CN108317862A - Quartzy pipe heating device and quartzy pipe heating method - Google Patents
Quartzy pipe heating device and quartzy pipe heating method Download PDFInfo
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- CN108317862A CN108317862A CN201710026748.2A CN201710026748A CN108317862A CN 108317862 A CN108317862 A CN 108317862A CN 201710026748 A CN201710026748 A CN 201710026748A CN 108317862 A CN108317862 A CN 108317862A
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- heating
- quartz ampoule
- quartz
- heat insulator
- furnace body
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
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- General Engineering & Computer Science (AREA)
- Resistance Heating (AREA)
Abstract
A kind of quartz pipe heating device, including：Furnace body opens up inlet port and outlet port on the furnace body；Multiple heating units, the multiple heating unit are arranged between the feed inlet and the discharge port, and the multiple heating unit is mutual indepedent, are formed along feed inlet to multiple and different regions of discharge port direction temperature increment, for being heated to quartz ampoule；Wherein, the feed inlet is used to enter furnace body for quartz ampoule to penetrate the multiple different zones, and the discharge port leaves the furnace body for being pierced by after the multiple different zones for quartz ampoule.The present invention also provides a kind of quartzy pipe heating methods, prevent quartz ampoule from melting insufficient and quartz ampoule is caused to extend raw in the process draw, to prevent the quartz ampoule to be formed surface quality defect, it prevents quartz tube fluctuation after extending caused by the extending part heat control accuracy difference of quartz ampoule big simultaneously, and reduces the extension efficiency of quartz ampoule caused by preventing the efficiency of heating surface of quartz ampoule relatively low.
Description
Technical field
The present invention relates to a kind of heating device and heating means more particularly to a kind of quartzy pipe heating device and quartz ampoule to add
Hot method.
Background technology
Currently, quartzy pipe heating device is processing link important in quartzy processing technology.Traditional quartz ampoule heating dress
It sets and quartz ampoule is heated using single temperature zone domain, the big quartz ampoule of diameter is extended into the small quartz ampoule of diameter.But it adopts
It can lead to following problem with single temperature zone domain：
1. enough energy should be provided for the extension of quartz ampoule, the soft state of quartz ampoule extending part is kept, meanwhile,
It bears again and the quartz ampoule for having just enter into single temperature zone domain is preheated and heated up, until being warming up to extensible temperature, easily cause molten
Melt it is insufficient, it is raw during causing quartz ampoule to extend to draw, form the surface quality defect of quartz ampoule.
2. the preheated zone of quartz ampoule is not detached with heating region is extended, the extending part heat of quartz ampoule is caused to control essence
It is really poor, cause quartz tube fluctuation after extending larger.
3. the efficiency of heating surface of quartz ampoule is relatively low, the extension efficiency of quartz ampoule is reduced, in order to improve the extension effect of quartz ampoule
Rate improves the efficiency of heating surface by improving heating temperature, but can so cause that heating unit electric current is excessive, heating unit is local
The excessively high harmful effect of temperature, shortens the heating unit service life.
Invention content
In view of this, it is necessary to provide a kind of quartzy pipe heating device and quartzy pipe heating methods, by making quartz
Pipe is realized across the different region of multiple temperature and improves quartz ampoule processing quality and extension efficiency.
The first aspect of the application provides a kind of quartzy pipe heating device, and the quartz pipe heating device includes：
Furnace body opens up inlet port and outlet port on the furnace body；
Multiple heating units, the multiple heating unit is arranged between the feed inlet and the discharge port, described more
A heating unit is mutual indepedent, is formed along feed inlet to multiple and different regions of discharge port direction temperature increment, for quartz
Pipe is heated；
Wherein, the feed inlet is used to enter furnace body for quartz ampoule to penetrate the multiple different zones, the discharge port
The furnace body is left for being pierced by after the multiple different zones for quartz ampoule.
Preferably, the multiple different zones include at least one preparation region and at least one operating area, it is described extremely
Higher than at least one temperature for preparing region, at least one preparations region is used for pair the temperature of a few operating area
Quartz ampoule is preheated, and at least one operating area is used to carry out operation to the quartz ampoule.
Preferably, each heating unit is electrical resistor heating element, each heating unit includes electrode and heating element, each
Electrode includes being connect respectively with the heating element into electric termination electrode and current output terminal electrode, the heating element be located at it is described into
Among electric termination electrode and the current output terminal electrode, the heating element is used to heat the quartz ampoule；
Or each heating unit is sensing heating unit, each heating unit includes induction coil and heating bucket.
Preferably, the heating element includes the closing structure being made of multiple concatenated heating plates.
Preferably, the quartz pipe heating device further includes the first heat insulator being located in the furnace body, described first every
Hot body is hollow, the multiple heating unit of the first heat insulator partial receipt, and first heat insulator is for reducing or preventing
The quartzy pipe heating device of heat outflow caused by the heating element.
Preferably, the multiple heating element is contained in first heat insulator, each go out into electric termination electrode and each
Electric termination electrode all includes extension, each passes through described the into the extension of the extension of electric termination electrode and each current output terminal electrode
One heat insulator, and be electrically connected with the heating element.
Preferably, further including each end into electric termination electrode and each current output terminal electrode, each end is prolonged from corresponding
One end protrusion of part is stretched, each end is located at outside the furnace body, and is trapped on the side wall of the furnace body, each into electric end electricity
The extension of the extension of pole and each current output terminal electrode passes through the furnace body.
Preferably, the quartz pipe heating device further includes the second heat insulator being located in first heat insulator, it is described
Second heat insulator is hollow, all includes each a connection piece into electric termination electrode and each current output terminal electrode, and the connector is located at institute
It states outside the second heat insulator, the heating element further includes two lugs, and described two lugs are from the outer surface of the heating element
Protrusion, each lug passes through outside second heat insulator to second heat insulator, and is fixedly connected with corresponding connector.
The second aspect of the application provides a kind of quartzy pipe heating method, and the quartz pipe heating method is applied to such as take up an official post
Quartzy pipe heating device described in a claim of anticipating, the quartz pipe heating method include：
Quartz ampoule is entered into the furnace body from feed inlet；
The quartz ampoule is passed through to multiple and different regions of the temperature increment of the multiple heating unit formation.
Preferably, the multiple different zones include at least one preparation region and at least one operating area, it is described extremely
The temperature of a few operating area is higher than at least one temperature for preparing region, and at least one preparation region is to quartz
Pipe is preheated, and at least one operating area carries out operation to the quartz ampoule.
The present invention forms the different multiple and different regions of temperature by multiple mutually independent heating units, can be in not same district
Domain executes the quartz ampoule different operations, and quartz ampoule melting can be prevented insufficient and quartz ampoule is caused to extend life in the process
Draw, to prevent the quartz ampoule to be formed surface quality defect, while can prevent quartz ampoule extending part heat control essence
Quartz tube fluctuation is big after extending caused by degree difference, and can prevent from reducing stone caused by the efficiency of heating surface of quartz ampoule is relatively low
The extension efficiency of English pipe.
Description of the drawings
Fig. 1 is the stereogram of the quartzy pipe heating device of embodiment of the present invention.
Fig. 2 is the decomposition diagram of the quartzy pipe heating device of embodiment of the present invention.
Fig. 3 is the III-III diagrammatic cross-sections of quartzy pipe heating device shown in FIG. 1.
Fig. 4 is the flow chart of the quartzy pipe heating method of embodiment of the present invention.
Main element symbol description
Following specific implementation mode will be further illustrated the present invention in conjunction with above-mentioned attached drawing.
Specific implementation mode
Below in conjunction with the accompanying drawings, it is described in detail by the specific implementation mode to the present invention, technical scheme of the present invention will be made
And other advantageous effects are apparent.It is appreciated that attached drawing is only for reference and description, not it is used for limiting the present invention
System.The size shown in attached drawing does not limit proportionate relationship only for ease of clearly describing.
For the simplicity of description, the spatially relative terms such as "upper" and "lower" can be used for herein describe an element or
Feature and other (multiple) elements shown in the accompanying drawings or the relationship of (multiple) feature.And the spatially relative terms such as " outer surface " this
Place can be used for describe an element Partial Feature relative to the element in attached drawing other features relationship.Device can be with
Different orientation (being rotated by 90 ° or in other directions) and spatial relative descriptor used herein should be interpreted accordingly.
In the description of the present invention, it is to be understood that, the orientation of the instructions such as term " horizontal direction " and " vertical direction "
Or position relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, and
It is not that the device of instruction or hint meaning or element must have a particular orientation, with specific azimuth configuration and operation, therefore
It is not considered as limiting the invention.
Please refer to Fig.1 and Fig. 2, Fig. 1 be an embodiment of the present invention quartzy pipe heating device stereogram.Fig. 2 is this
Invent the exploded view of the quartzy pipe heating device of an embodiment.The quartz pipe heating device 100 includes furnace body 110, first
Heat insulator 120, the second heat insulator 130 and multiple heating units 140.First heat insulator 120 is contained in the furnace body 110
In, second heat insulator 130 is contained in first heat insulator 120, and the multiple heating unit 140 is partially housed in institute
It states in the second heat insulator 130, and across second heat insulator 130, first heat insulator 120 and the furnace body 110 to institute
State furnace body 110.The multiple heating unit 140 is used to form multiple and different regions of temperature increment, to add to quartz ampoule
Heat.The quartz ampoule can enter the multiple different zones from one end of the furnace body 110 and from the other end of the furnace body 110
The multiple different zones, first heat insulator 120 and second heat insulator 130 are left for preventing the multiple heating
Heat caused by unit 140 spreads out of the furnace body 110.
The furnace body 110 includes outer tube 111, the first cover board 112 and the second cover board 113.It opens at 111 both ends of the outer tube
Mouthful and it is hollow.In the present embodiment, the cross section of the outer tube 111 is generally circular.In other embodiments, described
The cross section of outer tube 111 is substantially square, oval, star-like or other shapes.Multiple cards are formed on the outer tube 111
Hold hole 114.The multiple holding hole 114 is divided into two row on the outer tube 111.In the present embodiment, two row
Holding hole 114 is mutually parallel and relatively, and the quantity of the multiple holding hole 114 is six.In other embodiments, described
Two row holding holes 114 can not be mutually parallel and/or person is not opposite, and the quantity of the multiple holding hole 114 can be other quantity,
Such as it is four or eight.First cover board 112 and second cover board 113 are fixedly installed on the outer tube 111 respectively
Opposite both ends with opening.In the present embodiment, the shape of first cover board 112 is circle.In other embodiment party
In formula, the shape of first cover board 112 is rectangular, oval, star-like or other shapes.It is formed on first cover board 112
There is feed inlet 115.The feed inlet 115 is used to enter the furnace body 110 for the quartz ampoule.In the present embodiment, described
The shape of second cover board 113 is circle.In other embodiments, the shape of second cover board 113 be it is rectangular, oval,
Star-like or other shapes.It is formed with discharge port 116 on second cover board 113.The discharge port 116 is used to supply the quartz ampoule
Leave the furnace body 110.In the present embodiment, the discharge port 116 is opposite with the feed inlet 115.In other embodiment party
In formula, the discharge port 116 can not be opposite with the feed inlet 115.
First heat insulator 120 is contained in the inner space of the furnace body 110.First heat insulator 120 is by glass
Glass, asbestos, rock wool or evacuated panel etc. are made.First heat insulator 120 includes heat shield 121 and end cap 122.In this reality
It applies in mode, the heat shield 121 is substantially cylindrical.In other embodiments, 111 substantially square cylinder of the outer tube
Shape, oval tubular, star-like tubular or other shapes.121 both ends open of the heat shield and hollow.The heat shield 121
Divide receiving the heating unit 140, for preventing heat caused by the heating unit 140 (i.e. radial) from horizontal direction
Spread out of the furnace body 110.Multiple first straight slots 123 are formed on the heat shield 121.The multiple first straight slot 123 is in institute
It states and is divided into two row on heat shield 121.123 and one holding hole 114 of each first straight slot is opposite.In the present embodiment, described
Two the first straight slots of row 123 are mutually parallel and relatively, and it is six that the shape of the multiple first straight slot 123, which is round and quantity,.
In other embodiments, two row, first straight slot 123 can not be mutually parallel and/or person is not opposite, and the multiple first
The shape of straight slot 123 is other shapes, such as ellipse or rectangular, while quantity can be other quantity, is such as four or eight
It is a etc..Heat shield 121 opens up accepting hole 125 (as shown in Figure 3) in an axial direction, for accommodating heating unit 140.Accepting hole 125 wraps
The second segment 1252 (as shown in Figure 3) for including first segment 1251 (as shown in Figure 3) and being connected to first segment 1251.Second segment 1252 compared with
First segment 1251 is close to the first cover board 112.The diameter of first segment 1251 is more than the diameter of second segment 1252, therefore heat shield 121
Inner wall on formed one keep out face 126 (as shown in Figure 3), keep out the friendship that face 126 is located at first segment 1251 and second segment 1252
At boundary.
The end cap 122 is annular in shape.The opening of heat shield 121 described in 122 partial occlusion of the end cap.The end cap 122
For preventing heat caused by heating unit 140 from spreading out of the furnace body 110 on (i.e. axial) from vertical direction.In this embodiment party
In formula, the end cap 122 is in annular shape, and in other embodiments, the end cap 122 is in oval ring-type or rectangular loop
Deng.In the present embodiment, the quantity of the end cap 122 is one, is fixed on one end of the heat shield 121.In other realities
It applies in mode, the heat shield 121 is formed with the part of the second segment 1252 and the first segment 1251 that is formed with
Part is separable two parts, and the part that the heat shield 121 is formed with the second segment 1252 is another end cap, two ends
Lid is individually fixed in the opposite both ends of the heat shield 121.
Second heat insulator, 130 both ends open and hollow.Second heat insulator 130 is contained in first heat insulator
In 120, and the multiple heating unit 140 of partial receipt, specifically, the second heat insulator 130 is housed in the receiving of heat shield 121
In the first segment 1251 in hole 125, and both ends are against respectively on the face of keeping out 126 and end cap 122.Second heat insulator 130 is by glass
Glass, asbestos, rock wool or evacuated panel etc. are made.Second heat insulator 130 is for further preventing the heating unit 140
Generated heat spreads out of the furnace body 110.In the present embodiment, second heat insulator 130 is substantially cylindrical.At it
In his embodiment, second heat insulator, 130 substantially square tubular, oval tubular, star-like tubular or other shapes.Institute
It states and is formed with multiple second straight slots 131 on the second heat insulator 130.The multiple second straight slot 131 is in second heat insulator 130
On be divided into two row.Each second straight slot 131 is opposite with corresponding first straight slot 123.In the present embodiment, described two is arranged
Two straight slots 131 are mutually parallel and relatively, and the shape of the multiple second straight slot 131 is rectangular and quantity is six.At other
In embodiment, two row, second straight slot 131 can not be mutually parallel and/or person is not opposite, and the multiple second straight slot 131
Shape be other shapes, such as semicircle, half elliptic, while quantity can be other quantity, such as be four or eight.
Fig. 3 is please also refer to, the multiple heating unit 140 is mutual indepedent, and is arranged in order from top to bottom.In this implementation
In mode, first cover board 112 is located at the upper end of the outer tube 111, and second cover board 113 is located at the outer tube
111 lower end, the multiple heating unit 140 are used to form multiple and different regions of temperature increment from top to bottom.In other realities
It applies in mode, first cover board 112 is located at the lower end of the outer tube 111, and second cover board 113 is located at the outer tube
111 upper end, the multiple heating unit 140 are used to form multiple and different regions of lapse of temperature from top to bottom.It is multiple and different
Region includes preparing region 141 and operating area 142.In the present embodiment, the quantity for preparing region 141 is two, institute
The quantity for stating operating area 142 is one.In other embodiments, the quantity for preparing region 141 can be one, three
Either the quantity of three or more the operating areas 142 can be two, three or three or more.The operating area 142
Temperature is higher than the temperature for preparing region 141.The preparation region 141 is for preheating quartz ampoule, the operation area
Domain 142 is used to carry out operation to the quartz ampoule.The operation is extension or wire drawing.To, it can be achieved that preheating and Job Operations
The temperature requirement of Shi Butong.In other embodiments, the multiple different zones may also include other regions, such as heating zone
Domain.The heating region is between the preparation region 141 and the operating area 142.The temperature in the heating region is high
In the temperature for preparing region 141, it is less than the temperature of the operating area 142.The heating region will be for that will pass through preheating
The temperature of quartz ampoule be increased to can processing temperature.
In the present embodiment, the multiple heating unit 140 is mutually parallel.In other embodiments, the multiple
Heating unit 140 is not mutually parallel or part is mutually parallel.Each heating unit 140 is electrical resistor heating element.Each heating is single
Member 140 includes electrode 150 and heating element 160.Each electrode 150 is used to power for corresponding heating element 160.Each electrode
150 include into electric termination electrode 151 and current output terminal electrode 152.Each into electric termination electrode 151 and corresponding current output terminal electrode 152
One end with external power supply for being electrically connected, each into electric termination electrode 151 and the other end of corresponding current output terminal electrode 152 and corresponding
Heating element 160 be electrically connected.Each heating element 160 is located at corresponding into electric termination electrode 151 and corresponding current output terminal electrode
Between 152.The heating element 160 is used to heat the quartz ampoule.
Specifically, 150 material of the electrode is copper either metal materials such as silver or be the nonmetallic materials such as molybdenum or graphite.
Each extension 153, end 154 and connector 155 are respectively included into electric termination electrode 151 and corresponding current output terminal electrode 152.
In present embodiment, the shape of the extension 153 is cylinder.In other embodiments, the shape of the extension 153
For rectangular or elliptical cylinder-shape etc..The both ends of each extension 153 are protruded respectively is formed with the end 154 and the connector
155.In the present embodiment, the shape of the end 154 is cylinder.In other embodiments, the extension 153
Shape is rectangular or elliptic cylindrical shape etc..Each end 154 is located at outside the furnace body 110, and is trapped in the furnace body 110
On side wall.Each into the extension 153 of electric termination electrode 151 from outside the furnace body 110 pass through one row in corresponding holding hole 114
In to the furnace body 110, and enter in first heat insulator 120 across corresponding first straight slot 123 of respective column, each goes out
The extension 153 of electric termination electrode 152 is from the corresponding holding hole 114 passed through outside the furnace body 110 in another row to the furnace body
In 110, and enter in first heat insulator 120 across corresponding first straight slot 123 of corresponding row.
In the present embodiment, the heating element 160 is graphite.In other embodiments, the heating element 160
For resistance wire etc..Each heating element 160 includes closing structure 161 and two lugs 162.The closing structure 161 is contained in
In second heat insulator 130.The closing structure 161 be by multiple concatenated heating plates 163 form closure structure, every two
Slot is formed between a adjacent heating plate.In the present embodiment, the closing structure 161 is ring-shaped closed structure.At it
In his embodiment, the closing structure 161 is rectangular closing structure, oval closing structure etc..In the present embodiment, often
Two lugs 162 are protruded from the outer surface of corresponding closing structure 161.In the present embodiment, described two lugs 162 are in side
Shape, and be oppositely arranged.In other embodiments, described two lugs 162 are rounded or oval etc., and opposite can not set
It sets.One lug 162 of each heating element 160 passes through in a row corresponding second straight slot 131 out of second heat insulator 130
Outside to second heat insulator 130 and in first heat insulator 120, another lug 162 of each heating element 160 is worn
It is outer to second heat insulator 130 out of second heat insulator 130 and be located at institute to cross in another row corresponding second straight slot 131
It states in the first heat insulator 120, the connector 155 corresponding with one in first heat insulator 120 of each lug 162, which is fixed, to be connected
It connects.
To can each connect with corresponding heating element 160 and corresponding current output terminal electrode 152 into electric termination electrode 151
A circuit is formed, each powers, makes for corresponding heating element 160 into electric termination electrode 151 and corresponding current output terminal electrode 152
The heating element 160 is obtained to give off heat.It wherein, can be by the way that different power, electric current be arranged to the multiple heating element 160
Or voltage, so that the multiple heating unit 140 forms the different multiple and different regions of temperature.It specifically, can be by setting
The difference for the voltage that the external power supply being electrically connected with the electrode 150 is provided is set to make 160 quilt of the multiple heating element
It is provided with different voltage.Or can also be the multiple electrode 150 by the intermediary element and one with different resistance values outside
Power electric connection, so that the multiple heating element 160 is equipped with different electric currents.
When being assembled, the heating element 160 is positioned in second heat insulator 130, and makes described add
The lug 162 of thermal element 160 passes through corresponding second straight slot 131, and second heat insulator 130 is sleeved on first heat insulator
120, and first heat insulator 120 is sleeved on the furnace body 110, the electrode 150 is passed through into the holding hole 114 and institute
It is connect with the lug 162 after stating the first straight slot 123, and the end cap 122 and first cover board 112 and described second is covered
Plate 113 is individually fixed on first heat insulator 120 and the furnace body 110.
To which the present invention forms the different region of temperature by multiple heating units 140 so that different regions can be to stone
English pipe executes different operations, and quartz ampoule melting can be prevented insufficient and quartz ampoule is caused to extend raw drawing in the process, to prevent
The defect of the surface quality of the quartz ampoule of formation, while caused by can preventing the extending part heat control accuracy difference of quartz ampoule
Quartz tube fluctuation is big after extension, and the extension effect of quartz ampoule is reduced caused by the efficiency of heating surface of quartz ampoule can be prevented relatively low
Rate.Meanwhile feed inlet 115 is set on first cover board 112 and discharge port 116 is set on second cover board 113, make
The different region of the temperature can be entered and left by obtaining the multiple quartz ampoule.Also, pass through first heat insulator 120 and institute
The second heat insulator 130 is stated, prevents heat caused by the heating unit 140 from spreading out of the furnace body 110.
It is apparent that the heating unit 140 is not only limited to the electrode 150 in present embodiment and heating element 160, institute
It can be sensing heating unit to state heating unit 140 also, and the heating unit 140 includes induction coil and heating bucket, the induction
Coil is wrapped in the periphery of the heating bucket, and the induction coil passes through second heat insulator, the first heat insulator and the stove
Body is connect with external power supply, and the heating bucket is set in second heat insulator 130, for heating the quartz ampoule.Obviously
Ground, the induction coil are not only limited to above-mentioned across second heat insulator, the first heat insulator and the furnace body and external electrical
Source connects, can also be arranged between second heat insulator and first heat insulator, and across first heat insulator and
The furnace body is connect with external power supply.It is apparent that the assemble method is not only limited to the assemble method in present embodiment, also
There can be other assemble methods, the furnace body 110 and described as described in being first individually fixed in the second cover board 113 and an end cap 122
The lower end of one heat insulator 120, then the heating element 160 is positioned in second heat insulator 130, or also have other conjunctions
Suitable modification.It is apparent that the quartz pipe heating device 100 is not only limited to the direction anticipated shown in attached drawing placement, the stone
English pipe heating device 100 can also be laterally disposed, or can also be to be placed at an angle with ground.It is apparent that described in being formed
The length of the heating plate of the heating element 160 of operating area 142 is not only limited to and is formed described in the preheated zone and formation
The length of the heating plate of the heating element 160 in heating region is identical, forms adding for the heating element 160 of the operating area 142
The length of backing is less than the length of the heating plate for the heating element 160 for forming the preheated zone and/or the formation heating region
Degree, to realize the accurately quartz ampoule heating to operating area 142.It is apparent that the shape of the heating unit 140 is not only
The straight line being confined in attached drawing can also be in certain radian.
Referring to FIG. 4, the flow chart of the quartzy pipe heating method for embodiment of the present invention.The quartz pipe heating method
Applied to the quartzy pipe heating device.It is described quartz pipe heating method include：
Step S401：Quartz ampoule is entered into furnace body from feed inlet.
Step S402：Quartz ampoule is passed through to multiple and different regions of the temperature increment of multiple heating units formation, specifically,
Quartz ampoule, which sequentially passes through, prepares region and operating area.
Step S403：Quartz ampoule is left into furnace body from discharge port.
Further, the multiple different zones include at least one preparation region and at least one operating area, described
The temperature of at least one operating area is higher than at least one temperature for preparing region, and at least one preparation region is to stone
English pipe is preheated, and at least one operating area carries out operation to the quartz ampoule.
Further, multiple and different regions of the temperature increment are formed by resistance heating manner.
Further, multiple and different regions of the temperature increment are formed by induction heating mode.
Further, the multiple to be formed by the way that the different heating power of multiple heating units, current or voltage is arranged
Different zones.
It is noted that the above embodiment is only the better embodiment of the present invention, those skilled in the art can also be at this
Other variations are done in spirit.It is claimed should to be all included in the present invention for these variations that spirit is done according to the present invention
Within the scope of.
Claims (10)
1. it is a kind of quartz pipe heating device, which is characterized in that it is described quartz pipe heating device include：
Furnace body opens up inlet port and outlet port on the furnace body；
Multiple heating units, the multiple heating unit are arranged between the feed inlet and the discharge port, the multiple to add
Hot cell is mutual indepedent, is formed along feed inlet to multiple and different regions of discharge port direction temperature increment, for quartz ampoule into
Row heating；
Wherein, the feed inlet is used to enter furnace body for quartz ampoule to penetrate the multiple different zones, and the discharge port is used for
It is pierced by after the multiple different zones for quartz ampoule and leaves the furnace body.
2. quartz pipe heating device as described in claim 1, it is characterised in that：The multiple different zones include at least one
Prepare region and at least one operating area, the temperature of at least one operating area is higher than at least one preparation region
Temperature, for being preheated to quartz ampoule, at least one operating area is used for institute at least one preparation region
It states quartz ampoule and carries out operation.
3. quartz pipe heating device as described in claim 1, it is characterised in that：Each heating unit is electrical resistor heating element,
Each heating unit includes electrode and heating element, and each electrode includes being connect with the heating element respectively into electric termination electrode
And current output terminal electrode, the heating element are located at described among electric termination electrode and the current output terminal electrode, the heating element
For being heated to the quartz ampoule；
Or each heating unit is sensing heating unit, each heating unit includes induction coil and heating bucket.
4. quartz pipe heating device as claimed in claim 3, it is characterised in that：The heating element includes by multiple concatenated
The closing structure of heating plate composition.
5. quartz pipe heating device as claimed in claim 3, it is characterised in that：The quartz pipe heating device further includes being located at
The first heat insulator in the furnace body, first heat insulator is hollow, the multiple heating of the first heat insulator partial receipt
Unit, first heat insulator is for reducing or preventing heat caused by the heating element from spreading out of the quartz ampoule heating dress
It sets.
6. quartz pipe heating device as claimed in claim 5, it is characterised in that：The multiple heating element is contained in described
All include each extension into electric termination electrode and each current output terminal electrode, each into the extension of electric termination electrode in one heat insulator
First heat insulator is passed through with the extension of each current output terminal electrode, and is electrically connected with the heating element.
7. quartz pipe heating device as claimed in claim 6, it is characterised in that：Each into electric termination electrode and each current output terminal electricity
Pole all further includes end, and each end is protruded from one end of corresponding extension, and each end is located at outside the furnace body, and by card
It holds on the side wall of the furnace body, each passes through the stove into the extension of the extension of electric termination electrode and each current output terminal electrode
Body.
8. quartz pipe heating device as claimed in claim 4, it is characterised in that：The quartz pipe heating device further includes being located at
The second heat insulator in first heat insulator, second heat insulator is hollow, each into electric termination electrode and each current output terminal electricity
Pole all includes a connection piece, and the connector is located at outside second heat insulator, and the heating element further includes two lugs, institute
It states two lugs to protrude from the outer surface of the heating element, each lug passes through second heat insulator to described second heat-insulated
In vitro, and with corresponding connector it is fixedly connected.
9. a kind of quartz pipe heating method, which is characterized in that the quartz pipe heating method is applied to as described in claim 1-8
Quartzy pipe heating device, it is described quartz pipe heating method include：
Quartz ampoule is entered into the furnace body from feed inlet；
The quartz ampoule is passed through to multiple and different regions of the temperature increment of the multiple heating unit formation.
10. quartz pipe heating method as claimed in claim 9, it is characterised in that：The multiple different zones include at least one
The temperature of a preparation region and at least one operating area, at least one operating area is higher than at least one area in preparation
The temperature in domain, at least one preparation region preheat quartz ampoule, and at least one operating area is to the quartz
Pipe carries out operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710026748.2A CN108317862B (en) | 2017-01-14 | 2017-01-14 | Quartz tube heating device and quartz tube heating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710026748.2A CN108317862B (en) | 2017-01-14 | 2017-01-14 | Quartz tube heating device and quartz tube heating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108317862A true CN108317862A (en) | 2018-07-24 |
| CN108317862B CN108317862B (en) | 2020-05-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710026748.2A Active CN108317862B (en) | 2017-01-14 | 2017-01-14 | Quartz tube heating device and quartz tube heating method |
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| EP1496325A2 (en) * | 2003-07-10 | 2005-01-12 | Blüm, Heinz-Jürgen | Process for combined debinding and sintering of glass-ceramic, ceramic and metallic shaped articles |
| CN101190824A (en) * | 2006-11-21 | 2008-06-04 | 亚洲光学股份有限公司 | Glass molding device |
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| CN203360262U (en) * | 2013-06-28 | 2013-12-25 | 江苏丰源光伏科技有限公司 | Continuous melting furnace for producing elliptical quartz tubes |
| CN204848629U (en) * | 2015-07-13 | 2015-12-09 | 江苏圣达石英制品有限公司 | Multi -temperature -zone heating continuous smelting stove |
| CN106810055A (en) * | 2017-02-07 | 2017-06-09 | 江苏鑫亿鼎石英科技股份有限公司 | Square inwall production of quartz tubes equipment and technique |
| CN206970453U (en) * | 2017-04-20 | 2018-02-06 | 江苏太平洋石英股份有限公司 | The adjustable crucible lifting formula quartz glass continuous induction melting furnace of molding zone temperatures |
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| EP1496325A2 (en) * | 2003-07-10 | 2005-01-12 | Blüm, Heinz-Jürgen | Process for combined debinding and sintering of glass-ceramic, ceramic and metallic shaped articles |
| CN101190824A (en) * | 2006-11-21 | 2008-06-04 | 亚洲光学股份有限公司 | Glass molding device |
| CN201449142U (en) * | 2009-07-02 | 2010-05-05 | 连云港福东正佑照明电器有限公司 | Quartz tube continuous smelter provided with secondary heater at lower part |
| CN203360262U (en) * | 2013-06-28 | 2013-12-25 | 江苏丰源光伏科技有限公司 | Continuous melting furnace for producing elliptical quartz tubes |
| CN204848629U (en) * | 2015-07-13 | 2015-12-09 | 江苏圣达石英制品有限公司 | Multi -temperature -zone heating continuous smelting stove |
| CN106810055A (en) * | 2017-02-07 | 2017-06-09 | 江苏鑫亿鼎石英科技股份有限公司 | Square inwall production of quartz tubes equipment and technique |
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| CN108317862B (en) | 2020-05-15 |
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