longer stopping parallel light tube 3
The laser of outgoing；
Step 5: the attenuation multiple that computer 9 controls the second optical attenuator device is initialized as greatest level；
Step 6: computer 9, which controls turntable 6, turns to maximal off-axis angles degree；
Step 7: the irradiation level at 7 focusing plane of the second detection system measures, the acquisition measurement knot of signal acquiring system 8
Fruit；
Step 8: whether the measurement result that computer 9 judges that signal acquiring system 8 acquires reaches threshold value, if it is determined that knot
For fruit to be that then computer 9 records measurement result, the attenuation multiple that otherwise computer 9 controls the second optical attenuator device reduces one
Grade and return step seven；
Step 9: computer 9, which controls turntable 6, turns to next off-axis angle by setting rule；
Step 10: repeating step 7 to step 9, computer 9 calculates the point source under different off-axis angles according to measurement result
Transmitance；
Step 11: the point source transmittance curve under different off-axis angles is drawn, according to curve evaluation optical system to be measured
The stray light rejection ability of system 11.
Preferably, the rule of setting described in step 9 specifically: turntable 6 turns by positive maximal off-axis angles degree
It rises, is gradually reduced off-axis angle according to the stride of setting, until reaching positive minimal off-axis angle degree, then by reversed maximal off-axis angles
Degree starts to turn, and is gradually reduced off-axis angle according to the stride of setting, until reaching reversed minimal off-axis angle degree.
The present invention is by the translation mechanism of the mechanical part of point source transmitance Stray Light Test system and turntable and signal
Acquisition system carries out Integrated Simulation, realizes the computer automatic analysis of point source transmitance Stray Light Test system.The present invention is reduced
Human intervention in measurement process, reduces operation difficulty, realize at high speed, high-precision point source Transmissivity measurement.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that point source transmitance Stray Light Test system is automated described in specific embodiment one；
Fig. 2 is that the functional block diagram for realizing automatic measurement is controlled by computer in specific embodiment one.
Specific embodiment
Specific embodiment 1: illustrating present embodiment, automation described in present embodiment in conjunction with Fig. 1 and Fig. 2
Point source transmitance Stray Light Test system, including pulse laser 1, beam shaping 2, parallel light tube 3, the first detection system 4,
Translation mechanism 5, turntable 6, the second detection system 7, signal acquiring system 8, computer 9 and darkroom 10；
The laser that pulse laser 1 is emitted is incident to parallel light tube 3 after 2 shaping of beam shaping, and laser is through directional light
Pipe 3 is incident to the optical system to be measured 11 on turntable 6 after collimating；Element and mechanical structure through optical system 11 to be measured it is anti-
It penetrates, reflect, scattering or diffraction reaches the focal plane of optical system 11 to be measured；
First detection system 4 is located at the entrance pupil of optical system 11 to be measured, and is fixed on translation mechanism 5；Second detection
System 7 is located at the focal plane of optical system 11 to be measured, and is located on turntable 6；First detection system 4 and the second detection system 7
It is used to measurement irradiation level, signal acquiring system 8 acquires measurement result and measurement result is sent to computer 9；
Computer 9, for receiving measurement result and calculating point source transmitance；It is also used to control translation mechanism 5, turntable 6
The automatic measurement of point source transmitance is realized with signal acquiring system 8.Turntable 6 drives the rotation of optical system 11 to be measured to realize not
With the spuious light measurement of off-axis angle.
In order to expand the dynamic range of Stray Light Test system, which further includes light attenuation device.In light to be measured
The first optical attenuator device is placed at 11 entrance pupil of system, to protect detection system；Place what attenuation multiple can be changed at focal plane
Second optical attenuator device realizes the dynamic range for expanding Stray Light Test system.
First detection system 4, translation mechanism 5, turntable 6, the second detection system 7, signal acquiring system 8, to photometry
System 11, the first optical attenuator device and the second optical attenuator device are respectively positioned in darkroom 10.To reduce wall scattering pair in environment
The influence of measurement result.
This test macro possesses two sets of detection systems, and a set of detection system is located at 11 entrance pupil of optical system to be measured, entrance pupil
Place's detection system is mounted on translation mechanism 5, can be removed detection system at entrance pupil by control translation mechanism 5.Another set of spy
Examining system is located at the focal plane of optical system 11 to be measured, and signal acquiring system 8 acquires at entrance pupil respectively and focal plane detection system
Signal.
For asymmetrical optical system 11 to be measured, test macro needs to have positive and negative off-axis angle and corresponds to point source transmitance
Measure function.In order to realize positive and negative off-axis angle optical system point source transmitance measurement, need when angle is close to field angle
Detection system is protected, therefore when realizing the conversion of positive and negative off-axis angle, the second optical attenuator device at focal plane is impermeable optical mode
Formula.
The control of computer 9 includes entrance illumination measurement mode and focal plane illumination measurement mode, focal plane illumination measurement mode
It is divided into the spuious light measurement of positive off-axis angle and the spuious light measurement of negative off-axis angle again, only off-axis model need to be arranged in computer interface in user
It encloses, acquire the parameters such as data amount check, 11 point source transmitance automatic measurement of optical system to be measured can be realized.
User is in 9 interface setting measurement pattern of computer, when for entrance illumination measurement mode, the control translation of computer 9
First detection system 4 is placed at the entrance pupil of optical system 11 to be measured by mechanism 5, and optical system 11 to be measured is to the irradiation at entrance pupil
Degree measures, and computer 9 also controls signal acquiring system 8 and acquires measurement result；When for focal plane illumination measurement mode, calculate
Machine 9 controls translation mechanism 5 and removes the first detection system 4, until the laser for no longer parallel light tube 3 being stopped to be emitted, computer 9 is also
It controls turntable 6 to rotate, the irradiation level at 7 focusing plane of the second detection system measures, and computer 9 controls signal acquiring system
8 acquisition measurement results.
Computer 9 controls turntable 6 and starts to turn by maximal off-axis angles degree, turns to small off-axis angle.Second optical attenuator dress
The attenuation multiple set is initially the i.e. impermeable optical mode of greatest level, and computer 9 controls the attenuation multiple of the second optical attenuator device
It is gradually reduced, until the measurement result that signal acquiring system 8 acquires reaches threshold value.It is effectively protected detection system.
Specific embodiment 2: automation point source transmitance Stray Light Test method described in present embodiment, based on tool
The realization of automation point source transmitance Stray Light Test system described in body embodiment one, method includes the following steps:
Step 1: opening pulse laser 1, pulse laser 1 is waited to stablize；
Step 2: positioning optical system 11 to be measured, the directional light for being emitted parallel light tube 3 enters full of optical system 11 to be measured
Mouthful, and the center of optical system 11 to be measured is made to be located at the rotation center of turntable 6；
Step 3: the irradiation level that the first detection system 4 treats at 11 entrance pupil of photometry system measures, signal acquisition system
8 acquisition measurement result of system；
First detection system 4 is removed Step 4: computer 9 controls translation mechanism 5, until no longer stopping parallel light tube 3
The laser of outgoing；
Step 5: the attenuation multiple that computer 9 controls the second optical attenuator device is initialized as greatest level；
Step 6: computer 9, which controls turntable 6, turns to maximal off-axis angles degree；
Step 7: the irradiation level at 7 focusing plane of the second detection system measures, the acquisition measurement knot of signal acquiring system 8
Fruit；
Step 8: whether the measurement result that computer 9 judges that signal acquiring system 8 acquires reaches threshold value, if it is determined that knot
For fruit to be that then computer 9 records measurement result, the attenuation multiple that otherwise computer 9 controls the second optical attenuator device reduces one
Grade and return step seven；
Step 9: computer 9, which controls turntable 6, turns to next off-axis angle by setting rule；
Step 10: repeating step 7 to step 9, computer 9 calculates the point source under different off-axis angles according to measurement result
Transmitance；
Step 11: the point source transmittance curve under different off-axis angles is drawn, according to curve evaluation optical system to be measured
The stray light rejection ability of system 11.
The rule of setting described in step 9 specifically: turntable 6 is started to turn by positive maximal off-axis angles degree, according to setting
Stride be gradually reduced off-axis angle, until reach positive minimal off-axis angle degree, then start to turn by reversed maximal off-axis angles degree,
It is gradually reduced off-axis angle according to the stride of setting, until reaching reversed minimal off-axis angle degree.
Claims (9)
1. automating point source transmitance Stray Light Test system, which is characterized in that including pulse laser (1), beam shaping
(2), parallel light tube (3), the first detection system (4), translation mechanism (5), turntable (6), the second detection system (7), signal are adopted
Collecting system (8), computer (9) and darkroom (10)；
The laser of pulse laser (1) outgoing is incident to parallel light tube (3) after beam shaping (2) shaping, and laser is through parallel
The optical system to be measured (11) being incident to after light pipe (3) collimation on turntable (6)；
First detection system (4) is located at the entrance pupil of optical system to be measured (11), and is fixed on translation mechanism (5)；Second visits
Examining system (7) is located at the focal plane of optical system to be measured (11), and is located on turntable (6)；First detection system (4) and second
Detection system (7) is used to measurement irradiation level, and measurement result is simultaneously sent to calculating by signal acquiring system (8) acquisition measurement result
Machine (9)；
Computer (9), for receiving measurement result and calculating point source transmitance；It is also used to control translation mechanism (5), turntable
(6) and signal acquiring system (8) realize point source transmitance automatic measurement；
First detection system (4), translation mechanism (5), turntable (6), the second detection system (7), signal acquiring system (8) and to
Photometry system (11) is respectively positioned in darkroom (10).
2. automation point source transmitance Stray Light Test system according to claim 1, which is characterized in that further include first
Optical attenuator device and the second optical attenuator device；
The laser of parallel light tube (3) outgoing is incident to the first detection system (4) after the first optical attenuator device, and the first optics declines
Subtract device to be fixedly connected with the first detection system (4)；The stray light of optical system (11) outgoing to be measured is filled through the second optical attenuator
Merging is incident upon the second detection system (7), and the second optical attenuator device is fixedly connected with the second detection system (7).
3. automation point source transmitance Stray Light Test system according to claim 2, which is characterized in that the second optics declines
The attenuation multiple for subtracting device is variable.
4. automation point source transmitance Stray Light Test system according to claim 3, which is characterized in that computer control
Translation mechanism (5), turntable (6) and signal acquiring system (8) realize the automatic measurement of point source transmitance, specifically:
User is in computer (9) interface setting measurement pattern, when for entrance illumination measurement mode, computer (9) control translation
First detection system (4) is placed at the entrance pupil of optical system to be measured (11) by mechanism (5), and optical system (11) to be measured is to entrance pupil
The irradiation level at place measures, and computer (9) also controls signal acquiring system (8) acquisition measurement result；It is surveyed when for focal plane illumination
When amount mode, the first detection system (4) is removed in computer (9) control translation mechanism (5), until no longer stopping parallel light tube
(3) laser being emitted, computer (9) also controls turntable (6) and rotate, the irradiation level at the second detection system (7) focusing plane into
Row measurement, computer (9) control signal acquiring system (8) and acquire measurement result.
5. automation point source transmitance Stray Light Test system according to claim 4, which is characterized in that computer (9)
Control turntable (6) is started to turn by maximal off-axis angles degree.
6. automation point source transmitance Stray Light Test system according to claim 4, which is characterized in that entrance illumination is surveyed
The second optical attenuator device is impermeable optical mode when amount mode and focal plane illumination measurement mode are mutually converted.
7. automation point source transmitance Stray Light Test system according to claim 4, which is characterized in that the second optics declines
The attenuation multiple for subtracting device is initially greatest level, and the attenuation multiple that computer (9) controls the second optical attenuator device gradually subtracts
It is small, until the measurement result of signal acquiring system (8) acquisition reaches threshold value.
8. automating point source transmitance Stray Light Test method, which is characterized in that method includes the following steps:
Step 1: opening pulse laser (1), pulse laser (1) is waited to stablize；
Step 2: positioning optical system to be measured (11), the directional light for being emitted parallel light tube (3) is full of optical system to be measured (11)
Entrance, and the center of optical system to be measured (11) is made to be located at the rotation center of turntable (6)；
Step 3: the irradiation level that the first detection system (4) treats at photometry system (11) entrance pupil measures, signal acquisition system
System (8) acquires measurement result；
Step 4: the first detection system (4) is removed in computer (9) control translation mechanism (5), until no longer stopping parallel light tube
(3) laser being emitted；
Step 5: the attenuation multiple that computer (9) controls the second optical attenuator device is initialized as greatest level；
Step 6: computer (9) control turntable (6) turns to maximal off-axis angles degree；
Step 7: the irradiation level at the second detection system (7) focusing plane measures, signal acquiring system (8) acquisition measurement knot
Fruit；
Step 8: computer (9) judges whether the measurement result of signal acquiring system (8) acquisition reaches threshold value, if it is determined that knot
To be that then computer (9) records measurement result, the attenuation multiple that otherwise computer (9) controls the second optical attenuator device reduces fruit
One grade and return step seven；
Step 9: computer (9), which controls turntable (6), turns to next off-axis angle by setting rule；
Step 10: repeat step 7 to step 9, it is saturating that computer (9) according to measurement result calculates the point source under different off-axis angles
Cross rate；
Step 11: the point source transmittance curve under different off-axis angles is drawn, according to curve evaluation optical system to be measured
(11) stray light rejection ability；
This method is realized based on automation point source transmitance Stray Light Test system as claimed in claim 2.
9. automation point source transmitance Stray Light Test method according to claim 8, which is characterized in that described in step 9
Setting rule specifically: turntable (6) is started to turn by positive maximal off-axis angles degree, according to the stride of setting be gradually reduced from
Shaft angle degree until reach positive minimal off-axis angle degree, then is started to turn by reversed maximal off-axis angles degree, according to setting stride by
Decrescence small off-axis angle, until reaching reversed minimal off-axis angle degree.
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| CN114236510A (en) * | 2021-12-02 | 2022-03-25 | 桂林理工大学 | System for testing laser radar transmittance stray light in water depth measurement |
| CN114236510B (en) * | 2021-12-02 | 2023-06-23 | 桂林理工大学 | Laser radar transmissivity stray light test system for measuring water depth |
| CN115753017A (en) * | 2022-11-09 | 2023-03-07 | 中国科学院长春光学精密机械与物理研究所 | Method for determining stray light of point source of space telescope, optical equipment and medium |
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