CN108890124A - A kind of galvanometer motor, laser galvanometer and laser processing apparatus - Google Patents
A kind of galvanometer motor, laser galvanometer and laser processing apparatus Download PDFInfo
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- CN108890124A CN108890124A CN201811091561.1A CN201811091561A CN108890124A CN 108890124 A CN108890124 A CN 108890124A CN 201811091561 A CN201811091561 A CN 201811091561A CN 108890124 A CN108890124 A CN 108890124A
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- Prior art keywords
- refractor
- galvanometer
- motor
- laser
- incidence
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- 238000012545 processing Methods 0.000 title claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 9
- 239000012780 transparent material Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 241001442234 Cosa Species 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000010330 laser marking Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- GGYFMLJDMAMTAB-UHFFFAOYSA-N selanylidenelead Chemical compound [Pb]=[Se] GGYFMLJDMAMTAB-UHFFFAOYSA-N 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The disclosure is directed to a kind of galvanometer motor, laser galvanometer and laser processing apparatus.The galvanometer motor includes servo motor and refractor；Wherein：The refractor includes the plane of incidence and exit facet, receives an incident beam in the plane of incidence and forms deflecting light beams by unirefringence, which forms outgoing beam in the exit facet after birefringence and be radiated at working face predetermined position；Wherein the incident beam has preset incidence angle；Refractor described in the output axis connection of the motor adjusts displacement of the outgoing beam on working face to drive the refractor to deflect and change the incidence angle to form preset pattern.The disclosure improves the precision of galvanometer motor, reduces disturbing factor.
Description
Technical field
This disclosure relates to laser processing apparatus technical field more particularly to a kind of galvanometer motor of laser galvanometer, include
The laser galvanometer of the galvanometer motor and laser processing apparatus comprising the galvanometer motor.
Background technique
Laser galvanometer is a kind of optical scanner by the high-precision of driving plate and high speed swinging motor form, high speed,
It is widely used in laser marking, laser welding, precision laser cutting, Laser Micro-Machining, body laser inner carving, laser boring, material
The fields such as processing, shearing and the detection and projection of biologic medical.Laser galvanometer during the work time, laser output laser beam
It is mapped on its galvanometer motor, the processing of designated position in a certain range is realized by the deflection of the reflecting optics on galvanometer motor
Molding.The accuracy and speed of one galvanometer motor has been largely fixed the accuracy and speed of entire instrument.
It in the prior art, is all that the reflecting optics controlled on galvanometer motor come in fact applied to the galvanometer motor of laser galvanometer
The deflection of existing light beam, when the reflecting optics on galvanometer motor deflect an angle a, the laser reflection light that is irradiated on reflex reflector lens
The deflection angle of beam is 2a.But in actual operation, anyway, equipment operation bring error is inevitable, thus when
There is error reflecting optics thereon is caused to deflect angle error in galvanometer motor when being ω, and it is 2 that return laser beam, which deflects angle error,
ω.It can only achieve current level which results in the precision of laser galvanometer, be difficult to realize further improve.Therefore, having must
There is provided the new technical solution of one kind improves one or more problem present in above scheme.
Summary of the invention
The disclosure is designed to provide a kind of galvanometer motor, laser galvanometer and laser processing apparatus, and then at least exists
One or more is overcome the problems, such as caused by the limitation and defect due to the relevant technologies to a certain extent.
The embodiment of the present disclosure provides a kind of galvanometer motor, which is characterized in that the device includes servo motor and refractor；
Wherein：The refractor includes the plane of incidence and exit facet, receives an incident beam in the plane of incidence and passes through unirefringence shape
At deflecting light beams, which forms outgoing beam in the exit facet after birefringence and is radiated at working face predetermined position；
Wherein the incident beam has preset incidence angle；Refractor described in the output axis connection of the motor, it is described to drive
Refractor deflects and changes the incidence angle to adjust displacement of the outgoing beam on working face to form preset pattern.
In embodiment of the disclosure, the refractor has preset lens thickness, the lens thickness and the outgoing
Displacement of the light beam on working face is related.
In embodiment of the disclosure, the refractor has preset refractive index, and the refractive index and the refracting telescope
The material of piece is related.
In embodiment of the disclosure, the refractor is made of transparent material.
In embodiment of the disclosure, the transparent material includes glass, resin or crystal.
In embodiment of the disclosure, at least one in the plane of incidence and exit facet of the refractor is coated with anti-reflection film.
In embodiment of the disclosure, the refractor passes through the output axis connection of bracket and the motor.
In embodiment of the disclosure, the refractor is fixed on the bracket, which is connected to by fastener
On the output shaft of the motor.
The embodiment of the present disclosure provides a kind of laser galvanometer, the vibration including at least one as described in any of the above-described embodiment
Mirror motor.
The embodiment of the present disclosure additionally provides a kind of laser processing apparatus, including at least one galvanometer as described in any of the above-described
Motor.
The technical scheme provided by this disclosed embodiment can include the following benefits：
In a kind of embodiment of the disclosure, refractor described in the output axis connection of the motor, the refractor
The plane of incidence receives an incident beam and forms deflecting light beams, outgoing of the deflecting light beams in the refractor by unirefringence
Face forms outgoing beam after birefringence and is radiated on working face, and the rotation of the motor is to drive the refractor to send out
Life rotates and adjusts displacement of the outgoing beam on working face.When incident beam direction is constant, and since error leads to electricity
When the output shaft deflection of machine drives refractor to generate a deflection angle, the deflection angle of the deflecting light beams is far smaller than existing skill
The reflected light deflection angle that reflecting optics generate in art is missed to reduce the position that the outgoing beam is formed on working face
Difference, and then the precision of galvanometer motor is improved, reduce disturbing factor.
Detailed description of the invention
Fig. 1 shows galvanometer motor structural schematic diagram in disclosure exemplary embodiment；
Fig. 2 shows galvanometer motor partial structural diagrams in disclosure exemplary embodiment；
Fig. 3 shows light beam refraction principle figure in disclosure exemplary embodiment；
Fig. 4 shows light beam principle of reflection figure in disclosure exemplary embodiment.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to example set forth herein；On the contrary, thesing embodiments are provided so that the disclosure will more
Fully and completely, and by the design of example embodiment comprehensively it is communicated to those skilled in the art.Described feature, knot
Structure or characteristic can be incorporated in any suitable manner in one or more embodiments.
A kind of galvanometer motor is provided firstly in this example embodiment, referring to figs. 1 to Fig. 3, which includes watching
Take motor 10 and refractor 20.The refractor 20 includes the plane of incidence 21 and exit facet 22, which receives
One has the incident beam 50 of default incidence angle a, and forms deflecting light beams 51 by unirefringence, which goes out at this
It penetrates face 22 and forms outgoing beam 52 after birefringence and be radiated on the predetermined position of working face 60.The output shaft of the motor 10
The 11 connection refractors 20, to drive the refractor 20 to deflect and change the incidence angle a adjust it is described go out
Displacement of the irradiating light beam 52 on working face 60 is to form preset pattern.
In the present embodiment, as shown in figure 3, the refractor 20 have preset lens thickness t, lens thickness t with
Displacement of the outgoing beam 51 on working face 60 is related, in the application, it is thick can to control the eyeglass according to actual needs
Spend t.The refractor 20 has preset refractive index, and the refractive index is related to the material of the refractor 20, usually
In the case of, different refractor materials possesses different refractive index, and refractive index is higher, the ability for reflecting incident beam
It is stronger.
In one embodiment, referring to shown in Fig. 3, in order to enable being more likely to more light beams passes through refractor 20, it is described
Refractor 20 is made of transparent material, which can select the materials such as glass, resin or crystal.The present embodiment
In, at least one in the plane of incidence 21 and exit facet 22 of refractor 20 is coated with anti-reflection film, and the effect of anti-reflection film is to reduce reflection
The intensity of light, to increase the intensity of transmitted light.Common anti-reflection membrane material have magnesium fluoride, titanium oxide, vulcanized lead, lead selenide with
And ceramic infrared light infrared anti-reflection film, vinyl silsesquioxane hybridized film etc., the invention is not limited in this regard.
As shown in Fig. 2, in one embodiment, the galvanometer motor further includes a bracket 30, the refractor 20 is logical
Bracket 30 is crossed to connect with the output shaft 11 of the motor 10.The refractor 20 is fixed on the bracket 30, the bracket 30
It is connected on the output shaft 11 of the motor by fastener 40.In practical applications, often because the difference of demand, will replace
Different size, different types of refractor 20, the bracket 30 and refractor 20 are detachable for operating easily,.?
In the present embodiment, refractor 20 is bonded in one end of the bracket 30, and the other end of the bracket 30 is fixed by screws in
On the output shaft 11 of motor 10.The quantity of fastener 40 is more than or equal to 1 in the present invention, as long as guaranteeing that the bracket 30 can the company of consolidating
It connects on the output shaft 11 of motor 10, for example, the quantity of the fastener 40 is 2 in the schematic diagram of Fig. 2.
This example embodiment additionally provides a kind of laser galvanometer, including at least one is as described in any of the above-described embodiment
Galvanometer motor, in the present embodiment, the incident beam 50 that the refractor 20 of the galvanometer motor is received be laser beam,
The laser beam is issued by laser emitter.
Referring to figs. 1 to Fig. 3, the laser galvanometer controls watching for the galvanometer motor during the work time, using driving plate
Motor 10 is taken, by the rotation of output shaft 11 on servo motor 10, the refractor 20 is driven to be rotated.When the refraction
When eyeglass 20 turns an angle, incidence angle a just changes an angle, correspondingly, the angle of the refraction angle b of deflecting light beams 51 is sent out
Changing, so that the position that outgoing beam 52 is penetrated on working face 60 also changes, to scan the figure that we want.
In one embodiment, the horizontal plane of incidence 21 for injecting refractor 20 from air of incident beam 50 forms incidence
Angle a forms the deflecting light beams 51 with refraction angle b after unirefringence occurs, and the deflecting light beams 51 are in exit facet 22 through secondary
After refraction, forming the amount of side-shift that outgoing beam 52 is radiated on working face 60 is X.Assuming that the lens thickness of the refractor 20 is
The refractive index of t, eyeglass are k, then are obtained according to the law of refraction：
Sin a/sin b=k (when light beam injects medium by air, k > 1)
X=t sin (a-b)/cos b
In the prior art, as shown in figure 4, being reflected when the horizontal injection reflex reflector lens 70 of incident beam 50, it is assumed that enter
The angle of reflection of irradiating light beam 50 be c, incident beam 50 with working face 60 at a distance from be A, then incident beam 50 through reflection after
Horizontal distance on working face 60 is Y, then：
Y=Acot2c
When the incident direction of incident beam 50 is constant, and since error causes the motor output shaft 11 of galvanometer motor to deflect
Angle ω drives eyeglass also to produce a deflection angle ω, if the eyeglass is the refractor 20, it is assumed that incident beam 50
Refractive deflection angle be ω1If the eyeglass is reflecting optics 70 in the prior art, it is assumed that the reflection of incident beam 50 deflects
Angle is ω2, then：
sin(b-ω1)-sin b=sin (a- ω)/k-sin a/k
When a level off to 0 when, sin a level off to 0, sin b level off to 0 above formula can abbreviation be：
sin(b-ω1)=sin (a- ω)/k
sin b cosω1-cosbsinω1=(sin a cos ω-cos a sin ω)/k
Then sin ω1=cosa sin ω/k cosb
Due to cosine function in 0-90 ° of section monotone decreasing
B < a again
So cosb > cosa
K > 1 again
So sin ω1< sin ω
Due to SIN function in 0-90 ° of section monotonic increase
So ω1< ω
And ω when reflecting2=2 ω
So ω22 ω of >1
It can be seen that in conjunction with above-mentioned formula, when the error that motor deflects is identical, galvanometer motor provided by the present invention
Deflecting light beams deflection angle will than in the prior art reflecting optics generate small one times of reflected light deflection angle or more, to reduce
The location error that the outgoing beam is formed on working face, and then the precision of galvanometer motor is improved, also reduce interference
Factor.
The embodiment of the present disclosure additionally provides a kind of laser processing apparatus, should including galvanometer motor described in above-described embodiment
Laser processing apparatus can be laser marking machine, laser-beam welding machine, laser sub-marker, laser-beam drilling machine etc..
In the description of the disclosure, it is to be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
It describes the disclosure and simplifies description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore should not be understood as the limitation to the disclosure.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the disclosure, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the disclosure unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the disclosure.
In the disclosure unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is contained at least one embodiment or example of the disclosure.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
What can be combined in any suitable manner in one or more embodiment or examples.In addition, those skilled in the art can say this
Different embodiments or examples described in bright book are engaged and are combined.
Those skilled in the art after considering the specification and implementing the invention disclosed here, will readily occur to its of the disclosure
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes or
Person's adaptive change follows the general principles of this disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the disclosure are by appended
Claim is pointed out.
Claims (10)
1. a kind of galvanometer motor, which is characterized in that the device includes servo motor and refractor；Wherein：
The refractor includes the plane of incidence and exit facet, receives an incident beam in the plane of incidence and is formed by unirefringence
Deflecting light beams, the deflecting light beams form outgoing beam in the exit facet after birefringence and are radiated at working face predetermined position；Its
In the incident beam have preset incidence angle；
Refractor described in the output axis connection of the motor changes the incidence angle to drive the refractor to deflect
To adjust displacement of the outgoing beam on working face to form preset pattern.
2. galvanometer motor according to claim 1, which is characterized in that the refractor has preset lens thickness, should
Lens thickness is related to displacement of the outgoing beam on working face.
3. galvanometer motor according to claim 1 or claim 2, which is characterized in that the refractor has preset refractive index, and
The refractive index is related to the material of the refractor.
4. galvanometer motor according to claim 3, which is characterized in that the refractor is made of transparent material.
5. galvanometer motor according to claim 4, which is characterized in that the transparent material includes glass, resin or crystal.
6. galvanometer motor according to claim 3, which is characterized in that in the plane of incidence and exit facet of the refractor at least
One is coated with anti-reflection film.
7. galvanometer motor according to claim 3, which is characterized in that the refractor is defeated by bracket and the motor
Axis connection out.
8. galvanometer motor according to claim 7, which is characterized in that the refractor is fixed on the bracket, the branch
Frame is connected on the output shaft of the motor by fastener.
9. a kind of laser galvanometer, which is characterized in that including at least one as described in any one of claim 1~8 galvanometer motor.
10. a kind of laser processing apparatus, which is characterized in that including at least one, the galvanometer as described in any one of claim 1~8 is electric
Machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811091561.1A CN108890124A (en) | 2018-09-19 | 2018-09-19 | A kind of galvanometer motor, laser galvanometer and laser processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811091561.1A CN108890124A (en) | 2018-09-19 | 2018-09-19 | A kind of galvanometer motor, laser galvanometer and laser processing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108890124A true CN108890124A (en) | 2018-11-27 |
Family
ID=64359588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811091561.1A Pending CN108890124A (en) | 2018-09-19 | 2018-09-19 | A kind of galvanometer motor, laser galvanometer and laser processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108890124A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113843539A (en) * | 2021-11-23 | 2021-12-28 | 武汉华工激光工程有限责任公司 | Small laser processing head |
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| CN105518509A (en) * | 2013-09-05 | 2016-04-20 | 麦克马斯特大学 | Apparatus and method for foci array scanning through adjusting refractive medium |
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| CN208929446U (en) * | 2018-09-19 | 2019-06-04 | 西安荷佐里机电科技有限公司 | A kind of galvanometer motor, laser galvanometer and laser processing apparatus |
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2018
- 2018-09-19 CN CN201811091561.1A patent/CN108890124A/en active Pending
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|---|---|---|---|---|
| CN1430094A (en) * | 2001-12-31 | 2003-07-16 | 深圳朗光科技有限公司 | Tunable optical fiber attenuator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113843539A (en) * | 2021-11-23 | 2021-12-28 | 武汉华工激光工程有限责任公司 | Small laser processing head |
| CN113843539B (en) * | 2021-11-23 | 2023-04-18 | 武汉华工激光工程有限责任公司 | Small laser processing head |
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