CN108943453A - Produce monocrystalline silicon piece making herbs into wool cutter device - Google Patents

Produce monocrystalline silicon piece making herbs into wool cutter device Download PDF

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Publication number
CN108943453A
CN108943453A CN201810833543.XA CN201810833543A CN108943453A CN 108943453 A CN108943453 A CN 108943453A CN 201810833543 A CN201810833543 A CN 201810833543A CN 108943453 A CN108943453 A CN 108943453A
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CN
China
Prior art keywords
motor
monocrystalline silicon
cleaning solution
silicon piece
sliding rail
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Granted
Application number
CN201810833543.XA
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Chinese (zh)
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CN108943453B (en
Inventor
邱小永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Bei Sheng New Mstar Technology Ltd
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Zhejiang Bei Sheng New Mstar Technology Ltd
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Priority to CN201810833543.XA priority Critical patent/CN108943453B/en
Publication of CN108943453A publication Critical patent/CN108943453A/en
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Publication of CN108943453B publication Critical patent/CN108943453B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Crushing And Pulverization Processes (AREA)
  • Treatment Of Fiber Materials (AREA)

Abstract

The invention discloses production monocrystalline silicon piece making herbs into wool cutter devices, it includes rack (1), electric sliding rail (2) are provided in rack (1), article placing frame (3) and mobile platform (4), first hydraulic cylinder (5) are connected on mobile platform (4), vibration-damped table (6), high-speed motor (7) and rotation axis (8), cleaning solution inlet pipe (9) are installed in rotation axis (8), Woolen-making liquid inlet pipe (10) and diamond saw blade (11), diamond wire (12) are provided on diamond saw blade (11), cleaning solution channel (14) and Woolen-making liquid channel (15);Auto-steering collection device (29) are connected on electric sliding rail (2);The first inductor (16) and the second inductor (17) are provided on mobile platform (4);Infrared detecting device (42) are provided on electric sliding rail (2).The present invention can not only improve working efficiency and cutting accuracy, also have the advantages that manufacturing cost is lower, easy to use, safe and collection is convenient.

Description

Produce monocrystalline silicon piece making herbs into wool cutter device
Technical field
The present invention relates to a kind of monocrystalline silicon cutter devices, especially production monocrystalline silicon piece making herbs into wool cutter device.
Background technique
Existing monocrystalline silicon piece cutter device mainly moves back and forth completion using a plurality of ultra-fine adamantine line disposed in parallel Cutting to monocrystalline silicon section, after a wherein ultra-fine adamantine thread breakage, it is necessary to entirely stop cutter device, to Buddha's warrior attendant Line is replaced, and not only reduces working efficiency, and generally also need worker by the monocrystalline silicon of well cutting after the completion of cutting Piece is sent into fluff making device and carries out making herbs into wool to cut surface, and to reduce the damage of cut surface, labor intensity is larger;Simultaneously using a plurality of Before ultra-fine adamantine line is cut, need flat between the rate of tension and mutual two ultra-fine adamantine lines to every ultra-fine adamantine line Stroke degree is adjusted, and it is more inconvenient to use.Therefore existing monocrystalline silicon piece cutter device that there is working efficiencies is lower, Labor intensity is larger and uses less convenient problem.
Summary of the invention
The object of the present invention is to provide production monocrystalline silicon piece making herbs into wool cutter devices.The present invention can not only improve work Make efficiency, also has the advantages that labor intensity is lower and easy to use.
Technical solution of the present invention: monocrystalline silicon piece making herbs into wool cutter device, including rack are produced, is provided with two in rack The electric sliding rail being symmetrically set is being provided with multiple equally distributed article placing frames between two electric sliding rails;Electric sliding rail Side be provided with mobile platform, be connected with first hydraulic cylinder on mobile platform;Vibration-damped table is installed on the top surface of mobile platform, High-speed motor is installed in vibration-damped table;Rotation axis is installed on high-speed motor, cleaning solution inlet pipe, cleaning solution are installed in rotation axis The side of inlet pipe is provided with Woolen-making liquid inlet pipe;Multiple equally distributed diamond saw blades, diamond saw blade are installed in rotation axis Edge be provided with diamond wire;It is equipped with the first groove on the two sides of diamond saw blade, is respectively provided in each first groove There are multiple cleaning solution channels and Woolen-making liquid channel;Each cleaning solution channel is connect with cleaning solution inlet pipe, each Woolen-making liquid channel It is connect with Woolen-making liquid inlet pipe;One end of the electric sliding rail is connected with auto-steering collection device;The shifting of the mobile platform The first inductor and the second inductor are provided on dynamic path;It corresponds on the electric sliding rail and is set at the position in the middle part of mobile platform It is equipped with infrared detecting device.
For production monocrystalline silicon piece above-mentioned in making herbs into wool cutter device, the two sidewalls of the article placing frame are equipped with a plurality of uniform point The bottom surface of the cutting groove of cloth, article placing frame is equipped with a plurality of equally distributed first comb teeth.
Production monocrystalline silicon piece above-mentioned is in making herbs into wool cutter device, being equipped with controller, institute on the one side of the rack State electric sliding rail, first hydraulic cylinder, high-speed motor, the first inductor, the second inductor and infrared detecting device and controller It is electrically connected.
For production monocrystalline silicon piece above-mentioned in making herbs into wool cutter device, the auto-steering collection device includes delivery platform, Steering frame in honeycomb arrangement is installed on delivery platform;Third motor, each third electricity are mounted in each steering frame The first deflecting roller is respectively connected on machine;The side of each third motor is provided with the 4th motor, and the other side is provided with the 5th Motor;The second deflecting roller is respectively connected on each 4th motor;Third deflecting roller is respectively connected on each 5th motor;Conveying is flat One end of platform is provided with feeding passage, and one end of each feeding passage is connected with collection material frame;Substrate, base are provided in collection material frame Multiple equally distributed buffer springs are provided between plate and the bottom surface for collecting material frame, are socketed on each buffer spring flexible Pipe.
With in making herbs into wool cutter device, the third motor, the 4th motor and the 5th motor are in production monocrystalline silicon piece above-mentioned Triangle-Profile.
Production monocrystalline silicon piece above-mentioned is in making herbs into wool cutter device, and each cleaning solution channel is homogeneously intercommunicated, each Woolen-making liquid channel is also homogeneous intercommunicated;Shield is installed, the lower section of rotation axis is arranged by the second collecting tank in the rotation axis.
Compared with prior art, present invention improves over existing monocrystalline silicon piece cutter device, first monocrystalline silico briquette is placed on In article placing frame, monocrystalline silico briquette is driven to move ahead by electric sliding rail, after being moved at mobile platform infrared detecting device, by high-speed motor Rotation axis high-speed rotation is driven, rotation axis is driving diamond saw blade high-speed rotation, so that slicing treatment is carried out to monocrystalline silico briquette, Whole device structure is simple, and not only manufacturing cost is lower, but also is easy to use;It is logical by cleaning solution in cutting process The surface that Woolen-making liquid and water lotion are sent to monocrystalline silicon piece together is realized in road and Woolen-making liquid channel makings herbs into wool on one side cut while, not only Reduce subsequent making herbs into wool step, reduces labor intensity, moreover it is possible to improve working efficiency;By the way that vibration-damped table is arranged, height can reduce To the covibration of mobile platform when speed motor works, prevents the mobile platform in cutting process from shaking, influence cutting effect;Together When, by the first inductor of setting, the second inductor and infrared detecting device, respectively to the mobile distance and glove of mobile platform The shift position of frame is detected, and instrument makes diamond saw blade in cutting process, can accurately be by article placing frame to monocrystalline silicon section It is cut, improves cutting accuracy.In addition, the present invention also by article placing frame be equipped with multiple equally distributed cutting grooves and First comb teeth both can guarantee the uniformity and planarization of cutting, moreover it is possible to facilitate the Woolen-making liquid flow down in cutting process and washing Liquid can flow in the second collecting tank;Corresponding motor or hydraulic cylinder starting or opening and closing are controlled by setting controller, into one Step is convenient to use;It is each to turn to the third electricity being equipped in frame in angular distribution by the way that the steering frame of honeycomb arrangement is arranged Machine, the 4th motor and the 5th motor, by changing each start and stop for turning to different motors in frame, to the monocrystalline silicon piece in collection material frame Transporting direction be changed, to facilitate the collection to finished product monocrystalline silicon piece;By installing shield on the rotating shaft, mention The high safety of cutting.Therefore, the present invention can not only improve working efficiency and cutting accuracy, also have manufacturing cost compared with Advantage low, easy to use, safe and that collection is convenient.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is the structural schematic diagram of diamond saw blade;
Fig. 3 is the structural schematic diagram of article placing frame;
Fig. 4 is the structural schematic diagram for turning to frame;
Fig. 5 is the schematic diagram of internal structure for collecting material frame;
Fig. 6 is the partial enlarged view in Fig. 1 at A.
The label in accompanying drawing is: 1- rack, 2- electric sliding rail, 3- article placing frame, 4- mobile platform, 5- first hydraulic cylinder, 6- Vibration-damped table, 7- high-speed motor, 8- rotation axis, 9- cleaning solution inlet pipe, 10- Woolen-making liquid inlet pipe, 11- diamond saw blade, 12- Buddha's warrior attendant Line, the first groove of 13-, 14- cleaning solution channel, 15- Woolen-making liquid channel, the first inductor of 16-, the second inductor of 17-, 29- is certainly Turn is to collection device, 30- cutting groove, the first comb teeth of 31-, 42- infrared detecting device, 43- controller, 55- delivery platform, 56- turns to frame, 57- third motor, the first deflecting roller of 58-, the 4th motor of 59-, the 5th motor of 60-, the second deflecting roller of 61-, 62- Third deflecting roller, 63- feeding passage, 64- collection material frame, 65- substrate, 66- buffer spring, 67- telescoping tube, 68- shield, 69- Second collecting tank.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples, but be not intended as to the present invention limit according to According to.
Embodiment.Monocrystalline silicon piece making herbs into wool cutter device is produced, is constituted as shown in Figures 1 to 6, including rack 1, in rack 1 Two electric sliding rails being symmetrically set 2 are provided with, are being provided with multiple equally distributed gloves between two electric sliding rails 2 Frame 3;The side of electric sliding rail 2 is provided with mobile platform 4, and first hydraulic cylinder 5 is connected on mobile platform 4;The top of mobile platform 4 Vibration-damped table 6 is installed on face, high-speed motor 7 is installed in vibration-damped table 6;Rotation axis 8 is installed, in rotation axis 8 on high-speed motor 7 Cleaning solution inlet pipe 9 is installed, the side of cleaning solution inlet pipe 9 is provided with Woolen-making liquid inlet pipe 10;It is equipped in rotation axis 8 multiple uniform The diamond saw blade 11 of distribution, the edge of diamond saw blade 11 are provided with diamond wire 12;On the two sides of diamond saw blade 11 It is equipped with the first groove 13, multiple cleaning solution channels 14 and Woolen-making liquid channel 15 are provided in each first groove 13;Each Cleaning solution channel 14 is connect with cleaning solution inlet pipe 9, and each Woolen-making liquid channel 15 is connect with Woolen-making liquid inlet pipe 10;It is described electronic One end of sliding rail 2 is connected with auto-steering collection device 29;The first inductor is provided in the movement routine of the mobile platform 4 16 and second inductor 17;It is corresponded on the electric sliding rail 2 and is provided with infrared detecting device at the position at 4 middle part of mobile platform 42。
The two sidewalls of the article placing frame 3 are equipped with a plurality of equally distributed cutting groove 30, and the bottom surface of article placing frame 30 is equipped with A plurality of equally distributed first comb teeth 31;Controller 43, the electric sliding rail 2, are installed on the one side of the rack 17 One hydraulic cylinder 5, high-speed motor 7, the first inductor 17, the second inductor 18 and infrared detecting device 42 are electrical with controller 43 Connection;The auto-steering collection device 29 includes delivery platform 55, is equipped on delivery platform 55 and turns in honeycomb arrangement To frame 56;It is mounted on third motor 57 in each steering frame 56, the first deflecting roller 58 is respectively connected on each third motor 57; The side of each third motor 57 is provided with the 4th motor 59, and the other side is provided with the 5th motor 60;Each 4th motor The second deflecting roller 61 is respectively connected on 59;Third deflecting roller 62 is respectively connected on each 5th motor 60;The one of delivery platform 55 End is provided with feeding passage 63, and one end of each feeding passage 63 is connected with collection material frame 64;Substrate is provided in collection material frame 64 65, multiple equally distributed buffer springs 66 are provided between substrate 65 and the bottom surface for collecting material frame 64, on each buffer spring 66 It is socketed with telescoping tube 67;The third motor 57, the 4th motor 59 and the distribution triangular in shape of the 5th motor 60;It is described each clear Washing liquid channel 9 is homogeneous intercommunicated, and each Woolen-making liquid channel 10 is also homogeneous intercommunicated;Shield 68 is installed in the rotation axis 8, The lower section of rotation axis 8 is arranged by the second collecting tank 69.
Working principle: controller 43 employed in the present invention is programmable PLC controller, and concrete model can be with It can be FX for concrete model2N-48MRD、FX2C- 64ERD, SIMATICs7-200 or FP1-C40.
In use, first whole device is even connected with the mains, controller 43 is then opened, controller 43 controls the first inductor 16, the second inductor 17 and infrared detecting device 42 start, and then the monocrystalline silicon section with slice is placed in article placing frame 3, is opened Dynamic electric sliding rail 2;Electric sliding rail 2 can be moved along together after starting with the monocrystalline silicon section in article placing frame 3 and article placing frame 3, and one Article placing frame 3 can block infrared detecting device 42 after the section time, and at this moment infrared detecting device 42 detects article placing frame 3 and sends pass Signal is closed to controller 43, controller 43 can control the stopping of electric sliding rail 2, same time control after receiving the shutdown signal sent First hydraulic cylinder 5 processed and high-speed motor 7 start;First hydraulic cylinder 5 will push mobile platform 4 toward 2 direction of electric sliding rail after starting It is mobile;High-speed motor 7 will drive 8 high speed rotation of rotation axis after starting, and it is high that 8 high speed rotation of rotation axis will drive diamond saw blade 11 Speed rotation, diamond saw blade 11 pass through cutting under first hydraulic cylinder 5 and the collective effect of high-speed motor 7 while rotating Slot 30 carries out slice work to the monocrystalline silicon section in article placing frame 3;Pass through cleaning solution inlet pipe 9 and Woolen-making liquid inlet pipe while cutting 10 are sent into cleaning solution and Woolen-making liquid in cleaning solution channel 14 and Woolen-making liquid channel 15, and cleaning solution and Woolen-making liquid can be with diamonds The cutting face contact of saw blade 11 and monocrystalline silicon section carries out making herbs into wool to the cut surface for the monocrystalline silicon piece that cutting has under its command;When mobile platform 4 Front end touch the second inductor 17, the second inductor 17 can send inductive signal to controller 43, and controller 43 is receiving Determine that cutting is completed after the inductive signal sent to the second inductor 17, and controls the closing of high-speed motor 7, first hydraulic cylinder 5 Inverted running;First hydraulic cylinder 5 just will drive mobile platform 4 and return to initial position, until the leading portion of mobile platform 4 touches When one inductor 16, the first inductor 16 will send an inductive signal to controller 43, and controller 43 is receiving induction First hydraulic cylinder 5 is controlled after signal to stop, while controlling the starting of electric sliding rail 2, and electric sliding rail 2 will drive article placing frame 3 after starting It is moved together with the monocrystalline silicon piece cut down on the delivery platform 55 of auto-steering collection device 29.
After article placing frame 3 and monocrystalline silicon piece enter delivery platform 55, start each third motor 57 turned in frame 56, the Four motors 59 and the 5th motor 60, third motor 57, the 4th motor 59 and the 5th motor 60 starting will drive the first deflecting roller 58, Second deflecting roller 61 and third deflecting roller 62 rotate, so that article placing frame 3 and monocrystalline silicon piece be pushed to enter collection by feeding passage 63 On substrate 65 in material frame 64, article placing frame 3 is when being moved on substrate 65, due to the weight of article placing frame 3 and internal monocrystalline silicon piece There can be a downward pressure to substrate 65, so that buffer spring 66 be made to compress, substrate 65 moves down a distance, under convenient The entrance of one article placing frame 3;Simultaneously after one of collection material frame 64 fills material, adjusting third motor 57, the can be passed through The start and stop of four motors 59 and the 5th motor 60, it is opposed to change the first deflecting roller 58, the second deflecting roller 61 and third deflecting roller 62 The transport pathway of object frame 3 is not in article placing frame 3 the phenomenon that accumulating on delivery platform 55, is convenient to use, improves simultaneously Flexibility.

Claims (6)

1. producing monocrystalline silicon piece making herbs into wool cutter device, it is characterised in that: including rack (1), two phases are provided in rack (1) Mutual symmetrically arranged electric sliding rail (2) is being provided with multiple equally distributed article placing frames (3) between two electric sliding rails (2);Electricity The side of dynamic sliding rail (2) is provided with mobile platform (4), and first hydraulic cylinder (5) are connected on mobile platform (4);Mobile platform (4) Top surface on be equipped with vibration-damped table (6), high-speed motor (7) are installed in vibration-damped table (6);High-speed motor is equipped with rotation on (7) Axis (8) is equipped with cleaning solution inlet pipe (9) in rotation axis (8), and the side of cleaning solution inlet pipe (9) is provided with Woolen-making liquid inlet pipe (10); Multiple equally distributed diamond saw blades (11) are installed, the edge of diamond saw blade (11) is provided with gold in rotation axis (8) Rigid line (12);It is equipped on the two sides of diamond saw blade (11) the first groove (13), is respectively provided in each first groove (13) There are multiple cleaning solution channels (14) and Woolen-making liquid channel (15);Each cleaning solution channel (14) connect with cleaning solution inlet pipe (9), Each Woolen-making liquid channel (15) connect with Woolen-making liquid inlet pipe (10);One end of the electric sliding rail (2) is connected with auto-steering Collection device (29);The first inductor (16) and the second inductor (17) are provided in the movement routine of the mobile platform (4); It is corresponded on the electric sliding rail (2) and is provided with infrared detecting device (42) at the position in the middle part of mobile platform (4).
2. production monocrystalline silicon piece making herbs into wool cutter device according to claim 1, it is characterised in that: the article placing frame (3) Two sidewalls be equipped with a plurality of equally distributed cutting groove (30), the bottom surface of article placing frame (30) is equipped with a plurality of equally distributed the One comb teeth (31).
3. production monocrystalline silicon piece making herbs into wool cutter device according to claim 1, it is characterised in that: the rack (17) It is equipped on one side controller (43), the electric sliding rail (2), first hydraulic cylinder (5), high-speed motor (7), the first inductor (17), the second inductor (18) and infrared detecting device (42) are electrically connected with controller (43).
4. production monocrystalline silicon piece making herbs into wool cutter device according to claim 1, it is characterised in that: the auto-steering is received Acquisition means (29) include delivery platform (55), and the steering frame (56) in honeycomb arrangement is equipped on delivery platform (55);Each It turns to and is mounted on third motor (57) in frame (56), be respectively connected with the first deflecting roller (58) on each third motor (57);Often The side of a third motor (57) is provided with the 4th motor (59), and the other side is provided with the 5th motor (60);Each 4th The second deflecting roller (61) are respectively connected on motor (59);Third deflecting roller (62) are respectively connected on each 5th motor (60);It is defeated One end of platform (55) is sent to be provided with feeding passage (63), one end of each feeding passage (63) is connected with collection material frame (64); It is provided with substrate (65), is provided between substrate (65) and the bottom surface for collecting material frame (64) multiple equally distributed in collection material frame (64) Buffer spring (66) is socketed with telescoping tube (67) on each buffer spring (66).
5. production monocrystalline silicon piece making herbs into wool cutter device according to claim 4, it is characterised in that: the third motor (57), the 4th motor (59) and the 5th motor (60) distribution triangular in shape.
6. existing according to claim 1 to production monocrystalline silicon piece making herbs into wool cutter device, feature described in any claim in 5 In: each cleaning solution channel (9) is homogeneous intercommunicated, and each Woolen-making liquid channel (10) is also homogeneous intercommunicated;The rotation axis (8) it is equipped on shield (68), the lower section of rotation axis (8) is arranged by the second collecting tank (69).
CN201810833543.XA 2018-07-26 2018-07-26 Texturing cutting device for producing monocrystalline silicon wafers Expired - Fee Related CN108943453B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810833543.XA CN108943453B (en) 2018-07-26 2018-07-26 Texturing cutting device for producing monocrystalline silicon wafers

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Application Number Priority Date Filing Date Title
CN201810833543.XA CN108943453B (en) 2018-07-26 2018-07-26 Texturing cutting device for producing monocrystalline silicon wafers

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CN108943453B CN108943453B (en) 2020-05-22

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101937A (en) * 2007-08-07 2008-01-09 南京航空航天大学 Integrated processing method for cotton cutting of solar silicon and its device
CN201699001U (en) * 2010-06-30 2011-01-05 英利能源(中国)有限公司 Silicon wafer basket conveying line
US20110232082A1 (en) * 2010-03-26 2011-09-29 Taehyun Kim Apparatus for mounting semiconductor device
CN202592546U (en) * 2011-12-15 2012-12-12 谭凯元 Crystal ingot cutting machine
CN103177988A (en) * 2011-12-23 2013-06-26 三星电子株式会社 Apparatuses for bonding semiconductor chips
CN104396001A (en) * 2012-07-06 2015-03-04 贝斯荷兰有限公司 Device and method for separating, at least partially drying and inspecting electronic components
CN205631054U (en) * 2016-05-23 2016-10-12 上海日进机床有限公司 Silicon rod continuous operation system
CN107634024A (en) * 2017-07-27 2018-01-26 罗博特科智能科技股份有限公司 A kind of silicon chip batch transferring device
CN207014538U (en) * 2017-07-14 2018-02-16 大连圣迈新建材有限公司 Cement foaming insulation board diced system

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101937A (en) * 2007-08-07 2008-01-09 南京航空航天大学 Integrated processing method for cotton cutting of solar silicon and its device
US20110232082A1 (en) * 2010-03-26 2011-09-29 Taehyun Kim Apparatus for mounting semiconductor device
CN201699001U (en) * 2010-06-30 2011-01-05 英利能源(中国)有限公司 Silicon wafer basket conveying line
CN202592546U (en) * 2011-12-15 2012-12-12 谭凯元 Crystal ingot cutting machine
CN103177988A (en) * 2011-12-23 2013-06-26 三星电子株式会社 Apparatuses for bonding semiconductor chips
CN104396001A (en) * 2012-07-06 2015-03-04 贝斯荷兰有限公司 Device and method for separating, at least partially drying and inspecting electronic components
CN205631054U (en) * 2016-05-23 2016-10-12 上海日进机床有限公司 Silicon rod continuous operation system
CN207014538U (en) * 2017-07-14 2018-02-16 大连圣迈新建材有限公司 Cement foaming insulation board diced system
CN107634024A (en) * 2017-07-27 2018-01-26 罗博特科智能科技股份有限公司 A kind of silicon chip batch transferring device

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