CN108942110B - The processing technology for the ring shoulder annular knurl being used cooperatively with target - Google Patents
The processing technology for the ring shoulder annular knurl being used cooperatively with target Download PDFInfo
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- CN108942110B CN108942110B CN201810951478.0A CN201810951478A CN108942110B CN 108942110 B CN108942110 B CN 108942110B CN 201810951478 A CN201810951478 A CN 201810951478A CN 108942110 B CN108942110 B CN 108942110B
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- angle
- ring
- annular knurl
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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Abstract
The present invention provides a kind of processing technologys of ring shoulder annular knurl being used cooperatively with target, it is related to the technical field of semiconductor, including shoulder turning: by the inner ring and end face right angle of the direct turning ring of the angle R forming cutter and outer ring and end face right angle, forming the angle inner ring R, the outer ring angle R and Internal and external cycle and be connected end face；Shoulder annular knurl: the angle inner ring R, the outer ring angle R and Internal and external cycle are connected by end face by the angle R knurling tool and carry out annular knurl.The present invention provides a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, can sophisticated design R angle square cun, manage annular knurl position by data, guarantee that decorative pattern linking is perfect and without the problems such as recklessly spending design of scattered small flowers and plants, increase product bond area, extends product service life.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly, to a kind of ring shoulder annular knurl being used cooperatively with target
Processing technology.
Background technique
In semiconductor PVD plated film production process, in order to improve the uniformity of film, it will usually use some ring products
Cooperation target is used together, for example in our PVD plating tantalum films, be will use tantalum ring cooperation tantalum target and be used together, tantalum ring
In process, entire body surface needs to carry out annular knurl to increase surface roughness to part, and shoulder annular knurl is also ring annular knurl process
In a link.
Prior art shoulder R angle square cun is bigger than normal, and finished product is semicircular arc, because circular arc is big, to be repeatedly connected ability
Whole shoulder annular knurl is completed, decorative pattern is easy to appear the problems such as recklessly spending design of scattered small flowers and plants after being repeatedly connected, and is connected bad, In so as to cause decorative pattern
In coating process, easily causes various sputterings abnormal (excoriation, point discharge, pyramid fall off) and directly affect using the longevity
Life.
The information disclosed in the background technology section is intended only to deepen understanding of the general background technology to the present invention, and
It is not construed as recognizing or implying in any form that the information constitutes the prior art known to those skilled in the art.
Summary of the invention
The purpose of the present invention is to provide a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, Neng Goujing
Close design R angle square cun manages annular knurl position by data, and guarantee decorative pattern linking is perfect and without the problems such as recklessly spending design of scattered small flowers and plants, increases production
Product bond area extends product service life.
To achieve the above object, the present invention the following technical schemes are provided:
The present invention provides a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, comprising:
Shoulder turning: the ring shoulder is turned into trapezoidal, inner ring and end face by the direct turning ring of the angle R forming cutter
Right angle and outer ring and end face right angle form the angle inner ring R, the outer ring angle R and Internal and external cycle and are connected end face；
Shoulder annular knurl: the angle the inner ring R, the angle the outer ring R and the Internal and external cycle are connected by end face by the angle R knurling tool
Annular knurl is carried out, so that on the decorative pattern on the angle the inner ring R, the decorative pattern on the angle the outer ring R and Internal and external cycle linking end face
Decorative pattern is mutually connected；The angle R knurling tool converts multiple angles, and plane is angled the angle R knurling tool and ring place is
45°、90°、-45°。
Further, the shoulder turning includes:
The ring is clamped on the lathe spindle in rotation.
Further, the ring shoulder is turned into trapezoidal.
Further, the angle ring shoulder R is having a size of 0.7 ± 0.25mm.
Further, the angle ring shoulder R is having a size of 1.0 ± 0.25mm.
Further, the shoulder annular knurl includes:
The angle the inner ring R, the outer ring angle R and Internal and external cycle linking end face are rolled out into straight grain or net by the angle R knurling tool
Line.
Further, the shoulder annular knurl further include:
The angle R knurling tool converts multiple angles.
Further, it is 45 ° that the angle R knurling tool is angled with plane where the ring, 90 °, -45 °.
Further, the annular knurl parameter of described one decorative pattern in the angle ring shoulder R includes: that the angle the R knurling tool revolution is
30r/min, volume under pressure 0.4-0.5mm.
Further, the annular knurl parameter of described one decorative pattern in the angle ring shoulder R further include: the angle the R knurling tool turning collar
Number is that 4-6 is enclosed.
The processing technology of the ring shoulder annular knurl provided by the invention being used cooperatively with target has the advantages that
The present invention provides a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, comprising:
Shoulder turning: straight by the inner ring and end face right angle and outer ring and end face of the direct turning ring of the angle R forming cutter
At angle, forms the angle inner ring R, the outer ring angle R and Internal and external cycle and be connected end face；
Shoulder annular knurl: the angle inner ring R, the outer ring angle R and Internal and external cycle are connected by end face by the angle R knurling tool and carry out annular knurl.
The processing technology shoulder R angle square cun of the existing ring shoulder annular knurl being used cooperatively with target it is bigger than normal (1.59 ±
0.25mm), finished product is semicircular arc, because circular arc is big, whole shoulder annular knurl could be completed by being repeatedly connected, and decorative pattern is multiple
It is easy to appear the problems such as recklessly spending design of scattered small flowers and plants after linking, is connected bad so as to cause decorative pattern, in coating process, easily causes various splash
Penetrate exception, such as excoriation, point discharge, pyramid falls off, directly affect service life, using it is provided by the invention with
The processing technology for the ring shoulder annular knurl that target is used cooperatively, firstly, inner ring and end by the direct turning ring of the angle R forming cutter
Face right angle and outer ring and end face right angle form the angle inner ring R, the outer ring angle R and Internal and external cycle and are connected end face, so that ring shoulder
The portion angle R is not semicircular arc；Then by the angle R knurling tool by the angle inner ring R, the outer ring angle R and Internal and external cycle be connected end face respectively into
Row annular knurl manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants.
The present invention provides a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, being capable of the angle sophisticated design R
Size manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants, increases product attachment surface
Product extends product service life.
Other features and advantages of the present invention will illustrate in the following description, also, partly become from specification
It obtains it is clear that understand through the implementation of the invention.The objectives and other advantages of the invention are in specification, claims
And specifically noted structure is achieved and obtained in attached drawing.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is shoulder vehicle in the processing technology of the ring shoulder annular knurl provided in an embodiment of the present invention being used cooperatively with target
Ring sectional view during cutting；
Fig. 2 is outer ring R in the processing technology of the ring shoulder annular knurl provided in an embodiment of the present invention being used cooperatively with target
The structural schematic diagram of angle annular knurl；
Fig. 3 is inner ring R in the processing technology of the ring shoulder annular knurl provided in an embodiment of the present invention being used cooperatively with target
Angle annular knurl ground structure schematic diagram；
Fig. 4 is end face R in the processing technology of the ring shoulder annular knurl provided in an embodiment of the present invention being used cooperatively with target
The structural schematic diagram of angle annular knurl.
Icon: 1- ring；The angle 2-R forming cutter；The angle 3-R knurling tool；11- inner ring；The outer ring 12-.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are please referred to, is made to provided in an embodiment of the present invention with target cooperation below in conjunction with attached drawing
The processing technology of ring shoulder annular knurl elaborates.
The embodiment provides a kind of processing technologys of ring shoulder annular knurl being used cooperatively with target, comprising:
Shoulder turning: by the inner ring 11 of the direct turning ring 1 of the angle R forming cutter 2 and end face right angle and outer ring 12 with
End face right angle forms the angle inner ring R, the outer ring angle R and Internal and external cycle and is connected end face；
Shoulder annular knurl: the angle inner ring R, the outer ring angle R and Internal and external cycle are connected by end face by the angle R knurling tool 3 and carry out annular knurl.
The processing technology shoulder R angle square cun of the existing ring shoulder annular knurl being used cooperatively with target it is bigger than normal (1.59 ±
0.25mm), finished product is semicircular arc, because circular arc is big, whole shoulder annular knurl could be completed by being repeatedly connected, and decorative pattern is multiple
It is easy to appear the problems such as recklessly spending design of scattered small flowers and plants after linking, is connected bad so as to cause decorative pattern, in coating process, easily causes various splash
Penetrate exception, such as excoriation, point discharge, pyramid falls off, directly affect service life, using it is provided by the invention with
The processing technology for the ring shoulder annular knurl that target is used cooperatively, firstly, passing through the inner ring 11 of the direct turning ring 1 of the angle R forming cutter 2
With end face right angle and outer ring 12 and end face right angle, forms the angle inner ring R, the outer ring angle R and Internal and external cycle and be connected end face, so that
1 angle shoulder R of ring is not semicircular arc；Then pass through the angle R knurling tool 3 for the angle inner ring R, the outer ring angle R and Internal and external cycle cohesive end
Face carries out annular knurl respectively, manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants.
The present invention provides a kind of processing technology of ring shoulder annular knurl being used cooperatively with target, being capable of the angle sophisticated design R
Size manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants, increases product attachment surface
Product extends product service life.
In the optional scheme of the present embodiment, further, shoulder turning includes:
Ring 1 is clamped on the lathe spindle in rotation.
In at least one embodiment, ring 1 is clamped on the lathe spindle in rotation, it is direct by the angle R forming cutter 2
The inner ring 11 of turning ring 1 and end face right angle and outer ring 12 and end face right angle form the angle inner ring R, the outer ring angle R and interior
Outer ring is connected end face, so that 1 angle shoulder R of ring is not semicircular arc.
In the optional scheme of the present embodiment, further, 1 shoulder of ring is turned into trapezoidal.
In at least one embodiment, the inner ring 11 of the direct turning ring 1 of the angle R forming cutter 2 and end face right angle and outer
Circle 12 and end face right angle, form the angle inner ring R, the outer ring angle R and Internal and external cycle are connected end face, and the angle inner ring R, the outer ring angle R and
It is trapezoidal that Internal and external cycle is connected end face.
In the optional scheme of the present embodiment, further, 1 angle shoulder R of ring is having a size of 0.7 ± 0.25mm.
Prior art shoulder R angle square cun is bigger than normal, is 1.59 ± 0.25mm, and finished product is semicircular arc, because circular arc is big,
Whole shoulder annular knurl could be completed by being repeatedly connected, and decorative pattern is easy to appear the problems such as recklessly spending design of scattered small flowers and plants after being repeatedly connected, so as to cause
Decorative pattern linking is bad, and in coating process, easily causing various sputterings exceptions, (excoriation, point discharge, pyramid fall off
Deng) service life is directly affected, at least one embodiment, 1 angle shoulder R of ring is having a size of 0.7 ± 0.25mm, and finished product is in ladder
Shape manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants, increases product bond area,
With extending product service life.
In the optional scheme of the present embodiment, further, 1 angle shoulder R of ring is having a size of 1.0 ± 0.25mm.
Prior art shoulder R angle square cun is bigger than normal, is 1.59 ± 0.25mm, and finished product is semicircular arc, because circular arc is big,
Whole shoulder annular knurl could be completed by being repeatedly connected, and decorative pattern is easy to appear the problems such as recklessly spending design of scattered small flowers and plants after being repeatedly connected, so as to cause
Decorative pattern linking is bad, and in coating process, easily causing various sputterings exceptions, (excoriation, point discharge, pyramid fall off
Deng) service life is directly affected, at least one embodiment, 1 angle shoulder R of ring is having a size of 1.0 ± 0.25mm, and finished product is in ladder
Shape manages annular knurl position by data, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants, increases product bond area,
With extending product service life.
In the optional scheme of the present embodiment, further, shoulder annular knurl includes:
The angle inner ring R, the outer ring angle R and Internal and external cycle linking end face are rolled out into straight grain or reticulate pattern by the angle R knurling tool 3.
In at least one embodiment, by the angle R knurling tool 3 by workpiece surface, that is, angle inner ring R, the outer ring angle R and inside and outside
Circle linking end face rolls out straight grain or reticulate pattern, which is reticulation patterns.
In the optional scheme of the present embodiment, further, shoulder annular knurl further include:
The angle R knurling tool 3 converts multiple angles.
In at least one embodiment, three kinds of angles are converted for the angle inner ring R, the outer ring angle R and interior by the angle R knurling tool 3
Outer ring is connected end face and carries out annular knurl, and decorative pattern linking angle and size have specific data to provide.
In the optional scheme of the present embodiment, further, the angle R knurling tool 3 and 1 place plane of ring it is angled be 45 °,
90°、-45°。
In at least one embodiment, three kinds of angles, i.e., 45 °, 90 °, -45 °, by inner ring R are converted by the angle R knurling tool 3
Angle, the outer ring angle R and Internal and external cycle linking end face carry out annular knurl, and decorative pattern linking angle and size have specific data to provide.
In the optional scheme of the present embodiment, further, the annular knurl parameter of 1 one, the angle shoulder R decorative pattern of ring includes: R
Knurling tool 3 revolution in angle is 30r/min, volume under pressure 0.4-0.5mm.
In the optional scheme of the present embodiment, further, the annular knurl parameter of 1 one, the angle shoulder R decorative pattern of ring further include:
Knurling tool 3 turnning circle in the angle R is 4-6 circle.
The annular knurl parameter of 1 one, the angle shoulder R decorative pattern of ring are as follows: knurling tool 3 revolution in the angle R is 30r/min, volume under pressure 0.4-
Knurling tool 3 turnning circle in the angle 0.5mm, R is 4-6 circle.
The processing technology for the ring shoulder annular knurl being used cooperatively with target that the embodiment of the present invention provides, procedure of processing is such as
Under:
1. the turning of shoulder
Pass through direct 11 outer ring 12 of turning inner ring of shoulder forming cutter and the direct vehicle angulation of end face right angle, process tool angle
It has set.
Ring 1 is clamped in the lathe spindle in rotation.
2. the annular knurl of shoulder
Three kinds of angles (45 °, 90 °, -45 °) are converted by the angle inner ring R, the outer ring angle R and Internal and external cycle rank by the angle R knurling tool 3
Contact surface carries out annular knurl, and being connected angle and size has specific data to provide.
Workpiece surface is rolled out straight grain or reticulate pattern by knurling tool by decorative pattern, which is reticulation patterns.
Sophisticated design R angle square of the present invention cun (0.7 ± 0.25mm and 1.0 ± 0.25mm), finished product is trapezoidal, passes through data pipe
Annular knurl position is controlled, guarantees the problems such as decorative pattern linking is perfect and nothing recklessly spends design of scattered small flowers and plants, increases product bond area, improve ring 1 and use
Service life discharges when reducing using sputtering.
The processing technology of the ring shoulder annular knurl of the invention being used cooperatively with target is illustrated above, still,
The present invention is not limited to above-mentioned specific embodiments can carry out various without departing from the scope of the claims
Deformation or change.The invention includes various changes and modifications within the scope of the claims.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe is described in detail invention referring to foregoing embodiments, those skilled in the art should understand that: it is still
It is possible to modify the technical solutions described in the foregoing embodiments, or some or all of the technical features is carried out
Equivalent replacement；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution various embodiments of the present invention technical side
The range of case.
Claims (7)
1. a kind of processing technology for the ring shoulder annular knurl being used cooperatively with target characterized by comprising
Shoulder turning: the ring shoulder is turned into trapezoidal, passes through the inner ring of the direct turning ring of the angle R forming cutter and end face right angle
Place and outer ring and end face right angle form the angle inner ring R, the outer ring angle R and Internal and external cycle and are connected end face；
Shoulder annular knurl: the angle the inner ring R, the angle the outer ring R and the Internal and external cycle are connected by end face by the angle R knurling tool and carried out
Annular knurl, so that the decorative pattern on the angle the inner ring R, the decorative pattern on the angle the outer ring R and the decorative pattern on Internal and external cycle linking end face
Mutually it is connected；The angle R knurling tool converts multiple angles, it is 45 ° that plane where the angle R knurling tool and the ring is angled,
90°、-45°。
2. the processing technology of the ring shoulder annular knurl according to claim 1 being used cooperatively with target, which is characterized in that institute
Stating shoulder turning includes:
The ring is clamped on the lathe spindle in rotation.
3. the processing technology of the ring shoulder annular knurl according to claim 1 being used cooperatively with target, which is characterized in that institute
The angle ring shoulder R is stated having a size of 0.7 ± 0.25mm.
4. the processing technology of the ring shoulder annular knurl according to claim 1 being used cooperatively with target, which is characterized in that institute
The angle ring shoulder R is stated having a size of 1.0 ± 0.25mm.
5. the processing technology of the ring shoulder annular knurl according to claim 1 being used cooperatively with target, which is characterized in that institute
Stating shoulder annular knurl includes:
The angle the inner ring R, the outer ring angle R and Internal and external cycle linking end face are rolled out into straight grain or reticulate pattern by the angle R knurling tool.
6. the processing technology of the ring shoulder annular knurl according to claim 1 being used cooperatively with target, which is characterized in that institute
It is 30r/min, volume under pressure 0.4- that the annular knurl parameter for stating one, the angle ring shoulder R decorative pattern, which includes: the angle the R knurling tool revolution,
0.5mm。
7. the processing technology of the ring shoulder annular knurl according to claim 6 being used cooperatively with target, which is characterized in that institute
State the annular knurl parameter of one, the angle ring shoulder R decorative pattern further include: the angle the R knurling tool turnning circle is 4-6 circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810951478.0A CN108942110B (en) | 2018-08-21 | 2018-08-21 | The processing technology for the ring shoulder annular knurl being used cooperatively with target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810951478.0A CN108942110B (en) | 2018-08-21 | 2018-08-21 | The processing technology for the ring shoulder annular knurl being used cooperatively with target |
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| Publication Number | Publication Date |
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| CN108942110A CN108942110A (en) | 2018-12-07 |
| CN108942110B true CN108942110B (en) | 2019-11-05 |
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ID=64470927
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810951478.0A Active CN108942110B (en) | 2018-08-21 | 2018-08-21 | The processing technology for the ring shoulder annular knurl being used cooperatively with target |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2875301B2 (en) * | 1989-10-13 | 1999-03-31 | 株式会社日立製作所 | Manufacturing method of pressure transmitter |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101920439B (en) * | 2010-08-20 | 2011-10-26 | 宁夏东方钽业股份有限公司 | Reeling, welding and knurling process for inner and outer surfaces of sputtered tantalum ring |
| CN101920438B (en) * | 2010-08-20 | 2012-01-11 | 宁夏东方钽业股份有限公司 | Coiling machine continuous knurling technique on inner and outer surfaces of sputtering tantalum ring |
| US20120091785A1 (en) * | 2010-10-19 | 2012-04-19 | Lara Sr Ruben Q | Wheel insert for aluminum-alloy wheels |
| CN103567611B (en) * | 2012-07-24 | 2016-05-04 | 宁波江丰电子材料股份有限公司 | The welding method of focusing ring |
| CN103681201B (en) * | 2012-08-30 | 2016-03-09 | 宁波江丰电子材料股份有限公司 | Sputtering ring and manufacture method thereof |
| CN103707002B (en) * | 2012-09-29 | 2016-04-13 | 宁波江丰电子材料股份有限公司 | Focusing ring and forming method thereof |
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2018
- 2018-08-21 CN CN201810951478.0A patent/CN108942110B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2875301B2 (en) * | 1989-10-13 | 1999-03-31 | 株式会社日立製作所 | Manufacturing method of pressure transmitter |
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