CN108963727A - Linewidth narrowing module and excimer laser with alignment device - Google Patents
Linewidth narrowing module and excimer laser with alignment device Download PDFInfo
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- CN108963727A CN108963727A CN201810842600.0A CN201810842600A CN108963727A CN 108963727 A CN108963727 A CN 108963727A CN 201810842600 A CN201810842600 A CN 201810842600A CN 108963727 A CN108963727 A CN 108963727A
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- linewidth narrowing
- narrowing module
- visible laser
- discharge cavity
- laser
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- 230000008878 coupling Effects 0.000 claims abstract description 16
- 238000010168 coupling process Methods 0.000 claims abstract description 16
- 238000005859 coupling reaction Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 10
- 238000001228 spectrum Methods 0.000 claims description 9
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 abstract description 5
- 230000003595 spectral effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 208000007578 phototoxic dermatitis Diseases 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
Abstract
The linewidth narrowing module with alignment device that the invention discloses a kind of, including visible laser, for generating visible laser；Prism group generates reflection visible laser for reflecting the visible laser；Angle adjustment device, for adjusting the angle of the linewidth narrowing module, make the light shaft coaxle of the reflection visible laser and discharge cavity, and passes through the discharge cavity and vertically reflected by output coupling mirror by backtracking, to complete the alignment of the linewidth narrowing module and the discharge cavity.In addition, also providing a kind of excimer laser and method and excimer laser that linewidth narrowing module is aligned with discharge cavity.The Fast Installation and replacement of linewidth narrowing module can be achieved in the present invention, and ceiling capacity output is realized under conditions of guaranteeing spectral outputs characteristics.
Description
Technical field
The present invention relates to laser technology field, in particular to a kind of linewidth narrowing module with alignment device, quasi-molecule
The alignment methods of laser and linewidth narrowing module and discharge cavity.
Background technique
Linewidth narrowing module is the important component part of photoetching excimer laser.Pass through the cooperation with discharge cavity, line
Width, which narrows module, can realize the functions such as spectrum narrowing, center wavelength tuning, guarantee semi-conductor silicon chip chip by sub- micromicron line width
The fineness of pattern.
Prism group 1 cooperates the method for grating 2 to be to use wider spectrum-controlling method at present.Fig. 1 is excimer laser system
System linewidth narrowing module basic structure schematic diagram mainly includes prism group 1 and grating 2.Before 1 pair of arrival grating 2 of prism group
Light beam carry out it is one-dimensional expand, collimate, reduce intracavity beam energy density, while being conducive to the selection and control of spectrum.
Prism and grating in linewidth narrowing module belong to cavity loss element.By taking tetragonous mirror system as an example, each rib
Mirror light pass surface plates anti-reflection film, energetic transmittance 98%, diffraction efficiency of grating~50%, then linewidth narrowing module is to laser energy
The transmitance of amount is 42%.It can be seen that linewidth narrowing module also loses more laser energy while realizing that line width narrows
Amount.
Good alignment measure and device can be maximum while guaranteeing line width between linewidth narrowing module and discharge cavity
Degree improving laser exports energy, while improving module installation and replacement speed, is advantageously implemented product modular installation and dimension
Shield.
Summary of the invention
The present invention is directed to overcome defect of the existing technology, the invention adopts the following technical scheme:
On the one hand, the linewidth narrowing module with alignment device that the embodiment of the invention provides a kind of, including；
Visible laser, for generating visible laser；
Prism group generates reflection visible laser for reflecting the visible laser；
Angle adjustment device makes the reflection visible laser and electric discharge for adjusting the angle of the linewidth narrowing module
The light shaft coaxle of chamber, and pass through the discharge cavity and vertically reflected by output coupling mirror by backtracking, to complete the line width pressure
The alignment of narrow module and the discharge cavity.
It further include grating in some embodiments, the grating and prism group cooperation carry out excimer laser spectrum
Control and selection.
It further include half-reflecting half mirror, camera and observer in some embodiments；The half-reflecting half mirror be set to it is described can
Between light-exposed laser and the prism group, the visible laser is through the output coupling mirror, the prism group and described half anti-
It is incident on after pellicle mirror on the camera, forms hot spot on the observer.
In some embodiments, the camera is CCD camera.
In some embodiments, it is provided in the front end of the linewidth narrowing module and the output coupling mirror rear end narrow
Seam, the slit is for suppressing the angle of divergence of light beam.
In some embodiments, the linewidth narrowing module includes etalon, the etalon be placed in the prism group and
Between the grating, for carrying out spectrum control to light beam.
On the other hand, the embodiment of the invention also provides one kind to be used for laser.The laser includes foregoing
Linewidth narrowing module with alignment device.
More, the present invention also provides a kind of method that linewidth narrowing module is aligned with discharge cavity, pass through above-mentioned line width
Narrow module realization, comprising the following steps:
Visible laser generates visible laser；
Prism group reflects the visible laser, generates reflection visible laser；
Angle adjustment device adjusts the angle of the linewidth narrowing module, makes the light of the reflection visible laser and discharge cavity
Axis is coaxial, and passes through the discharge cavity and vertically reflected by output coupling mirror by backtracking, to complete the linewidth narrowing module
With the alignment of the discharge cavity.
Technical effect of the invention: the present invention solves the problems, such as that linewidth narrowing module is aligned with cavity, passes through the alignment
Device, it can be achieved that linewidth narrowing module Fast Installation and replacement, maximum energy is realized under conditions of guaranteeing spectral outputs characteristics
Amount output.
Detailed description of the invention
Fig. 1 is existing excimer laser system linewidth narrowing module basic structure schematic diagram.
Fig. 2 is the excimer laser schematic diagram of the linewidth narrowing module proposed by the present invention with alignment device.
Fig. 3 is the schematic diagram of excimer laser one embodiment proposed by the present invention.
Fig. 4 is the schematic diagram of the excimer laser proposed by the present invention with narrow slit structure.
Fig. 5 is the schematic diagram of the excimer laser proposed by the present invention with etalon structure.
Fig. 6 is the schematic diagram of another embodiment of excimer laser proposed by the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair
It is bright, but not to limit the present invention.
Please refer to Fig. 2-Fig. 6, the linewidth narrowing module with alignment device of the invention, it is seen that light laser 5, for producing
Raw visible laser；Prism group 1 generates reflection visible laser for reflecting the visible laser；Angle adjustment device,
For adjusting the angle of the linewidth narrowing module, make the light shaft coaxle of the reflection visible laser and discharge cavity 3, and pass through institute
Stating discharge cavity, vertically reflection is by backtracking by output coupling mirror 4, to complete the linewidth narrowing module and the discharge cavity 3
Alignment.Grating 2, the grating 2 carry out the control and selection of excimer laser spectrum with the prism group 1 cooperation.
It further include half-reflecting half mirror 6, camera 7 and observer 8；The half-reflecting half mirror 6 is set to the visible light lasers
Between device 5 and the prism group 1, the visible laser is through the output coupling mirror 4, the prism group 1 and the half-reflection and half-transmission
It is incident on after mirror 6 on the camera 7, forms hot spot on the observer 8.
In the present embodiment, it is seen that light laser 5 is miniature visible laser, and camera 7 is CCD camera.
The operation principle of the present invention is that: the linewidth narrowing module proposed by the present invention with alignment device is micro- by increasing
What type visible laser was realized.Essence is the angle by presetting miniature visible laser shoot laser, records line width pressure
Relative positional relationship between narrow module and discharge cavity 3 realizes the rapid alignment of linewidth narrowing module and discharge cavity 3.Discharge cavity 3
The fluorescence of outgoing is incident on the first face surface prism P1, if the first face surface prism P1 non-anti-reflection coated, fluorescence will be
First face prism incidence face is reflected.According to light path principle, swash if placing miniature visible light in fluorescent reflection direction
Light device, then the laser of miniature visible laser outgoing is coaxial with 3 fluorescence of discharge cavity after the first face prism P1 reflection.Pass through
The angle for adjusting linewidth narrowing module, the laser for enabling miniature visible laser to issue pass through discharge cavity 3 and by output couplings
When closing the vertical reflection of mirror 4 by backtracking, the alignment of linewidth narrowing module and discharge cavity is completed.
Specific work steps is as follows:
Excimer laser is opened, excimer laser output coupling mirror 4 is adjusted, keeps other end output energy maximum.
Miniature visible laser in linewidth narrowing module is opened, it is another that linewidth narrowing module is placed on excimer laser
One end adjusts linewidth narrowing die angle and pitching deflection, when miniature visible laser output laser is anti-through output coupling mirror 4
When penetrating by backtracking, the alignment of linewidth narrowing module and discharge cavity 3 is completed.
In the present embodiment, prism group 1 includes 4 right-angle prism P1~P4, is ultraviolet-grade fused silica material or ultraviolet
The good material of photosensitiveness is made, such as CaF2, MgF2.Right-angle prism P1~P4 can be isosceles right-angle prism or have special angle
The prism of degree, if apex angle is 39 °~45 ° of prism.
In the present embodiment, prism group 1 is set on prism group platform.
In one embodiment of the invention, slit 9 is set between 3 rear end of linewidth narrowing module front end and discharge cavity,
It is suppressed by the angle of divergence of the slit 9 to light beam, to obtain the output of more narrow linewidth, as shown in Figure 4.In 3 front end of discharge cavity
It is inserted into slit 11 between output coupling mirror 4 to control beam divergence angle, the laser output of more narrow linewidth can be obtained.
In one embodiment of the invention, spectrum control is carried out to light beam using etalon 10, etalon 10 is placed in
Between 4th prism P4 and grating 2, the steady of excimer laser spectrum is realized by prism group 1 and the cascade effect of etalon 10
Fixed output, as shown in Figure 5.
Furthermore the present invention also provides a kind of excimer lasers, including above-mentioned linewidth narrowing module.
More, the present invention also provides a kind of method that linewidth narrowing module is aligned with discharge cavity, pass through above-mentioned line width
Narrow module realization, comprising the following steps:
Visible laser 5 generates visible laser；
Prism group 1 reflects the visible laser, generates reflection visible laser；
Angle adjustment device adjusts the angle of the linewidth narrowing module, makes the reflection visible laser and discharge cavity 3
Light shaft coaxle, and pass through the discharge cavity 3 and vertically reflected by output coupling mirror 4 by backtracking, to complete the linewidth narrowing
The alignment of module and the discharge cavity.
Technical effect of the invention: the present invention realizes the alignment of linewidth narrowing module and discharge cavity, with previous technology
Compare, the apparatus structure compact, easy to operate, adjustment precision is high, using the reflected beams obtain related angle information not by
The influence of optical element material.
Those skilled in the art should further appreciate that, describe in conjunction with the embodiments described herein
Each exemplary unit and algorithm steps, can be realized with electronic hardware, computer software, or a combination of the two, in order to clear
Illustrate to Chu the interchangeability of hardware and software, generally describes each exemplary group according to function in the above description
At and step.These functions are implemented in hardware or software actually, the specific application and design depending on technical solution
Constraint condition.Professional technician can use different methods to achieve the described function each specific application, but
It is that such implementation should not be considered as beyond the scope of the present invention.
The step of method described in conjunction with the examples disclosed in this document or algorithm, can be executed with hardware, processor
The combination of software module or the two is implemented.Software module can be placed in random access memory (RAM), memory, read-only memory
(ROM), electrically programmable ROM, electrically erasable ROM, register, hard disk, moveable magnetic disc, CD-ROM or technical field
In any other form of storage medium well known to interior.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements, unless otherwise restricted clearly.For those of ordinary skill in the art
For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below "
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, modifies, replacement and variant.
The above described specific embodiments of the present invention are not intended to limit the scope of the present invention..Any basis
Any other various changes and modifications made by technical concept of the invention should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (8)
1. a kind of linewidth narrowing module with alignment device characterized by comprising
Visible laser, for generating visible laser；
Prism group generates reflection visible laser for reflecting the visible laser；
Angle adjustment device makes the reflection visible laser and discharge cavity for adjusting the angle of the linewidth narrowing module
Light shaft coaxle, and pass through the discharge cavity and vertically reflected by output coupling mirror by backtracking, to complete the linewidth narrowing mould
The alignment of block and the discharge cavity.
2. the linewidth narrowing module according to claim 1 with alignment device, which is characterized in that it further include grating, institute
It states grating and prism group cooperation carries out the control and selection of excimer laser spectrum.
3. the linewidth narrowing module according to claim 1 with alignment device, which is characterized in that further include half-reflection and half-transmission
Mirror, camera and observer；
The half-reflecting half mirror is set between the visible laser and the prism group, and the visible laser is through described defeated
It is incident on the camera after coupling mirror, the prism group and the half-reflecting half mirror out, forms hot spot on the observer.
4. the linewidth narrowing module according to claim 3 with alignment device, which is characterized in that the camera is CCD
Camera.
5. the linewidth narrowing module according to claim 1 with alignment device, which is characterized in that in the linewidth narrowing
The front end of module and the output coupling mirror rear end are provided with slit, and the slit is for suppressing the angle of divergence of light beam.
6. the linewidth narrowing module according to claim 2 with alignment device, which is characterized in that the linewidth narrowing mould
Block includes etalon, and the etalon is placed between the prism group and the grating, for carrying out spectrum control to light beam.
7. a kind of excimer laser, which is characterized in that including linewidth narrowing module as claimed in any one of claims 1 to 6.
8. a kind of method that linewidth narrowing module is aligned with discharge cavity, which is characterized in that pass through any one of such as claim 1-6 institute
The linewidth narrowing module stated is realized, comprising the following steps:
Visible laser generates visible laser；
Prism group reflects the visible laser, generates reflection visible laser；
Angle adjustment device adjusts the angle of the linewidth narrowing module, keeps the optical axis of the reflection visible laser and discharge cavity same
Axis, and pass through the discharge cavity and vertically reflected by output coupling mirror by backtracking, to complete the linewidth narrowing module and institute
State the alignment of discharge cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810842600.0A CN108963727A (en) | 2018-07-27 | 2018-07-27 | Linewidth narrowing module and excimer laser with alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810842600.0A CN108963727A (en) | 2018-07-27 | 2018-07-27 | Linewidth narrowing module and excimer laser with alignment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108963727A true CN108963727A (en) | 2018-12-07 |
Family
ID=64465969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810842600.0A Pending CN108963727A (en) | 2018-07-27 | 2018-07-27 | Linewidth narrowing module and excimer laser with alignment device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109490206A (en) * | 2019-01-04 | 2019-03-19 | 北京科益虹源光电技术有限公司 | A kind of line width adjustment apparatus and system of spectrum-stable |
| WO2023272894A1 (en) * | 2021-06-28 | 2023-01-05 | 北京科益虹源光电技术有限公司 | Excimer laser, and line width narrowing apparatus and method |
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| US4117319A (en) * | 1977-07-05 | 1978-09-26 | Rockwell International Corporation | Alignment system for lasers |
| JP2002084026A (en) * | 2000-06-16 | 2002-03-22 | Lambda Physik Ag | F2 laser |
| US6603788B1 (en) * | 1999-11-23 | 2003-08-05 | Lambda Physik Ag | Resonator for single line selection |
| US6628682B1 (en) * | 1999-11-29 | 2003-09-30 | Komatsu Ltd. | Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus |
| CN201975681U (en) * | 2010-12-13 | 2011-09-14 | 西安北方捷瑞光电科技有限公司 | Light-beam micro-displacement online automatic installation and adjustment system for ring laser |
| CN208571210U (en) * | 2018-07-27 | 2019-03-01 | 北京科益虹源光电技术有限公司 | A kind of linewidth narrowing module and excimer laser with alignment device |
-
2018
- 2018-07-27 CN CN201810842600.0A patent/CN108963727A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4117319A (en) * | 1977-07-05 | 1978-09-26 | Rockwell International Corporation | Alignment system for lasers |
| US6603788B1 (en) * | 1999-11-23 | 2003-08-05 | Lambda Physik Ag | Resonator for single line selection |
| US6628682B1 (en) * | 1999-11-29 | 2003-09-30 | Komatsu Ltd. | Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus |
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| CN201975681U (en) * | 2010-12-13 | 2011-09-14 | 西安北方捷瑞光电科技有限公司 | Light-beam micro-displacement online automatic installation and adjustment system for ring laser |
| CN208571210U (en) * | 2018-07-27 | 2019-03-01 | 北京科益虹源光电技术有限公司 | A kind of linewidth narrowing module and excimer laser with alignment device |
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| CN109490206A (en) * | 2019-01-04 | 2019-03-19 | 北京科益虹源光电技术有限公司 | A kind of line width adjustment apparatus and system of spectrum-stable |
| WO2023272894A1 (en) * | 2021-06-28 | 2023-01-05 | 北京科益虹源光电技术有限公司 | Excimer laser, and line width narrowing apparatus and method |
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