CN108940744B - Coating equipment and coating film abnormality detection method - Google Patents
Coating equipment and coating film abnormality detection method Download PDFInfo
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- CN108940744B CN108940744B CN201811088387.5A CN201811088387A CN108940744B CN 108940744 B CN108940744 B CN 108940744B CN 201811088387 A CN201811088387 A CN 201811088387A CN 108940744 B CN108940744 B CN 108940744B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
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- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
Abstract
The embodiment of the invention discloses coating equipment and a coating film abnormity detection method, wherein the coating equipment comprises: a substrate to be coated and a plurality of liquid outlet units; the substrate to be coated comprises a coating area, the coating area comprises a plurality of sub-coating areas, and the sub-coating areas are sequentially arranged along a first direction; each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each first identification code corresponds to one liquid outlet unit; the liquid outlet unit is used for coating the preset solution into the corresponding sub-coating area. According to the coating equipment provided by the embodiment of the invention, the first identification codes are respectively corresponding to the sub-coating areas, and each first identification code corresponds to one liquid outlet unit, so that each sub-coating area corresponds to one unique liquid outlet unit. Therefore, when the coating film is abnormal, the spraying state of which liquid outlet unit is abnormal can be quickly and accurately determined according to the corresponding relation between the sub-coating area and the liquid outlet unit.
Description
Technical Field
The embodiment of the invention relates to a semiconductor manufacturing technology, in particular to coating equipment and a coating film abnormity detection method.
Background
Polyimide (PI) film is one of the earliest commercial products of Polyimide, since Polyimide has excellent thermal stability, chemical resistance and mechanical properties; and the chemical property is stable, and the flame retardant can be used for retarding flame without adding a flame retardant. Therefore, polyimide films are widely used in the semiconductor field. For example, the polyimide film may be used as a photoresist, a dielectric layer, a buffer layer, a protective layer, or a flexible substrate. Generally, a polyimide film is formed by spraying a polyimide solution onto a substrate through a polyimide spraying machine (or called PI film coating device) and heating and curing the polyimide solution. The PI film coating apparatus occasionally causes abnormality in the spraying state, such as: the PI film is not uniform due to clogging of the liquid outlet unit, which is macroscopically observable by human eyes and is generally called Head Mura. For the abnormal condition, the processing mode is generally as follows: and (4) carrying out detection or weighing again, and treating the liquid outlet unit with abnormal spraying state so as to enable the film surface of each part of the sprayed PI film to be flat and uniform.
However, the above-mentioned processing method is to observe the macroscopic state of the coating film by human eyes, and it cannot be accurately determined which liquid discharge unit is abnormal in the spraying state. Therefore, in practice, only a plurality of liquid outlet units can be selected for detection or weighing. This operation is time consuming and laborious and may not achieve the improved effect, resulting in even more nozzle streaks.
Disclosure of Invention
The embodiment of the invention provides a coating device and a coating film abnormity detection method, which can quickly and accurately judge which liquid outlet unit has abnormity in the spraying state.
An embodiment of the present invention provides a coating apparatus, including:
the substrate to be coated comprises a coating area, the coating area comprises a plurality of sub-coating areas, and the sub-coating areas are sequentially arranged along a first direction;
each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each first identification code corresponds to the unique liquid outlet unit;
the liquid outlet unit is used for coating a preset solution into the sub-coating area corresponding to the preset solution.
In another example, the sub-coating areas are respectively arranged corresponding to the liquid outlet units;
the width of the pattern formed by coating the liquid outlet unit is equal to the width of the sub-coating area corresponding to the liquid outlet unit.
In yet another embodiment, each liquid outlet unit corresponds to a plurality of sub-coating areas;
the width of the pattern formed by coating of the single liquid outlet unit is equal to the sum of the widths of the sub-coating areas corresponding to the single liquid outlet unit.
In still another embodiment, the widths of the sub-coating areas corresponding to the same liquid outlet unit are all equal.
In yet another embodiment, the coating apparatus further comprises a control unit;
the control unit is connected with the liquid outlet units and used for controlling whether the liquid outlet units perform coating operation or not.
In yet another embodiment, the coating apparatus operating process comprises a coating process;
in the coating process, the control unit controls each odd-numbered liquid outlet unit to perform coating operation simultaneously; or,
in the coating process, the control unit controls the even-numbered liquid outlet units to simultaneously perform coating operation.
In yet another embodiment, the coating apparatus further comprises a regulating unit electrically connected with the liquid outlet unit;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit so that the preset solution coated by the liquid outlet unit meets a preset threshold;
wherein the coating parameter comprises a voltage value.
In another embodiment, each liquid outlet unit corresponds to a second identification code; the second identification codes correspond to the liquid outlet units respectively;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code, so that the preset solution coated by the liquid outlet unit meets a preset threshold value.
The embodiment of the present invention further provides a coating apparatus, including:
the coating device comprises a control unit, a substrate to be coated and a plurality of liquid outlet units;
the control unit is connected with the liquid outlet units and is used for controlling whether the liquid outlet units perform coating operation or not;
the substrate to be coated comprises a coating area, the coating area comprises a plurality of sub-coating areas, and the sub-coating areas are sequentially arranged along a first direction;
each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each sub-coating area corresponds to the unique liquid outlet unit;
the liquid outlet unit is used for coating a preset solution into the corresponding sub-coating area;
the adjusting unit is electrically connected with the liquid outlet unit;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit so that the preset solution coated by the liquid outlet unit meets a preset threshold;
wherein the coating parameter comprises a voltage value;
each liquid outlet unit corresponds to a second identification code; the second identification codes correspond to the liquid outlet units respectively;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code, so that the preset solution coated by the liquid outlet unit meets a preset threshold value.
The embodiment of the invention also provides a coating film abnormity detection method, which can be applied to the coating equipment and comprises the following steps:
the liquid outlet unit coats a preset solution required by film forming to one side of the substrate to be coated;
and judging the position of the liquid outlet unit with the abnormality according to the corresponding relation between the sub-coating area and the first identification code and the corresponding relation between the first identification code and the liquid outlet unit.
The coating equipment provided by the embodiment of the invention comprises a coating substrate and a plurality of liquid outlet units, wherein the coating substrate comprises a coating area through arrangement, the coating area comprises a plurality of sub-coating areas, and the sub-coating areas are sequentially arranged along a first direction; each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each first identification code corresponds to one liquid outlet unit. Thus, each sub-coating area corresponds to a unique one of the liquid outlet units. Therefore, when the coating is abnormal, the specific liquid outlet unit with abnormal spraying state can be quickly and accurately determined by distinguishing the sub-coating area in which the nozzle stripes are positioned and according to the corresponding relation between the sub-coating area and the liquid outlet unit. The problem of determine when the liquid unit that spraying state is unusual is specific among the prior art, the operation is wasted time and energy and judge inaccurate is solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief description will be given below of the drawings required for the embodiments or the technical solutions in the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a coating apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a substrate to be coated of a coating apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a substrate to be coated of another coating apparatus provided in an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating the correspondence between the width of a pattern formed by coating and the width of a sub-coating region according to an embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating the correspondence between the width of a pattern formed by another coating and the width of a sub-coating region according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of another coating apparatus provided in an embodiment of the present invention;
FIG. 7 is a schematic diagram of a distribution of patterns formed by coating with a coating apparatus according to an embodiment of the present invention;
FIG. 8 is a schematic view of the distribution of patterns formed by coating with another coating apparatus provided in an embodiment of the present invention;
fig. 9 is a schematic flow chart of a coating film abnormality detection method according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described through embodiments with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic structural diagram of a coating apparatus according to an embodiment of the present invention. Referring to fig. 1, the coating apparatus includes: a substrate 10 to be coated and a plurality of liquid outlet units 20; the substrate to be coated 10 comprises a coating area 101, wherein the coating area 101 comprises a plurality of sub-coating areas 1011, and the sub-coating areas 1011 are sequentially arranged along a first direction X; each sub-coating area 1011 corresponds to a first identification code An (n can be An integer equal to or greater than 1, and is exemplarily shown as a 1-a 11 in fig. 1), the first identification codes An respectively correspond to the sub-coating areas 1011, and each first identification code An corresponds to one dispensing unit 20; the liquid outlet unit 20 is used for coating the preset solution into the corresponding sub-coating area 1011.
The substrate 10 to be coated includes various substrates that can be thin-film coated. The substrate 10 to be coated may be a rigid substrate such as a glass substrate or a silicon wafer substrate, a flexible substrate such as a stainless steel substrate or a polyimide substrate, or the rigid substrate or the flexible substrate having a surface on which some functional film layers have been formed. It will be understood by those skilled in the art that the substrate 10 to be coated may be made of different materials according to different products, and it is obvious that the material of the substrate 10 to be coated includes, but is not limited to, the above-mentioned substrate materials, any material that can be used as a substrate falls within the scope of the present invention, and the material of the substrate 10 to be coated is not limited by the embodiment of the present invention.
Wherein, the liquid outlet unit 20 can contain the preset solution (shown in fig. 1), or the liquid outlet unit 20 is communicated with a component (not shown in fig. 1) containing the preset solution through an intermediate pipeline. Under the action of gravity and/or pressure, the pre-set solution flows out or is sprayed out from the liquid outlet unit 20 and is coated into the sub-coating area 1011 of the substrate 10 to be coated.
For example, when the coating apparatus is a spraying device, the liquid outlet unit 20 may be a nozzle of the spraying device.
It should be noted that fig. 1 only shows that the cross-sectional shape of the liquid outlet unit 20 is a pentagon, which is only an exemplary illustration and is not a limitation of the liquid outlet unit 20 provided by the embodiment of the present invention. In other embodiments, the three-dimensional shape of the liquid outlet unit 20 may be set according to the actual requirement of the coating apparatus, which is not limited in the embodiment of the present invention.
The coating area 101 is an area where a pre-set solution is to be coated.
Illustratively, the coating region 101 is shown in fig. 1 as being located at the center of the substrate 10 to be coated, and the substrate 10 to be coated further includes a non-coating region surrounding the coating region 101, which is merely illustrative and not limiting. In other embodiments, the position of the coating region 10 on the substrate 10 to be coated and the relative position of the coating region 10 to the non-coating region can also be set according to the actual requirements of the coating equipment and/or the substrate 10 to be coated.
Illustratively, the coating zone 101 shown in fig. 1 includes 11 sub-coating zones 1011, and each sub-coating zone corresponds to a first identification code An. Along first direction X, each sub-coating area 1011 is arranged in order, and its corresponding first identification code An is: a1, a2, A3, a4, a5, a6, a7, A8, a9, a10, a 11. Meanwhile, fig. 1 shows a plurality of dispensing units 20, and each first identification code An corresponds to a unique dispensing unit 20. Thus, each sub-coating area 1011 corresponds to only one liquid outlet unit 20.
It should be noted that, fig. 1 only shows the number of the sub-coating areas 1011 as 11 by way of example, and the number of the liquid outlet units 20 as 11, that is, the sub-coating areas 1011 correspond to the liquid outlet units 20 one by one, which is only an example and is not limited. In other embodiments, the number of the sub-coating areas 1011 and the number of the liquid outlet units 20 may be set according to the actual requirements of the coating apparatus; meanwhile, each liquid outlet unit 20 may correspond to 1 sub-coating area 1011, and one liquid outlet unit 20 may also correspond to a plurality of sub-coating areas 1011, which is not limited in the embodiment of the present invention.
In addition, it should be noted that fig. 1 only exemplarily shows that the liquid outlet unit 20 is located above the substrate 10 to be coated, and the first direction X is a direction parallel to one side edge of the substrate 10 to be coated, which are merely exemplary and not limiting of the coating apparatus provided by the embodiment of the present invention. In other embodiments, the relative position relationship between the liquid outlet unit 20 and the substrate 10 to be coated in the space and the size of the angle between the first direction X and the side edge of the substrate 10 to be coated may be set according to the actual requirement of the coating apparatus, which is not limited by the embodiment of the present invention.
According to the coating equipment provided by the embodiment of the invention, the substrate 10 to be coated comprises the coating area 10, the coating area 10 comprises a plurality of sub-coating areas 1011, and the sub-coating areas 1011 are sequentially arranged along the first direction X; each sub-coating area 1011 corresponds to a first identification code An, the first identification code An corresponds to the sub-coating area, and each first identification code An corresponds to a unique liquid outlet unit 20. Thus, each sub-coating area 1011 corresponds to a unique liquid outlet unit 20. Therefore, when the coating film is abnormal, the sub-coating area 1011 in which the nozzle stripe is located can be distinguished, and the specific liquid outlet unit 20 in which the abnormal coating state occurs can be quickly and accurately determined according to the corresponding relationship between the sub-coating area 1011 and the liquid outlet unit 20.
In another embodiment, fig. 2 is a schematic structural diagram of a substrate to be coated of a coating apparatus according to an embodiment of the present invention. Referring to fig. 1 and 2, the sub-coating areas 1011 are disposed corresponding to the liquid outlet units 20, respectively; the width W of the pattern formed by coating the liquid outlet unit 20 is equal to the width a of the corresponding sub-coating area 1011.
The liquid outlet units 20 may be arranged in a direction parallel to one side direction of the substrate 10 to be coated, and when the liquid outlet units 20 and the substrate 10 to be coated move relatively, the liquid outlet units 20 may coat the corresponding sub-coating regions 1011 in the substrate 10 to be coated.
For example, the liquid outlet unit 20 may be arranged along the first direction X, and when the liquid outlet unit 20 moves along a direction perpendicular to the first direction X and/or the substrate to be coated moves along a direction perpendicular to the first direction X, the liquid outlet unit 20 forms a coating pattern in each sub-coating region 1011 of the substrate 10 to be coated.
By arranging the sub-coating areas 1011 and the liquid outlet units 20 to be respectively in one-to-one correspondence, and the width W of the pattern formed by coating the liquid outlet units 20 is equal to the width of the corresponding sub-coating area 1011, the liquid outlet units 20 can be coated simultaneously, and a complete coating pattern can be formed on the surface of the substrate 10 to be coated; meanwhile, when the coating film is abnormal, the sub-coating area 1011 in which the nozzle stripe is located is distinguished, and the specific liquid outlet unit 20 in which the abnormal coating state occurs is quickly and accurately determined according to the one-to-one correspondence relationship between the sub-coating area 1011 and the liquid outlet unit 20.
It should be noted that fig. 2 only exemplarily shows that the number of the sub-coating areas 1011 is 60, that is, the number of the corresponding first identification codes An (where n is a positive integer having a value of 1 to 60) is 60, which is merely An exemplary illustration and is not a limitation. In other embodiments, the number of the sub-coating regions 1011 and the corresponding first identifiers An can be set according to the actual requirement of the coating apparatus, which is not limited in the embodiments of the invention.
In yet another embodiment, fig. 3 is a schematic structural diagram of a substrate to be coated of another coating apparatus provided in an embodiment of the present invention. Referring to fig. 3, each liquid outlet unit corresponds to a plurality of sub-coating regions 1011; the width of the pattern formed by coating of the single liquid outlet unit 20 is equal to the sum of the widths of the corresponding sub-coating areas.
Wherein, different sub-coating areas 1011 corresponding to the same liquid outlet unit respectively correspond to different liquid outlet positions of the liquid outlet unit.
For example, in fig. 3, the first identification codes corresponding to the respective sub-coating areas 1011 are grouped, where the group of each group of the first identification codes is shown by Am (where m is a positive integer from 1 to 60), and each group of the first identification codes Am includes 8 first identification codes AmBh (where m is a positive integer from 1 to 60, and h is a positive integer from 1 to 8). Illustratively, the second group A2 includes 8 first identification codes A2B 1-A2B 8, and the 8 first identification codes respectively correspond to different dispensing positions of the same dispensing unit. Similarly, the 56 th group a56 includes 8 first identification codes a56B 1-a 56B8, and the 8 first identification codes can correspond to different dispensing positions of another dispensing unit. Similarly, the other groups of first identification codes respectively correspond to different positions of the liquid outlet unit corresponding to the other groups of first identification codes.
When the coating film is abnormal, the specific liquid outlet position of the liquid outlet unit with abnormal spraying state can be quickly and accurately determined according to the position of the sub-coating area 1011 corresponding to the spray head stripe, the first identification code AmBh corresponding to the position of the sub-coating area 1011 and the corresponding relation between the first identification code AmBh and different positions of the liquid outlet unit, and the specific liquid outlet position of the liquid outlet unit with abnormal spraying state can be quickly and accurately determined.
It should be noted that fig. 3 only shows that the number of the sub-coating areas 1011 is 480, which may be divided into 60 groups, and each group has 8, that is, each liquid outlet unit corresponds to 8 sub-coating areas, which is only an exemplary illustration and is not a limitation of the coating apparatus provided by the embodiment of the present invention. In other embodiments, the number of the sub-coating areas corresponding to each liquid outlet unit may be set according to actual requirements of the coating apparatus, and the number of the sub-coating areas corresponding to different liquid outlet units may be the same or different, which is not limited in this embodiment of the present invention.
Exemplarily, fig. 4 is a schematic diagram of a corresponding relationship between a width of a pattern formed by coating and a width of a sub-coating region according to an embodiment of the present invention. Referring to fig. 4, the number of the sub-coating areas 1011 in the group is 10, and the widths of the sub-coating areas 1011 are not equal, where the width of the first 9 sub-coating areas 1011 is a ', the width of the 10 th sub-coating area 1011 is B', and the width of the pattern formed by the liquid discharge unit coating is W. The width W of the pattern formed by coating the liquid outlet unit is equal to the sum of the widths of the sub-coating areas 1011 in the group, that is, W is a '× 9+ B'.
Illustratively, a 'may have a value of 10mm, B' may have a value of 15mm, and in this case, W may have a value of 105 mm. Or the value of A 'can be 10mm, the value of B' can be 5mm, and in this case, the value of W is 95 mm. This is merely an illustration and not a limitation.
It should be noted that fig. 4 only shows the number of the sub-coating regions 1011 in the group as 10, and the width of the last sub-coating region 1011 is greater than the width of the other sub-coating regions 1011, which is only an exemplary illustration and not a limitation. In other embodiments, the number of the sub-coating regions 1011 in each group and the width of each sub-coating region 1011 may be set according to the actual requirements of the coating equipment, which is not limited by the embodiment of the present invention.
Thus, each liquid outlet unit is arranged to correspond to a plurality of sub-coating areas 1011; the width of the pattern formed by coating of a single liquid outlet unit 20 is equal to the sum of the widths of the corresponding sub-coating areas, so that the liquid outlet units can be coated simultaneously to form a complete coating pattern on the surface of the substrate 10 to be coated; meanwhile, when the coating film is abnormal, the specific liquid outlet unit with abnormal spraying state can be quickly and accurately determined according to the position of the sub-coating area 1011 corresponding to the nozzle strip and the corresponding relationship between the sub-coating area 1011 and the liquid outlet unit, and the specific liquid outlet position with abnormal spraying state of the liquid outlet unit with abnormal spraying state can be quickly and accurately determined.
In yet another embodiment, fig. 5 is a schematic diagram illustrating the correspondence between the width of a pattern formed by another coating and the width of a sub-coating region according to an embodiment of the present invention. Referring to fig. 5, the sub-coating areas 1011 corresponding to the same liquid outlet unit have the same width.
Illustratively, the number of the sub-coating areas 1011 in the group is 10, the width of each sub-coating area 1011 is equal, and is indicated as a, and the width of the pattern formed by coating by the liquid outlet unit is W, then W is a 10.
Illustratively, the value of A may be 10mm, and the value of W may be 100 mm. This is merely an illustration and not a limitation.
It should be noted that fig. 5 only shows an exemplary group of 10 neutron coating areas 1011, which is only an exemplary illustration and is not a limitation.
Therefore, the widths of the sub-coating areas 1011 corresponding to the same liquid outlet unit are equal, so that the corresponding relation between the sub-coating areas 1011 and different liquid outlet positions of the same liquid outlet unit can be simplified, and the specific liquid outlet position with abnormal spraying state in the liquid outlet unit with abnormal spraying state can be determined more quickly and accurately when a coating film is abnormal.
Furthermore, it should be noted that fig. 4 and 5 each only exemplarily show that the coated region is the third sub-coating region 1011 in the first direction X in the group, which is merely an illustration and is not a limitation.
In yet another embodiment, fig. 6 is a schematic structural diagram of another coating apparatus provided in an embodiment of the present invention. Referring to fig. 6, the coating apparatus may further include a control unit 30; the control unit 30 is connected with the liquid outlet units 20 and used for controlling whether the liquid outlet units 20 perform coating operation or not.
Wherein, the control unit 30 can control each liquid outlet unit 20 to individually perform the coating operation.
Illustratively, the control unit 30 stores a parameter list, which includes spraying parameters related to the spraying status of the liquid outlet unit 20. For example, by setting the parameters in the parameter list, the corresponding liquid outlet unit 20 may be controlled to perform the coating operation or not to perform the coating operation.
For example, the control unit 30 may control the liquid outlet unit 20 by a button switch, a switch displayed on an operation interface, or by directly changing parameters in a control program, and the manner of implementing the control is not limited in the embodiment of the present invention.
By setting the control unit 30 to control whether each liquid outlet unit 20 performs coating operation, the liquid outlet units 20 which need coating operation can be set according to different coating requirements, and therefore flexible control of the coating equipment is achieved.
In yet another embodiment, the coating apparatus operating process comprises a coating process; in the coating process, the control unit 30 controls each odd-numbered liquid outlet unit 20 to perform the coating operation simultaneously; alternatively, the control unit 30 controls the even-numbered dispensing units 20 to perform the coating operation simultaneously during the coating process.
Exemplarily, fig. 7 is a schematic distribution diagram of a pattern formed by coating with a coating apparatus according to an embodiment of the present invention. Referring to fig. 7, this corresponds to the case where the sub-coating areas 1011 correspond to the liquid outlet units one to one. When the even liquid outlet units carry out coating operation at the same time, coating patterns as shown in fig. 7 are formed, namely, the coating patterns are formed in the even sub-coating areas. Illustratively, a coating pattern is formed in each sub-coating region 1011 corresponding to the even number of n in the first identification code An (where n is a positive integer from 1 to 60), so that the long strip-shaped coating patterns distributed at intervals can be formed.
Illustratively, fig. 8 is a schematic distribution diagram of patterns formed by coating with another coating apparatus provided in the embodiment of the present invention. Referring to fig. 8, this corresponds to the case where the sub-coating areas 1011 correspond to the liquid outlet units one to one. The coating pattern may be formed in each sub-coating area 1011 corresponding to a multiple of n of the first identification code (where n is a positive integer of 1 to 60) which is a multiple of 3, so that the strip-shaped coating patterns distributed at intervals may be formed. At this time, the width of the space between the adjacent coating patterns is equal to 2 times the width of the elongated coating pattern.
It should be noted that fig. 7 and 8 only exemplarily show the coating patterns formed in each sub-coating region 1011 of the substrate 10 to be coated when the value of n corresponding to the first identification code An (where the value of n is a positive integer from 1 to 60) is An even number or a multiple of 3. This is merely an illustration and not a limitation. In other embodiments, the position of the liquid outlet unit for performing the coating operation may be set according to the actual requirement of the coating apparatus, which is not limited in the embodiment of the present invention.
Therefore, the liquid outlet units distributed at intervals are controlled, the preset solution is coated in the sub-coating areas distributed at intervals, and light and dark stripes can be formed, so that the liquid outlet units with abnormal spraying states can be found in time, and the specific liquid outlet unit with the abnormal spraying states can be quickly and accurately determined.
In yet another embodiment, with continued reference to fig. 6, the coating apparatus may further include a regulating unit 40, the regulating unit 40 being electrically connected with the liquid outlet unit 20; the adjusting unit 40 is used for adjusting the coating parameters of the liquid outlet unit 20 so that the preset solution coated by the liquid outlet unit 20 meets a preset threshold; the coating parameter 20 includes a voltage value.
Wherein, the coating effect of the pattern formed by coating can be changed by adjusting the voltage value of the liquid outlet unit 20.
For example, a Polyimide (PI) film is coated on a glass substrate. The thickness of the PI film can be determined according to the brightness of the PI film on the glass substrate, if the PI film in a certain sub-coating area 1011 is bright, the thickness of the PI film in the sub-coating area 1011 is thin, and the thickness of the PI film in the sub-coating area 1011 can be increased by increasing the voltage value of the liquid outlet unit 20 corresponding to the sub-coating area 1011; if the PI film in a sub-coating area 1011 is darker, it indicates that the PI film in the sub-coating area 1011 is thicker, and the PI film in the sub-coating area 1011 can be thinner by reducing the voltage value of the liquid outlet unit 20 corresponding to the sub-coating area 1011.
Therefore, after the specific position of the liquid outlet unit 20 with the abnormal condition is determined, the coating parameters of the liquid outlet unit 20 are adjusted through the adjusting unit 40, the abnormal condition is improved, and the abnormal condition of the coating film is conveniently and quickly improved.
The above description is given by way of example only, but not by way of limitation, of coating a PI film on a glass substrate and detecting whether or not a coating film abnormality occurs based on the degree of brightness of the PI film. In other embodiments, the material of the substrate to be coated, the material of the coated film and the detection method used in the coating film abnormality detection method may be set according to the actual requirements of the coating equipment, which is not limited by the embodiment of the present invention.
It should be noted that fig. 6 only illustrates the control unit 30 and the adjusting unit 40 for controlling the liquid outlet unit 20 independently, which is only an exemplary illustration and not a limitation. In other embodiments, there may also be signal transmission between the control unit 30 and the adjusting unit 40, and the two cooperate to control the liquid outlet unit 20, which is not limited in this embodiment of the present invention.
In addition, it should be noted that fig. 1 to 8 only exemplarily show that the shape of the sub-coating area 1011 is a long strip, which is merely an exemplary illustration and is not a limitation. In other embodiments, the shape of the sub-coating region 1011 may be set according to the actual requirements of the coating apparatus, which is not limited by the embodiment of the present invention. The substrate 10 to be coated is shown in fig. 1-3, 6-8 as being rectangular in shape by way of example only, and not by way of limitation. In other embodiments, the shape of the substrate 10 to be coated may be set according to actual requirements, which is not limited by the embodiment of the present invention.
In another embodiment, each liquid outlet unit corresponds to a second identification code; the second identification codes correspond to the liquid outlet units one by one; the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code so that the preset solution coated by the liquid outlet unit meets a preset threshold value.
For example, both the first identification code and the second identification code may be added to the parameter list of the control unit. At this time, when editing the parameter list, the substrate to be coated and the coating area (each sub-coating area) therein can be added to the parameter list after being scaled down by a certain multiple, and a first identification code corresponding to each sub-coating area is added; meanwhile, the liquid outlet units and the spatial distribution thereof can be proportionally reduced by a certain multiple and then added into the parameter list, and a second identification code corresponding to each liquid outlet unit is added.
Wherein the second identification codes correspond to the liquid outlet units one by one, the first identification codes correspond to the sub-coating areas one by one, because the second identification code corresponds to one or more sub-coating areas, the second identification code corresponds to one or more first identification codes, and the preset solution meets the preset threshold value by adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code, the coating condition of the corresponding sub-coating area can be adjusted or improved, the detection and improvement of coating abnormity are realized, the detection and improvement process can be controlled based on digitization (the corresponding relation between the second identification code and the first identification code), the control process is simple, the response speed is high, through the arrangement of the coating film abnormity detection unit and the cooperative work of the regulation unit, the self-feedback detection and regulation process of the coating equipment can be realized, and thus, the automatic control is realized.
Based on the same inventive concept, the embodiment of the invention also provides a coating film abnormity detection method. The coating film abnormality detection method can be applied to the coating apparatus provided in the above embodiment. The method is not explained in detail with reference to the explanation of the coating apparatus in the above embodiment, and the explanation is omitted.
Exemplarily, fig. 9 is a schematic flow chart of a method for detecting coating film abnormality according to an embodiment of the present invention. Referring to fig. 9, the method includes:
and S01, coating the preset solution required by film forming on one side of the substrate to be coated by a liquid outlet unit.
Referring to fig. 1, the liquid outlet unit 20 applies a pre-set solution to one side of a substrate 10 to be coated.
The substrate 10 to be coated comprises a coating area 101, wherein the coating area 101 comprises a plurality of sub-coating areas 1011, and the sub-coating areas 1011 are sequentially arranged along a first direction X; each sub-coating area 1011 corresponds to a first identification code An (n may be An integer equal to or greater than 1, exemplarily shown as a 1-a 11 in fig. 1), the first identification codes An correspond to the sub-coating areas 1011 one by one, and each first identification code An corresponds to one dispensing unit 20.
S02, determining the position of the liquid outlet unit with abnormality according to the corresponding relationship between the sub-coating area and the first identification code and the corresponding relationship between the first identification code and the liquid outlet unit.
With reference to fig. 1, each sub-coating area 1011 corresponds to a first identification code An, the first identification codes An correspond to the sub-coating areas, and each first identification code An corresponds to one dispensing unit 20. Thus, each sub-coating area 1011 corresponds to a unique liquid outlet unit 20. Therefore, when the coating film is abnormal, the specific position of the liquid outlet unit 20 with the abnormality can be quickly and accurately determined according to the corresponding relation between the sub-coating area 1011 and the liquid outlet unit 20.
The coating film abnormality detection method provided by the embodiment of the invention is applied to the coating apparatus provided by the above embodiment, the coating apparatus includes a coating substrate and a plurality of liquid outlet units, the coating substrate includes a coating area by setting, the coating area includes a plurality of sub-coating areas, and the sub-coating areas are sequentially arranged along a first direction; each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each first identification code corresponds to a unique liquid outlet unit. Thus, each sub-coating area corresponds to a unique liquid outlet unit. Therefore, when the coating is abnormal, the specific liquid outlet unit with abnormal spraying state can be quickly and accurately determined by distinguishing the sub-coating area in which the nozzle stripes are positioned and according to the corresponding relation between the sub-coating area and the liquid outlet unit. The problem of determine when the liquid unit that spraying state is unusual is specific among the prior art, the operation is wasted time and energy and judge inaccurate is solved.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (8)
1. A coating apparatus, comprising: the coating equipment is used for coating a polyimide film on the whole surface of the substrate to be coated;
the substrate to be coated comprises a coating area, the coating area comprises a plurality of sub-coating areas, the sub-coating areas are sequentially arranged along a first direction and extend along a second direction, and the first direction is crossed with the second direction;
each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each first identification code corresponds to one liquid outlet unit;
the liquid outlet unit is used for coating a preset solution into the corresponding sub-coating area;
the liquid outlet device is characterized by also comprising an adjusting unit, wherein the adjusting unit is electrically connected with the liquid outlet units, and each liquid outlet unit corresponds to a second identification code; the second identification codes correspond to the liquid outlet units respectively;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code so as to enable the preset solution coated by the liquid outlet unit to meet a preset threshold value;
wherein the coating parameter comprises a voltage value.
2. The coating apparatus according to claim 1, wherein the sub-coating regions are respectively disposed corresponding to the liquid outlet units;
the width of the pattern formed by coating the liquid outlet unit is equal to the width of the sub-coating area corresponding to the liquid outlet unit.
3. The coating apparatus as claimed in claim 1, wherein each of said liquid outlet units corresponds to a plurality of said sub-coating zones;
the width of the pattern formed by coating of the single liquid outlet unit is equal to the sum of the widths of the sub-coating areas corresponding to the single liquid outlet unit.
4. The coating apparatus as claimed in claim 3, wherein each of said sub-coating regions corresponding to the same liquid outlet unit has an equal width.
5. The coating apparatus according to claim 1, further comprising a control unit;
the control unit is connected with the liquid outlet units and used for controlling whether the liquid outlet units perform coating operation or not.
6. The coating apparatus of claim 5 wherein said coating apparatus operating process comprises a coating process;
in the coating process, the control unit controls each odd-numbered liquid outlet unit to perform coating operation simultaneously; or,
in the coating process, the control unit controls the even-numbered liquid outlet units to simultaneously perform coating operation.
7. A coating apparatus, comprising: the coating equipment is used for coating a polyimide film on the whole surface of the substrate to be coated;
the control unit is connected with the liquid outlet units and is used for controlling whether the liquid outlet units perform coating operation or not;
the substrate to be coated comprises a coating area, the coating area comprises a plurality of sub-coating areas, the sub-coating areas are sequentially arranged along a first direction and extend along a second direction, and the first direction is crossed with the second direction;
each sub-coating area corresponds to a first identification code, the first identification codes correspond to the sub-coating areas respectively, and each sub-coating area corresponds to one liquid outlet unit;
the liquid outlet unit is used for coating a preset solution into the corresponding sub-coating area;
the adjusting unit is electrically connected with the liquid outlet unit;
each liquid outlet unit corresponds to a second identification code; the second identification codes correspond to the liquid outlet units respectively;
the adjusting unit is used for adjusting the coating parameters of the liquid outlet unit based on the corresponding relation between the second identification code and the first identification code so as to enable the preset solution coated by the liquid outlet unit to meet a preset threshold value;
wherein the coating parameter comprises a voltage value.
8. A method of detecting coating film abnormality, which is carried out by the coating apparatus according to any one of claims 1 to 6, comprising:
the liquid outlet unit coats a preset solution required by film forming to one side of the substrate to be coated;
and judging the position of the liquid outlet unit with the abnormality according to the corresponding relation between the sub-coating area and the first identification code and the corresponding relation between the first identification code and the liquid outlet unit.
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| KR20150106197A (en) * | 2014-03-11 | 2015-09-21 | 에이피시스템 주식회사 | Liquid ejection apparatus |
| CN207042733U (en) * | 2017-07-13 | 2018-02-27 | 广东沛达复合材料有限公司 | Coating machine apparatus for coating |
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