CN108941584B - A kind of preparation method of long molybdenum tube sputtering target material - Google Patents
A kind of preparation method of long molybdenum tube sputtering target material Download PDFInfo
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- CN108941584B CN108941584B CN201811042186.1A CN201811042186A CN108941584B CN 108941584 B CN108941584 B CN 108941584B CN 201811042186 A CN201811042186 A CN 201811042186A CN 108941584 B CN108941584 B CN 108941584B
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- Prior art keywords
- molybdenum tube
- long
- molybdenum
- sputtering target
- target material
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 272
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 231
- 239000011733 molybdenum Substances 0.000 title claims abstract description 231
- 239000013077 target material Substances 0.000 title claims abstract description 63
- 238000005477 sputtering target Methods 0.000 title claims abstract description 62
- 238000002360 preparation method Methods 0.000 title claims abstract description 25
- 238000001513 hot isostatic pressing Methods 0.000 claims abstract description 49
- 238000005245 sintering Methods 0.000 claims abstract description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000001257 hydrogen Substances 0.000 claims abstract description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 9
- 238000012797 qualification Methods 0.000 claims abstract description 8
- 238000002156 mixing Methods 0.000 claims abstract description 5
- 238000005452 bending Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 238000000137 annealing Methods 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 13
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- 238000004321 preservation Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 230000006698 induction Effects 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 239000012300 argon atmosphere Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 abstract 1
- 238000003825 pressing Methods 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 238000005304 joining Methods 0.000 description 8
- 238000009770 conventional sintering Methods 0.000 description 6
- 238000003754 machining Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000011324 bead Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 238000005242 forging Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
- B22F3/04—Compacting only by applying fluid pressure, e.g. by cold isostatic pressing [CIP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
- B22F3/15—Hot isostatic pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F5/10—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
- B22F5/106—Tube or ring forms
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
- B22F2003/248—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
- B22F2009/041—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by mechanical alloying, e.g. blending, milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811042186.1A CN108941584B (en) | 2018-09-07 | 2018-09-07 | A kind of preparation method of long molybdenum tube sputtering target material |
Applications Claiming Priority (1)
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CN201811042186.1A CN108941584B (en) | 2018-09-07 | 2018-09-07 | A kind of preparation method of long molybdenum tube sputtering target material |
Publications (2)
Publication Number | Publication Date |
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CN108941584A CN108941584A (en) | 2018-12-07 |
CN108941584B true CN108941584B (en) | 2019-09-03 |
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CN201811042186.1A Active CN108941584B (en) | 2018-09-07 | 2018-09-07 | A kind of preparation method of long molybdenum tube sputtering target material |
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CN (1) | CN108941584B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110000391A (en) * | 2019-02-28 | 2019-07-12 | 株洲硬质合金集团有限公司 | A kind of preparation method of molybdenum tube |
CN111607752B (en) * | 2020-06-03 | 2021-07-13 | 福建阿石创新材料股份有限公司 | Internal stress removing correction method for sputtering target material |
CN112343948B (en) * | 2020-11-05 | 2021-08-06 | 三阳纺织有限公司 | Manufacturing method of mandrel component, mandrel component and textile machine applying mandrel component |
CN114131026A (en) * | 2021-12-08 | 2022-03-04 | 西安瑞福莱钨钼有限公司 | Process for producing molybdenum tube blank by using mould pressing method |
CN115488333B (en) * | 2022-09-27 | 2023-12-29 | 宁波江丰电子材料股份有限公司 | Molybdenum-titanium alloy tube target and preparation method and application thereof |
CN115502403A (en) * | 2022-09-29 | 2022-12-23 | 宁波江丰电子材料股份有限公司 | Preparation method of large-size and high-density molybdenum target |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6417804A (en) * | 1987-07-10 | 1989-01-20 | Kawasaki Steel Co | High density iron series sintered material and its production |
DE10048870C2 (en) * | 2000-10-02 | 2003-01-09 | Xaloy Ag Olten | Housing for plastic, metal powder, ceramic powder or food processing machines and method for producing such a housing |
US7832619B2 (en) * | 2004-02-27 | 2010-11-16 | Howmet Corporation | Method of making sputtering target |
US9555500B2 (en) * | 2013-04-10 | 2017-01-31 | Aktiebolaget Skf | Method of joining two materials by diffusion welding |
CN104708192A (en) * | 2013-12-12 | 2015-06-17 | 有研亿金新材料有限公司 | Diffusion welding method for W-Ti alloy target assembly |
CN105478771B (en) * | 2014-09-15 | 2018-01-05 | 安泰科技股份有限公司 | A kind of manufacture method of inexpensive molybdenum tube target |
CN108000057A (en) * | 2017-10-27 | 2018-05-08 | 包头稀土研究院 | The manufacture method of target material assembly |
CN108468025B (en) * | 2018-02-11 | 2023-08-22 | 东莞市欧莱溅射靶材有限公司 | Hot isostatic pressing treatment method for chromium planar target material |
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2018
- 2018-09-07 CN CN201811042186.1A patent/CN108941584B/en active Active
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CN108941584A (en) | 2018-12-07 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Preparation method of long molybdenum tube sputtering target material Effective date of registration: 20200622 Granted publication date: 20190903 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2020440000149 |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 512026 Yangshan village committee, Xilian Town, Wujiang District, Shaoguan City, Guangdong Province Patentee after: Guangdong Oulai high tech materials Co.,Ltd. Patentee after: DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Address before: 512000 Yangshan Area, Muxi Industrial Park, Wujiang District, Shaoguan City, Guangdong Province Patentee before: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd. Patentee before: DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211227 Granted publication date: 20190903 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2020440000149 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A preparation method of sputtering target for long molybdenum tube Effective date of registration: 20211229 Granted publication date: 20190903 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: Guangdong Oulai high tech materials Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2021980016846 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220311 Granted publication date: 20190903 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: Guangdong Oulai high tech materials Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2021980016846 |