CN201803596U - Electric heating furnace body - Google Patents
Electric heating furnace body Download PDFInfo
- Publication number
- CN201803596U CN201803596U CN2010202835737U CN201020283573U CN201803596U CN 201803596 U CN201803596 U CN 201803596U CN 2010202835737 U CN2010202835737 U CN 2010202835737U CN 201020283573 U CN201020283573 U CN 201020283573U CN 201803596 U CN201803596 U CN 201803596U
- Authority
- CN
- China
- Prior art keywords
- heater
- electrical heating
- heating body
- wires
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses an electric heating furnace body, which comprises furnace wires (1) wound into a spring shape, insulators (2) positioned between the furnace wires and arranged along the winding direction of the furnace wires, and a through rod (4) for connecting the insulators (2) in series to form a row. The exterior of the furnace wires (1) is wound by heat insulation cotton (8), the exterior of the heat insulation cotton (8) is wrapped with a housing (7), a plurality of leading-out wires (5) are welded on the furnace wires (1) and extend to the outer surface of the housing (7), a thermocouple jack (9) is formed in the outer surface of the housing (7), and the furnace wires (1) are electric heating wires. Longer constant temperature zones and more accurate temperature control can be obtained by five-section temperature control; the ceramic insulators are adopted to separate the furnace wires, thereby improving the heating stability; and the whole furnace body has a compact structure and attractive appearance, and barely requires any maintenance during use.
Description
Technical field
The utility model relates to the technical field of heating of semiconductor, solar facilities, particularly relates to a kind of electrical heating body of heater that is used for equipment such as diffusion furnace, PECVD, LPCVD.
Background technology
Traditional heating furnace body refers to bore less than Φ 300mm, three sections temperature controls, and precision ± 1 ℃, the heating furnace body flat-temperature zone is short, and temperature-controlled precision is low, poor stability.Along with the develop rapidly of semi-conductor industry, require heating furnace body cavity bore increasing, the length of flat-temperature zone is more and more longer, and the precision of temperature control is more and more higher.Traditional heating furnace body can not adapt to the demand for heat of equipment such as diffusion furnace, PECVD, LPCVD.
The utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model is that temperature-controlled precision, the raising of raising electrical heating body of heater adds heat endurance.
(2) technical scheme
For solving the problems of the technologies described above, a kind of electrical heating body of heater is provided, comprise that coiling is the stove silk of spring-like, the insulator of arranging between each circle stove silk and along stove filament winding system direction, and the bar that described insulator chain is unified into row; The foreign volume of described stove silk is wound with heat-preservation cotton, and the outer wrap of described heat-preservation cotton has shell, and some lead-out wires are welded on the described stove silk and extend out to the outer surface of shell, and the outer surface of described shell has the thermocouple jack, and described stove silk is a heating wire.
Preferably, described insulator is a ceramic insulator.
Preferably, described electrical heating body of heater is divided into five sections in the longitudinal direction, and respectively there is one section secondary temperature control district at two ends, and middle three sections length overalls are greater than the length of required flat-temperature zone.
Preferably, described lead-out wire is 6.
Preferably, the two ends of described electrical heating body of heater have the insulation plug.
Preferably, described thermocouple jack becomes miter angle in a circumferential direction with described lead-out wire.
Preferably, described shell adopts stainless steel material to make.
Preferably, described heat-preservation cotton can just be designed to 5～8 layers according to technological temperature, and interior two-layer employing contains the zirconium plug and draws the blanket material to make, and the common plug of peripheral employing draws blanket to make.
Preferably, the bore of described electrical heating body of heater is not less than 300mm.
Preferably, the length of the flat-temperature zone of described electrical heating body of heater is not less than 760mm.
(3) beneficial effect
The utility model is by adopting the five-part form temperature control, is than three sections temperature controls its advantage of comparing, can obtain longer flat-temperature zone and more precise dose control; Adopt ceramic insulator that the stove silk is separated, raising adds heat endurance; Whole furnace binding compactness, good looking appearance, use need not be keeped in repair substantially.
Description of drawings
Fig. 1 a is the structural front view according to the electrical heating body of heater of the utility model embodiment;
Fig. 1 b is the side view of Fig. 1 a;
Fig. 1 c is the perspective view according to the electrical heating body of heater of the utility model embodiment.
Wherein, 1: the stove silk; 2: insulator; 3: nut; 4: bar; 5: lead-out wire; 6: plug; 7: shell; 8: heat-preservation cotton; 9: the thermocouple hole.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
Shown in Fig. 1 a-1c, the utility model provides a kind of electrical heating body of heater, mainly comprises stove silk 1, insulator 2, bar 4, lead-out wire 5, plug 6, shell 7, heat-preservation cotton 8 etc.The long flat-temperature zone of coiling heavy caliber (bore 〉=Φ 300mm, flat-temperature zone 〉=760mm), and high temperature-controlled precision (precision can reach ± and 0.5 ℃.) the electrical heating body of heater.Preferably, adopt heating wire, separate with insulator 2 between every circle heating wire, with bar 4 insulator 2 is fixed then through the heavy caliber spring shape of accurate coiling.Preferably, described insulator 2 is a ceramic insulator, and described bar 4 adopts the heating wire material.At the skin of stove silk 1, according to the serviceability temperature difference, the heat-preservation cotton 8 of coiling unlike material, two ends are incubated plug 6, and outermost layer is wrapped fixing with stainless steel sheet|.Described body of heater adopts the five-part form temperature control, draws six roots of sensation lead-out wire 5 from stove silk 1, and lead-out wire 5 welds out the Z-shaped lead-in wire of the six roots of sensation for stove silk place with argon arc welding, heats in order to energising respectively.In the place of the 5 one-tenth miter angles in the surface and lead-out wire of shell 7, there are 5 groups of thermocouple holes 9 to lay respectively at five sections temperature control districts, be convenient to insert temperature-controlling thermal couple.
As can be seen from the above embodiments, the utility model embodiment is by adopting the five-part form temperature control, is than three sections temperature controls its advantage of comparing, can obtain longer flat-temperature zone and more precise dose control; Adopt ceramic insulator that the stove silk is separated, raising adds heat endurance; Whole furnace binding compactness, good looking appearance, use need not be keeped in repair substantially.
The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (10)
1. electrical heating body of heater, it is characterized in that, described electrical heating body of heater comprises that coiling is the stove silk (1) of spring-like, the insulator (2) of arranging between each circle stove silk and along stove filament winding system direction, and with described insulator (2) bar (4) in a row of connecting; The foreign volume of described stove silk (1) is wound with heat-preservation cotton (8), the outer wrap of described heat-preservation cotton (8) has shell (7), some lead-out wires (5) are welded in the outer surface that shell (7) were gone up and extend out to described stove silk (1), the outer surface of described shell (7) has thermocouple hole (9), and described stove silk (1) is a heating wire.
2. electrical heating body of heater as claimed in claim 1 is characterized in that, described insulator (2) is a ceramic insulator.
3. electrical heating body of heater as claimed in claim 2 is characterized in that, described electrical heating body of heater is divided into five sections in the longitudinal direction, and respectively there is one section secondary temperature control district at two ends, and middle three sections length overalls are greater than the length of required flat-temperature zone.
4. electrical heating body of heater as claimed in claim 3 is characterized in that, described lead-out wire (5) is 6.
5. electrical heating body of heater as claimed in claim 1 is characterized in that, the two ends of described electrical heating body of heater have insulation plug (6).
6. electrical heating body of heater as claimed in claim 5 is characterized in that, described thermocouple jack (9) becomes miter angle in a circumferential direction with described lead-out wire (5).
7. electrical heating body of heater as claimed in claim 1 is characterized in that, described shell (7) adopts stainless steel material to make.
8. electrical heating body of heater as claimed in claim 1 is characterized in that, described heat-preservation cotton (8) is designed to 5～8 layers, and interior two-layer employing contains the zirconium plug and draws the blanket material to make, and the common plug of outer employing draws the blanket material to make.
9. electrical heating body of heater as claimed in claim 1 is characterized in that the bore of described electrical heating body of heater is not less than 300mm.
10. electrical heating body of heater as claimed in claim 1 is characterized in that the length of the flat-temperature zone of described electrical heating body of heater is not less than 760mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202835737U CN201803596U (en) | 2010-08-05 | 2010-08-05 | Electric heating furnace body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202835737U CN201803596U (en) | 2010-08-05 | 2010-08-05 | Electric heating furnace body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201803596U true CN201803596U (en) | 2011-04-20 |
Family
ID=43873095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202835737U Expired - Fee Related CN201803596U (en) | 2010-08-05 | 2010-08-05 | Electric heating furnace body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201803596U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103774238A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Heat treatment device |
| CN109023530A (en) * | 2018-09-25 | 2018-12-18 | 胡新军 | A kind of High temperature diffusion furnace body |
| CN111473652A (en) * | 2020-04-18 | 2020-07-31 | 青岛赛瑞达电子装备股份有限公司 | Heating furnace body with process pipe supporting function piece |
| CN111524835A (en) * | 2020-04-29 | 2020-08-11 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment |
| CN112747603A (en) * | 2020-12-04 | 2021-05-04 | 深圳市拉普拉斯能源技术有限公司 | Wire winding structure and thermal field temperature control method |
| CN116294613A (en) * | 2023-05-25 | 2023-06-23 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
-
2010
- 2010-08-05 CN CN2010202835737U patent/CN201803596U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103774238A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Heat treatment device |
| CN109023530A (en) * | 2018-09-25 | 2018-12-18 | 胡新军 | A kind of High temperature diffusion furnace body |
| CN111473652A (en) * | 2020-04-18 | 2020-07-31 | 青岛赛瑞达电子装备股份有限公司 | Heating furnace body with process pipe supporting function piece |
| CN111524835A (en) * | 2020-04-29 | 2020-08-11 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment |
| CN111524835B (en) * | 2020-04-29 | 2021-09-17 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment |
| CN112747603A (en) * | 2020-12-04 | 2021-05-04 | 深圳市拉普拉斯能源技术有限公司 | Wire winding structure and thermal field temperature control method |
| CN116294613A (en) * | 2023-05-25 | 2023-06-23 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
| CN116294613B (en) * | 2023-05-25 | 2023-07-25 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201803596U (en) | Electric heating furnace body | |
| US20180098385A1 (en) | Heating element and process heater | |
| CN104677116B (en) | A kind of self-expansion type superhigh temperature heater | |
| CN202918524U (en) | Composite-type electric heating tube | |
| CN111434255B (en) | Parallel layered heating structure and low-temperature smoking set using same | |
| CN202496089U (en) | Carbon fiber heating flat cable | |
| CN207486771U (en) | A kind of electric energy Boiler Steam linkage generator | |
| CN112797625A (en) | High-temperature gas heating device | |
| CN203492214U (en) | Energy-saving long-service-life electric heater for drying system | |
| CN103747547A (en) | Electrical heated tube for heating furnace | |
| CN203327263U (en) | Integrated temperature-measuring and heating armored rectangular cable | |
| CN202979327U (en) | PTC aluminum heating body | |
| CN207573652U (en) | A kind of big high voltage power transmission tower melting ice and snow accompanying-heat cable | |
| CN206843551U (en) | Monofilament single control steel bead wire production line is tempered heater | |
| CN206282701U (en) | A kind of furnace transformer machine body structure for preventing Transformer Winding hot-spot | |
| CN206319082U (en) | It is a kind of effectively to prevent the heating module of burner hearth cold spot | |
| CN2212245Y (en) | Black body rediate source | |
| CN206118055U (en) | Cylinder hot plate | |
| CN201063872Y (en) | Electrothermal film | |
| CN202587429U (en) | Efficient medical coil heater | |
| CN203761604U (en) | Electrothermal tube for heating furnace | |
| CN219824463U (en) | Graphite heating structure of high-temperature carbonization furnace for carbon fiber production | |
| CN203279220U (en) | A far-infrared heating pipe and a heating and drying apparatus | |
| CN201715838U (en) | Heating device for grain drier | |
| CN114828313B (en) | Armored heater suitable for various heating powers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Beijing SevenStar Huachang Magnetic Electronics Co., Ltd. Assignor: Qixinghuachuang Electronic Co., Ltd., Beijing Contract record no.: 2012990000364 Denomination of utility model: Electric heating furnace body Granted publication date: 20110420 License type: Exclusive License Record date: 20120530 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110420 Termination date: 20160805 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |