CN108955580A - A kind of method of the outer vertical angle measurement of high-precision - Google Patents
A kind of method of the outer vertical angle measurement of high-precision Download PDFInfo
- Publication number
- CN108955580A CN108955580A CN201810982746.5A CN201810982746A CN108955580A CN 108955580 A CN108955580 A CN 108955580A CN 201810982746 A CN201810982746 A CN 201810982746A CN 108955580 A CN108955580 A CN 108955580A
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- Prior art keywords
- precision
- angle
- measurement
- outer vertical
- calibration
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/12—Instruments for setting out fixed angles, e.g. right angles
Abstract
The present invention provides a kind of method of outer vertical angle measurement of high-precision, the following steps are included: building optical path by two orthogonal autocollimators of optical axis, the drift angle between emergent light and the light received later by reflection is obtained, which is separated into the component in X-direction and Y-direction both direction；Using the right angle precision of the hollow right-angle prism of interferometer measurement, the calibration of standard is carried out；Two autocollimators are adjusted respectively in two dimensions in the x direction and the y direction, zero are illustrated as in two dimensions of X and Y for enabling autocollimator read, fixed autocollimator；The hollow right-angle prism for replacing calibration with optical element to be measured, the position for being placed in the intersection of two autocollimator optical axises measure.A kind of method of the outer vertical angle measurement of high-precision provided by the invention, optical path is built using two high-precision auto-collimations, auxiliary uses the measurement of laser interferometer to realize the high-acruracy survey to the outer right angle of element under test as the standard of calibration with a quiet close multidimensional regulating mechanism.
Description
Technical field
The present invention relates to field of optical measurements, more particularly to a kind of method of the outer vertical angle measurement of high-precision.
Background technique
The measurement of right angle precision is the key that many optical element performances of evaluation, including prism of corner cube, right-angle prism, Borrow
Prism, pentagonal prism etc..Right angle precision is commonly defined as leaving 90 degree absolute of departure.Usually, these optics
The right angle precision of element can by interior angle measure obtain, at this time measuring beam can be by optical element material inside, it is this
Under situation, the discontinuity of materials inside optical element will lead to the dispersion of light, and then the measurement to right angle brings additional mistake
Difference.In addition, the surface of optical element has been coated with reflectance coating because of some needs functionally sometimes, measuring beam is difficult
To be directly incident on inside it.
The method of externally measured angle is divided into contact type measurement and non-contact measurement；During contact type measurement, it is easy
Optical element to be measured is destroyed, and by non-contact measurement, while not high there are measurement accuracy, due to auxiliary element precision
Error is introduced, ultimate measurement accuracy is further influenced.
Summary of the invention
The present invention is that the above-mentioned prior art is overcome to be easily destroyed optics member to be measured for existing in the scheme of outer angular measurement
Part, measurement accuracy be low and auxiliary element is readily incorporated the technological deficiency of error, provides a kind of method of outer vertical angle measurement of high-precision.
In order to solve the above technical problems, technical scheme is as follows:
A kind of method of the outer vertical angle measurement of high-precision, comprising the following steps:
S1: optical path is built by two orthogonal autocollimators of optical axis, every autocollimator is available each contented
Drift angle between emergent light and the light received after reflection, two drift angles are separated into X-direction and Y-direction both direction
On component；
S2: using the right angle precision of the hollow right-angle prism of interferometer measurement, the calibration of standard is carried out；
S3: adjusting two autocollimators in two dimensions in the x direction and the y direction respectively, the X and Y two for enabling autocollimator read
Zero is illustrated as in a dimension, fixed autocollimator；
S4: replacing the hollow right-angle prism of calibration with optical element to be measured, is placed in the intersection of two autocollimator optical axises
Position measures.
Wherein, in the step S2, the interferometer is ZYGO laser interferometer.
Wherein, in the step S2, the hollow right-angle prism precision of selection is better than 30 rads.
Wherein, with error of perpendicularity Δ0Indicate the error of the hollow right-angle prism of calibration；The step S4X is read on direction
For Abx, then the right angle precision Δ of element under testcAre as follows: Δc=Abx-Δ0。
Compared with prior art, the beneficial effect of technical solution of the present invention is:
A kind of method of the outer vertical angle measurement of high-precision provided by the invention, builds light using two high-precision auto-collimations
Road, auxiliary use the measurement of ZYGO laser interferometer as the standard of calibration with an accurate multidimensional regulating mechanism, and realization is treated
Survey the high-acruracy survey at the outer right angle of element.
Detailed description of the invention
Fig. 1 is the method for the present invention flow chart.
Fig. 2 is that optical path builds schematic diagram.
Fig. 3 is calibration process schematic diagram.
Fig. 4 is measurement result of the present invention and ZYGO measurement result comparison diagram.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；
In order to better illustrate this embodiment, the certain components of attached drawing have omission, zoom in or out, and do not represent actual product
Size；
To those skilled in the art, it is to be understood that certain known features and its explanation, which may be omitted, in attached drawing
's.
The following further describes the technical solution of the present invention with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, a kind of method of the outer vertical angle measurement of high-precision, measurement procedure are as follows:
S1: it as shown in Fig. 2, two autocollimators are put into position shown in figure, is mutually perpendicular to by two optical axises
Autocollimator build optical path, the available light for respectively obtaining emergent light and being received after reflection of every autocollimator it
Between drift angle, two drift angles are separated into the component in X-direction and Y-direction both direction；
S2: using the right angle precision of one hollow right-angle prism of ZYGO laser interferometer measurement, by the hollow right-angle prism
It is placed on position as shown in Figure 3, for demarcating the position of two autocollimators, the hollow right-angle prism precision of selection is better than 30 jiaos
Second；
S3: adjusting two autocollimators in two dimensions in the x direction and the y direction respectively, enable two autocollimators read X and
It is illustrated as zero in two dimensions of Y, thinks that the optical axis of two collimators is orthogonal at this time, the error delta of verticality0It is calibration
The error of hollow right-angle prism used, the error are obtained by ZYGO laser interferometer measurement；
S4: replacing the hollow right-angle prism of calibration with optical element to be measured, is placed in the intersection of two autocollimator optical axises
Position adjusts optical element to be measured in two X-direction, Y-direction dimensions, so that autocollimator a is in both the x and y directions
Reading is 0, at this time the reading A of collimator b in the X directionbxDeduct Δ0, obtain the right angle precision Δ of element under testc=Abx-
Δ0。
In the specific implementation process, 16 right angle precision having a size of 1 inch of right-angle prism are measured with this method, together
When compared with the measurement result of ZYGO laser interferometer；ZYGO used in experiment is the phenanthrene of 6 inches of an entablature diameter
Rope type laser interferometer can isolate influence of the earth shock to measurement, and be placed on one with active isolation vibration function
In the organic glass cover of acrylic material, it is possible to prevente effectively from influence of the air agitation to measurement, right-angle prism sample is chosen
Healthy and free from worry 79800F grades of fabulous vitreous silicas of material homogeneity, and sample size is smaller, since measuring beam passes through material internal
Caused phase change can be ignored, therefore can use interior vertical angle measurement method in ZYGO measurement, theoretically its result
With should be consistent when outer vertical angle measurement.
In the specific implementation process, as Fig. 4 gives the Comparative result that two kinds of completely self-contained methods measure, the two
Measurement result substantially conform to, correlation has reached 0.998.In 16 measurement samples, the maximum measurement result of two methods is poor
It Wei not 2 microradians.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (4)
1. a kind of method of the outer vertical angle measurement of high-precision, which comprises the following steps:
S1: building optical path by two orthogonal autocollimators of optical axis, obtains emergent light and is received after reflection
Drift angle between light, the drift angle are separated into the component in X-direction and Y-direction both direction；
S2: using the right angle precision of the hollow right-angle prism of interferometer measurement, the calibration of standard is carried out；
S3: adjusting two autocollimators in two dimensions in the x direction and the y direction respectively, the X and Y two for enabling two autocollimators read
Zero is illustrated as in a dimension, fixed autocollimator；
S4: replacing the hollow right-angle prism of calibration with optical element to be measured, is placed in the position of two autocollimator optical axises intersection
It measures.
2. a kind of method of the outer vertical angle measurement of high-precision according to claim 1, it is characterised in that: in the step S2
In, the interferometer is ZYGO laser interferometer.
3. a kind of method of the outer vertical angle measurement of high-precision according to claim 1, it is characterised in that: in the step S2
In, the hollow right-angle prism precision of selection is better than 30 rads.
4. the method for the outer vertical angle measurement of described in any item a kind of high-precisions according to claim 1~3, it is characterised in that: use and hang down
Straight degree error delta0Indicate the error of the hollow right-angle prism of calibration；Reading is A on the direction the step S4Xbx, then element under test
Right angle precision ΔcAre as follows: Δc=Abx-Δ0。
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| CN201810982746.5A CN108955580A (en) | 2018-08-27 | 2018-08-27 | A kind of method of the outer vertical angle measurement of high-precision |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470183A (en) * | 2018-12-19 | 2019-03-15 | 博众精工科技股份有限公司 | A kind of detection system of prism flatness |
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| US6674521B1 (en) * | 2000-05-12 | 2004-01-06 | The Regents Of The University Of Michigan | Optical method and system for rapidly measuring relative angular alignment of flat surfaces |
| CN100462674C (en) * | 2007-06-22 | 2009-02-18 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN202757593U (en) * | 2012-08-03 | 2013-02-27 | 福州华友光学仪器有限公司 | Double tube angle measuring apparatus |
| CN104482884B (en) * | 2014-11-20 | 2017-10-03 | 中国工程物理研究院激光聚变研究中心 | Narrow angle measuring device and its measuring method |
| CN108332686A (en) * | 2018-01-26 | 2018-07-27 | 中国科学院上海光学精密机械研究所 | A kind of detection device and method of conical mirror cone angle |
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
-
2018
- 2018-08-27 CN CN201810982746.5A patent/CN108955580A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6674521B1 (en) * | 2000-05-12 | 2004-01-06 | The Regents Of The University Of Michigan | Optical method and system for rapidly measuring relative angular alignment of flat surfaces |
| CN100462674C (en) * | 2007-06-22 | 2009-02-18 | 哈尔滨工业大学 | Precision determination method for angle between optical axis and mechanical axis of optical system |
| CN202757593U (en) * | 2012-08-03 | 2013-02-27 | 福州华友光学仪器有限公司 | Double tube angle measuring apparatus |
| CN104482884B (en) * | 2014-11-20 | 2017-10-03 | 中国工程物理研究院激光聚变研究中心 | Narrow angle measuring device and its measuring method |
| CN108332686A (en) * | 2018-01-26 | 2018-07-27 | 中国科学院上海光学精密机械研究所 | A kind of detection device and method of conical mirror cone angle |
| CN108759723A (en) * | 2018-07-23 | 2018-11-06 | 中国工程物理研究院激光聚变研究中心 | optical angle measurement method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470183A (en) * | 2018-12-19 | 2019-03-15 | 博众精工科技股份有限公司 | A kind of detection system of prism flatness |
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