CN108735521B - Miniature super capacitor based on conductive elastomer and manufacturing method thereof - Google Patents

Miniature super capacitor based on conductive elastomer and manufacturing method thereof Download PDF

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CN108735521B
CN108735521B CN201810377271.7A CN201810377271A CN108735521B CN 108735521 B CN108735521 B CN 108735521B CN 201810377271 A CN201810377271 A CN 201810377271A CN 108735521 B CN108735521 B CN 108735521B
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conductive elastomer
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toluene
pmma
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CN108735521A (en
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张海霞
宋宇
王浩彬
陈学先
陈号天
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Peking University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
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    • H01G11/26Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
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    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
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    • H01G11/48Conductive polymers
    • HELECTRICITY
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    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/54Electrolytes
    • H01G11/56Solid electrolytes, e.g. gels; Additives therein
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    • H01ELECTRIC ELEMENTS
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    • H01G11/86Processes for the manufacture of hybrid or EDL capacitors, or components thereof specially adapted for electrodes
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Abstract

The invention provides a miniature supercapacitor based on a conductive elastomer and a manufacturing method thereof. The micro super capacitor comprises a conductive elastomer with a porous structure and a solid electrolyte, wherein the solid electrolyte is gel polymer, and the conductive elastomer and the solid electrolyte are connected in a fusion mode. The conductive elastomer comprises a mixture of a polymer and a conductive material, wherein the polymer comprises polydimethylsiloxane or polyaniline, and the conductive material comprises carbon nanotubes or ethylene dioxythiophene monomers. The gel polymer comprises polyvinyl alcohol and phosphoric acid, sulfuric acid and lithium chloride. The porous structure is induced by adding water-soluble particles to a PMMA mould filled with the cured mixture. The miniature supercapacitor based on the conductive elastomer adopts the planar interdigital structure electrode, greatly reduces the thickness of the device, improves the flexibility of the device, can be better integrated with a flexible electronic device, and simultaneously has the advantages of large specific surface area of multiple holes and high conductivity of the carbon nano tube.

Description

Miniature super capacitor based on conductive elastomer and manufacturing method thereof
Technical Field
The invention relates to the technical field of micro-energy devices, energy storage and wearable electronics, in particular to a micro supercapacitor based on a conductive elastomer and a manufacturing method thereof.
Background
Nowadays, personal electronics facing smart wearable devices are rapidly developed, and at the same time, it is also important for the development of energy devices matched with the same. As an energy storage device of a key ring of an energy system, especially, a supercapacitor receives extensive attention from researchers by virtue of advantages such as high power density and good cycle stability of the supercapacitor, a large amount of work is carried out on the aspects of improving the performance of electrode materials, optimizing the processing technology and the like, especially for applications such as wearable electronic equipment, a series of solid supercapacitors are mainly researched and developed, and good biocompatibility and stable electrochemical performance are simultaneously met.
However, the conventional super capacitor with a sandwich structure has a large thickness and poor flexibility, and thus the application of the super capacitor in a smart wearable system is limited to a certain extent. And as the device is developed towards the direction of miniaturization and integration, compared with a common super capacitor, the micro super capacitor with a planar structure has good application prospect. The miniature super capacitor mostly adopts a planar interdigital structure, an intermediate diaphragm layer is not needed, the whole thickness of the device is greatly reduced, the flexibility and the portability are obviously improved, the miniature super capacitor is easy to integrate with other flexible devices, and the application range of the device is expanded.
However, the micro-super-capacitor in the prior art has at least two disadvantages as follows:
the first disadvantage is that: the process is complex in the flexible electrode transfer process, and an additional substrate is introduced, so that the overall integration level and the portability of the device are adversely affected;
the second disadvantage is that: for the patterning processing of the electrode structure, a photoetching mode is mostly adopted, and certain damage can be inevitably caused to the electrode in the photoetching process, so that the performance and the stability of the electrode are influenced.
Disclosure of Invention
Embodiments of the present invention provide a conductive elastomer-based micro supercapacitor and a method of manufacturing the same to overcome the problems of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme.
According to one aspect of the present invention, there is provided a conductive elastomer based miniature supercapacitor comprising: the conductive elastomer comprises a conductive elastomer with a porous structure and a solid electrolyte, wherein the solid electrolyte is gel polymer, and the conductive elastomer and the solid electrolyte are connected in a fusion mode.
Further, the conductive elastomer comprises a mixture of a polymer and a conductive material, wherein the polymer comprises polydimethylsiloxane or polyaniline, and the conductive material comprises carbon nanotubes or ethylene dioxythiophene monomers.
Further, the gel polymer comprises a polymer of polyvinyl alcohol and at least one of phosphoric acid, sulfuric acid, and lithium chloride.
Further, the porous structure is induced by adding water-soluble particles in a PMMA mould filled with the cured mixture.
According to another aspect of the present invention, there is provided a method for manufacturing a conductive elastomer-based micro supercapacitor, comprising:
cutting grooves with interdigital structures on a PMMA (polymethyl methacrylate) die in a laser patterning mode;
mixing CNT and PDMS base solution by weighing, and adding the mixture into toluene to obtain a toluene solution;
performing magnetic auxiliary stirring on the toluene solution to enable the CNT and the PDMS to be completely dissolved in the toluene, so as to obtain the toluene solution with uniformly dispersed CNT-PDMS;
adding a crosslinking agent of PDMS and powdered sugar particles into a toluene solution with uniformly dispersed CNT-PDMS, and performing magnetic auxiliary stirring on the toluene solution again to volatilize toluene so as to obtain a CNT-PDMS-powdered sugar mixture;
filling the CNT-PDMS-powdered sugar mixture into a groove with an interdigital structure in the PMMA mould, and reacting and curing the base liquid of PDMS and a cross-linking agent in a heating and drying manner;
putting the PMMA mould filled with the cured mixture in the groove into a beaker filled with hot water, dissolving sugar powder to obtain the CNT-PDMS conductive elastomer with the porous structure, and putting the PMMA mould into an oven for heating to volatilize water;
and uniformly attaching the solid electrolyte to the surface of the PMMA mold, drying the PMMA mold, and completely transferring the CNT-PDMS conductive elastomer onto the solid electrolyte to obtain the conductive elastomer-based micro supercapacitor.
Further, the method further comprises the following steps: mixing PVA and H3PO4Adding the solution into deionized water to obtain an ionic aqueous solution, carrying out magnetic auxiliary stirring on the ionic aqueous solution until the ionic aqueous solution is transparent to obtain a gel polymer, and taking the gel polymer as a solid electrolyte.
Furthermore, the width of a single finger of the interdigital structure is 0.5-3cm, the length of the interdigital is 1-4cm, the interdigital interval is 0.5-1.5cm, the groove depth is 200-1000 μm, and the number of the interdigital is 4-10.
Further, the method for preparing the nano carbon tube by weighing and mixing the CNT and the base solution of PDMS into toluene to obtain a toluene solution further comprises the following steps:
the mass of the CNT is 200-1000mg, the mass of the PDMS base liquid is 1-5g, and the volume of the toluene is 5-25 ml.
Further, the method for adding the crosslinking agent of the PDMS and the sugar powder particles into the toluene solution with the CNT-PDMS uniformly dispersed by weighing also comprises the following steps:
the mass of the PDMS cross-linking agent is 100-500mg, the mass of the powdered sugar is 4-20g, and the diameter size is 10-80 μm.
Further, the PMMA mould with the groove filled with the cured mixture is placed in a beaker filled with hot water to dissolve sugar powder to obtain the CNT-PDMS conductive elastomer with the porous structure, and the PMMA mould is placed in an oven to be heated to volatilize moisture, and the method further comprises the following steps:
the temperature of hot water in the beaker is 45 ℃, the volume of the hot water is 50-250ml, the dissolving time of sugar powder in the beaker is 4 hours, the drying temperature of the PMMA mould in the oven is 40 ℃, and the drying time is 2 hours.
Compared with the traditional sandwich structure supercapacitor, the planar interdigital structure electrode is adopted, the thickness of the device is greatly reduced, the flexibility of the device is improved, the device can be better integrated with a flexible electronic device, the conductive elastomer has good mechanical and electrical properties, and meanwhile, the conductive elastomer has the advantages of large specific surface area of multiple holes and high conductivity of carbon nano tubes, and the performance of the device is further improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a micro supercapacitor according to an embodiment of the present invention.
Fig. 2 is a processing flow chart of a method for manufacturing a micro supercapacitor according to an embodiment of the present invention.
Fig. 3 is a scanning electron micrograph of a conductive elastomer electrode according to an embodiment of the present invention.
Fig. 4 is a side scanning electron microscope photograph of a micro supercapacitor according to an embodiment of the present invention.
Fig. 5 is a waveform of electrochemical performance of a micro supercapacitor according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or coupled. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
For the convenience of understanding the embodiments of the present invention, the following description will be further explained by taking several specific embodiments as examples in conjunction with the drawings, and the embodiments are not to be construed as limiting the embodiments of the present invention.
Example one
Aiming at the problems that the traditional supercapacitor with a sandwich structure is large in size, poor in flexibility, complex in preparation process and the like, the embodiment of the invention designs the conductive elastomer-based micro supercapacitor which is simple in processing process, efficient in structural design and excellent in flexibility and portability, can be prepared in a large-scale integrated mode, has good energy storage capacity and stability, and is suitable for micro energy systems of wearable electronics and flexible low-power-consumption devices.
The schematic structural diagram of a conductive elastomer-based micro supercapacitor provided by an embodiment of the present invention is shown in fig. 1, and includes: the conductive elastomer comprises a conductive elastomer with a porous structure and a solid electrolyte, wherein the conductive elastomer and the solid electrolyte are connected in a fusion mode.
The conductive elastomer is a mixture with good electrical conductivity, such as a mixture of a polymer such as Polydimethylsiloxane (PDMS) or Polyaniline (PANI) and a conductive material such as Carbon Nanotube (CNT) or 3, 4-ethylenedioxythiophene monomer (PEDOT).
The porous structure is induced by adding water-soluble particles, including small size-adjustable particles such as sugars, salts, etc., to a PMMA (Polymeric methyl methacrylate) mold filled with the cured mixture.
The solid electrolyte is a gel polymer comprising polyvinyl alcohol (PVA) and phosphoric acid (H)3PO4) Sulfuric acid (H)2SO4) And lithium chloride (LiCl).
Example two
Fig. 2 is a processing step diagram of a manufacturing method of a micro supercapacitor according to an embodiment of the present invention, including the following steps:
1) controlling the laser scanning power and scanning speed in a laser patterning mode, and cutting a groove with an interdigital structure on the acrylic plate die; the acrylic plate comprises PMMA.
The width of a single finger of the interdigital structure is 0.5-3cm, the length of the interdigital is 1-4cm, the interdigital interval is 0.5-1.5cm, the groove depth is 200-1000 mu m, and the number of the interdigital is 4-10.
2) CNT was mixed with a base solution of PDMS by weighing and added to toluene.
The mass of CNT is 200-1000mg, the mass of PDMS base liquid is 1-5g, and the volume of toluene is 5-25 ml.
3) Through a magnetic auxiliary stirring method, the toluene solution is stirred at a high speed under the assistance of a magnetic auxiliary stirrer, so that the CNT is fully contacted with the PDMS, and finally the CNT and the PDMS are completely dissolved in the toluene, and the toluene solution with uniformly dispersed CNT-PDMS is obtained;
the temperature of the magnetic auxiliary stirring in the step is normal temperature, and the stirring time is 4 hours.
4) Adding a crosslinking agent of PDMS and sugar powder particles into a toluene solution with uniformly dispersed CNT-PDMS by weighing;
the mass of the crosslinking agent of PDMS is 100-500mg, the mass of the powdered sugar particles is 4-20g, and the diameter size is 10-80 μm.
5) Gradually volatilizing toluene in the process of stirring the toluene solution at a high speed by a magnetic auxiliary stirring method to obtain a CNT-PDMS-powdered sugar mixture;
the temperature of the magnetic auxiliary stirring in the step is normal temperature, and the stirring time is 1 hour.
6) After the toluene is volatilized, filling the CNT-PDMS-powdered sugar mixture into the groove of the PMMA mould in the step 1, and reacting and curing the base solution of the PDMS and the cross-linking agent in a heating and drying mode;
the drying temperature is 50 ℃, and the single drying time is 6 hours.
7) Placing the PMMA mould filled with the solidified mixture in the groove into a beaker filled with hot water to gradually dissolve sugar powder to obtain the CNT-PDMS conductive elastomer with the porous structure, and placing the mould into an oven to heat until water is completely volatilized;
in the step, the temperature of hot water in a beaker is 45 ℃, the volume of the hot water is 50-250ml, the dissolving time is 4 hours, the drying temperature is 40 ℃, and the drying time is 2 hours.
8) PVA and H3PO4Adding the solution into deionized water to obtain an ionic aqueous solution, carrying out magnetic auxiliary stirring on the ionic aqueous solution until the ionic aqueous solution is transparent to obtain a gel polymer, and taking the gel polymer as a solid electrolyte.
The temperature of the magnetic auxiliary stirring in the step is 85 ℃, and the stirring time is 1 hour.
9) And uniformly attaching the solid electrolyte to the surface of the PMMA mould, drying at constant temperature, removing residual water molecules, and completely transferring the CNT-PDMS conductive elastomer onto the solid electrolyte to obtain the conductive elastomer-based micro supercapacitor.
The drying temperature in this step was 45 ℃ and the drying time was 12 hours.
The process sequence of the preparation steps is not fixed, and the process sequence can be adjusted or the process steps can be deleted according to actual needs.
EXAMPLE III
Fig. 3 is a scanning electron microscope photograph of a CNT-PDMS conductive elastomer electrode according to an embodiment of the present invention, fig. 4 is a side scanning electron microscope photograph of a micro supercapacitor according to an embodiment of the present invention, and fig. 5 is a waveform of electrochemical performance of a micro supercapacitor according to an embodiment of the present invention.
The manufacturing method of the miniature supercapacitor provided by the embodiment comprises the following processing steps:
step 1: groove cutting is carried out on the PMMA plate in a laser imaging mode to obtain a PMMA mould 1 with a planar interdigital structure, and the size and the depth of the interdigital structure can be regulated and controlled through the power and the speed of laser;
step 2: obtaining CNT powder and PDMS base liquid by a weighing mode, and uniformly mixing the CNT powder and the PDMS base liquid and adding the mixture into toluene;
and step 3: stirring the mixed liquid with toluene as a cosolvent at high speed for 4 hours at normal temperature by a magnetic auxiliary stirring method to ensure that the CNT is fully contacted with the PDMS and is completely dissolved in the toluene to obtain a uniformly dispersed CNT-PDMS toluene solution;
and 4, step 4: obtaining sugar powder particles and a PDMS cross-linking agent by a weighing mode, and adding the sugar powder particles and the PDMS cross-linking agent into a toluene solution containing CNT-PDMS;
and 5: gradually and completely volatilizing toluene by a magnetic auxiliary stirring method to obtain a uniformly dispersed CNT-PDMS-powdered sugar mixture, filling the uniformly dispersed CNT-PDMS-powdered sugar mixture into the groove of the PMMA mould 1, and completely curing the mixture by a heating and drying mode;
step 6: putting the PMMA mould 1 into water in a dissolving mode, and putting the PMMA mould into a constant-temperature oven after sugar powder in the mixture is completely dissolved to obtain a CNT-PDMS conductive elastomer 2;
and 7: by means of magnetic force-assisted stirring,obtaining clear and transparent PVA/H3PO4Solid electrolyte 3, PVA/H3PO4After the solid electrolyte 3 is uniformly covered on the PMMA mould 1, placing the PMMA mould 1 in a constant temperature oven, and removing residual water molecules in the PMMA mould 1 device;
and 8: and completely uncovering the CNT-PDMS conductive elastomer 2 from the PMMA mould 1 by an electrolyte transfer mode to obtain the conductive elastomer-based micro supercapacitor.
The conductive elastomer-based micro supercapacitor provided by the embodiment of the invention can be applied to the following fields:
1. the planar interdigital electrode structure of the miniature supercapacitor has the advantages of small volume, light weight, good flexibility and the like, the miniature supercapacitor device designed by the invention can be integrated with various wearable electronic devices and directly attached to the surfaces of various flexible electronic devices, and the planar interdigital electrode structure of the miniature supercapacitor has good portability and can stably supply power for a long time.
2. The laser patterning process is adopted, the advantages of high resolution, strong controllability, large-area processing and the like are achieved, the working voltage range of the device can be widened through structural design such as series-parallel connection, the energy power density of the device is improved, the energy requirements of different flexible devices are met, and the working capacity and the application range of the miniature super capacitor are expanded.
3. The manufacturing method provided by the invention is processed and prepared by adopting a laboratory basic process, adopts modes of a laser graphical die, electrolyte transfer and the like, does not need complicated photoetching and transfer processes, greatly reduces the processing process cost, is simple in processing and preparation method, has high stability, and has the possibility of large-scale batch production.
In summary, the conductive elastomer-based micro supercapacitor provided in the embodiments of the present invention has the following advantages:
1. compared with the traditional sandwich structure supercapacitor, the planar interdigital structure electrode is adopted, the thickness of the device is greatly reduced, the flexibility of the device is improved, the device can be better integrated with a flexible electronic device, the conductive elastomer has good mechanical and electrical properties, and meanwhile, the conductive elastomer has the advantages of large porous specific surface area and high conductivity of the carbon nano tube, and the performance of the device is further improved.
2. Compared with other miniature super capacitors, the miniature super capacitor provided by the invention has the advantages that an extra substrate is not needed in an electrolyte transfer mode, the overall thickness of the device is greatly reduced, and possible damage to the device caused by a complex transfer process is avoided. Meanwhile, the laser patterning processing mode is utilized, the advantages of high resolution, diversified structural design, no mask plate and the like are achieved, large-scale array preparation can be carried out, and the requirements of various low-power-consumption electronic devices can be met.
3. The manufacturing method provided by the invention adopts a basic process flow in a laboratory, does not relate to a high-cost processing process, has a simple preparation process, low cost and short production period, and has the possibility of large-scale batch production.
Those of ordinary skill in the art will understand that: the figures are merely schematic representations of one embodiment, and the blocks or flow diagrams in the figures are not necessarily required to practice the present invention.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for apparatus or system embodiments, since they are substantially similar to method embodiments, they are described in relative terms, as long as they are described in partial descriptions of method embodiments. The above-described embodiments of the apparatus and system are merely illustrative, and the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A manufacturing method of a miniature supercapacitor based on a conductive elastomer is characterized by comprising the following steps:
cutting grooves with interdigital structures on a PMMA (polymethyl methacrylate) die in a laser patterning mode;
mixing CNT and PDMS base solution by weighing, and adding the mixture into toluene to obtain a toluene solution;
performing magnetic auxiliary stirring on the toluene solution to enable the CNT and the PDMS to be completely dissolved in the toluene, so as to obtain the toluene solution with uniformly dispersed CNT-PDMS;
adding a crosslinking agent of PDMS and powdered sugar particles into a toluene solution with uniformly dispersed CNT-PDMS, and performing magnetic auxiliary stirring on the toluene solution again to volatilize toluene so as to obtain a CNT-PDMS-powdered sugar mixture;
filling the CNT-PDMS-powdered sugar mixture into a groove with an interdigital structure in the PMMA mould, and reacting and curing the base liquid of PDMS and a cross-linking agent in a heating and drying manner;
putting the PMMA mould filled with the cured mixture in the groove into a beaker filled with hot water, dissolving sugar powder to obtain the CNT-PDMS conductive elastomer with the porous structure, and putting the PMMA mould into an oven for heating to volatilize water;
and uniformly attaching the solid electrolyte to the surface of the PMMA mold, drying the PMMA mold, and completely transferring the CNT-PDMS conductive elastomer onto the solid electrolyte to obtain the conductive elastomer-based micro supercapacitor.
2. The method of claim 1, further comprising: mixing PVA and H3PO4Adding the solution into deionized water to obtain an ionic aqueous solution, carrying out magnetic auxiliary stirring on the ionic aqueous solution until the ionic aqueous solution is transparent to obtain a gel polymer, and taking the gel polymer as a solid electrolyte.
3. The method as claimed in claim 2, wherein the interdigital structure has a single finger width of 0.5-3cm, an interdigital length of 1-4cm, an interdigital spacing of 0.5-1.5cm, a groove depth of 200 μm, and a number of fingers of 4-10.
4. The method of claim 1, wherein the CNT is mixed with a base solution of PDMS by weighing and added to toluene to obtain a toluene solution, further comprising:
the mass of the CNT is 200-1000mg, the mass of the PDMS base liquid is 1-5g, and the volume of the toluene is 5-25 ml.
5. The method of claim 1, wherein the crosslinking agent of PDMS and the sugar powder particles are added to the CNT-PDMS uniformly dispersed toluene solution by weighing, and further comprising:
the mass of the PDMS cross-linking agent is 100-500mg, the mass of the powdered sugar is 4-20g, and the diameter size is 10-80 μm.
6. The method of claim 1, wherein the PMMA mold with the groove filled with the cured mixture is placed in a beaker filled with hot water to dissolve sugar powder to obtain the CNT-PDMS conductive elastomer with porous structure, and the PMMA mold is placed in an oven to be heated to volatilize water, and further comprising: the temperature of hot water in the beaker is 45 ℃, the volume of the hot water is 50-250ml, the dissolving time of sugar powder in the beaker is 4 hours, the drying temperature of the PMMA mould in the oven is 40 ℃, and the drying time is 2 hours.
7. The method of claim 1, wherein the micro-supercapacitor comprises: the conductive elastomer and the solid electrolyte are in fusion connection, and the conductive elastomer is positioned on one side of the solid electrolyte; the miniature supercapacitor based on the conductive elastomer is of a planar interdigital structure.
8. The method of claim 7, wherein the conductive elastomer comprises a mixture of a polymer comprising polydimethylsiloxane or polyaniline and a conductive material comprising carbon nanotubes or ethylene dioxythiophene monomers.
9. The method of claim 7, wherein the gel polymer comprises a polymer of polyvinyl alcohol and at least one of phosphoric acid, sulfuric acid, and lithium chloride.
10. Method according to claim 7 or 8 or 9, characterized in that the porous structure is induced by adding water-soluble particles in a PMMA mould filled with the cured mixture.
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