CN108962878A - Electronic package and manufacturing method thereof - Google Patents

Electronic package and manufacturing method thereof Download PDF

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Publication number
CN108962878A
CN108962878A CN201710377667.7A CN201710377667A CN108962878A CN 108962878 A CN108962878 A CN 108962878A CN 201710377667 A CN201710377667 A CN 201710377667A CN 108962878 A CN108962878 A CN 108962878A
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CN
China
Prior art keywords
encapsulated layer
packing piece
electronic
layer
piece according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710377667.7A
Other languages
Chinese (zh)
Other versions
CN108962878B (en
Inventor
陈冠达
方柏翔
庄明翰
赖佳助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siliconware Precision Industries Co Ltd
Original Assignee
Siliconware Precision Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siliconware Precision Industries Co Ltd filed Critical Siliconware Precision Industries Co Ltd
Publication of CN108962878A publication Critical patent/CN108962878A/en
Application granted granted Critical
Publication of CN108962878B publication Critical patent/CN108962878B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6661High-frequency adaptations for passive devices
    • H01L2223/6677High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16227Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15313Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

An electronic package and a manufacturing method thereof are provided, wherein a first packaging layer is formed on a bearing member with a circuit, an electronic component and an antenna structure are arranged on the first packaging layer, and the antenna structure and the circuit of the bearing member are isolated by the first packaging layer, so that when the antenna structure receives or emits electromagnetic waves, the interference of the antenna structure with the signal transmission of the circuit of the bearing member can be reduced.

Description

Electronic packing piece and its preparation method
Technical field
The present invention is about a kind of electronic packing piece, especially with regard to a kind of electronic packing piece and its system with antenna structure Method.
Background technique
With flourishing for portable electronic product in recent years, the exploitation of all kinds of Related products is also directed to high density, height Performance and light, thin, short, small trend, for this purpose, industry develops the various multi-functional encapsulation aspect of integration, to meet Electronic product is light and short with highdensity requirement.For example, wireless communication technique is widely used to miscellaneous disappear at present Expense property electronic product, such as mobile phone (cell phone), plate, to receive or send various less radio-frequency (Radio by antenna Frequency, abbreviation RF) signal.
Fig. 1 is the schematic cross-sectional view for noting the semiconductor package part 1 of tool antenna structure.The preparation method of the semiconductor package part 1 In semiconductor component 13 is arranged by multiple conductive bumps 130 on the route 100 of a package substrate 10, and in the package substrate It is formed with an antenna stack 14 on 10, then the semiconductor subassembly 13 and antenna stack 14 are coated with packing colloid 15, by the antenna stack 14 give off electromagnetic wave.
However, noting in semiconductor package part 1, since the antenna stack 14 is formed on the surface of the package substrate 10, make The transmitting of the antenna stack 14 can internal wiring 100 ' and the semiconductor group to the package substrate 10 with the characteristic for receiving electromagnetic wave Part 13 causes the problem of electromagnetic interference (Electromagnetic Interference, abbreviation EMI).
Therefore, how to overcome the problems, such as it is above-mentioned note technology, have become in fact at present want solve project.
Summary of the invention
In view of the above-mentioned missing for noting technology, the present invention provides a kind of electronic packing piece and its preparation method, can be reduced the antenna The signal of the route of the constructive interference load-bearing part transmits.
Electronic packing piece of the invention a, comprising: load-bearing part with route;First encapsulated layer is formed in the carrying On part;Electronic building brick is set on first encapsulated layer;And antenna structure, it is set on first encapsulated layer.
The present invention also provides a kind of preparation methods of electronic packing piece, comprising: forms the first encapsulated layer in holding with route In holder;And a setting at least electronic building brick and antenna structure are on first encapsulated layer.
In electronic packing piece above-mentioned and its preparation method, it is formed in first encapsulated layer and is electrically connected the electronic building brick and is somebody's turn to do The electric conductor of route.
In electronic packing piece above-mentioned and its preparation method, which is plane formula or three-dimensional.
In electronic packing piece above-mentioned and its preparation method, further include to be formed the second encapsulated layer on first encapsulated layer with cladding The electronic building brick, and second encapsulated layer have opposite first surface and second surface, make second encapsulated layer with its first Surface is bound on first encapsulated layer.For example, the antenna structure includes antenna stack and the first active layer, which is bound to The first surface or second surface, and first active layer is bound to the first surface.Further, which also includes In conjunction with the second active layer of the load-bearing part.
In addition, in electronic packing piece above-mentioned and its preparation method, further include to be formed shielding construction on first encapsulated layer with Cover the electronic building brick.Further, which is electrically connected the antenna structure.
From the foregoing, it will be observed that in electronic packing piece and its preparation method of the invention, mainly by the first encapsulation of formation on the load-bearing part Layer is to be isolated the route of the antenna structure Yu the load-bearing part, therefore compared to the technology that notes, the present invention can be reduced the antenna structure in It receives or interferes the signal of the route to transmit when emitting electromagnetic wave.
In addition, the electronic building brick and the antenna structure is isolated using the shielding construction in electronic packing piece of the invention, with Avoid generation of the antenna structure to the EMI problem of the electronic building brick.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section for noting the semiconductor package part of tool antenna structure;
Fig. 2A to Fig. 2 D is the diagrammatic cross-section of the preparation method of electronic packing piece of the invention;
Fig. 2 C ' is the section signal of another embodiment of corresponding diagram 2C;
Fig. 2 D ' is the section signal of another embodiment of corresponding diagram 2D;And
The diagrammatic cross-section for other different embodiments that Fig. 3 A and Fig. 3 B are corresponding diagram 2D.
Primary clustering symbol description
1 semiconductor package part
10 package substrates
100,100 ' routes
13 semiconductor subassemblies
130,230 conductive bumps
14 antenna stacks
15 packing colloids
2,2 ', 2 ", 3,3 ' electronic packing pieces
20 load-bearing parts
The first side 20a
20b second side
200,200 ' routes
201 dielectric materials
21 first encapsulated layers
22 electric conductors
The surface 22a
23 electronic building bricks
24,24 ', 34,34 ' antenna structures
240,340 antenna stacks
241,241 ', 341,341 ' first active layers
25 second encapsulated layers
25a first surface
25b second surface
26 shielding constructions
260 support portions
261 shielding portions
342 second active layers
The interval d, t.
Specific embodiment
Illustrate embodiments of the present invention by particular specific embodiment below, people skilled in the art can be by this theory The bright revealed content of book is understood other advantages and efficacy of the present invention easily.
It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., only to cooperate specification to be taken off The content shown is not intended to limit the invention enforceable qualifications for the understanding and reading of people skilled in the art, Therefore not having technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing this hair Under bright the effect of can be generated and the purpose that can reach, it should all still fall in disclosed technology contents and obtain and can cover In range.Meanwhile cited such as "upper", " first ", " second " and " one " term in this specification, it is also only convenient for narration Be illustrated, rather than to limit the scope of the invention, relativeness is altered or modified, and is changing technology without essence It inside holds, when being also considered as the enforceable scope of the present invention.
Fig. 2A to Fig. 2 D is the diagrammatic cross-section of the preparation method of electronic packing piece of the invention.
As shown in Figure 2 A, a load-bearing part 20 with opposite the first side 20a and second side 20b is provided.
In this present embodiment, which is, for example, the package substrate with core layer and line construction (substrate) or the line construction of seedless central layer (coreless), in forming multiple routes 200 on dielectric material 201, 200 ', it is such as fanned out to (fan out) type and reroutes road floor (redistribution layer, abbreviation RDL).For example, the route 200,200 ' be the metal material such as copper, and the dielectric material 201 is prepreg (prepreg, abbreviation PP), polyimides (polyimide, abbreviation PI), benzocyclobutene (Benezocy-clobutene, abbreviation BCB) gather to diazole benzene (Polybenzoxazole, abbreviation PBO) or glass (glass fiber).
It should be appreciated that ground, which also can be other load bearing units for carrying such as chip electronic building brick, example Such as lead frame (leadframe) or the semiconductor plate such as silicon intermediate plate (silicon interposer).
As shown in Figure 2 B, one first encapsulated layer 21 is formed on the first side 20a of the load-bearing part 20, and in first encapsulation Multiple electric conductors 22 for being electrically connected the route 200 are formed in layer 21.
In this present embodiment, which forms through molding processing procedure or pressing thin film manufacture process, and formed this The material of one encapsulated layer 21 is, for example, prepreg (PP), polyimides (PI), benzocyclobutene (BCB), gathers to diazole benzene (PBO), dry film (dry film), epoxy resin (epoxy) or package material (molding compound), but be not limited to above-mentioned.
In addition, the electric conductor 22 is, for example, column, threadiness or bulk, such as metal column (such as copper post), bonding wire section, soldered ball (solder ball) or other patterns.
Also, the production method of the electric conductor 22 is various.For example, being initially formed the electric conductor 22 on the route 200, re-form First encapsulated layer 21, to coat the electric conductor 22, makes the part table of the electric conductor 22 on the first side 20a of the load-bearing part 20 Face 22a exposes to first encapsulated layer 21.Alternatively, it is initially formed first encapsulated layer 21 on the first side 20a of the load-bearing part 20, Perforation is formed in first encapsulated layer 21, forms the electric conductor 22 later in the perforation, and the part of the electric conductor 22 Surface 22a exposes outside first encapsulated layer 21.
As shown in Figure 2 C, it connects and sets an at least electronic building brick 23 on first encapsulated layer 21, and form an antenna structure 24 In on first encapsulated layer 21, wherein the electronic building brick 23 is separated with 24 phase of antenna structure.
In this present embodiment, which is driving component, passive component or the two combination etc., wherein the master Dynamic component is, for example, semiconductor chip, and the passive component is, for example, resistance, capacitor and inductance.For example, the electronic building brick 23 is Semiconductor chip, by multiple exposed tables for being set to the electric conductor 22 with rewinding method such as the conductive bump 230 of soldering tin material On the 22a of face and it is electrically connected the electric conductor 22;Alternatively, the electronic building brick 23 can be electric in a manner of routing by multiple bonding wires (figure omits) Property connects the electric conductor 22;Also or, the electronic building brick 23 can directly contact the electric conductor 22.However, the related electronic building brick 23 Be electrically connected the electric conductor 22 mode be not limited to it is above-mentioned.
In addition, the antenna structure 24 includes an antenna stack 240 and one first active layer 241 for mutual communication connection, and should First active layer 241 extends from the antenna stack 240.Specifically, as shown in Figure 2 C, which is plane formula, make this One active layer 241 is bound to first encapsulated layer 21 with the antenna stack 240, can be by sputter (sputtering), vapor deposition (vaporing), it is electroplated, change is plated or the modes such as pad pasting (foiling) are formed.Alternatively, as shown in Fig. 2 C ', the antenna structure 24 ' Be it is three-dimensional, make first active layer 241 ' be erected on first encapsulated layer 21 and by the antenna stack 240 be set up in this first 21 top of encapsulated layer, can form by the mode that sheet metal is converted into metal frame.
Also, further, electronic packing piece 2 ' as shown in Figure 2 D can form one second encapsulated layer 25 in first encapsulation To coat the electronic building brick 23, conductive bump 230 and the antenna structure 24 on layer 21, and second encapsulated layer 25 is with opposite First surface 25a and second surface 25b, makes second encapsulated layer 25 be bound to first encapsulated layer 21 with its first surface 25a, And first active layer 241 and the antenna stack 240 be located at the same side (i.e. the side of first surface 25a) and do not expose outside this second The second surface 25b of encapsulated layer 25.
Specifically, which forms through molding processing procedure or pressing thin film manufacture process, and forms second encapsulation The material of layer 25 is prepreg, polyimides, benzocyclobutene, gathers to diazole benzene, dry film, epoxy resin or package material etc., but It is not limited to above-mentioned, therefore the material of first and second encapsulated layer 21,25 can be identical on demand or not identical.It should be appreciated that ground, also Primer (not shown) can be formed between first encapsulated layer 21 and the electronic building brick 23, to coat those conductive bumps 230, then Second encapsulated layer 25 is set to coat the primer.
In addition, also shielding (shielding) structure 26, and the shielding construction 26 can be formed in 23 surrounding of electronic building brick Be electrically connected the antenna structure 24, wherein the shielding construction 26 include at least one around the electronic building brick 23 and be erected on this On one encapsulated layer 21 and it is electrically connected the support portion 260 of first active layer 241 and is correspondingly arranged at 23 top of electronic building brick Shielding portion 261, and the shielding portion 261 exposes outside the second surface 25b of second encapsulated layer 25.
Specifically, the shielding construction 26 of such as metal frame construction first can be set up in this by the production method of the shielding construction 26 On first encapsulated layer 21, as shown in Fig. 2 D ', second encapsulated layer 25 is re-formed, wherein the support portion 260 is metal column or gold Belong to wall, and the shielding portion 261 is sheet metal.Alternatively, be initially formed second encapsulated layer 25, then with laser formed perforation (via) in On second encapsulated layer 25, the support portion 260 can be formed in the perforation by modes such as sputter, vapor deposition, plating, change platings later In, and the shielding portion 261 is formed in the second of second encapsulated layer 25 by modes such as sputter, vapor deposition, plating, change plating or pad pastings On the 25b of surface, to complete the production of the shielding construction 26, wherein the support portion 260 is conductive through holes pattern, and the shielding portion 261 be metal layer pattern.Production in relation to the shielding construction 26 is not limited to above-mentioned.
In another embodiment, the electronic packing piece 2 " as shown in Fig. 2 D ' can omit the production of second encapsulated layer 25, And only make the shielding construction 26.
In other embodiments, the electronic packing piece 3,3 ' as shown in Fig. 3 A and Fig. 3 B, which can be outer It is exposed to the second surface 25b of second encapsulated layer 25.Specifically, as shown in Figure 3A, the antenna stack 340 of the antenna structure 34 is day Line ontology is formed in the second surface that second encapsulated layer 25 is exposed on the second surface 25b of second encapsulated layer 25 25b, and first active layer 341 be used as signal wire, be located at second encapsulated layer 25 first surface 25a on (or this first On encapsulated layer 21) and be electrically connected the support portion 260 and electronic building brick 23 of the shielding construction 26, make the antenna stack 340 and this One active layer 341 is opposite to be stacked and in having an interval t between the two, with enable first active layer 341 and the antenna stack 340 by Signal is transmitted by electromagnetic coupling mode, thus the shape of antenna stack and arrangement design have because taking up space without other components it is higher Freedom degree.
Alternatively, as shown in Figure 3B, which further includes second active layer 342 as signal wire, formed In on the first side 20a of the load-bearing part 20 and being electrically connected the route 200, and first active layer 341 ' is used as patchcord, uses To turn to pass the signal of second active layer 342 to the antenna stack 340, not in contact with and be not electrically connected the shielding construction 26, and There is another interval d between second active layer 342 and first active layer 341 ', to enable second active layer 342 and be somebody's turn to do First active layer 341 ' transmits signal by electromagnetic coupling mode.
Preparation method of the invention is by forming the first encapsulated layer 21 on the first side 20a of the load-bearing part 20 this day knot is isolated The route 200,200 ' of structure 24,24 ', 34,34 ' and the load-bearing part 20, therefore compared to the technology that notes, the present invention can be reduced the antenna Layer 240,340 interferes the signal transmission of the route 200,200 ' of the load-bearing part 20 when receiving or emitting electromagnetic wave.
In addition, electronic packing piece 2 ', 2 ", 3,3 ' of the invention using the shielding construction 26 be isolated the electronic building brick 23 with The antenna structure 24,34,34 ', to avoid the cross-talk (cross of 240,340 pairs of electronic building bricks 23 of antenna stack Talking), the noise interference EMI such as (noise interfering) and radiation interference (radiation interference) are asked The generation of topic.
The present invention also provides a kind of electronic packing pieces 2,2 ', 2 ", 3,3 ' comprising: holding with route 200,200 ' Holder 20, the first encapsulated layer 21 being formed on the load-bearing part 20, at least one electronic building brick on first encapsulated layer 21 23 and one it is formed in antenna structure 24,24 ', 34,34 ' on first encapsulated layer 21.
In an embodiment, it is formed with multiple electric conductors 22 in first encapsulated layer 21, is electrically connected the electronic building brick 23 with the route 200.
In an embodiment, which is plane formula;Alternatively, the antenna structure 24 ' is three-dimensional.
In an embodiment, the electronic packing piece 2 ', 3,3 ' further include one second encapsulated layer 25, is formed in first encapsulation To coat the electronic building brick 23 on layer 21, and second encapsulated layer 25 has opposite first surface 25a and second surface 25b, It is bound to second encapsulated layer 25 on first encapsulated layer 21 with its first surface 25a.For example, the antenna structure 24,24 ', 34,34 ' include 240,340 and one first active layer 241 of an antenna stack, 241 ', 341,341 ', the antenna stack 240,340 formed In first surface 25a or second surface 25b, and first active layer 241,341,341 ' combines first surface 25a.Or Person, the second active layer 342 which also combines the load-bearing part 20 comprising one.
In an embodiment, which further includes a shielding construction 26, is formed in first envelope It fills on layer 21 to cover the electronic building brick 23.Further, which is electrically connected the antenna structure 24,34.
In conclusion electronic packing piece and its preparation method of the invention, by encapsulated layer is formed on the load bearing member, then at the envelope Antenna structure is formed on dress layer, the route of the antenna structure Yu the load-bearing part is isolated, therefore can be reduced the antenna structure in reception Or the signal of the route is interfered to transmit when transmitting electromagnetic wave.
In addition, the electronic building brick and the antenna structure is isolated using shielding construction is formed outside electronic building brick, to prevent this Electromagnetic interference of the antenna structure to the electronic building brick.
Above-described embodiment is only to be illustrated the principle of the present invention and its effect, and is not intended to limit the present invention.Appoint What those skilled in the art without departing from the spirit and scope of the present invention, modifies to above-described embodiment, and The content of foregoing embodiments can be combined with each other application again.Therefore the scope of the present invention, should be such as claims institute Column.

Claims (16)

1. a kind of electronic packing piece, it is characterized in that, which includes:
One load-bearing part with route;
First encapsulated layer is formed on the load-bearing part;
Electronic building brick is set on first encapsulated layer;And
Antenna structure is set on first encapsulated layer.
2. electronic packing piece according to claim 1, it is characterized in that, it is formed in first encapsulated layer and is electrically connected the electricity The electric conductor of sub-component and the route.
3. electronic packing piece according to claim 1, it is characterized in that, which is plane formula or three-dimensional.
4. electronic packing piece according to claim 1, it is characterized in that, which further includes having opposite first Second encapsulated layer on surface and second surface is formed on first encapsulated layer to coat the electronic building brick, wherein this second Encapsulated layer is bound on first encapsulated layer with its first surface.
5. electronic packing piece according to claim 4, it is characterized in that, which includes antenna stack and the first effect Layer, which is bound to the first surface or second surface, and first active layer is bound to the first surface.
6. electronic packing piece according to claim 5, it is characterized in that, which also includes to be bound to the load-bearing part Second active layer.
7. electronic packing piece according to claim 1, it is characterized in that, which further includes being formed in first envelope The shielding construction of the electronic building brick is covered on dress layer.
8. electronic packing piece according to claim 7, it is characterized in that, which is electrically connected the antenna structure.
9. a kind of preparation method of electronic packing piece, it is characterized in that, which includes:
The first encapsulated layer is formed on a load-bearing part with route;And
An at least electronic building brick and antenna structure are set on first encapsulated layer.
10. the preparation method of electronic packing piece according to claim 9, it is characterized in that, electrical property is formed in first encapsulated layer Connect the electric conductor of the electronic building brick Yu the route.
11. the preparation method of electronic packing piece according to claim 9, it is characterized in that, which is plane formula or solid Formula.
12. the preparation method of electronic packing piece according to claim 9, it is characterized in that, which further includes being formed to have relatively First surface and second surface the second encapsulated layer on first encapsulated layer to coat the electronic building brick, wherein this second Encapsulated layer is bound on first encapsulated layer with its first surface.
13. the preparation method of electronic packing piece according to claim 12, it is characterized in that, which includes antenna stack and the One active layer, which is bound to the first surface or second surface, and first active layer is bound to the first surface.
14. the preparation method of electronic packing piece according to claim 13, it is characterized in that, which also includes to be bound to this Second active layer of load-bearing part.
15. the preparation method of electronic packing piece according to claim 9, it is characterized in that, which further includes forming shielding construction In on first encapsulated layer to cover the electronic building brick.
16. the preparation method of electronic packing piece according to claim 15, it is characterized in that, which is electrically connected the antenna Structure.
CN201710377667.7A 2017-05-18 2017-05-25 Electronic package and manufacturing method thereof Active CN108962878B (en)

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TW106116438A TWI659518B (en) 2017-05-18 2017-05-18 Electronic package and method for fabricating the same
TW106116438 2017-05-18

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CN108962878B CN108962878B (en) 2019-12-27

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Publication number Priority date Publication date Assignee Title
US11508678B2 (en) 2019-08-01 2022-11-22 Mediatek Inc. Semiconductor package structure including antenna
US11587881B2 (en) 2020-03-09 2023-02-21 Advanced Semiconductor Engineering, Inc. Substrate structure including embedded semiconductor device
US11335646B2 (en) * 2020-03-10 2022-05-17 Advanced Semiconductor Engineering, Inc. Substrate structure including embedded semiconductor device and method of manufacturing the same
TWI762197B (en) * 2021-02-18 2022-04-21 矽品精密工業股份有限公司 Electronic package and manufacturing method thereof

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CN103258817A (en) * 2012-09-20 2013-08-21 日月光半导体制造股份有限公司 Semiconductor packaging structure and manufacturing method thereof
CN103311213A (en) * 2012-05-04 2013-09-18 日月光半导体制造股份有限公司 Semiconductor packaging member integrating shielding film and antenna
TW201541704A (en) * 2014-04-30 2015-11-01 Auden Techno Corp Chip-type antenna device and chip structure

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Publication number Priority date Publication date Assignee Title
CN102299142A (en) * 2010-06-23 2011-12-28 环旭电子股份有限公司 Packaging structure with antenna and manufacturing method thereof
CN103311213A (en) * 2012-05-04 2013-09-18 日月光半导体制造股份有限公司 Semiconductor packaging member integrating shielding film and antenna
CN103258817A (en) * 2012-09-20 2013-08-21 日月光半导体制造股份有限公司 Semiconductor packaging structure and manufacturing method thereof
TW201541704A (en) * 2014-04-30 2015-11-01 Auden Techno Corp Chip-type antenna device and chip structure

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TW201901915A (en) 2019-01-01
CN108962878B (en) 2019-12-27
TWI659518B (en) 2019-05-11

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