CN108872151B - Optical sensor based on T-shaped pair and nanowire pair - Google Patents
Optical sensor based on T-shaped pair and nanowire pair Download PDFInfo
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Abstract
The invention relates to an optical sensor based on T-shaped pairs and nanowire pairs, which comprises a dielectric layer, a metal nanostructure and a substrate, wherein the metal nanostructure is in a dimer structure, the metal nanostructure comprises linear metal nanowire pairs arranged on the substrate and T-shaped metal nanowire pairs positioned between the linear metal nanowire pairs, the distance between two ends of the transverse edge of each T-shaped metal nanowire and the corresponding linear metal nanowire is equal to the distance between the longitudinal edges of the two T-shaped metal nanowires, the length of each linear metal nanowire is equal to the length of the transverse edge of each T-shaped metal nanowire, the width of the longitudinal edge of each T-shaped metal nanowire is equal to the width of each transverse edge of each T-shaped metal nanowire, and the width of each linear metal nanowire is equal to the height of each T-shaped metal nanowire. The optical sensor has the advantages of simple structure, greatly reduced difficulty in preparation process, good sensing effect and easy improvement of sensitivity.
Description
Technical Field
The invention relates to the field of sensors, in particular to an optical sensor based on T-shaped pairs and nanowire pairs.
Background
The requirements of the sensor on miniaturization, automation, selectivity, stability, sensitivity, response time, service life and the like are higher and higher, and the development and application of novel sensing materials are receiving more and more attention. The use of new materials for the manufacture of new sensors has become one of the important directions of research, and the research of nanowires as sensor sensitive materials has been particularly attractive. This is mainly due to the large specific surface area and high surface activity of one-dimensional nanomaterials, which are particularly sensitive to the surrounding environment.
In 2011 verelelen N et al in Plasmon Line Shaping Using Nanocrosses for High Sensitivity Localized Surface Plasmon Resonance Sensing, a metamaterial sensor based on combination of an X-type and a nanowire is proposed, wherein the left side of the sensor is the X-type, the right side of the sensor is the nanowire, the material of the sensor is composed of gold, and the sensor is of a three-layer structure composed of a medium, gold and a substrate from bottom to top, and the substrate is a glass material. The X-shaped structure in the structure has the characteristic of angle control, but the structure is difficult in the preparation process, the preparation process requirement is high, the influence of the structure is low, and the sensitivity of the sensor can not meet the requirement of customers sometimes.
Disclosure of Invention
The invention aims to provide an optical sensor based on a T-shaped pair and a nanowire pair, which has a simple structure, is easy to process and greatly improves the sensitivity.
In order to achieve the above purpose, the optical sensor based on the T-shaped pair and the nanowire pair adopts the following technical scheme: the optical sensor comprises a dielectric layer, a metal nano structure and a substrate, wherein the dielectric layer, the metal nano structure and the substrate are sequentially arranged from top to bottom, the metal nano structure is of a dimer structure, the metal nano structure comprises linear metal nano pairs arranged on the upper surface of the substrate, the linear metal nano pairs comprise linear metal nano wires which are arranged at intervals in parallel and extend longitudinally, the metal nano structures further comprise T-shaped metal nano pairs which are oppositely arranged on the upper surface of the substrate between the linear metal nano wires, the T-shaped metal nano pairs comprise T-shaped metal nano wires which are arranged at intervals in opposite longitudinal sides and are arranged in parallel on transverse sides, the distance between two ends of the transverse sides of each T-shaped metal nano wire and the longitudinal sides of the corresponding linear metal nano wires is equal, the length of each linear metal nano wire is equal to the length of the transverse sides of each T-shaped metal nano wire, the width of the longitudinal sides of each T-shaped metal nano wire and the width of each transverse side of each linear metal nano wire are equal, and the height of each T-shaped metal nano wire is equal to the height of each T-shaped metal nano wire.
The distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 10-60nm.
The distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 40nm.
The length of the linear metal nanowire is 80-150nm.
The length of the linear metal nanowire is 100nm.
The length of the longitudinal side of the T-shaped metal nanowire is 30nm-90nm.
The width of the linear metal nanowire is 10-50nm.
The width of the linear metal nanowire is 20nm.
The height of the T-shaped metal nanowire is 20-50nm.
The height of the T-shaped metal nanowire is 30nm.
The invention has the beneficial effects that: the metal nano structure is a dimer structure and comprises a linear metal nano pair and T-shaped metal nano pairs positioned between the linear metal nano pairs, the distance between the two ends of the transverse edge of each T-shaped metal nano wire and the corresponding linear metal nano wire is equal to the distance between the longitudinal edges of the two T-shaped metal nano wires, the length of each linear metal nano wire is equal to the length of the transverse edge of each T-shaped metal nano wire, the width of the longitudinal edge of each T-shaped metal nano wire is equal to the width of the transverse edge and the width of each linear metal nano wire, and the height of each T-shaped metal nano wire is equal to the height of each linear metal nano wire. The optical sensor has the advantages of simple structure, greatly reduced difficulty in preparation process, good sensing effect and easy improvement of sensitivity. Light can be incident in any direction, and sensitivity difference caused by the incident angle does not exist. Such an optical sensor is only relatively sensitive to the refractive index of the object, irrespective of the intensity of the light, and can detect and indicate a change in wavelength by simply illuminating the structure, regardless of the direction from which the light is incident.
Drawings
FIG. 1 is a schematic diagram of one embodiment of an optical sensor of the present invention based on T-pairs and nanowire pairs;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a schematic diagram of the positional structure of T-shaped metal nano-pairs and linear metal nano-pairs;
FIG. 4 is a graph showing the extinction spectrum of the optical sensor obtained by theoretical calculation in the present embodiment;
FIG. 5 is a graph showing the relationship between the incident wavelength and the refractive index of the optical sensor obtained by theoretical calculation in the present embodiment;
FIG. 6 is a graph showing the relationship between the quality factors of the optical sensor obtained by theoretical calculation in the present embodiment, wherein P 1 Is the variation of short wavelength with refractive index, P 2 Is the change of the long wavelength with refractive index, their relation is fom=m (nm RIU -1 ) FWHM (nm), m is the change in wavelength as the refractive index changes within a cell, and FWHM is the half-wave width.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which are derived by a person skilled in the art based on the embodiments of the invention, fall within the scope of protection of the invention.
An embodiment of an optical sensor based on a T-pair and nanowire pair of the present invention: as shown in fig. 1 to 6, the metal nano-structure comprises a dielectric layer 1, a metal nano-structure and a substrate 2 which are sequentially arranged from top to bottom, wherein the substrate 2 is a quartz plate, and the metal nano-structure is a dimer structure and is embedded on the substrate 2. The metal nanostructure includes linear metal nanowire pairs 3 having parallel spaced linear metal nanowires 5 disposed on an upper surface of a substrate 2, the length of the linear metal nanowires 5 extending in a longitudinal direction. The metal nano structure also comprises T-shaped metal nano pairs 4 which are oppositely arranged between the linear metal nano wires 5 on the upper surface of the substrate 2, wherein the T-shaped metal nano pairs 4 comprise T-shaped metal nano wires 6 of which longitudinal edges 8 are oppositely arranged at intervals and transverse edges 7 are arranged in parallel. Wherein, the distance D between the two ends of the transverse edge 7 of each T-shaped metal nanowire 6 and the corresponding linear metal nanowire 5 is equal to the distance D between the longitudinal edges 8 of the two T-shaped metal nanowires 6, the length L of the linear metal nanowire 5 is equal to the length L of the transverse edge 7 of the T-shaped metal nanowire 6, the width W of the longitudinal edge 8 of the T-shaped metal nanowire 6 is equal to the width W of the transverse edge 7 and the width W of the linear metal nanowire 5, and the height H of the T-shaped metal nanowire 6 is equal to the height H of the linear metal nanowire 5. Light can be incident in any direction, and sensitivity difference caused by the incident angle does not exist. Such an optical sensor is only relatively sensitive to the refractive index of the object, irrespective of the intensity of the light, and can detect and indicate a change in wavelength by simply illuminating the structure, regardless of the direction from which the light is incident. The linear metal nano pair 3 and the T-shaped metal nano pair 4 are both made of metal silver, and the dielectric layer 1 is air.
The distance D between the two ends of the lateral edge 7 of each T-shaped metal nanowire 6 and the corresponding linear metal nanowire 5 is 40nm. The length of the linear metal nanowire 5 is 100nm. The length S of the longitudinal side 8 of the T-shaped metal nanowire 6 is 40nm. The width of the longitudinal edges 8 of the T-shaped metal nanowires 6 is 20nm. The height H of the T-shaped metal nanowire 6 is 30nm.
The metal nano structure is a dimer structure, the structure is simple, the preparation process requirement difficulty is greatly reduced, the sensing effect is good, and the optical sensor with the structure can easily improve the sensitivity of the sensor. The mechanism of the optical sensor is that the interaction of plasmas among the metal nanowires is promoted to generate different spectral responses by adjusting the parameters of the T-shaped metal nano pairs and the parameters of the linear metal nano pairs, so that the sensing effect is realized.
The preparation process of the optical sensor based on the T-shaped pair and nanowire pair structure comprises the following steps:
And step 6, developing: and performing corrosion development on the exposed photoresist by using a developing solution.
The sensor-carrying sensing characteristics were simulated using a wave optics module of finite element electromagnetic simulation software Comsol Multiphysics. Firstly, a structural model is constructed in software, then periodic boundary conditions are set, the influence can be eliminated by constructing a perfect matching layer aiming at the boundary reflection condition, and finally the whole structure is simulated. The resulting extinction spectrum plot of the sensor is calculated as shown in fig. 4. The resulting graph of the incident wavelength versus refractive index for the sensor is calculated as shown in fig. 5. The calculated figure of merit for the sensor is shown in figure 6.
In other embodiments of the invention, the length of the linear metal nanowires is 80nm; the length of the linear metal nanowire is 150nm; the length of the longitudinal side of the T-shaped metal nanowire is 30nm; the length of the longitudinal side of the T-shaped metal nanowire is 90nm; the width of the longitudinal side of the T-shaped metal nanowire is 10nm; the width of the longitudinal side of the T-shaped metal nanowire is 50nm; the height of the T-shaped metal nanowire is 20nm; the height of the T-shaped metal nanowire is 50nm; the distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 10nm; the distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 60nm.
Claims (10)
1. An optical sensor based on T shape is to and nanowire is to, includes dielectric layer, metal nanostructure and the basement that sets gradually from top to bottom, its characterized in that: the substrate is a quartz plate, the metal nano structure is a dimer structure, the metal nano structure comprises linear metal nano pairs arranged on the upper surface of the substrate, the linear metal nano pairs comprise linear metal nano wires which are arranged in parallel at intervals and extend longitudinally, the metal nano structure also comprises T-shaped metal nano pairs which are oppositely arranged on the upper surface of the substrate between the linear metal nano wires, the T-shaped metal nano pairs comprise T-shaped metal nano wires with opposite longitudinal edges and parallel transverse edges, the distance between two ends of the transverse edges of each T-shaped metal nano wire and the corresponding linear metal nano wire is equal to the distance between the longitudinal edges of the two T-shaped metal nano wires, the length of each linear metal nano wire is equal to the length of the transverse edge of each T-shaped metal nano wire, the width of the longitudinal edges of each T-shaped metal nano wire is equal to the width of each transverse edge of each T-shaped metal nano wire, and the height of each T-shaped metal nano wire is equal to the height of each linear metal nano wire.
2. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 10-60nm.
3. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the distance between the two ends of the transverse edge and the corresponding linear metal nanowire is 40nm.
4. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the length of the linear metal nanowire is 80-150nm.
5. The optical sensor based on T-pairs and nanowire pairs of claim 4, wherein: the length of the linear metal nanowire is 100nm.
6. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the length of the longitudinal side of the T-shaped metal nanowire is 30nm-90nm.
7. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the width of the linear metal nanowire is 10-50nm.
8. The optical sensor based on T-pairs and nanowire pairs of claim 7, wherein: the width of the linear metal nanowire is 20nm.
9. The optical sensor based on T-pairs and nanowire pairs according to claim 1, characterized in that: the height of the T-shaped metal nanowire is 20-50nm.
10. The optical sensor based on T-pairs and nanowire pairs of claim 9, wherein: the height of the T-shaped metal nanowire is 30nm.
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