CN108890902A - A kind of silicon single crystal rod cutter device - Google Patents
A kind of silicon single crystal rod cutter device Download PDFInfo
- Publication number
- CN108890902A CN108890902A CN201811007979.XA CN201811007979A CN108890902A CN 108890902 A CN108890902 A CN 108890902A CN 201811007979 A CN201811007979 A CN 201811007979A CN 108890902 A CN108890902 A CN 108890902A
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- single crystal
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 61
- 239000010703 silicon Substances 0.000 title claims abstract description 61
- 239000013078 crystal Substances 0.000 title claims abstract description 60
- 210000000078 claw Anatomy 0.000 claims abstract description 11
- 230000006835 compression Effects 0.000 claims description 18
- 238000007906 compression Methods 0.000 claims description 18
- 230000000694 effects Effects 0.000 claims description 18
- 238000003780 insertion Methods 0.000 claims description 12
- 230000037431 insertion Effects 0.000 claims description 12
- 210000005069 ears Anatomy 0.000 claims description 11
- 239000011148 porous material Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 239000010985 leather Substances 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 23
- 238000012545 processing Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008450 motivation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to the technical fields of wafer processing auxiliary equipment, more particularly to a kind of silicon single crystal rod cutter device, it can cut the moving distance after finishing by adjusting silicon single crystal rod each time, so as to guarantee the monocrystalline silicon piece consistency of thickness cut each time；And the motion track of inner circle cutting piece can be limited, to guarantee that the thickness of monocrystalline silicon piece is uniform；Including station, silicon single crystal rod, motor, inner circle cutting piece and cutting plate rack, that cuts plate rack is provided with four groups of claw bars；It further include sliding rail, four groups of position-limited wheels, four groups of support rods, movable plates, sliding rail is provided with two groups of sliding grooves, and it further includes limiter, limiter includes support, rocking bar, rotation axis and baffle that movable plate, which is provided with telescopic rod, interlocking bar, adjusts handle and fixed link,；It further include that two groups of hack levers, two groups of circular rails, two groups of position-limited wheels, line shaft, driven spindle, support shaft, power shaft and belt, the bottom end of motor are provided with steadying plate.
Description
Technical field
The present invention relates to the technical fields of wafer processing auxiliary equipment, cut and fill more particularly to a kind of silicon single crystal rod
It sets.
Background technique
It is well known that silicon single crystal rod cutter device is one kind during producing wafer, for cutting silicon single crystal rod
Device is widely used in a variety of applications in the field of wafer processing；Existing silicon single crystal rod cutter device includes operation
Platform, silicon single crystal rod, two groups of spring fixed clips, motor, inner circle cutting piece and cutting plate rack, described two groups of spring fixed clips
Bottom end connect with the top of station, the top of two groups of spring fixed clips with silicon single crystal rod is fixed clamps, it is described electronic
The output end of machine is connect with the fixing end of cutting plate rack, and the cutting plate rack is provided with four groups of claw bars, the cutting sheet
The working end of four groups of claw bars of bracket is spirally connected with the inner sidewall edge of inner circle cutting piece respectively；Existing silicon single crystal rod cutter device
In use, first fix silicon single crystal rod on two groups of spring fixed clips of station, then staff is by inner circle cutting
Piece is mounted on the cutting plate rack of motor output end, and last staff operates motor and drives inner circle cutting piece to monocrystalline
Silicon rod cutting；It is found in existing silicon single crystal rod cutter device use, motor drives inner circle cutting piece to monocrystalline first
When silicon rod is cut, the thickness that not can guarantee the monocrystalline silicon piece scaled off from silicon single crystal rod is consistent, so as to cause office
It is sex-limited higher；And staff is manually operated motor and inner circle cutting piece is driven to cut silicon single crystal rod, due to human factor
Presence not can guarantee monocrystalline silicon piece thickness it is uniform, it is poor so as to cause practicability.
Summary of the invention
In order to solve the above technical problems, the present invention provides one kind can cut finish it each time by adjusting silicon single crystal rod
Moving distance afterwards reduces so as to guarantee the monocrystalline silicon piece consistency of thickness cut each time and uses limitation；And it can be with
The motion track of inner circle cutting piece is limited, to guarantee that the thickness of monocrystalline silicon piece is uniform, enhances the silicon single crystal rod cutting of practicability
Device.
A kind of silicon single crystal rod cutter device of the invention, including station, silicon single crystal rod, motor, inner circle cutting piece and
Plate rack is cut, the cutting plate rack is provided with four groups of claw bars, the working end point of four groups of claw bars of the cutting plate rack
It is not spirally connected with the inner sidewall edge of inner circle cutting piece；It further include sliding rail, four groups of position-limited wheels, four groups of support rods, movable plates, the cunning
The fixing end of rail and the top left hand of station connect, and the sliding rail is provided with two groups of sliding grooves, and four groups of position-limited wheels include
Two groups of front-wheels and two groups of rear-wheels, four groups of support rods include two groups of front support rods and two groups of back support rods, two groups of front-wheels
It is rotatablely connected respectively with the bottom end of two groups of front support rods, two groups of rear-wheels are rotatablely connected with two groups of back support rods respectively, described
Two groups of front-wheels and two groups of rear-wheels rotate respectively to be installed in two groups of sliding grooves of sliding rail, the bottom end of two groups of front support rods and shifting
It is connected on rear side of connection on front side of the bottom end of movable plate, the bottom end of two groups of back support rods and the bottom end of movable plate, movable plate is provided with
Telescopic rod, interlocking bar adjust handle and fixed link, and the movable plate is internally provided with telescopic cavity, and the bottom end of the telescopic cavity is right
Side is provided with the sliding mouth of limit, and the sliding mouth of adjusting, the right end and telescopic cavity of the fixed link are provided on the left of the front side wall of telescopic cavity
The connection of right side wall bottom end, the lower right side activity of the left end of the fixed link and telescopic rod rivets, and the bottom end of the telescopic rod is set
It is equipped with multiple groups gear lever, the bottom end intracavitary portion of equal self extending of the multiple groups gear lever, which passes through, to be limited sliding mouth and extend out to telescopic cavity
Bottom side, the left end of the telescopic rod and the right end activity of interlocking bar rivet, and the left end of interlocking bar is provided with connecting shaft, the adjusting
Lateral wall in the middle part of be provided with pulling mouth, the intracavitary portion of movable end self extending of the connecting shaft of the interlocking bar, which passes through, adjusts sliding mouth
And it extend out on the outside of telescopic cavity, while the movable end of connecting shaft continues the inside of self-regulation handle across pulling mouth and reaches
The front side of handle is adjusted, it is described to adjust being riveted with the connecting shaft of interlocking bar by pulling mouth activity, it further include limiter, the limit
Position device includes support, rocking bar, rotation axis and baffle, is connected on the right side of the bottom end of the support and the top of sliding rail, the support
Left end and right end are provided with and communicated with intercommunicating pore, and the left end of the rotation axis passes through intercommunicating pore from the right end of support and extend out to support
Left end, the fixing end of the right end of the rotation axis and rocking bar connects, and the left end of the rotation axis and the fixing end of baffle connect；
Further include two groups of hack levers, two groups of circular rails, two groups of position-limited wheels, line shaft, driven spindle, support shaft, power shaft and belt,
The bottom end of the motor is provided with steadying plate, and the left end of the steadying plate and the right side wall bottom end of station connect, the electricity
The output end and power shaft of motivation are fixed to be set with, and the left end rotation of the support shaft is provided with rod, a left side for the rod
End is connect with the right side wall of station, and the driven spindle, support shaft and power shaft are rotated with belt respectively to be set with, described
The left end central area of driven spindle and the right end of line shaft connect, and the rotation axis is set with two groups of position-limited wheel rotations respectively,
The bottom end of two groups of hack levers with the top of station on the right side of connect, the top of two groups of hack levers respectively with two groups of circular rails
Bottom end connection, two groups of circular rails are provided with limit track, and two groups of position-limited wheels rotate respectively is installed on two groups of limits
On the track of position, and two groups of position-limited wheels are provided with two groups of clamping pieces, and two groups of position-limited wheels pass through two groups of clamping piece difference
It is close to the left side wall of two groups of circular rails and right side wall, the left end of line shaft is connect with the fixing end of cutting plate rack.
A kind of silicon single crystal rod cutter device of the invention further includes squeezing shaft, oscillating rod, strength torsional spring and side position bar,
Side position bar is named connection on the upside of the right side wall of left end and station, the bottom end activity riveting of the right end and oscillating rod of side position bar
It connects, the top middle portion of side position bar is provided with insertion groove, and the insertion groove top is provided with insert port, a left side for the oscillating rod
Side wall is provided with stretch slot, stretching mouth is provided on the left of the stretch slot, the fixing end of the strength torsional spring is from outside insertion groove
Side passes through and insert port and extend into inside insertion groove, the outside of the turning end self stretch slot of strength torsional spring pass through stretch mouth and
Extend into inside stretch slot, the right side wall top of the oscillating rod is provided with connecting rod, oscillating rod by the right end of connecting rod with
Shaft rotation connection is squeezed, the circumferential wall for squeezing shaft is close to the lateral wall of belt.
A kind of silicon single crystal rod cutter device of the invention further includes two groups of pressing plates, two groups of supporting plates, two groups of steady arms, four groups
Stock screw and four groups of ears nuts, the bottom end of two groups of steady arms connect with the left and right side on the top of movable plate respectively
It connects, the top of two groups of steady arms is connect with the bottom end of two groups of supporting plates respectively, in the front side of two groups of supporting plates and the top of rear side
Portion and center bottom be provided with and communicated with threaded hole and two groups of pressing plates front side and rear side top middle portion and center bottom it is equal
It is provided with threaded hole, four groups of stock screws are bolted through four groups of threaded holes of two groups of supporting plates simultaneously from the downside of two groups of supporting plates respectively
And it is extend out to the first volume of two groups of supporting plates, then four groups of stock screws are bolted through two groups of pressing plates from the downside of two groups of pressing plates respectively
Four groups of threaded holes and the upside for extending out to two groups of pressing plates, the end of thread of four groups of ears nuts respectively with four groups of stock screw spiral shells
It connects, two groups of pressing plate inner lower edges are provided with anti-skidding leather packing.
A kind of silicon single crystal rod cutter device of the invention, further includes loose collar and operating stick, the loose collar and line shaft
Rotation suit, and loose collar is located between two groups of circular rails, and the top of the loose collar and the bottom end of operating stick connect.
A kind of silicon single crystal rod cutter device of the invention, further includes single threaded screw, it is described adjust handle front side wall on the upside of and
It is provided with and communicated with threaded hole on the upside of rear wall, is bolted through threaded hole on front side of the single threaded screw self-regulation handle and extend into
The rear side of handle is adjusted, is close on the left of the end of thread for adjusting handle and the front side wall of movable plate.
A kind of silicon single crystal rod cutter device of the invention, further includes cylinder transparent protection plate, the cylinder transparent protection plate
Apical lateral wall, apical lateral wall, front end outer side wall and rear end side wall respectively and cutting plate rack four groups of claw bars on the inside of
Wall connection.
A kind of silicon single crystal rod cutter device of the invention further includes pushing handle, the fixing end and shifting for pushing handle
The connection of movable plate left end lateral wall.
A kind of silicon single crystal rod cutter device of the invention further includes crooked fulcrum bar, compressed spring and sideslip bar, the bending
Strut is internally provided with compression chamber, and the top of the compression chamber is provided with detent mouth, the top of the sideslip bar and rocking bar
Front side wall connection, the bottom end of the sideslip bar are provided with limit film, and the bottom end of the sideslip bar passes through card from the outside of compression chamber
Position and is extend into compression chamber mouth, and the bottom end of the sideslip bar is clamped by the top activity of limit film and compression chamber, described
The bottom end of compressed spring and the bottom end of compression chamber connect, and the top of the compressed spring and the bottom end of the limit film of sideslip bar are tight
Patch.
Beneficial effects of the present invention are compared with prior art：Handle is adjusted according to the thickness requirements of monocrystalline silicon piece first, is adjusted
Drive interlocking bar is applied pulling force to the left end of telescopic rod by section because all connecting rods that telescopic rod includes be activity riveting and
For parallelogram sturcutre, so the left end of moving telescopic bar can make between multiple groups gear lever while mobile and multiple groups gear lever
Pitch-synchronous adjusting size, adjusting finish adjusting after screws single threaded screw to adjust limit, then push movable plate
Contact gear lever with baffle, after one group of monocrystalline silicon piece of completion of processing, rotating rocker limits baffle no longer to gear lever, from
And movable plate is pushed, then rotating rocker limits baffle to next group of gear lever, continues to process monocrystalline silicon piece, repeats such behaviour
Make the monocrystalline silicon piece consistency of thickness that can guarantee to cut every time, to reduce using limitation；And motor passes through belt
Line shaft rotation is driven, line shaft drives the rotation of inner circle cutting piece, and inner circle cutting piece is not contacted with silicon single crystal rod at this time, is then led to
Crossing promotion operating stick makes inner circle cutting piece start to cut silicon single crystal rod bottom side, continues operating stick and line shaft is driven to pass through two groups of limits
Wheel moves in the limit track of two groups of circular rails, since position-limited wheel and limit track closely rotate clamping during this, from
And ensure that line shaft drives patio's cutting sheet that any shaking does not occur, therefore ensure that the thickness of monocrystalline silicon piece is uniform, enhance
Practicability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the attachment structure schematic diagram of stock screw and ears nut of the invention；
Fig. 3 is the attachment structure schematic diagram of movable plate and sliding rail of the invention；
Fig. 4 is the attachment structure schematic diagram of circular rail and position-limited wheel of the invention；
Fig. 5 is the attachment structure schematic diagram of driven spindle and power shaft of the invention；
Fig. 6 is the attachment structure schematic diagram of movable plate and multiple groups gear lever of the invention；
Fig. 7 is the partial enlargement structural representation of A of the invention；
It is marked in attached drawing：1, station；2, silicon single crystal rod；3, motor；4, inner circle cutting piece；5, plate rack is cut；6, sliding rail；
7, four groups of position-limited wheels；8, four groups of support rods；9, movable plate；10, telescopic rod；11, interlocking bar；12, handle is adjusted；13, fixed link；
14, support；15, rocking bar；16, rotation axis；17, baffle；18, two groups of hack levers；19, two groups of circular rails；20, two groups of position-limited wheels；21,
Line shaft；22, driven spindle；23, shaft is supported；24, power shaft；25, belt；26, shaft is squeezed；27, oscillating rod；28,；
29, strength torsional spring；30, two groups of pressing plates；31, two groups of supporting plates；32, two groups of steady arms；33, four groups of stock screws；34, four groups of ears
Nut；35, loose collar；36, operating stick；37, single threaded screw；38, cylinder transparent protection plate；39, handle is pushed；40, bending branch
Bar；41, compressed spring；42, sideslip bar.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As shown in Figures 1 to 7, a kind of silicon single crystal rod cutter device of the invention, including station 1, silicon single crystal rod 2, electricity
Motivation 3, inner circle cutting piece 4 and cutting plate rack 5, that cuts plate rack is provided with four groups of claw bars, cuts four groups of pawls of plate rack
The working end of bar is spirally connected with the inner sidewall edge of inner circle cutting piece respectively；It further include 6, four groups of sliding rail, 7, four groups of position-limited wheel support rod
8, movable plate 9, the fixing end of sliding rail and the top left hand of station connect, and sliding rail is provided with two groups of sliding grooves, four groups of position-limited wheels
Including two groups of front-wheels and two groups of rear-wheels, four groups of support rods include two groups of front support rods and two groups of back support rods, two groups of front-wheel difference
It is rotatablely connected with the bottom end of two groups of front support rods, two groups of rear-wheels are rotatablely connected with two groups of back support rods respectively, two groups of front-wheels and two
Group rear-wheel rotate is installed in two groups of sliding grooves of sliding rail respectively, and the bottom end of two groups of front support rods and the bottom end front side of movable plate connect
It connects, is connected on rear side of the bottom end of two groups of back support rods and the bottom end of movable plate, movable plate is provided with telescopic rod 10, interlocking bar 11, adjusts
12 and fixed link 13, movable plate are internally provided with telescopic cavity by section, and the sliding mouth of limit is provided on the right side of the bottom end of telescopic cavity, is stretched
The sliding mouth of adjusting is provided on the left of the front side wall of chamber, the right end of fixed link and the right side wall bottom end of telescopic cavity connect, fixed link
The lower right side activity of left end and telescopic rod rivets, and the bottom end of telescopic rod is provided with multiple groups gear lever, and the bottom end of multiple groups gear lever is equal
The intracavitary portion of self extending passes through the bottom side for limiting sliding mouth and extending out to telescopic cavity, the left end of telescopic rod and the right end activity riveting of interlocking bar
It connects, the left end of interlocking bar is provided with connecting shaft, adjusts and is provided with pulling mouth, the work of the connecting shaft of interlocking bar in the middle part of the lateral wall of handle
Self extending intracavitary portion in moved end, which passes through, to be adjusted sliding mouth and extend out on the outside of telescopic cavity, while the movable end of connecting shaft continues to be self-regulated
Inside pass through pull mouth and reach adjust handle front side, adjust with the connecting shaft of interlocking bar by pull mouth activity
Riveting, further includes limiter, and limiter includes support 14, rocking bar 15, rotation axis 16 and baffle 17, the bottom end of support and sliding rail
Connection on the right side of top, the left end of support and right end are provided with and communicated with intercommunicating pore, and the left end of rotation axis is passed through from the right end of support to be connected
Through-hole and the left end for extending out to support, the right end of rotation axis and the fixing end of rocking bar connect, the left end of rotation axis and consolidating for baffle
Fixed end connection；It further include 18, two groups of two groups of hack levers, 19, two groups of circular rail position-limited wheel 20, line shaft 21, driven spindle 22, support
Shaft 23, power shaft 24 and belt 25, the bottom end of motor are provided with steadying plate, the left end of steadying plate and the right side of station
The connection of wall bottom end, the output end and power shaft of motor are fixed to be set with, and is supported the left end of shaft to rotate and is provided with rod, rod
Left end and station right side wall connect, driven spindle, support shaft and power shaft respectively with belt rotate be set with, it is driven
The left end central area of shaft and the right end of line shaft connect, and rotation axis is set with two groups of position-limited wheel rotations respectively, two groups of hack levers
Bottom end with the top of station on the right side of connect, the top of two groups of hack levers is connect with the bottom end of two groups of circular rails respectively, two groups
Circular rail is provided with limit track, and two groups of position-limited wheels rotate respectively to be installed on two groups of limit tracks, and two groups of position-limited wheels
Two groups of clamping pieces are provided with, two groups of position-limited wheels pass through left side wall and right side wall of two groups of clamping pieces respectively with two groups of circular rails
It is close to, the left end of line shaft is connect with the fixing end of cutting plate rack；Handle is adjusted according to the thickness requirements of monocrystalline silicon piece first, is adjusted
Drive interlocking bar is applied pulling force to the left end of telescopic rod by section because all connecting rods that telescopic rod includes be activity riveting and
For parallelogram sturcutre, so the left end of moving telescopic bar can make between multiple groups gear lever while mobile and multiple groups gear lever
Pitch-synchronous adjusting size, adjusting finish adjusting after screws single threaded screw to adjust limit, then push movable plate
Contact gear lever with baffle, after one group of monocrystalline silicon piece of completion of processing, rotating rocker limits baffle no longer to gear lever, from
And movable plate is pushed, then rotating rocker limits baffle to next group of gear lever, continues to process monocrystalline silicon piece, repeats such behaviour
Make the monocrystalline silicon piece consistency of thickness that can guarantee to cut every time, to reduce using limitation；And motor passes through belt
Line shaft rotation is driven, line shaft drives the rotation of inner circle cutting piece, and inner circle cutting piece is not contacted with silicon single crystal rod at this time, is then led to
Crossing promotion operating stick makes inner circle cutting piece start to cut silicon single crystal rod bottom side, continues operating stick and line shaft is driven to pass through two groups of limits
Wheel moves in the limit track of two groups of circular rails, since position-limited wheel and limit track closely rotate clamping during this, from
And ensure that line shaft drives patio's cutting sheet that any shaking does not occur, therefore ensure that the thickness of monocrystalline silicon piece is uniform, enhance
Practicability.
A kind of silicon single crystal rod cutter device of the invention further includes squeezing shaft 26, oscillating rod 27, strength torsional spring 28 and side
Position bar 29, side position bar are named connection on the upside of the right side wall of left end and station, the bottom end activity of the right end and oscillating rod of side position bar
The top middle portion of riveting, side position bar is provided with insertion groove, and insertion groove top is provided with insert port, and the left side wall of oscillating rod is provided with
Stretch slot, stretching mouth is provided on the left of stretch slot, and the fixing end of strength torsional spring passes through insert port from the outside of insertion groove and stretches
Entering to inside insertion groove, the outside of the turning end self stretch slot of strength torsional spring, which passes through, to be stretched mouth and extend into inside stretch slot,
The right side wall top of oscillating rod is provided with connecting rod, and right end and extruding shaft rotation connection of the oscillating rod by connecting rod squeeze
The circumferential wall of shaft is close to the lateral wall of belt；During the cutting silicon single crystal rod movement of inner circle cutting sheet, brute spring
A downward thrust is generated to oscillating rod always, oscillating rod, which drives extruding shaft that can also be close to belt always, at this time makes belt one
It is straight to be in the state tightened, it is close to belt always during driven spindle is mobile to ensure that, to increase practical
Property.
A kind of silicon single crystal rod cutter device of the invention further includes 30, two groups of two groups of pressing plates, 31, two groups of supporting plate steady arm
32, four groups of stock screws 33 and four groups of ears nuts 34, the bottom end of two groups of steady arms respectively with the left side on the top of movable plate and
Right side connection, the top of two groups of steady arms connect with the bottom end of two groups of supporting plates respectively, the front side of two groups of supporting plates and the top of rear side
Middle part and center bottom are provided with and communicated with the front side of threaded hole and two groups of pressing plates and the top middle portion and center bottom of rear side
Be provided with threaded hole, four groups of stock screws be bolted through respectively from the downside of two groups of supporting plates four groups of threaded holes of two groups of supporting plates and
It is extend out to the first volume of two groups of supporting plates, then four groups of stock screws are bolted through the four of two groups of pressing plates from the downside of two groups of pressing plates respectively
Group threaded hole and the upside for extending out to two groups of pressing plates, the end of thread of four groups of ears nuts are spirally connected with four groups of stock screws respectively, and two
Group pressing plate inner lower edge is provided with anti-skidding leather packing；Four groups of ears nuts are unscrewed from four groups of stock screws respectively first, are made
Then silicon single crystal rod is passed through two groups of pressing plates and two groups of supporting plates, has regulated monocrystalline silicon by ears nut not on being tightly attached to pressing plate
After the position of stick, by screwing four groups of ears nuts from four groups of stock screws respectively, to make two groups of pressing plates and two groups
Supporting plate is close to the top of silicon single crystal rod and bottom end respectively, increases reliability.
A kind of silicon single crystal rod cutter device of the invention, further includes loose collar 35 and operating stick 36, loose collar and line shaft
Rotation suit, and loose collar is located between two groups of circular rails, and the top of loose collar and the bottom end of operating stick connect；By holding
Operating stick can make the movement of inner circle cutting piece more convenient, to increase convenience.
A kind of silicon single crystal rod cutter device of the invention, further includes single threaded screw 37, is adjusted on the upside of the front side wall of handle with after
It is provided with and communicated with threaded hole on the upside of side wall, is bolted through threaded hole on front side of single threaded screw self-regulation handle and extend into adjusting handle
Rear side, adjust handle the end of thread and movable plate front side wall on the left of be close to；Adjusting finishes adjusting after by screwing single head
Screw contacts the end of thread of single threaded screw with the extruding of the front side wall of movable plate, so as to so that single threaded screw is limited handle is adjusted
Position, ensure that multiple groups gear plate will not be subjected to displacement, increases practicability.
A kind of silicon single crystal rod cutter device of the invention, further includes cylinder transparent protection plate 38, cylinder transparent protection plate
Apical lateral wall, apical lateral wall, front end outer side wall and rear end side wall respectively with cutting plate rack four groups of claw bar inner sidewalls
Connection；Monocrystalline silicon piece can be held by cylinder transparent protection plate after monocrystalline silicon piece is cut down from silicon single crystal rod,
To reduce the damage of monocrystalline silicon piece, safety is increased.
A kind of silicon single crystal rod cutter device of the invention further includes pushing handle 39, pushes the fixing end and movement of handle
The connection of plate left end lateral wall；By pushing handle that can more easily push movable plate, to increase convenience.
A kind of silicon single crystal rod cutter device of the invention, further includes crooked fulcrum bar 40, compressed spring 41 and sideslip bar 42, curved
Bent strut is internally provided with compression chamber, and the top of compression chamber is provided with detent mouth, and the bottom end of sideslip bar is provided with limit film, side
The top of slide bar and the front side wall of rocking bar connect, and the bottom end of sideslip bar passes through detent mouth from the outside of compression chamber and extend into pressure
It contracts intracavitary, the bottom end of sideslip bar is clamped by the top activity of limit film and compression chamber, the bottom end of compressed spring and compression chamber
Bottom end connection, the top of compressed spring is close to the bottom end of the limit film of sideslip bar；The top of sideslip bar is connected to rocking bar, when pushing away
When dynamic movable plate, rotating rocker makes rocking bar compressed side slide bar extend into the compression chamber of crooked fulcrum bar, when adjusting is over movement
Behind the position of plate, rocking bar is unclamped at this time, and sideslip bar resets rocking bar under the promotion of compressed spring, so that rocking bar continues to movement
Plate limit, increases practicability.
A kind of silicon single crystal rod cutter device of the invention, it is at work, first that silicon single crystal rod is fixed on station
Good, then inner circle cutting piece is mounted on the cutting plate rack of motor output end by staff, last staff's operation
Motor drives inner circle cutting piece to cut silicon single crystal rod；Before completing above-mentioned movement, first according to monocrystalline silicon piece
Thickness requirements adjust handle, adjust and left end of the drive interlocking bar to telescopic rod is applied pulling force, because of all companies that telescopic rod includes
Extension bar is activity riveting and is parallelogram sturcutre, so the left end of moving telescopic bar can make multiple groups gear lever while movement
And the pitch-synchronous adjusting size between multiple groups gear lever, adjusting finish adjusting and screw single threaded screw after to adjusting limit
Then position pushes movable plate to contact gear lever with baffle, after one group of monocrystalline silicon piece of completion of processing, rotating rocker makes baffle not
Gear lever is limited again, to push movable plate, then rotating rocker limits baffle to next group of gear lever, continues work sheet
Crystal silicon chip；And motor drives line shaft to rotate by belt, and line shaft drives the rotation of inner circle cutting piece, at this time inner circle cutting
Piece is not contacted with silicon single crystal rod, is then made inner circle cutting piece start to cut silicon single crystal rod bottom side by promoting operating stick, is continued to grasp
Making bar drives line shaft to move in the limit track of two groups of circular rails by two groups of position-limited wheels, this process position-limited wheel and limit
Track closely rotates clamping, and motor here is to buy in the market, when the installation line of motor should be in strict accordance with purchase
The instruction for mounting of institute's band carries out.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications, these improvements and modifications can also be made
Also it should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of silicon single crystal rod cutter device, including station（1）, silicon single crystal rod（2）, motor（3）, inner circle cutting piece（4）
With cutting plate rack（5）, the cutting plate rack（5）Be provided with four groups of claw bars, the cutting plate rack（5）Four groups of claw bars
Working end respectively with inner circle cutting piece（4）Inner sidewall edge be spirally connected；It is characterized in that, further including sliding rail（6）, four groups of limits
Wheel（7）, four groups of support rods（8）, movable plate（9）, the sliding rail（6）Fixing end and station（1）Top left hand connection, institute
State sliding rail（6）It is provided with two groups of sliding grooves, four groups of position-limited wheels（7）Including two groups of front-wheels and two groups of rear-wheels, four groups of branch
Strut（8）Including two groups of front support rods and two groups of back support rods, two groups of front-wheels turn with the bottom end of two groups of front support rods respectively
Dynamic connection, two groups of rear-wheels are rotatablely connected with two groups of back support rods respectively, and two groups of front-wheels and two groups of rear-wheels rotate respectively
It is installed on sliding rail（6）Two groups of sliding grooves in, the bottom end of two groups of front support rods and movable plate（9）Bottom end on front side of connection,
The bottom end of two groups of back support rods and movable plate（9）Bottom end on rear side of connection, movable plate（9）It is provided with telescopic rod（10）, connection
Lever（11）, adjust handle（12）And fixed link（13）, the movable plate（9）Be internally provided with telescopic cavity, the telescopic cavity
It is provided with the sliding mouth of limit on the right side of bottom end, the sliding mouth of adjusting, the fixed link are provided on the left of the front side wall of telescopic cavity（13）The right side
End is connect with the right side wall bottom end of telescopic cavity, the fixed link（13）Left end and telescopic rod（10）Lower right side activity riveting,
The telescopic rod（10）Bottom end be provided with multiple groups gear lever, the bottom end intracavitary portion of equal self extending of the multiple groups gear lever passes through limit
The sliding mouth in position and the bottom side for extending out to telescopic cavity, the telescopic rod（10）Left end and interlocking bar（11）Right end activity riveting, connection
Lever（11）Left end be provided with connecting shaft, the adjusting handle（12）Lateral wall in the middle part of be provided with pulling mouth, the interlocking bar
（11）The intracavitary portion of movable end self extending of connecting shaft pass through and adjust sliding mouth and extend out on the outside of telescopic cavity, while connecting shaft
Movable end continues the handle that is self-regulated（12）Inside pass through to pull and mouth and reach adjusting handle（12）Front side, the adjusting handle
（12）With interlocking bar（11）Connecting shaft by pull mouth activity riveting, further include limiter, the limiter includes support
（14）, rocking bar（15）, rotation axis（16）And baffle（17）, the support（14）Bottom end and sliding rail（6）Top on the right side of connection,
The support（14）Left end and right end be provided with and communicated with intercommunicating pore, the rotation axis（16）Left end from support（14）Right end
Across intercommunicating pore and it extend out to support（14）Left end, the rotation axis（16）Right end and rocking bar（15）Fixing end connection,
The rotation axis（16）Left end and baffle（17）Fixing end connection；It further include two groups of hack levers（18）, two groups of circular rails（19）,
Two groups of position-limited wheels（20）, line shaft（21）, driven spindle（22）, support shaft（23）, power shaft（24）And belt（25）, institute
State motor（3）Bottom end be provided with steadying plate, the left end of the steadying plate and station（1）Right side wall bottom end connection, institute
State motor（3）Output end and power shaft（24）Fixed suit, the support shaft（23）Left end rotation be provided with and choose
Bar, the left end of the rod and station（1）Right side wall connection, the driven spindle（22）, support shaft（23）And power
Shaft（24）Respectively with belt（25）Rotation suit, the driven spindle（22）Left end central area and line shaft（21）The right side
End connection, the rotation axis（16）Respectively with two groups of position-limited wheels（20）Rotation suit, two groups of hack levers（18）Bottom end with
Station（1）Top on the right side of connection, two groups of hack levers（18）Top respectively with two groups of circular rails（19）Bottom end connection,
Two groups of circular rails（19）It is provided with limit track, two groups of position-limited wheels（20）Rotation is installed on two groups of position-limited rails respectively
On road, and two groups of position-limited wheels（20）It is provided with two groups of clamping pieces, two groups of position-limited wheels（20）Pass through two groups of clamping pieces
Respectively with two groups of circular rails（19）Left side wall and right side wall be close to, line shaft（21）Left end and cutting plate rack（5）Consolidate
Fixed end connection.
2. a kind of silicon single crystal rod cutter device as described in claim 1, which is characterized in that further include squeezing shaft（26）, pendulum
Lever（27）, strength torsional spring（28）With side position bar（29）, side position bar（29）Cry left end and station（1）Right side wall on
Side connection, side position bar（29）Right end and oscillating rod（27）Bottom end activity riveting, side position bar（29）Top middle portion set
It is equipped with insertion groove, the insertion groove top is provided with insert port, the oscillating rod（27）Left side wall be provided with stretch slot, it is described
Stretching mouth, the strength torsional spring are provided on the left of stretch slot（28）Fixing end pass through insert port on the outside of the insertion groove and stretch
Enter to inside insertion groove, strength torsional spring（28）The outside of turning end self stretch slot pass through to stretch and mouth and extend into stretch slot
Portion, the oscillating rod（27）Right side wall top be provided with connecting rod, oscillating rod（27）Turned by the right end and extruding of connecting rod
Axis（26）Rotation connection, the extruding shaft（26）Circumferential wall and belt（25）Lateral wall be close to.
3. a kind of silicon single crystal rod cutter device as claimed in claim 2, which is characterized in that further include two groups of pressing plates（30）, two
Group supporting plate（31）, two groups of steady arms（32）, four groups of stock screws（33）With four groups of ears nuts（34）, two groups of steady arms
（32）Bottom end respectively with movable plate（9）Top left and right side connection, two groups of steady arms（32）Top difference
With two groups of supporting plates（31）Bottom end connection, two groups of supporting plates（31）Front side be connected to and set with center bottom with the top middle portion of rear side
It is equipped with threaded hole and two groups of pressing plates（30）Front side and the top middle portion and center bottom of rear side be provided with threaded hole, institute
State four groups of stock screws（33）Respectively from two groups of supporting plates（31）Downside is bolted through two groups of supporting plates（31）Four groups of threaded holes and
It extend out to two groups of supporting plates（31）The first volume, then four groups of stock screws（33）Respectively from two groups of pressing plates（30）Downside be bolted through
Two groups of pressing plates（30）Four groups of threaded holes and extend out to two groups of pressing plates（30）Upside, four groups of ears nuts（34）Screw thread
End respectively with four groups of stock screws（33）It is spirally connected, two groups of pressing plates（30）Inner lower edge is provided with anti-skidding leather packing.
4. a kind of silicon single crystal rod cutter device as claimed in claim 3, which is characterized in that further include loose collar（35）And operation
Bar（36）, the loose collar（35）With line shaft（21）Rotation suit, and loose collar（35）Positioned at two groups of circular rails（19）It
Between, the loose collar（35）Top and operating stick（36）Bottom end connection.
5. a kind of silicon single crystal rod cutter device as claimed in claim 4, which is characterized in that further include single threaded screw（37）, institute
State adjusting handle（12）Front side wall on the upside of and rear wall on the upside of be provided with and communicated with threaded hole, the single threaded screw（37）Be self-regulated handle
（12）Front side be bolted through threaded hole and extend into adjusting handle（12）Rear side, the adjusting handle（12）The end of thread and shifting
Movable plate（9）Front side wall on the left of be close to.
6. a kind of silicon single crystal rod cutter device as claimed in claim 5, which is characterized in that further include cylinder transparent protection plate
（38）, the cylinder transparent protection plate（38）Apical lateral wall, apical lateral wall, front end outer side wall and rear end side wall difference
With cutting plate rack（5）Four groups of claw bar inner sidewalls connection.
7. a kind of silicon single crystal rod cutter device as claimed in claim 6, which is characterized in that further include pushing handle（39）, institute
State promotion handle（39）Fixing end and movable plate（9）The connection of left end lateral wall.
8. a kind of silicon single crystal rod cutter device as claimed in claim 7, which is characterized in that further include crooked fulcrum bar（40）, pressure
Contracting spring（41）With sideslip bar（42）, the crooked fulcrum bar（40）Be internally provided with compression chamber, the sideslip bar（42）Top
End is connect with the front side wall of rocking bar, and the top of the compression chamber is provided with detent mouth, the sideslip bar（42）Bottom end be provided with
Limit film, the sideslip bar（42）Bottom end pass through and detent mouth and extend into compression chamber, the side from the outside of compression chamber
Slide bar（42）Bottom end clamped by the top activity of limit film and compression chamber, the compressed spring（41）Bottom end and compression chamber
Bottom end connection, the compressed spring（41）Top and sideslip bar（42）Limit film bottom end be close to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811007979.XA CN108890902A (en) | 2018-08-31 | 2018-08-31 | A kind of silicon single crystal rod cutter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811007979.XA CN108890902A (en) | 2018-08-31 | 2018-08-31 | A kind of silicon single crystal rod cutter device |
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| Publication Number | Publication Date |
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| CN108890902A true CN108890902A (en) | 2018-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811007979.XA Pending CN108890902A (en) | 2018-08-31 | 2018-08-31 | A kind of silicon single crystal rod cutter device |
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| CN (1) | CN108890902A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110039670A (en) * | 2019-06-06 | 2019-07-23 | 嵊州航羽电子有限公司 | A kind of silicon single crystal rod for presetting cutting is disconnected to cut terminal |
| CN110774466A (en) * | 2019-10-18 | 2020-02-11 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Safe and efficient semiconductor nondestructive cutting clamping method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4955357A (en) * | 1988-01-22 | 1990-09-11 | Hi-Silicon Co., Ltd. | Method and apparatus for cutting polycrystalline silicon rods |
| KR20090117439A (en) * | 2008-05-09 | 2009-11-12 | 신한테크주식회사 | Cutting device for concrete pile |
| US8623137B1 (en) * | 2008-05-07 | 2014-01-07 | Silicon Genesis Corporation | Method and device for slicing a shaped silicon ingot using layer transfer |
| CN204249124U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | For the cutter sweep of silicon single crystal rod |
| CN205522034U (en) * | 2016-01-20 | 2016-08-31 | 青岛高测科技股份有限公司 | Monocrystalline silicon clipper |
| CN206840463U (en) * | 2017-06-02 | 2018-01-05 | 福建鑫隆光伏科技有限公司 | A kind of cutter device of silicon single crystal rod |
| CN107552972A (en) * | 2017-09-07 | 2018-01-09 | 河北华工森茂特激光科技有限公司 | Semiconductor laser cutter device |
| CN209649183U (en) * | 2018-08-31 | 2019-11-19 | 江苏英锐半导体有限公司 | A kind of silicon single crystal rod cutter device |
-
2018
- 2018-08-31 CN CN201811007979.XA patent/CN108890902A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4955357A (en) * | 1988-01-22 | 1990-09-11 | Hi-Silicon Co., Ltd. | Method and apparatus for cutting polycrystalline silicon rods |
| US8623137B1 (en) * | 2008-05-07 | 2014-01-07 | Silicon Genesis Corporation | Method and device for slicing a shaped silicon ingot using layer transfer |
| KR20090117439A (en) * | 2008-05-09 | 2009-11-12 | 신한테크주식회사 | Cutting device for concrete pile |
| CN204249124U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | For the cutter sweep of silicon single crystal rod |
| CN205522034U (en) * | 2016-01-20 | 2016-08-31 | 青岛高测科技股份有限公司 | Monocrystalline silicon clipper |
| CN206840463U (en) * | 2017-06-02 | 2018-01-05 | 福建鑫隆光伏科技有限公司 | A kind of cutter device of silicon single crystal rod |
| CN107552972A (en) * | 2017-09-07 | 2018-01-09 | 河北华工森茂特激光科技有限公司 | Semiconductor laser cutter device |
| CN209649183U (en) * | 2018-08-31 | 2019-11-19 | 江苏英锐半导体有限公司 | A kind of silicon single crystal rod cutter device |
Non-Patent Citations (2)
| Title |
|---|
| 翟焕春;赵东杰;占志斌;: "单晶硅棒切方专用金刚石外圆切割片技术要求及制造工艺探讨", 超硬材料工程, no. 06, 15 December 2008 (2008-12-15) * |
| 韩长玉;王瑞洁;许觅婷;车丽玮;张兰;马会中;: "电镀金刚石超薄切割片切割单晶硅实验研究", 河南科技, no. 08, 15 August 2009 (2009-08-15) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110039670A (en) * | 2019-06-06 | 2019-07-23 | 嵊州航羽电子有限公司 | A kind of silicon single crystal rod for presetting cutting is disconnected to cut terminal |
| CN110774466A (en) * | 2019-10-18 | 2020-02-11 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Safe and efficient semiconductor nondestructive cutting clamping method |
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