CN108896213B - Stress sensor based on porous conductive elastomer and manufacturing method thereof - Google Patents

Stress sensor based on porous conductive elastomer and manufacturing method thereof Download PDF

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CN108896213B
CN108896213B CN201810377273.6A CN201810377273A CN108896213B CN 108896213 B CN108896213 B CN 108896213B CN 201810377273 A CN201810377273 A CN 201810377273A CN 108896213 B CN108896213 B CN 108896213B
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pdms
cnt
stress sensor
conductive elastomer
planar electrode
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CN108896213A (en
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张海霞
宋宇
陈号天
缪立明
程晓亮
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Beijing Yuanrou Electronics Co ltd
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Peking University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
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Abstract

The invention provides a stress sensor based on a porous conductive elastomer and a manufacturing method thereof. The stress sensor includes: the stress sensor comprises a planar electrode (1), a conductive elastic body (2) with a porous structure and a planar electrode (3), wherein the planar electrode (1) is connected with the upper surface of the conductive elastic body (2) in a sticking mode, the planar electrode (3) is connected with the lower surface of the conductive elastic body (2) in a sticking mode, and the planar electrode (1) and the planar electrode (3) are used as signal output ends of the stress sensor. The stress sensor based on the porous conductive elastomer can accurately respond to external stress strain through the change of the resistance, and has the advantages of high stability, high reliability and the like. Meanwhile, the micro-stress sensor has good mechanical and electrical properties, and key parameters such as sensitivity and the like of the stress sensor can be regulated, controlled and optimized by adjusting the mass fraction, the pore size and the porosity among the component proportions, so that the aim of accurately identifying external micro-stress is fulfilled.

Description

Stress sensor based on porous conductive elastomer and manufacturing method thereof
Technical Field
The invention relates to the field of signal sensing, wearable and health monitoring, in particular to a stress sensor based on a porous conductive elastomer and a manufacturing method thereof.
Background
With the rapid development of wearable electronics and portable intelligent systems, various flexible stress sensing devices are receiving more and more attention and are applied to various aspects of health monitoring, human-computer interaction and safety communication. The existing stress sensor can be classified into various categories such as capacitance type, piezoresistive type, piezoelectric type and the like according to different principles, and can stably identify and sense external strain. The piezoresistive stress sensor for converting external pressure into a resistance signal adopts a specific high-sensitivity structure and is matched with a functional material with excellent conductivity, has the advantages of low manufacturing cost, wide detection stress range, simple preparation process, simple and reliable structure and the like, and is widely applied to the fields of electronic skin, array positioning, track identification and the like.
Many research groups have conducted extensive research on different piezoresistive working principle based stress sensors. However, the sensitivity of these stress sensors using polymer materials as sensing materials is usually not high, and the sensing stability is poor in a low strain range, which limits further applications in wearable fields to some extent. Recently, a novel stress sensor adopting porous sponge and conductive material is deeply researched, and by dripping active substances on a commercial sponge framework, a porous structure is deformed under the condition of applying external stress, so that the resistance of a device is correspondingly changed, and stable resistance response is generated. However, this separate processing approach results in lower device stability and lower controllability for the porous structure, limiting the possibility of further optimization of the device.
Disclosure of Invention
Embodiments of the present invention provide a stress sensor based on a porous conductive elastomer and a method for manufacturing the same to overcome the problems of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme.
According to one aspect of the present invention, there is provided a porous conductive elastomer based stress sensor comprising:
planar electrode (1), electrically conductive elastomer (2) and planar electrode (3) that have porous structure, planar electrode (1) with the last surface paste of porous electrically conductive elastomer (2) is connected, planar electrode (3) with the lower surface paste of porous electrically conductive elastomer (2) is connected, planar electrode (1) and planar electrode (3) are as stress sensor's signal output part.
Further, the conductive elastomer (2) comprises a mixture of a polymer and a conductive material, wherein the polymer comprises polydimethylsiloxane or polyaniline, and the conductive material comprises carbon nanotubes or ethylene dioxythiophene monomers.
Further, the planar electrode (1) and the planar electrode (3) are electrodes with flexible characteristics.
Further, the porous structure is induced by adding particles that are readily soluble in water in a mold filled with the cured mixture.
According to one aspect of the invention, a method for manufacturing a stress sensor based on a porous conductive elastomer is provided, and the method comprises the following steps:
mixing CNT and PDMS base solution by weighing, and adding the mixture into toluene to obtain a toluene solution;
performing magnetic auxiliary stirring on the toluene solution to enable the CNT and the PDMS to be completely dissolved in the toluene, so as to obtain the toluene solution with uniformly dispersed CNT-PDMS;
adding a crosslinking agent of PDMS and powdered sugar particles into a toluene solution with uniformly dispersed CNT-PDMS, and performing magnetic auxiliary stirring on the toluene solution again to volatilize toluene so as to obtain a CNT-PDMS-powdered sugar mixture;
filling the CNT-PDMS-powdered sugar mixture into a mould, and reacting and curing the base solution of PDMS and a cross-linking agent in a heating and drying way;
taking out the completely cured mixture from the mold, putting the mixture into a beaker filled with hot water, and dissolving sugar powder to obtain the CNT-PDMS elastomer with a porous structure;
and taking the CNT-PDMS elastomer with the porous structure out of the beaker in a constant-temperature drying mode, and respectively adhering and connecting a layer of planar electrode on the upper surface and the lower surface of the CNT-PDMS elastomer to obtain the stress sensor based on the porous conductive elastomer.
Further, the method for preparing the nano carbon tube by weighing and mixing the CNT and the base solution of PDMS into toluene to obtain a toluene solution further comprises the following steps:
the mass of the CNT is 70-350mg, the mass of the PDMS base liquid is 1-5g, and the volume of the toluene is 5-25 ml.
Further, the method for adding the crosslinking agent of the PDMS and the sugar powder particles into the toluene solution with the CNT-PDMS uniformly dispersed by weighing also comprises the following steps:
the mass of the PDMS cross-linking agent is 100-500mg, the mass of the powdered sugar is 5-25g, and the diameter size is 10-200 μm.
Further, the filling of the CNT-PDMS-sugar powder mixture into a mold further includes:
the area of the die is 0.25-25cm 2The depth of the mould is 0.1-0.5 cm.
Further, the method comprises the steps of taking the completely cured mixture out of the mold, putting the mixture into a beaker filled with hot water, and dissolving sugar powder to obtain the CNT-PDMS elastomer with a porous structure, and further comprises the following steps:
the temperature of hot water in the beaker is 75 ℃, the volume of the hot water is 50-250ml, and the dissolving time of the powdered sugar is 4 hours.
Further, the method of heating and drying makes the base solution of PDMS react with the cross-linking agent for curing, and also includes;
the drying temperature in this step is 70 ℃, and the single drying time is 3 hours.
According to the technical scheme provided by the embodiment of the invention, the stress sensor based on the porous conductive elastomer can accurately respond to the external stress strain through the change of the resistance, and has the advantages of high stability, high reliability and the like. Meanwhile, the micro-stress sensor has good mechanical and electrical properties, and key parameters such as sensitivity and the like of the stress sensor can be regulated, controlled and optimized by adjusting the mass fraction, the pore size and the porosity among the component proportions, so that the aim of accurately identifying external micro-stress is fulfilled.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a stress sensor according to an embodiment of the present invention.
Fig. 2 is a scanning electron micrograph of a cellular elastomer structure according to an embodiment of the present invention.
Fig. 3 is a scanning electron micrograph of a CNT conductive network according to an embodiment of the present invention.
Fig. 4 is a waveform diagram of resistance response of a stress sensor under different stresses according to an embodiment of the present invention.
Fig. 5 is a waveform diagram of resistance responses of a stress sensor according to an embodiment of the present invention when the stress sensor is placed on a wrist under different bending conditions of the wrist.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or coupled. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
For the convenience of understanding the embodiments of the present invention, the following description will be further explained by taking several specific embodiments as examples in conjunction with the drawings, and the embodiments are not to be construed as limiting the embodiments of the present invention.
Example one
Aiming at the problems of low sensitivity, poor stability and the like of the existing stress sensor, the embodiment of the invention designs a novel stress sensor with a porous structure, combines the excellent mechanical property of the porous structure with the advantage of high conductivity of an elastic body by directly preparing a conductive elastic body with a good porous structure, obtains the stress sensor with high sensitivity and wide working range, and realizes stable response to external stress strain.
The embodiment of the invention provides a stress sensor based on a porous conductive elastomer, the structure of the stress sensor is shown in figure 1, and the stress sensor comprises: the planar electrode 1 is provided with a porous conductive elastomer 2 and a planar electrode 3, wherein the planar electrode 1 is connected with the upper surface of the porous conductive elastomer 2 in a sticking way, and the planar electrode 3 is connected with the lower surface of the porous conductive elastomer 2 in a sticking way. The porous conductive elastomer 2 is a mixture having good electrical conductivity, such as a mixture of a polymer such as Polydimethylsiloxane (PDMS) or Polyaniline (PANI) and a conductive material such as Carbon Nanotube (CNT) or 3, 4-ethylenedioxythiophene monomer (PEDOT).
The planar electrodes 1 and 3 are electrodes with flexible characteristics, such as commercial Indium Tin Oxide (ITO) electrodes.
The porous structure is induced by adding water-soluble particles, including small size-adjustable particles such as sugars, salts, etc., to a mold filled with the solidified mixture.
Example two
The embodiment of the invention also provides a stress sensor manufacturing method based on the porous conductive elastomer, which comprises the following steps:
1) mixing CNT and PDMS base solution by weighing, and adding the mixture into toluene to obtain a toluene solution;
the mass of the CNT in the step is 70-350mg, the mass of the PDMS base solution is 1-5g, and the volume of the toluene is 5-25 ml;
2) through a magnetic auxiliary stirring method, the toluene solution is stirred at a high speed under the assistance of a magnetic auxiliary stirrer, so that the CNT is fully contacted with the PDMS, and finally the CNT and the PDMS are completely dissolved in the toluene, and the toluene solution with uniformly dispersed CNT-PDMS is obtained;
the temperature of the magnetic auxiliary stirring in the step is normal temperature, and the stirring time is 4 hours.
3) Adding a crosslinking agent of PDMS and sugar powder particles into a toluene solution with uniformly dispersed CNT-PDMS by weighing;
the mass of the PDMS cross-linking agent is 100-500mg, the mass of the powdered sugar is 5-25g, and the diameter size is 10-200 μm.
4) Gradually volatilizing toluene in the process of stirring the toluene solution at a high speed by a magnetic auxiliary stirring method to obtain a CNT-PDMS-powdered sugar mixture;
the temperature of the magnetic auxiliary stirring in the step is normal temperature, and the stirring time is 1 hour.
5) After the toluene is volatilized, filling the CNT-PDMS-powdered sugar mixture into a designed mould, and reacting and curing the base solution of the PDMS and the cross-linking agent in a heating and drying mode;
the area of the die in the step is 0.25-25cm 2The depth of the mould is 0.1-0.5cm, the drying temperature is 70 ℃, and the single drying time is 3 hours.
The grinding tool can be: an acrylic plate, an aluminum alloy plate or a resin plate, from which a square hole is removed in the middle, and which is sized as described above, is used as a mold.
6) Taking out the completely cured mixture from the mold, putting the mixture into a beaker filled with hot water, and gradually dissolving sugar powder to obtain the CNT-PDMS elastomer with the porous structure;
the temperature of hot water in the beaker in the step is 75 ℃, the volume of the hot water is 50-250ml, and the dissolving time is 4 hours.
7) And completely volatilizing water molecules remained on the CNT-PDMS elastomer with the porous structure in a constant-temperature drying mode, and taking the CNT-PDMS elastomer with the porous structure out of the beaker. And then, respectively sticking and connecting a layer of planar electrode on the upper surface and the lower surface of the CNT-PDMS elastomer to obtain the stress sensor based on the porous conductive elastomer.
The drying temperature in the step 7 is 40 ℃, and the drying time is 2 hours.
The process sequence of the preparation steps is not fixed, and the process sequence can be adjusted or the process steps can be deleted according to actual needs.
EXAMPLE III
Referring to fig. 2, fig. 2 is a scanning electron micrograph of a cellular elastomer structure according to an embodiment of the present invention. Referring to fig. 3, fig. 3 is a scanning electron micrograph of a CNT conductive network according to an embodiment of the present invention. Referring to fig. 4, fig. 4 is a waveform diagram of resistance response of a stress sensor under different stresses according to an embodiment of the present invention. Referring to fig. 5, fig. 5 is a waveform diagram of resistance response of a stress sensor according to an embodiment of the present invention when the stress sensor is placed on a wrist, under different bending conditions of the wrist.
The embodiment provides a stress sensor manufacturing method based on a porous conductive elastomer, which comprises the following steps:
step 1: obtaining CNT powder and PDMS base solution by a weighing mode, and uniformly mixing the CNT powder and the PDMS base solution and adding the mixture into toluene to obtain a toluene solution;
step 2: stirring the mixed liquid with toluene as a cosolvent at high speed for 4 hours at normal temperature by a magnetic stirring method to ensure that the CNT is fully contacted with the PDMS and is completely dissolved in the toluene solution to obtain the toluene solution with uniformly dispersed CNT-PDMS;
and step 3: obtaining a cross-linking agent of the powdered sugar particles and PDMS by a weighing mode, and adding the cross-linking agent of the powdered sugar particles and PDMS into the uniformly dispersed toluene solution of the CNT-PDMS;
and 4, step 4: by a magnetic auxiliary stirring method, toluene is gradually volatilized in the process of stirring a toluene solution at a high speed to obtain a uniformly dispersed CNT-PDMS-powdered sugar mixture, and the CNT-PDMS-powdered sugar mixture is filled into a mold;
and 5: and (3) after the CNT-PDMS-powdered sugar mixture is solidified by heating and drying, taking the CNT-PDMS-powdered sugar mixture out of the mold, putting the mold into water, and removing the powdered sugar in the CNT-PDMS-powdered sugar mixture. Then, placing the CNT-PDMS-powdered sugar mixture in a constant-temperature oven, and removing residual water molecules on the CNT-PDMS-powdered sugar mixture to obtain a porous CNT-PDMS conductive elastomer 2;
step 6: and respectively attaching the planar electrodes 1 and 3 to the upper surface and the lower surface of the conductive elastomer 1 in a sticking mode, and taking the planar electrodes 1 and 3 as signal output ends to obtain the stress sensor based on the porous conductive elastomer.
The stress sensor based on the porous conductive elastomer can be applied to the following fields:
1. by combining the advantages of adjustable performance parameters, strong universality of the preparation process, good compatibility and the like of the stress sensor, the device designed by the invention can be integrated with various energy storage devices such as a battery, a super capacitor and the like, and the energy storage devices are used as power supplies to drive the stress sensor to perform resistance response on external stress strain, so that accurate detection and sensing of external signals are realized.
2. The device designed by the invention can be directly attached to the surface of a human body, such as parts with frequent deformation, such as throat, wrist, arm and the like, and in the process of movement of skin, joints, muscles and the like of the human body, the stress sensor can make corresponding resistance response to wide range of motion from small stress to large stress, analyze and identify various actions, and has the possibility of realizing real-time human-computer interaction and health monitoring.
In summary, the stress sensor based on the porous conductive elastomer provided by the embodiment of the invention has the advantages that:
1. the stress sensor based on the porous conductive elastomer provided by the invention can accurately respond to the external stress strain through the change of the resistance, and has the advantages of strong stability, high reliability and the like.
2. Compared with other stress sensors, the stress sensor provided by the invention is based on the porous conductive elastomer structure, has good mechanical and electrical properties, can regulate and control and optimize key parameters such as sensitivity and the like of the stress sensor by adjusting the mass fraction, the pore size and the porosity among the component proportions, and achieves the aim of accurately identifying external micro stress.
3. The manufacturing method provided by the invention is processed and prepared by adopting a laboratory basic process, does not relate to a high-cost processing process, has the characteristic of low cost, is simple in processing and preparation method, and has the possibility of large-scale batch production.
Those of ordinary skill in the art will understand that: the figures are merely schematic representations of one embodiment, and the blocks or flow diagrams in the figures are not necessarily required to practice the present invention.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for apparatus or system embodiments, since they are substantially similar to method embodiments, they are described in relative terms, as long as they are described in partial descriptions of method embodiments. The above-described embodiments of the apparatus and system are merely illustrative, and the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A method for manufacturing a stress sensor based on a porous conductive elastomer is characterized by comprising the following steps:
mixing CNT and PDMS base solution by weighing, and adding the mixture into toluene to obtain a toluene solution;
performing magnetic auxiliary stirring on the toluene solution to enable the CNT and the PDMS to be completely dissolved in the toluene, so as to obtain the toluene solution with uniformly dispersed CNT-PDMS;
adding a crosslinking agent of PDMS and powdered sugar particles into a toluene solution with uniformly dispersed CNT-PDMS, and performing magnetic auxiliary stirring on the toluene solution again to volatilize toluene so as to obtain a CNT-PDMS-powdered sugar mixture;
filling the CNT-PDMS-powdered sugar mixture into a mould, and reacting and curing the base solution of PDMS and a cross-linking agent in a heating and drying way;
taking out the completely cured mixture from the mold, putting the mixture into a beaker filled with hot water, and dissolving sugar powder to obtain the CNT-PDMS elastomer with a porous structure;
and taking the CNT-PDMS elastomer with the porous structure out of the beaker in a constant-temperature drying mode, and respectively adhering and connecting a layer of planar electrode on the upper surface and the lower surface of the CNT-PDMS elastomer to obtain the stress sensor based on the porous conductive elastomer.
2. The method of claim 1, wherein the CNT is mixed with a base solution of PDMS by weighing and added to toluene to obtain a toluene solution, further comprising:
the mass of the CNT is 70-350mg, the mass of the PDMS base liquid is 1-5g, and the volume of the toluene is 5-25 ml.
3. The method of claim 1, wherein the crosslinking agent of PDMS and the sugar powder particles are added to the CNT-PDMS uniformly dispersed toluene solution by weighing, and further comprising:
the mass of the PDMS cross-linking agent is 100-500mg, the mass of the powdered sugar is 5-25g, and the diameter size is 10-200 μm.
4. The method of claim 1, wherein the filling of the CNT-PDMS-sugar powder mixture into the mold further comprises:
the area of the die is 0.25-25cm 2The depth of the mould is 0.1-0.5 cm.
5. The method of claim 1, wherein the step of removing the fully cured mixture from the mold and placing the mixture in a beaker filled with hot water to dissolve the sugar powder to obtain the CNT-PDMS elastomer having a porous structure further comprises:
the temperature of hot water in the beaker is 75 ℃, the volume of the hot water is 50-250ml, and the dissolving time of the powdered sugar is 4 hours.
6. The method of claim 1, wherein the curing step of reacting the base solution of PDMS with the cross-linking agent by heat drying further comprises:
the drying temperature in this step is 70 ℃, and the single drying time is 3 hours.
7. A porous conductive elastomer based stress sensor obtained by the method according to any of claims 1 to 6, comprising:
planar electrode (1), electrically conductive elastomer (2) and planar electrode (3) that have porous structure, planar electrode (1) with the last surface paste of electrically conductive elastomer (2) is connected, planar electrode (3) with the lower surface paste of electrically conductive elastomer (2) is connected, planar electrode (1) and planar electrode (3) are as stress sensor's signal output part.
8. The porous conductive elastomer based stress sensor according to claim 7, wherein the conductive elastomer (2) comprises a mixture of a polymer comprising polydimethylsiloxane or polyaniline and a conductive material comprising carbon nanotubes or ethylene dioxythiophene monomers.
9. The porous conductive elastomer based stress sensor according to claim 7, wherein the planar electrodes (1, 3) are electrodes with flexible properties.
10. The porous conductive elastomer-based stress sensor according to claim 7, 8 or 9, wherein the porous structure is induced by adding particles that are readily soluble in water in a mold filled with the cured mixture.
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