CN108317862B - Quartz tube heating device and quartz tube heating method - Google Patents

Quartz tube heating device and quartz tube heating method Download PDF

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CN108317862B
CN108317862B CN201710026748.2A CN201710026748A CN108317862B CN 108317862 B CN108317862 B CN 108317862B CN 201710026748 A CN201710026748 A CN 201710026748A CN 108317862 B CN108317862 B CN 108317862B
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quartz tube
heating
heat insulator
furnace body
heat
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CN108317862A (en
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王占举
沈一春
庄卫星
张贤根
赵海伦
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Zhongtian Technology Advanced Materials Co ltd
Jiangsu Zhongtian Technology Co Ltd
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Zhongtian Technology Advanced Materials Co ltd
Jiangsu Zhongtian Technology Co Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00Arrangement of elements for electric heating in or on furnaces
    • F27D11/02Ohmic resistance heating

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  • General Engineering & Computer Science (AREA)
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Abstract

A quartz tube heating apparatus comprising: the furnace body is provided with a feeding hole and a discharging hole; the heating units are arranged between the feeding hole and the discharging hole, are mutually independent, form a plurality of different areas with gradually increased temperatures along the direction from the feeding hole to the discharging hole and are used for heating the quartz tube; the feeding hole is used for allowing the quartz tube to enter the furnace body to penetrate into the different areas, and the discharging hole is used for allowing the quartz tube to penetrate out of the different areas and then to leave the furnace body. The invention also provides a quartz tube heating method, which prevents the quartz tube from being pulled in the extension process due to insufficient melting of the quartz tube, thereby preventing the defect of the surface quality of the formed quartz tube, simultaneously preventing the diameter fluctuation of the quartz tube after extension caused by poor heat control precision of the extension part of the quartz tube, and preventing the extension efficiency of the quartz tube from being reduced due to lower heating efficiency of the quartz tube.

Description

Quartz tube heating device and quartz tube heating method
Technical Field
The present invention relates to a heating device and a heating method, and more particularly, to a quartz tube heating device and a quartz tube heating method.
Background
At present, a quartz tube heating device is an important processing link in a quartz processing technology. The traditional quartz tube heating device adopts a single temperature area to heat the quartz tube, so as to extend the quartz tube with a large diameter into the quartz tube with a small diameter. However, the use of a single temperature region causes the following problems:
1. the quartz tube is not only required to provide enough energy for the extension of the quartz tube to keep the soft state of the extension part of the quartz tube, but also to carry out the preheating and the temperature rise of the quartz tube just entering a single-temperature area until the temperature rises to the extendable temperature, which easily causes insufficient melting and causes the pulling in the extension process of the quartz tube to form the surface quality defect of the quartz tube.
2. The preheating area and the extension heating area of the quartz tube are not separated, so that the heat control accuracy of the extension part of the quartz tube is poor, and the diameter of the extended quartz tube fluctuates greatly.
3. The heating efficiency of quartz capsule is lower, has reduced the extension efficiency of quartz capsule, for the extension efficiency that improves the quartz capsule, improves heating efficiency through improving heating temperature, but so can cause the too big, the too high harmful effects of heating unit local temperature of heating unit electric current of heating unit, has shortened the heating unit life-span.
Disclosure of Invention
In view of the above, it is desirable to provide a quartz tube heating apparatus and a quartz tube heating method, which can improve the processing quality and the extension efficiency of the quartz tube by making the quartz tube pass through a plurality of regions with different temperatures.
A first aspect of the present application provides a quartz tube heating apparatus including:
the furnace body is provided with a feeding hole and a discharging hole;
the heating units are arranged between the feeding hole and the discharging hole, are mutually independent, form a plurality of different areas with gradually increased temperatures along the direction from the feeding hole to the discharging hole and are used for heating the quartz tube;
the feeding hole is used for allowing the quartz tube to enter the furnace body to penetrate into the different areas, and the discharging hole is used for allowing the quartz tube to penetrate out of the different areas and then to leave the furnace body.
Preferably, the plurality of different areas include at least one preparation area and at least one operation area, the temperature of the at least one operation area is higher than that of the at least one preparation area, the at least one preparation area is used for preheating the quartz tube, and the at least one operation area is used for operating the quartz tube.
Preferably, each heating unit is a resistance heating unit, each heating unit comprises an electrode and a heating element, each electrode comprises a power inlet end electrode and a power outlet end electrode which are respectively connected with the heating element, the heating element is positioned between the power inlet end electrode and the power outlet end electrode, and the heating element is used for heating the quartz tube;
or each heating unit is an induction heating unit and comprises an induction coil and a heating barrel.
Preferably, the heating element comprises a closed structure consisting of a plurality of heating fins connected in series.
Preferably, the quartz tube heating apparatus further comprises a first heat insulator disposed in the furnace body, the first heat insulator being hollow, the first heat insulator partially accommodating the plurality of heating units, the first heat insulator being configured to reduce or prevent heat generated by the heating element from being transferred out of the quartz tube heating apparatus.
Preferably, the plurality of heating elements are accommodated in the first heat insulator, each of the power input end electrodes and each of the power output end electrodes include an extension piece, and the extension piece of each of the power input end electrodes and the extension piece of each of the power output end electrodes penetrate through the first heat insulator and are electrically connected with the heating elements.
Preferably, each of the power input end electrodes and each of the power output end electrodes further include a tip, each tip protrudes from one end of the corresponding extension piece, each tip is located outside the furnace body and is clamped on the side wall of the furnace body, and the extension piece of each of the power input end electrodes and the extension piece of each of the power output end electrodes penetrate through the furnace body.
Preferably, the quartz tube heating device further comprises a second heat insulator arranged in the first heat insulator, the second heat insulator is hollow, each power input end electrode and each power output end electrode comprise a connecting piece, the connecting pieces are located outside the second heat insulator, the heating element further comprises two lugs, the two lugs protrude from the outer surface of the heating element, and each lug penetrates through the second heat insulator to the outside of the second heat insulator and is fixedly connected with the corresponding connecting piece.
A second aspect of the present application provides a quartz tube heating method applied to the quartz tube heating apparatus according to any one of the preceding claims, the quartz tube heating method comprising:
a quartz tube enters the furnace body from a feeding hole;
passing the quartz tube through a plurality of different zones of increasing temperature formed by the plurality of heating units.
Preferably, the plurality of different areas include at least one preparation area and at least one operation area, the temperature of the at least one operation area is higher than that of the at least one preparation area, the at least one preparation area preheats the quartz tube, and the at least one operation area operates the quartz tube.
The quartz tube extension device has the advantages that the plurality of different areas with different temperatures are formed by the plurality of mutually independent heating units, different operations can be performed on the quartz tube in different areas, the quartz tube can be prevented from being pulled in the extension process due to insufficient melting of the quartz tube, the defect of the surface quality of the formed quartz tube is avoided, the problem that the diameter of the extended quartz tube fluctuates greatly due to poor heat control precision of the extension part of the quartz tube is avoided, and the extension efficiency of the quartz tube is reduced due to low heating efficiency of the quartz tube is avoided.
Drawings
Fig. 1 is a perspective view of a quartz tube heating apparatus according to an embodiment of the present invention.
Fig. 2 is an exploded view of a quartz tube heating apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic sectional view III-III of the quartz tube heating apparatus shown in fig. 1.
Fig. 4 is a flowchart of a method of heating a quartz tube according to an embodiment of the present invention.
Description of the main elements
Figure BDA0001209792630000041
Figure BDA0001209792630000051
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
The technical solution and other advantages of the present invention will become apparent from the following detailed description of specific embodiments of the present invention, which is to be read in connection with the accompanying drawings. It is to be understood that the drawings are provided solely for the purposes of reference and illustration and are not intended as a definition of the limits of the invention. The dimensions shown in the figures are for clarity of description only and are not to be taken in a limiting sense.
For simplicity of description, spatially relative terms such as "upper" and "lower" may be used herein to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. And spatially relative terms such as "exterior surface" may be used herein to describe a relationship of some features of an element with respect to other features of the element in the figures. The device may be oriented differently (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In the description of the present invention, it is to be understood that the terms "horizontal direction" and "vertical direction" and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Referring to fig. 1 and 2, fig. 1 is a perspective view of a quartz tube heating device according to an embodiment of the invention. Fig. 2 is an exploded view of a quartz tube heating apparatus according to an embodiment of the present invention. The quartz tube heating apparatus 100 includes a furnace body 110, a first insulator 120, a second insulator 130, and a plurality of heating units 140. The first insulator 120 is accommodated in the furnace body 110, the second insulator 130 is accommodated in the first insulator 120, and the plurality of heating units 140 are partially accommodated in the second insulator 130 and pass through the second insulator 130, the first insulator 120, and the furnace body 110 to the furnace body 110. The plurality of heating units 140 are used to form a plurality of different regions with increasing temperatures to heat the quartz tube. The quartz tubes may enter the plurality of different regions from one end of the furnace body 110 and exit the plurality of different regions from the other end of the furnace body 110, and the first and second thermal insulators 120 and 130 serve to prevent heat generated from the plurality of heating units 140 from being transferred out of the furnace body 110.
The furnace body 110 includes an outer cover tube 111, a first cover plate 112 and a second cover plate 113. The outer cover tube 111 is hollow and has openings at both ends. In the present embodiment, the cross section of the outer cover tube 111 is substantially circular. In other embodiments, the cross-section of the outer shroud 111 is generally square, oval, star-shaped, or other shape. The outer cover tube 111 is formed with a plurality of chucking holes 114. The plurality of chucking holes 114 are equally divided into two rows on the outer cover tube 111. In the present embodiment, the two rows of holding holes 114 are parallel and opposite to each other, and the number of the holding holes 114 is six. In other embodiments, the two rows of chucking holes 114 may not be parallel and/or opposite to each other, and the number of the plurality of chucking holes 114 may be other numbers, such as four or eight, etc. The first cover plate 112 and the second cover plate 113 are respectively fixed to two opposite ends of the outer cover tube 111, which have openings. In the present embodiment, the first cover plate 112 has a circular shape. In other embodiments, the first cover plate 112 has a square, oval, star, or other shape. The first cover plate 112 is formed with a feed opening 115. The feed inlet 115 is used for feeding the quartz tube into the furnace body 110. In the present embodiment, the second cover plate 113 has a circular shape. In other embodiments, the second cover plate 113 has a square, oval, star, or other shape. The second cover plate 113 is formed with a discharge hole 116. The discharge hole 116 is used for allowing the quartz tube to leave the furnace body 110. In the present embodiment, the discharge port 116 is opposite to the feed port 115. In other embodiments, the outlet 116 may not be opposite the inlet 115.
The first insulator 120 is accommodated in the inner space of the furnace body 110. The first insulator 120 is made of glass, asbestos, rock wool, or a vacuum plate, etc. The first insulator 120 includes a heat shield 121 and an end cap 122. In the present embodiment, the heat shield 121 has a substantially cylindrical shape. In other embodiments, the outer shroud 111 may be substantially square-cylindrical, elliptical-cylindrical, star-cylindrical, or other shapes. The heat shield 121 is open at both ends and hollow. The heat shield 121 partially houses the heating unit 140, and prevents heat generated by the heating unit 140 from being transferred out of the furnace body 110 in a horizontal direction (i.e., a radial direction). The heat shield 121 is formed with a plurality of first through grooves 123. The plurality of first through grooves 123 are equally divided into two rows on the heat shield 121. Each first through groove 123 is opposite to a chucking hole 114. In the present embodiment, the two rows of first through grooves 123 are parallel and opposite to each other, and the plurality of first through grooves 123 are circular and six in number. In other embodiments, the two columns of first through slots 123 may not be parallel and/or opposite to each other, and the plurality of first through slots 123 may have other shapes, such as oval or square, and the like, and the number may be other numbers, such as four or eight. The heat shield 121 has an axial receiving hole 125 (shown in fig. 3) for receiving the heating unit 140. The receiving cavity 125 includes a first section 1251 (shown in fig. 3) and a second section 1252 (shown in fig. 3) in communication with the first section 1251. Second section 1252 is closer to first cover plate 112 than first section 1251. The diameter of the first section 1251 is greater than the diameter of the second section 1252, such that a stop surface 126 (shown in FIG. 3) is formed on the inner wall of the heat shield 121, the stop surface 126 being located at the intersection of the first and second sections 1251, 1252.
The end cap 122 is annular. The end cap 122 partially covers the opening of the heat shield 121. The end cap 122 is used to prevent heat generated by the heating unit 140 from being transferred out of the furnace body 110 from a vertical direction (i.e., an axial direction). In the present embodiment, the end cap 122 has an annular shape, and in other embodiments, the end cap 122 has an elliptical ring shape, a rectangular ring shape, or the like. In the present embodiment, the end cap 122 is fixed to one end of the heat shield 121. In other embodiments, the portion of the heat shield 121 where the second segment 1252 is formed is two separable parts from the portion where the first segment 1251 is formed, the portion of the heat shield 121 where the second segment 1252 is formed is the other end cap, and the two end caps are respectively fixed to two opposite ends of the heat shield 121.
The second insulator 130 is open at both ends and hollow. The second thermal insulator 130 is accommodated in the first thermal insulator 120 and partially accommodates the plurality of heating units 140, and specifically, the second thermal insulator 130 is accommodated in the first section 1251 of the accommodating hole 125 of the thermal shield 121, and two ends of the second thermal insulator are respectively abutted against the abutting surface 126 and the end cap 122. The second insulator 130 is made of glass, asbestos, rock wool, or a vacuum plate, etc. The second insulator 130 is used to further prevent heat generated by the heating unit 140 from being transferred out of the furnace body 110. In the present embodiment, the second insulator 130 has a substantially cylindrical shape. In other embodiments, the second insulator 130 is substantially in the shape of a square cylinder, an elliptical cylinder, a star cylinder, or other shapes. The second insulator 130 has a plurality of second through grooves 131 formed therein. The plurality of second through grooves 131 are equally divided into two rows on the second heat insulator 130. Each second through slot 131 is opposite to the corresponding first through slot 123. In the present embodiment, the two rows of second through grooves 131 are parallel and opposite to each other, and the plurality of second through grooves 131 are square and six in number. In other embodiments, the two rows of second through slots 131 may not be parallel and/or opposite to each other, and the plurality of second through slots 131 may have other shapes, such as a semi-circle, a semi-ellipse, etc., while the number may be other numbers, such as four or eight, etc.
Referring to fig. 3, the plurality of heating units 140 are independent from each other and are arranged in sequence from top to bottom. In the present embodiment, the first cover plate 112 is located at the upper end of the outer cover tube 111, the second cover plate 113 is located at the lower end of the outer cover tube 111, and the plurality of heating units 140 are used to form a plurality of different regions whose temperatures increase from top to bottom. In other embodiments, the first cover plate 112 is located at the lower end of the outer cover tube 111, the second cover plate 113 is located at the upper end of the outer cover tube 111, and the plurality of heating units 140 are configured to form a plurality of different regions having decreasing temperatures from top to bottom. The plurality of different areas include a preparation area 141 and a work area 142. In the present embodiment, the number of the preparation areas 141 is two, and the number of the working areas 142 is one. In other embodiments, the number of the preparation areas 141 may be one, three, or more than three, and the number of the working areas 142 may be two, three, or more than three. The temperature of the working area 142 is higher than that of the preparation area 141. The preparation area 141 is used for preheating the quartz tube, and the operation area 142 is used for operating the quartz tube. The operation is stretching or wire drawing. Thus, different temperature requirements during preheating and operation can be realized. In other embodiments, the plurality of different regions may also include other regions, such as an elevated temperature region. The temperature rise region is located between the preparation region 141 and the working region 142. The temperature of the warming region is higher than the temperature of the preparation region 141 and lower than the temperature of the working region 142. The temperature raising region is used for raising the temperature of the preheated quartz tube to an operable temperature.
In the present embodiment, the plurality of heating units 140 are parallel to each other. In other embodiments, the plurality of heating units 140 are not parallel or partially parallel to each other. Each heating unit 140 is a resistance heating unit. Each heating unit 140 includes an electrode 150 and a heating element 160. Each electrode 150 is used to power a corresponding heating element 160. Each electrode 150 includes a power-in terminal electrode 151 and a power-out terminal electrode 152. One end of each of the power input terminal electrodes 151 and the corresponding power output terminal electrode 152 is used to be electrically connected to an external power source, and the other end of each of the power input terminal electrodes 151 and the corresponding power output terminal electrode 152 is electrically connected to the corresponding heating element 160. Each heating element 160 is located between a corresponding power-in terminal electrode 151 and a corresponding power-out terminal electrode 152. The heating element 160 is used for heating the quartz tube.
Specifically, the electrode 150 is made of a metal material such as copper or silver, or a non-metal material such as molybdenum or graphite. Each of the power-in terminal electrodes 151 and the corresponding power-out terminal electrodes 152 respectively includes an extension 153, a tip 154 and a connecting member 155. In the present embodiment, the extension 153 is cylindrical in shape. In other embodiments, the extension 153 is square or elliptical-cylindrical in shape, or the like. The two ends of each extending member 153 are respectively protruded to form the head 154 and the connecting member 155. In this embodiment, the tip 154 is cylindrical in shape. In other embodiments, the extension 153 has a square or elliptical cylindrical shape. Each head 154 is located outside the furnace body 110 and is clamped to the side wall of the furnace body 110. The extending part 153 of each power inlet electrode 151 passes through the corresponding holding hole 114 of one row from the outside of the furnace body 110 to the inside of the furnace body 110, passes through the corresponding first through groove 123 of the corresponding row to enter the first heat insulator 120, and the extending part 153 of each power outlet electrode 152 passes through the corresponding holding hole 114 of the other row from the outside of the furnace body 110 to the inside of the furnace body 110, and passes through the corresponding first through groove 123 of the corresponding row to enter the first heat insulator 120.
In this embodiment, the heating element 160 is graphite. In other embodiments, the heating element 160 is a resistance wire or the like. Each heating element 160 comprises a closure 161 and two lugs 162. The closure structure 161 is housed within the second insulator 130. The closed structure 161 is a closed structure composed of a plurality of serially connected heating plates 163, and a groove is formed between every two adjacent heating plates. In this embodiment, the closing structure 161 is a circular ring-shaped closing structure. In other embodiments, the closure 161 is a square closure, an oval closure, or the like. In this embodiment, each two lugs 162 project from the outer surface of the corresponding closure structure 161. In the present embodiment, the two lugs 162 are square and are disposed opposite to each other. In other embodiments, the two lugs 162 are circular, oval, etc., and may not be disposed opposite each other. One lug 162 of each heating element 160 passes through a corresponding second slot 131 in one row from inside the second insulator 130 to outside the second insulator 130 and within the first insulator 120, another lug 162 of each heating element 160 passes through a corresponding second slot 131 in another row from inside the second insulator 130 to outside the second insulator 130 and within the first insulator 120, and each lug 162 is fixedly attached to a corresponding connector 155 within the first insulator 120.
Thus, each power-in terminal electrode 151 and the corresponding heating element 160 and the corresponding power-out terminal electrode 152 can be connected in series to form a loop, and each power-in terminal electrode 151 and the corresponding power-out terminal electrode 152 supply power to the corresponding heating element 160, so that the heating element 160 emits heat. Wherein the plurality of heating units 140 can form a plurality of different regions with different temperatures by setting different powers, currents or voltages to the plurality of heating elements 160. Specifically, the plurality of heating elements 160 may be set with different voltages by setting a difference in voltage supplied from an external power source electrically connected to the electrodes 150. Or it may be that the plurality of electrodes 150 are electrically connected to an external power source through intermediate elements having different resistance values so that the plurality of heating elements 160 are provided with different currents.
When the assembly is performed, the heating element 160 is placed in the second heat insulator 130, the lug 162 of the heating element 160 passes through the corresponding second through groove 131, the second heat insulator 130 is sleeved on the first heat insulator 120, the first heat insulator 120 is sleeved on the furnace body 110, the electrode 150 passes through the clamping hole 114 and the first through groove 123 and then is connected with the lug 162, and the end cover 122, the first cover plate 112 and the second cover plate 113 are respectively fixed on the first heat insulator 120 and the furnace body 110.
Therefore, the present invention forms the regions with different temperatures by the plurality of heating units 140, so that the different regions can perform different operations on the quartz tube, and can prevent the quartz tube from being pulled in the extension process due to insufficient melting of the quartz tube, thereby preventing the defect of the surface quality of the formed quartz tube, and simultaneously can prevent the diameter of the extended quartz tube from fluctuating greatly due to the poor control precision of the heat of the extension part of the quartz tube, and can prevent the extension efficiency of the quartz tube from being reduced due to the low heating efficiency of the quartz tube. Meanwhile, a feed port 115 is provided on the first cover plate 112 and a discharge port 116 is provided on the second cover plate 113, so that the plurality of quartz tubes can enter and exit the regions having different temperatures. The first insulator 120 and the second insulator 130 prevent heat generated by the heating unit 140 from being transferred to the furnace body 110.
Obviously, the heating unit 140 is not limited to the electrode 150 and the heating element 160 in this embodiment, and the heating unit 140 may also be an induction heating unit, the heating unit 140 includes an induction coil wound around the outer circumference of the heating barrel, the induction coil passing through the second insulator, the first insulator and the furnace body and being connected to an external power source, and a heating barrel disposed in the second insulator 130 for heating the quartz tube. Obviously, the induction coil is not limited to the above connection with an external power supply through the second insulator, the first insulator and the furnace body, but may be disposed between the second insulator and the first insulator and connected with an external power supply through the first insulator and the furnace body. Obviously, the assembling method is not limited to the assembling method in the present embodiment, and other assembling methods may be adopted, such as first fixing the second cover plate 113 and the end cap 122 to the lower ends of the furnace body 110 and the first insulator 120, respectively, and then placing the heating element 160 in the second insulator 130, or other suitable modifications. Obviously, the quartz tube heating apparatus 100 is not limited to the orientation shown in the drawings, and the quartz tube heating apparatus 100 may be disposed in a lateral direction, or may be disposed at an angle to the ground. Obviously, the length of the heating sheet of the heating element 160 forming the working region 142 is not limited to be the same as the length of the heating sheet of the heating element 160 forming the preheating region and the heating region forming the heating region, and the length of the heating sheet of the heating element 160 forming the working region 142 is smaller than the length of the heating sheet of the heating element 160 forming the preheating region and/or the heating region forming the heating region, so that the quartz tube of the working region 142 can be precisely heated. Obviously, the shape of the heating unit 140 is not limited to the straight line in the drawing, but may be a certain arc.
Fig. 4 is a flowchart illustrating a quartz tube heating method according to an embodiment of the invention. The quartz tube heating method is applied to the quartz tube heating device. The quartz tube heating method comprises the following steps:
step S401: and (4) enabling the quartz tube to enter the furnace body from the feeding hole.
Step S402: the quartz tube is passed through a plurality of heating units to form a plurality of different zones of increasing temperature, and specifically, the quartz tube is passed through a preparation zone and a working zone in sequence.
Step S403: and the quartz tube leaves the furnace body from the discharge hole.
Further, the plurality of different areas comprise at least one preparation area and at least one operation area, the temperature of the at least one operation area is higher than that of the at least one preparation area, the quartz tube is preheated by the at least one preparation area, and the quartz tube is operated by the at least one operation area.
Further, the plurality of different regions of increasing temperature are formed by means of resistance heating.
Further, the plurality of different regions with increasing temperature are formed by means of induction heating.
Further, the plurality of different regions are formed by setting different heating powers, currents, or voltages of the plurality of heating units.
It should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention, and that other variations within the spirit of the present invention may be made by those skilled in the art. Such variations are intended to be included within the scope of the invention as claimed.

Claims (8)

1. A quartz tube heating apparatus, characterized by comprising:
the furnace body is provided with a feeding hole and a discharging hole;
the heating units are arranged between the feeding hole and the discharging hole, are mutually independent, form a plurality of different areas with gradually increased temperatures along the direction from the feeding hole to the discharging hole and are used for heating the quartz tube;
the feeding hole is used for allowing the quartz tube to enter the furnace body to penetrate into the different areas, and the discharging hole is used for allowing the quartz tube to penetrate out of the different areas and then leave the furnace body;
each heating unit comprises a heating element and an electrode, the heating element comprises a closed structure consisting of a plurality of heating sheets connected in series and two lugs protruding from the outer surface of the corresponding closed structure, and the electrode is electrically connected with the lugs;
the quartz tube heating device comprises a first heat insulator arranged in the furnace body and a second heat insulator arranged in the first heat insulator, the first heat insulator comprises a heat shield and an end cover, two ends of the heat shield are open, a blocking surface is formed on the inner wall of the heat shield, the end cover partially blocks the opening of the heat shield, and the blocking surface and the end cover jointly limit the second heat insulator in the first heat insulator; a second through groove is formed in the second heat insulator, the closing structure is contained in the second heat insulator, and the lug penetrates through the second through groove to enable the closing structure to be limited in the second heat insulator.
2. The quartz tube heating apparatus as set forth in claim 1, wherein: the plurality of different areas comprise at least one preparation area and at least one operation area, the temperature of the at least one operation area is higher than that of the at least one preparation area, the at least one preparation area is used for preheating the quartz tube, and the at least one operation area is used for operating the quartz tube.
3. The quartz tube heating apparatus as set forth in claim 1, wherein: each heating unit is a resistance heating unit, each electrode comprises a power inlet end electrode and a power outlet end electrode which are respectively connected with the heating element, the heating element is positioned between the power inlet end electrode and the power outlet end electrode, and the heating element is used for heating the quartz tube.
4. A quartz tube heating apparatus as set forth in claim 3, wherein: each of the power inlet end electrodes and each of the power outlet end electrodes include an extension member, and the extension member of each of the power inlet end electrodes and the extension member of each of the power outlet end electrodes penetrate through the first heat insulator and are electrically connected to the heating element.
5. The quartz tube heating apparatus as set forth in claim 4, wherein: each electricity inlet end electrode and each electricity outlet end electrode further comprise ends, each end protrudes from one end of the corresponding extending piece, each end is located outside the furnace body and clamped on the side wall of the furnace body, and the extending piece of each electricity inlet end electrode and the extending piece of each electricity outlet end electrode penetrate through the furnace body.
6. The quartz tube heating apparatus as set forth in claim 5, wherein: each electricity inlet end electrode and each electricity outlet end electrode comprise a connecting piece, the connecting pieces are located outside the second heat insulation body, and each lug penetrates through the second heat insulation body to the outside of the second heat insulation body and is fixedly connected with the corresponding connecting piece.
7. A quartz tube heating method applied to the quartz tube heating apparatus according to claims 1 to 6, comprising:
providing a furnace body;
providing a plurality of heating units, wherein each heating unit comprises a heating element and an electrode, the heating element comprises a closed structure consisting of a plurality of heating sheets connected in series and two lugs protruding from the outer surface of the corresponding closed structure, and the electrode is electrically connected with the lugs;
providing a first heat insulator and a second heat insulator, wherein the first heat insulator is arranged in the furnace body, the second heat insulator is arranged in the first heat insulator, the first heat insulator comprises a heat shield and an end cover, two ends of the heat shield are opened, a blocking surface is formed on the inner wall of the heat shield, the end cover partially blocks the opening of the heat shield, and the blocking surface and the end cover jointly limit the second heat insulator in the first heat insulator; a second through groove is formed in the second heat insulator, the closing structure is accommodated in the second heat insulator, and the lug penetrates through the second through groove to enable the closing structure to be limited in the second heat insulator;
a quartz tube enters the furnace body from a feeding hole;
passing the quartz tube through a plurality of different zones of increasing temperature formed by the plurality of heating units.
8. The quartz tube heating method according to claim 7, wherein: the plurality of different areas comprise at least one preparation area and at least one operation area, the temperature of the at least one operation area is higher than that of the at least one preparation area, the quartz tube is preheated by the at least one preparation area, and the quartz tube is operated by the at least one operation area.
CN201710026748.2A 2017-01-14 2017-01-14 Quartz tube heating device and quartz tube heating method Active CN108317862B (en)

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Application Number Priority Date Filing Date Title
CN201710026748.2A CN108317862B (en) 2017-01-14 2017-01-14 Quartz tube heating device and quartz tube heating method

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Publication Number Publication Date
CN108317862A CN108317862A (en) 2018-07-24
CN108317862B true CN108317862B (en) 2020-05-15

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1496325A2 (en) * 2003-07-10 2005-01-12 Blüm, Heinz-Jürgen Process for combined debinding and sintering of glass-ceramic, ceramic and metallic shaped articles
CN101190824A (en) * 2006-11-21 2008-06-04 亚洲光学股份有限公司 Glass molding device
CN201449142U (en) * 2009-07-02 2010-05-05 连云港福东正佑照明电器有限公司 Quartz tube continuous smelter provided with secondary heater at lower part
CN203360262U (en) * 2013-06-28 2013-12-25 江苏丰源光伏科技有限公司 Continuous melting furnace for producing elliptical quartz tubes
CN204848629U (en) * 2015-07-13 2015-12-09 江苏圣达石英制品有限公司 Multi -temperature -zone heating continuous smelting stove
CN106810055A (en) * 2017-02-07 2017-06-09 江苏鑫亿鼎石英科技股份有限公司 Square inwall production of quartz tubes equipment and technique
CN206970453U (en) * 2017-04-20 2018-02-06 江苏太平洋石英股份有限公司 The adjustable crucible lifting formula quartz glass continuous induction melting furnace of molding zone temperatures

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1496325A2 (en) * 2003-07-10 2005-01-12 Blüm, Heinz-Jürgen Process for combined debinding and sintering of glass-ceramic, ceramic and metallic shaped articles
CN101190824A (en) * 2006-11-21 2008-06-04 亚洲光学股份有限公司 Glass molding device
CN201449142U (en) * 2009-07-02 2010-05-05 连云港福东正佑照明电器有限公司 Quartz tube continuous smelter provided with secondary heater at lower part
CN203360262U (en) * 2013-06-28 2013-12-25 江苏丰源光伏科技有限公司 Continuous melting furnace for producing elliptical quartz tubes
CN204848629U (en) * 2015-07-13 2015-12-09 江苏圣达石英制品有限公司 Multi -temperature -zone heating continuous smelting stove
CN106810055A (en) * 2017-02-07 2017-06-09 江苏鑫亿鼎石英科技股份有限公司 Square inwall production of quartz tubes equipment and technique
CN206970453U (en) * 2017-04-20 2018-02-06 江苏太平洋石英股份有限公司 The adjustable crucible lifting formula quartz glass continuous induction melting furnace of molding zone temperatures

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