CN108870974A - Spread furnace body - Google Patents
Spread furnace body Download PDFInfo
- Publication number
- CN108870974A CN108870974A CN201810833677.1A CN201810833677A CN108870974A CN 108870974 A CN108870974 A CN 108870974A CN 201810833677 A CN201810833677 A CN 201810833677A CN 108870974 A CN108870974 A CN 108870974A
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- CN
- China
- Prior art keywords
- furnace body
- insulating layer
- insulator
- resistance wire
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
Abstract
The invention discloses a kind of diffusion furnace bodies, it is related to chip manufacture field, the lower problem of temperature uniformity everywhere in existing eight cun of diffusions furnace body, its key points of the technical solution are that including the furnace body outer wall of cylindrical setting, the insulating layer of cylindrical setting that inside outer wall is arranged in, the resistance wire for the spiral setting being arranged on insulating layer and several insulators on insulating layer for being fixed on resistance wire on insulating layer being arranged in；Close to the part of furnace body front end one third on insulating layer, the distance between two adjacent rings resistance wire is 3~10 millimeters, the distance between the two adjacent rings resistance wire at one third end is 4~millimeter among furnace body, the part of furnace body rear end one third, the distance between two adjacent rings resistance wire is 3~10 millimeters, by to the distance of resistance wire controls everywhere in furnace body, improving in furnace body the uniformity of temperature everywhere.
Description
Technical field
The present invention relates to chip manufacture fields, more specifically, it is related to a kind of diffusion furnace body.
Background technique
The essential production equipment of diffusion furnace chip production, with the development of present chip industry, large scale diffusion furnace
It is necessary product, domestic diffusion furnace is mostly 4 cun and 6 cun, 8 cun of diffusion furnace furnace for 6 cun of diffusion furnaces now
Intracorporal space increases, and the control of furnace body temperature is more difficult, makes in furnace body that temperature uniformity is lower everywhere, once and furnace body
Inside temperature uniformity is lower everywhere, is easy to appear and produces the inconsistent problem of chip-resistance rate.It is needed in a kind of furnace body now
The higher 8 cun of diffusion furnaces of temperature uniformity everywhere.
Summary of the invention
In view of the deficiencies of the prior art, the present invention intends to provide a kind of diffusion furnace body, by furnace
The distance of resistance wire everywhere is controlled in vivo, improves in furnace body the uniformity of temperature everywhere.
To achieve the above object, the present invention provides following technical solutions：A kind of diffusion furnace body, including cylindrical set
The furnace body outer wall set, the insulating layer of cylindrical setting that inside outer wall is set, the spiral setting that is arranged on insulating layer
Resistance wire and it is arranged on insulating layer for several insulators for being fixed on resistance wire on insulating layer；
Close to the part of furnace body front end one third on insulating layer, the distance between two adjacent rings resistance wire is 3~10 millimeters,
The distance between the two adjacent rings resistance wire at one third end is 4~12 millimeters among furnace body, the portion of furnace body rear end one third
Point, the distance between two adjacent rings resistance wire is 3~10 millimeters.
By using above-mentioned technical proposal, controlled by the distance to the resistance wire of two adjacent rings in furnace body three sections
System, when so that diffusion furnace body being heated, temperature uniformity everywhere is higher.
The present invention is further arranged to：The material of the resistance wire is HRE material.
By using above-mentioned technical proposal, resistance wire uses HRE material, enables to the heat production of resistance wire more uniform,
Improve the stability of resistance wire heat production, when preferably improving heating in furnace body temperature everywhere uniformity.
The present invention is further arranged to：The insulating layer is made of ceramic fibre material.
By using above-mentioned technical proposal, insulating layer made of ceramic fibre material will not both generate thawing at high temperature,
And itself is also relatively low for the conductibility of heat, thus reduce in diffusion furnace body everywhere temperature from the transmitting on insulating layer,
When to preferably improve heating in furnace body temperature everywhere uniformity.
The present invention is further arranged to：The insulator is divided into several groups on insulating layer, and each group of insulation group is all along furnace
The length direction of external wall is arranged.
By using above-mentioned technical proposal, the insulator that several groups are arranged along the length direction of furnace body outer wall, to spiral
The resistance wire of setting can preferably control the distance between two adjacent rings resistance wire when being fixed, thus preferably
When improving heating in furnace body temperature everywhere uniformity.
The present invention is further arranged to：Described insulator one end is inserted into insulating layer, and the other end stretches out insulating layer, absolutely
The two sides up and down that edge stretches out one end of insulating layer offer the mutual corresponding upper groove and recessed in semicircle shape setting respectively
The radius of slot, upper groove and lower groove is all equal with the radius of resistance wire；
Insulator is located at the link slot for offering that section is in isosceles trapezoid shape at the top of one end in insulating layer, the bottom of link slot
Side is horizontally disposed；The bottom that insulator is located at one end in insulating layer is fixedly connected with and the mutually matched size shape of link slot
Shape link block identical with link slot, when the link block of adjacent two insulator and link slot mutual cooperation, adjacent two insulator
Upper groove and lower groove collectively constitute a complete circle.
By using above-mentioned technical proposal, resistance wire can be consolidated in link slot by snapping fit onto link block
It is fixed, to just be pre-fixed to resistance wire before insulator is fixed in insulating layer, thus preferably to two adjacent rings
The distance of resistance wire is controlled, thus when preferably improving heating in furnace body temperature everywhere uniformity.
The present invention is further arranged to：The connection trench bottom both ends are provided with the first fillet, the link block bottom two
End be provided with it is identical with the first fillet size shape and with mutually matched second fillet of the first fillet；
By using above-mentioned technical proposal, manpower when using insulator can be prevented by the first fillet of setting and the second fillet
It is scratched by sharp wedge angle, and it is more convenient to enable to link block to be inserted into link slot.
The present invention is further arranged to：One end that the insulator is extend into insulating layer offers connection along the vertical direction
Hole, after the link block of adjacent two insulator is inserted into link slot, the connecting hole of adjacent two insulator is interconnected；
A connecting rope that same group of several insulators link together is provided in the connecting hole of same group of insulator.
By using above-mentioned technical proposal, by setting connecting hole and connecting rope, can first pass through connecting rope in advance will be same
Several insulators of group are fixed together, so that the position to resistance wire is fixed in advance, furnace body when preferably improving heating
The inside uniformity of temperature everywhere.
The present invention is further arranged to：The insulator is made of ceramic materials.
By using above-mentioned technical proposal, ceramic material will not be conductive, and the heating conduction of ceramic material itself also compares
It is poor so that the heat that resistance wire generates will not be transmitted by ceramic material, thus prevent because insulator thermally conductive and
Influence the uniformity of temperature everywhere in furnace body when heating.
In conclusion the present invention has the advantages that compared with the prior art：
1, for the present invention close to the part of furnace body front end one third on insulating layer, the distance between two adjacent rings resistance wire is 3
~10 millimeters, the distance between the two adjacent rings resistance wire at furnace body centre one third end is 4~12 millimeters, and furnace body rear end three is divided
One of part, the distance between two adjacent rings resistance wire is 3~10 millimeters, improves in furnace body the uniformity of temperature everywhere；
2, the present invention is by being arranged several groups along the equally distributed insulator of furnace body outer wall length direction, and sets on the insulator
Upper groove, lower groove, link slot and link block are set, resistance wire can be consolidated in link slot by snapping fit onto link block
It is fixed, to just be pre-fixed to resistance wire before insulator is fixed in insulating layer, thus preferably to two adjacent rings
The distance of resistance wire is controlled, thus when preferably improving heating in furnace body temperature everywhere uniformity.
Detailed description of the invention
Fig. 1 is the axonometric drawing of the complete structure of embodiment；
Fig. 2 is the portion the A enlarged diagram of Fig. 1；
Fig. 3 is the cross-sectional view that embodiment embodies insulator specific structure；
Fig. 4 is the portion the B enlarged diagram of Fig. 3；
Fig. 5 is the axonometric drawing of the complete structure of temperature measuring rack.
In figure：1, furnace body outer wall；2, insulating layer；3, resistance wire；4, insulator；41, upper groove；42, link slot；421,
One fillet；43, link block；431, the second fillet；44, lower groove；45, connecting hole；46, connecting rope.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.The wherein identical appended drawing reference of identical components
It indicates.It should be noted that word "front", "rear" used in the following description, "left", "right", "up" and "down" refer to it is attached
Direction in figure, word " bottom surface " and " top surface ", "inner" and "outside" are referred respectively to towards or away from geometric center of specific component
Direction.
Embodiment one：A kind of diffusion furnace body, referring to attached drawing 1 and attached drawing 2, furnace body outer wall 1 including cylindrical setting,
The insulating layer 2 that the cylindrical setting made of ceramic fibre material of inside outer wall is set, the spiral shell being arranged on insulating layer 2
It revolves the resistance wire 3 of setting and several insulators 4 on insulating layer 2 for being fixed on resistance wire 3 on insulating layer 2 is set；
Insulator 4 is divided into several groups on insulating layer 2, and length direction of each group of insulation group all along furnace body outer wall 1 is arranged；It is protecting
Close to the part of furnace body front end one third on warm layer 2, the distance between two adjacent rings resistance wire 3 is 3 millimeters, three among furnace body
The distance between two adjacent rings resistance wire 3 of/one end is 4 millimeters, the part of furnace body rear end one third, two adjacent rings electricity
Hindering the distance between silk 3 is 3 millimeters；The material of resistance wire 3 is HRE material.
Referring to attached drawing 3 and attached drawing 4,4 one end of insulator is inserted into insulating layer 2, and the other end stretches out insulating layer 2, insulation
The two sides up and down that son 4 stretches out one end of insulating layer 2 offer upper groove 41 and lower groove 44, upper groove 41 and lower groove 44 respectively
All semicircular in shape is arranged and radius is all equal with the radius of resistance wire 3, and the center of circle of upper groove 41 and lower groove 44 is same perpendicular
On straight line, same group of adjacent two insulator 4 contacts with each other, and the upper groove 41 of two adjacent insulators 4 and recessed
Slot 44 collectively constitutes a complete circle；Insulator 4 limits resistance wire 3 by upper groove 41 and the cooperation of lower groove 44
Position, so that resistance wire 3 is fixed on insulating layer 2.
Referring to attached drawing 3 and attached drawing 4, insulator 4, which is located at the top of one end in insulating layer 2, offers link slot 42, connection
The section of slot 42 is arranged in isosceles trapezoid shape, and the bottom side of link slot 42 is horizontally disposed, the bottom both ends of link slot 42
It is both provided with the first fillet 421；The bottom that even insulator 4 is located at one end in insulating layer 2 is fixedly connected with and 42 phase of link slot
The size shape mutually cooperated link block 43 identical with link slot 42, and the bottom both ends of link block 43 are provided with and the first circle
Identical second fillet 431 of 421 size shape of angle, two second fillets 431 cooperate with two first fillets 421 respectively.It is adjacent
The link blocks 43 of two insulators 4 be inserted into link slot 42 when cooperating with link slot 42, upper groove 41 and lower groove 44
Collectively constitute a complete circle；In same group of several insulators 4, at the top of link block 43 not to the distance at the top of link slot 42
Together, to preferably control the distance between resistance wire 3.One end that insulator 4 extend into insulating layer 2 offers along the vertical direction
Connecting hole 45, after the link block 43 of adjacent two insulator 4 is inserted into link slot 42, the connecting hole of adjacent two insulator 4
45 are interconnected；It is provided with a connecting rope 46 in the connecting hole 45 of same group of insulator 4, by connecting rope 46 by same group
Several insulators 4 link together.
Embodiment two：The present embodiment and embodiment one the difference is that, divide on insulating layer 2 close to furnace body front end three
One of part, the distance between two adjacent rings resistance wire 3 is 6.5 millimeters, the two adjacent rings electricity at one third end among furnace body
Hindering the distance between silk 3 is 8 millimeters, the part of furnace body rear end one third, and the distance between two adjacent rings resistance wire 3 is 6.5
Millimeter.
Embodiment three：The present embodiment and embodiment one the difference is that, divide on insulating layer 2 close to furnace body front end three
One of part, the distance between two adjacent rings resistance wire 3 is 10 millimeters, the two adjacent rings resistance at one third end among furnace body
The distance between silk 3 is 12 millimeters, the part of furnace body rear end one third, and the distance between two adjacent rings resistance wire 3 is 10 millis
Rice.
Comparative example one：Spreading furnace body includes outer wall；Furnace body leans on the part of front end one third, two adjacent rings resistance wire
The distance between 3 be 2 millimeters, and the distance between the two adjacent rings resistance wire 3 at one third end is 3 millimeters among furnace body, furnace body
The part of rear end one third, the distance between two adjacent rings resistance wire 3 are 2 millimeters.
Comparative example two：Spreading furnace body includes outer wall；Furnace body leans on the part of front end one third, two adjacent rings resistance wire
The distance between 3 be 11 millimeters, and the distance between the two adjacent rings resistance wire 3 at one third end is 13 millimeters among furnace body, furnace
The part of body rear end one third, the distance between two adjacent rings resistance wire 3 are 11 millimeters.
The uniformity of experiment detection temperature：
It include the central shaft rod to overlap with furnace body axis, axis using the temperature measuring rack as shown in Figure 5 made of ceramic fibre
The top of bar is located at close to the middle position of furnace body top one third section, and the bottom end of central shaft rod is located at three close to furnace body bottom end
/ mono- section of middle position；The top of central shaft rod is provided with the apical ring that diameter is equal to 2 internal diameter half of insulating layer, apical ring
Axis and the axis of central shaft rod overlap, and the top of apical ring and central shaft rod is located in the same horizontal plane.The top of central shaft rod is solid
Surely three rhizospheres are connected with around the equally distributed top cross bar in the periphery of central shaft rod；The middle position of central shaft rod is in apical ring and three
The position that top cross bar projects downwards is corresponding to be provided with middle ring and three middle part cross bars, and the middle position of central shaft rod is in apical ring
And the position that projects downwards of three top cross bars is corresponding is provided with base ring and three root bottom part cross bars.
The top of central shaft rod is provided with A1 temperature measuring point, three points that three top cross bars intersect with apical ring are respectively arranged with
Tri- temperature measuring points of A2, A3 and A4.The middle position of central shaft rod is provided with B1 temperature measuring point, the bottom end of central shaft rod is provided with C1
Temperature measuring point；The position of temperature measuring point A2, A3, A4 vertical projection to middle ring is respectively arranged with B2, B3, B4 temperature measuring point.Temperature measuring point A2,
The position of A3, A4 vertical projection to base ring is respectively arranged with C2, C3, C4 temperature measuring point.By temperature measuring rack be placed individually into embodiment one,
Embodiment two, embodiment three, comparative example one and comparative example two diffusion furnace body in, carried out using each temperature measuring point each in furnace body
Locate the test of temperature, test result is as follows shown in list lattice：
Each temperature measuring point thermometer of embodiment one
Each temperature measuring point thermometer of embodiment two
Each temperature measuring point thermometer of embodiment three
Each temperature measuring point thermometer of comparative example one
Each temperature measuring point thermometer of comparative example two
Each watch test is obtained the difference between each temperature measuring point and heating temperature to be averaged, furnace body heating is finally obtained
The average value of the temperature difference.The average value that one furnace body of embodiment heats the temperature difference is 0.342 DEG C, and two furnace body of the embodiment heating temperature difference is averaged
Value is 0.283 DEG C, and the average value of the furnace body heating temperature difference of embodiment three is 0.333 DEG C, the furnace body heating temperature difference of comparative example one
Average value is 2.333 DEG C, and the average value of the furnace body heating temperature difference of comparative example two is 2.958 DEG C.After comparing it can be found that,
The temperature uniformity of embodiment one, embodiment two and embodiment three is substantially better than comparative example one and the temperature of comparative example two is uniform
Property.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of diffusion furnace body, it is characterised in that：Furnace body outer wall (1), setting including cylindrical setting are in inside outer wall
Cylindrical setting insulating layer (2), be arranged on insulating layer (2) spiral setting resistance wire (3) and setting protecting
Several insulators (4) on warm layer (2) for being fixed on resistance wire (3) on insulating layer (2)；
On insulating layer (2) close to furnace body front end one third part, the distance between two adjacent rings resistance wire (3) be 3~
10 millimeters, the distance between the two adjacent rings resistance wire (3) at furnace body centre one third end is 4~12 millimeters, furnace body rear end three
/ mono- part, the distance between two adjacent rings resistance wire (3) are 3~10 millimeters.
2. diffusion furnace body according to claim 1, it is characterised in that：The material of the resistance wire (3) is HRE material.
3. diffusion furnace body according to claim 1, it is characterised in that：The insulating layer (2) is by ceramic fibre material system
At.
4. diffusion furnace body according to claim 1, it is characterised in that：The insulator (4) is divided on insulating layer (2)
Several groups, length direction of each group of insulation group all along furnace body outer wall (1) are arranged.
5. diffusion furnace body according to claim 4, it is characterised in that：Described insulator (4) one end is inserted into insulating layer
(2) in, the other end stretches out insulating layer (2), and the two sides up and down that insulator (4) stretches out the one end of insulating layer (2) offer respectively
The radius of mutual corresponding upper groove (41) and lower groove (44) in semicircle shape setting, upper groove (41) and lower groove (44) is all
It is equal with the radius of resistance wire (3)；
Insulator (4) is located at the link slot (42) for offering that section is in isosceles trapezoid shape at the top of one end in insulating layer (2), even
The bottom side of access slot (42) is horizontally disposed；The bottom that insulator (4) is located at one end in insulating layer (2) is fixedly connected with and connects
Access slot (42) mutually matched size shape and link slot (42) identical link block (43), when the company of adjacent two insulator (4)
When connecing block (43) and link slot (42) mutual cooperation, the upper groove (41) and common group of lower groove (44) of adjacent two insulator (4)
At a complete circle.
6. diffusion furnace body according to claim 5, it is characterised in that：Link slot (42) the bottom both ends are provided with
One fillet (421), link block (43) the bottom both ends be provided with it is identical with the first fillet (421) size shape and with
Mutually matched second fillet (431) of first fillet (421).
7. diffusion furnace body according to claim 5, it is characterised in that：The insulator (4) extend into insulating layer (2)
One end offer connecting hole (45) along the vertical direction, when the link block (43) of adjacent two insulator (4) is inserted into link slot
(42) after in, the connecting hole (45) of adjacent two insulator (4) is interconnected；
One is provided in the connecting hole (45) of same group of insulator (4), and same group of several insulators (4) are connected to one
The connecting rope (46) risen.
8. diffusion furnace body according to claim 1, it is characterised in that：The insulator (4) is made of ceramic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810833677.1A CN108870974A (en) | 2018-07-26 | 2018-07-26 | Spread furnace body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810833677.1A CN108870974A (en) | 2018-07-26 | 2018-07-26 | Spread furnace body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108870974A true CN108870974A (en) | 2018-11-23 |
Family
ID=64305303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810833677.1A Pending CN108870974A (en) | 2018-07-26 | 2018-07-26 | Spread furnace body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108870974A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3651240A (en) * | 1969-01-31 | 1972-03-21 | Trw Inc | Heat transfer device |
| JPH0758046A (en) * | 1993-08-11 | 1995-03-03 | Tokyo Electron Ltd | Heat treatment apparatus |
| CN1257991A (en) * | 1999-12-01 | 2000-06-28 | 上海交通大学 | Method for decreasing heat loss caused by grate bricks in industrial furnace |
| CN201163149Y (en) * | 2008-01-24 | 2008-12-10 | 郑州市科慧高科技发展有限公司 | Electric resistance furnace |
| CN101846451A (en) * | 2009-03-24 | 2010-09-29 | 台湾积体电路制造股份有限公司 | The rotatable and tunable heaters that is used for semiconductor furnace |
| CN103017527A (en) * | 2013-01-03 | 2013-04-03 | 上海实研电炉有限公司 | Atmosphere furnace |
-
2018
- 2018-07-26 CN CN201810833677.1A patent/CN108870974A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3651240A (en) * | 1969-01-31 | 1972-03-21 | Trw Inc | Heat transfer device |
| JPH0758046A (en) * | 1993-08-11 | 1995-03-03 | Tokyo Electron Ltd | Heat treatment apparatus |
| CN1257991A (en) * | 1999-12-01 | 2000-06-28 | 上海交通大学 | Method for decreasing heat loss caused by grate bricks in industrial furnace |
| CN201163149Y (en) * | 2008-01-24 | 2008-12-10 | 郑州市科慧高科技发展有限公司 | Electric resistance furnace |
| CN101846451A (en) * | 2009-03-24 | 2010-09-29 | 台湾积体电路制造股份有限公司 | The rotatable and tunable heaters that is used for semiconductor furnace |
| CN103017527A (en) * | 2013-01-03 | 2013-04-03 | 上海实研电炉有限公司 | Atmosphere furnace |
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Application publication date: 20181123 |
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