CN206906000U - Point source transmittance stray light test system based on time resolution - Google Patents
Point source transmittance stray light test system based on time resolution Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 25
- 238000002834 transmittance Methods 0.000 title abstract description 3
- 238000001514 detection method Methods 0.000 claims abstract description 34
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Abstract
The utility model relates to a stray light test system of point source transmissivity based on time resolution, the system includes the pulse laser light source system who sets gradually along the light path, light source plastic system, collimator, the ray apparatus system that awaits measuring, detection system, still include revolving stage and signal acquisition and processing system, the light of pulse laser light source system outgoing gets into the ray apparatus system that awaits measuring through collimator, reach the focal plane of the ray apparatus system that awaits measuring, detection system measures the distribution of ray apparatus system focal plane department radiant energy along with time that awaits measuring, signal acquisition and processing system calculate point source transmissivity PST (theta) of off-axis angle theta, statistics bji(θ), solve for L Jj(theta), rotating the turntable angle, measuring the stray light transmission time distribution characteristic curve and the point source transmittance PST (theta) and J under different off-axis anglesj(theta). The utility model discloses the analysis awaits measuring the relation of the time distribution characteristic of ray system stray light transmission and stray light path has important guiding meaning to analysis, location and the control of the stray light problem of system.
Description
Technical field
Stray Light Test technical field is the utility model is related to, more particularly to one kind is based on time-resolved point source transmitance
Test system.
Background technology
Veiling glare refers to the ambient noise formed on the detection system up to the non-imaged light of image planes, and it is optical noise
One kind, the presence of veiling glare can reduce the detectivity of Photodetection system, echo signal can be made when serious by stray radiation
Noise is fallen into oblivion, and causes instrument can not normal work.
Therefore the level to the spuious Xanthophyll cycle of optical-mechanical system and test checking propose higher requirement.At present, veiling glare
Method of testing is mainly face source method and point source method, and its Point Source method precision is high, is the trend of space optics technology development.Point source method
It is defined as using point source transmitance as evaluation function, point source transmitance (PST, Point Source Transmittance)：
The outer off-axis angle θ of visual field Point Target radiation, the radiant illumination E after optical system at focal planed(θ) and optical system entrance
Locate irradiation level E0Ratio.
In Stray Light Test practice, actual optical-mechanical system stray light level is often higher than theoretical analysis level, and it is former to study carefully it
Polluted in cause mainly real system in the presence of processing, manufacture, assembling equal error, or element surface etc., and defined according to PST, now
Some test systems can only measure the veiling glare total amount of optical-mechanical system, therefore be difficult to analyze, position actual light from test result
The veiling glare of machine system.
Utility model content
The information content provided to solve existing Stray Light Test is not enough to the spuious of accurate analysis and alignment system very little
Optical issue, the utility model provides one kind and is based on time-resolved point source transmitance Stray Light Test system and method, spuious
Increase time dimension information in optical tests, analyze the transmission of stray light Annual distribution characteristic of optical-mechanical system to be measured and spuious light path
Relation, the causality of transmission of stray light in exposing system, analysis, positioning and control to the spuious optical issue of system have important
Directive significance.
Increase the Annual distribution characteristic that time dimension information is mainly based upon transmission of stray light, veiling glare in Stray Light Test
Annual distribution feature definitions are that for veiling glare by different spuious light paths, the light path of experience is different, arrives it in optical-mechanical system
Emittance up to system focal plane changes over time, it will be seen from figure 1 that when off-axis angle is 10 °, optical-mechanical system to be measured
Veiling glare Annual distribution characteristic curve.
Technical solution of the present utility model is to provide one kind and is based on time-resolved point source transmitance Stray Light Test
System, it is characterized in that：Including the pulsed laser light source system 1, light source orthopedic systems 2, parallel set gradually along light path
Light pipe 3 and optical-mechanical system to be measured 4 and detection system 5；Also include turntable 6 and signal acquisition and processing system 7, above-mentioned ray machine to be measured
System 4 or parallel light tube 3 are located on turntable 6；Above-mentioned detection system 5 is located on the focal plane of optical-mechanical system 4 to be measured, and above-mentioned signal is adopted
Collection and processing system 7 gather the signal of detection system 5, and above-mentioned detection system 5 is the detection system with temporal resolution.
Preferably, to extend the dynamic range of veiling glare test system, the system also includes light attenuation device, above-mentioned optical attenuation
Device is located at parallel light tube focal point.
Preferably, above-mentioned light source orthopedic systems 2 include expander lens, reshaper and plus lens.
Preferably, the temporal resolution of the detection system 5 is better than 0.1ns.
Preferably, the above-mentioned detection system 5 with temporal resolution is streak camera.
The utility model is used based on time-resolved point source transmitance Stray Light Test system has high time resolution
Detection system be placed at optical-mechanical system focal plane to be measured, test the veiling glare of optical-mechanical system to be measured, obtain veiling glare Annual distribution
Characteristic curve.
It can be TD that detection system, which is defined, in the stray light emission that i-th of time sampling point receivesi(θ), detection system is common
There is m sampled point, then the point source transmitance under off-axis angle θ is that PST (θ) is：
In above formula, Ed(θ) is the irradiation level that detection system receives at optical-mechanical system focal plane to be measured, and Ф (θ) is detection
Total stray light emission energy that system receives, E0For optical-mechanical system porch collimated light beam irradiation level to be measured, A is detection system light
Quick face area, t are the time of integration.
Each spuious optical channel radiation energy TDi(θ) is the stray light emission energy LJ from different spuious light pathsjThe line of (θ)
Property superposition, then have
Wherein LJj(θ) represents the stray light emission energy of j-th of spuious light path；
aij(θ) represents j-th of spuious light path to TDi(θ) contribution factor.
Above formula can be expressed as：
, also can be by spuious light path radiation energy LJ according to above-mentioned thinkingj(θ) is expressed as the line of each spuious optical channel radiation energy
Property combination
bji(θ) be represent the stray light emission of i-th of spuious optical channel can be in j-th of spuious light path stray light emission energy
Molecular group.
Above formula can be expressed as：
It is the key that formula (5) is to solve for transmission of stray light path radiation energy to obtain score factor matrix.Here, it can pass through
The a large amount of light of Analysis for Stray Light software trace, score of the spuious optical channel radiation energy of statistical analysis different time on veiling glare path
Factor bji(θ), solve the radiation energy LJ of spuious light pathj(θ), while the radiation that different spuious light paths are calculated can be analyzed
Can be to total stray light emission energy horizontal contribution factor Jj(θ)：
By above-mentioned analysis, the utility model, which also provides, above-mentioned is based on time-resolved point source transmitance Stray Light Test system
The Stray Light Test method of system, comprises the following steps：
Step 1：Position optical-mechanical system to be measured so that optical-mechanical system optical axis to be measured and parallel light tube optical axis coincidence so that treat
The entrance center for surveying optical-mechanical system crosses the pivot O of turntable；
Step 2：Pulsed laser light source system is opened, after pulsed laser light source is stable, demarcation parallel light tube outgoing is parallel
Beam uniformity, time stability and irradiation level E0；
Step 3：Open the detection system with temporal resolution, rotating table to specified off-axis angle θ positions；
Step 4：The directional light of parallel light tube outgoing enters optical-mechanical system to be measured, the diffraction through internal system element, scattering
Or the mode such as lens surface residual reflectivity reaches the focal plane of optical-mechanical system to be measured, the detection system measurement with temporal resolution is treated
Emittance is with the distribution of time, the stray light emission energy TD of acquisition different time sampled point at survey optical-mechanical system focal planei(θ)；
Step 5：Signal acquisition and processing system calculates off-axis angle θ point source transmitance PST (θ)：
Wherein A is detection system photosurface area, and t is the time of integration.
Step 6：By a large amount of light of Analysis for Stray Light software trace, counting different sampled point stray light emissions can be to each
Spuious light path radiation energy obtains molecular group bji(θ), solve the stray light emission energy LJ of different spuious light pathsj(θ)：
Calculate the stray light emission energy LJ of each spuious light pathjThe contribution factor J of (θ) to total stray light emission energy Φ (θ)j
(θ)；
Step 7：Rotating table angle, repeat step four to step 6, when measuring transmission of stray light under different off-axis angles
Between distribution character curve, calculate the stray light emission of point source transmitance PST (θ) under different off-axis angles and main spuious light path
To the contribution factor J of total stray light emission energyj(θ)。
Preferably, it is protection detection system, regulation light attenuation device is also included in step 2, the step of making dim light be emitted.
The beneficial effects of the utility model are：
The utility model measures radiation energy at optical-mechanical system focal plane to be measured by the detection system with high time resolution
With the distribution of time, increase time dimension information in Stray Light Test, analyze the time point of optical-mechanical system transmission of stray light to be measured
The relation of cloth characteristic and spuious light path, the causality of transmission of stray light, divides the spuious optical issue of system in exposing system
Analysis, positioning and control have great importance.
Brief description of the drawings
Transmission of stray light Annual distribution characteristic curve of Fig. 1 optical-mechanical systems in 10 ° of off-axis angle；
Schematic diagrams of the Fig. 2 based on time resolution point source transmitance Analysis for Stray Light system；
Reference is：1- pulsed laser light source systems, 2- light source orthopedic systems, 3- parallel light tubes, 4- ray machine systems to be measured
System, 5- detection systems, 6- turntables, 7- signal acquisition and processing systems.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model will be further described.
Figure it is seen that Tthe utility model system includes pulsed laser light source system 1, the light set gradually along light path
Source orthopedic systems 2 (containing expander lens, reshaper and plus lens), parallel light tube 3 and optical-mechanical system to be measured 4, there is the high time
The detection system 5 of resolution ratio, in addition to signal acquisition and processing system 7 and turntable 6, optical-mechanical system 4 or parallel light tube 3 to be measured
In on turntable 6；Detection system 5 is located on the focal plane of optical-mechanical system 4 to be measured, and signal acquisition and processing system 7 gathers and handled spy
The signal of examining system 5.
Pulsed laser light source through light source orthopedic systems post-concentration in parallel light tube focal point, after light beam is collimated by parallel light tube
Outgoing directional light illuminates the entrance of optical-mechanical system to be measured, into optical-mechanical system to be measured light beam through optical element, machinery in system
The mode such as structural member surface scattering or diffraction by aperture reaches optical-mechanical system focal plane to be measured, the detection system with high time resolution
The distribution of emittance at optical-mechanical system focal plane to be measured with the time is measured, that is, the veiling glare transmission time for obtaining optical-mechanical system to be measured is special
Linearity curve.Turntable drives camera to be measured to rotate the veiling glare measurement for realizing different off-axis angles.
Specific testing process is as follows：
1) optical-mechanical system to be measured, is positioned, ensures the optical axis and parallel light tube optical axis coincidence of optical-mechanical system to be measured, ensures simultaneously
The entrance center of optical-mechanical system to be measured crosses the pivot O of turntable；
2) light source, is opened, after laser light source stable, demarcation parallel light tube is emitted the uniformity of parallel light radiation, time
Stability and irradiation level E0；
3) intensity for, adjusting light source makes dim light be emitted (protection detection system)；
4) detection system, is opened；
5), rotating table is to specified off-axis angle θ positions；
6), the adjustment intensity of light source makes strong light be emitted；
7), the directional light of parallel light tube outgoing enters optical-mechanical system to be measured, the diffraction through internal system element, scattering or anti-
The mode such as penetrate and reach optical-mechanical system focal plane to be measured, have the detection system measurement transmission of stray light Annual distribution of high time resolution special
Property, obtain the veiling glare radiation energy TD that the spuious optical channel of different time is different time sampled pointi(θ)；
8), signal acquisition and processing system calculates off-axis angle θ point source transmitance PST (θ)：
9), by a large amount of light of Analysis for Stray Light software trace, the different spuious optical channel radiation energies of statistics are to each veiling glare
Path radiation energy obtains molecular group bji(θ), solve the radiation energy LJ of different spuious light pathsj(θ)：
Calculate the stray light emission energy LJ of each spuious light pathjThe contribution factor J of (θ) to total stray light emission energy Φ (θ)j
(θ)；
10) rotating table angle, repeat step 5) to 9), measuring veiling glare transmission time distribution character under different off-axis angles
Curve, the stray light emission of point source transmitance under different off-axis angles and corresponding spuious light path is calculated to total stray light emission energy
Contribution factor.
Claims (5)
1. one kind is based on time-resolved point source transmitance Stray Light Test system, it is characterised in that：Including being set successively along light path
Pulsed laser light source system (1), light source orthopedic systems (2), parallel light tube (3), optical-mechanical system to be measured (4), the detection system put
(5), in addition to turntable (6) and signal acquisition and processing system (7), the optical-mechanical system (4) to be measured or parallel light tube (3) are located at
On turntable (6)；The detection system (5) is located on the focal plane of optical-mechanical system to be measured (4), the signal acquisition and processing system
(7) signal of detection system (5) is gathered, the detection system (5) is the detection system with temporal resolution.
2. according to claim 1 be based on time-resolved point source transmitance Stray Light Test system, it is characterised in that：Also
Including light attenuation device, the light attenuation device is located at parallel light tube focal point.
3. according to claim 1 or 2 be based on time-resolved point source transmitance Stray Light Test system, its feature exists
In：The light source orthopedic systems (2) include expander lens, reshaper and plus lens.
4. according to claim 3 be based on time-resolved point source transmitance Stray Light Test system, it is characterised in that：Visit
The temporal resolution of examining system (5) is more than 0.1ns.
5. according to claim 4 be based on time-resolved point source transmitance Stray Light Test system, it is characterised in that：Tool
The detection system of having time resolution ratio is streak camera.
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| CN201720676422.XU CN206906000U (en) | 2017-06-12 | 2017-06-12 | Point source transmittance stray light test system based on time resolution |
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| CN201720676422.XU CN206906000U (en) | 2017-06-12 | 2017-06-12 | Point source transmittance stray light test system based on time resolution |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144421A (en) * | 2017-06-12 | 2017-09-08 | 中国科学院西安光学精密机械研究所 | System and method for testing stray light of point source transmittance based on time resolution |
| CN108982061A (en) * | 2018-06-12 | 2018-12-11 | 哈尔滨工业大学 | Automate point source transmitance Stray Light Test system and method |
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2017
- 2017-06-12 CN CN201720676422.XU patent/CN206906000U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144421A (en) * | 2017-06-12 | 2017-09-08 | 中国科学院西安光学精密机械研究所 | System and method for testing stray light of point source transmittance based on time resolution |
| CN107144421B (en) * | 2017-06-12 | 2023-08-18 | 中国科学院西安光学精密机械研究所 | Point source transmittance stray light test system and method based on time resolution |
| CN108982061A (en) * | 2018-06-12 | 2018-12-11 | 哈尔滨工业大学 | Automate point source transmitance Stray Light Test system and method |
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