CN108866494A - A method of improving metal matrix ceramic composites wearability - Google Patents

A method of improving metal matrix ceramic composites wearability Download PDF

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Publication number
CN108866494A
CN108866494A CN201810843674.6A CN201810843674A CN108866494A CN 108866494 A CN108866494 A CN 108866494A CN 201810843674 A CN201810843674 A CN 201810843674A CN 108866494 A CN108866494 A CN 108866494A
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China
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metal matrix
ceramic composites
matrix ceramic
wearability
improving metal
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CN201810843674.6A
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Chinese (zh)
Inventor
万明军
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Hefei Cen Yao Xin Mstar Technology Ltd
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Hefei Cen Yao Xin Mstar Technology Ltd
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Priority to CN201810843674.6A priority Critical patent/CN108866494A/en
Publication of CN108866494A publication Critical patent/CN108866494A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a kind of methods for improving metal matrix ceramic composites wearability, include the following steps：Step 1, metal matrix ceramic composites matrix is first pre-processed, followed by grinding process 12-16min, then carries out cleaning 3-5min with ethyl alcohol, it is subsequently sent to carry out surface treatment 65-75min in sputtering chamber, forms the surface covering with a thickness of 0.02-0.08um.The present invention is first using pretreatment, preprocess method is that matrix is placed in 840-860 DEG C of first modifier treatment 25-35min, the then cooling 1-2h in 550-570 DEG C of furnace, finally it is cooled to room temperature with 5-7 DEG C/min, matrix surface performance can be improved after pretreatment, enhance its surface abrasion resistance, while improving its subsequent processing performance.

Description

A method of improving metal matrix ceramic composites wearability
Technical field
The present invention relates to technical field of composite materials, and in particular to a kind of to improve metal matrix ceramic composites wearabilities Method.
Background technique
Wearability refers to the ability that material resists mechanical wear, and under the conditions of the mill of certain loading is fast, unit area is in list The abrasion of position time, are indicated with the abrasion loss of sample, and the difference of quality is divided by by flour milling after it is equal to quality before sample is ground and grinds Product is indicated with wear rate of the material under regulation friction condition or the inverse of wear intensity；Metal matrix ceramic composites be by The composite material of ceramic hard phase and metal or alloy bonding phase composition had both maintained the high intensity, high rigidity, wear-resisting of ceramics The characteristics such as damage, high temperature resistant, anti-oxidant and chemical stability, and there is preferable metal toughness and plasticity, therefore applied metal The place of based composite ceramic material is more and more, but its surface property is not fine, therefore the present invention is by further probing into, right It is surface-treated, and the material wear ability prepared is more preferable.
Existing Chinese patent literature (publication number：CN104496548B a kind of metal ceramic surface processing method) is disclosed, Ceramic body is placed in the vacuum tank full of carbon-source gas, ceramic sintering temperature, vacuum degree 9 are being greater than or equal to-2-10- 2Under conditions of MPa, Carburization Treatment is carried out, heat preservation took out ceramic after 2-4 hours, and carburizing finishes, which singly uses carburizing Method is surface-treated it, though can improve surface property, improvement is not very well, to still need to further improve.
Summary of the invention
It is above-mentioned to solve the purpose of the present invention is to provide a kind of method for improving metal matrix ceramic composites wearability The problem of being proposed in background technique.
To achieve the above object, the present invention provides the following technical solutions：
The present invention provides a kind of methods for improving metal matrix ceramic composites wearability, include the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 12-16min, with Cleaning 3-5min is carried out with ethyl alcohol afterwards, is subsequently sent to carry out surface treatment 65-75min in sputtering chamber, is formed with a thickness of 0.02- The surface covering of 0.08um；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 12-14min.
It is as further scheme of the invention：The preprocess method is that matrix is placed in quenched place of 840-860 DEG C of elder generation 25-35min is managed, then the cooling 1-2h in 550-570 DEG C of furnace, is finally cooled to room temperature with 5-7 DEG C/min.
It is as further scheme of the invention：Vacuum degree is 25-35MPa, sputtering power 2-6W/ in the sputtering chamber cm2。
It is as further scheme of the invention：Vacuum degree is 30MPa, sputtering power 4W/cm in the sputtering chamber2。
It is as further scheme of the invention：It is also used at rotating excitation field when being surface-treated in the sputtering chamber Reason.
It is as further scheme of the invention：The rotating excitation field processing field frequency is 7-9Hz.
It is as further scheme of the invention：The induction coil heating temperature is 320-360 DEG C.
It is as further scheme of the invention：The induction coil and step 1 process storeroom away from for 4-8mm.
It is as further scheme of the invention：The ultrasonic power is 1-2KW, supersonic frequency 22-26KHz.
It is as further scheme of the invention：The ultrasonic power is 1.5KW, supersonic frequency 24KHz.
Compared with prior art, the present invention has following beneficial effect：
For the present invention first using pretreatment, preprocess method is that matrix is placed in 840-860 DEG C of first modifier treatment 25-35min, The then cooling 1-2h in 550-570 DEG C of furnace, is finally cooled to room temperature with 5-7 DEG C/min, can improve base after pretreatment Body surface property enhances its surface abrasion resistance, while improving its subsequent processing performance, then in sputtering chamber Reason, and the processing of accompanying rotation magnetic field is handled, the film that can form sputter process further aoxidizes, can further enhance matrix Wearability, induction coil are heat-treated the coefficient of friction that can further decrease surface film oxide to it, and it is wear-resisting then to enhance its Property.
Specific embodiment
Combined with specific embodiments below, technical scheme in the embodiment of the invention is clearly and completely described, shows So, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the reality in the present invention Example is applied, every other embodiment obtained by those of ordinary skill in the art without making creative efforts all belongs to In the scope of protection of the invention.
Embodiment 1：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 12min, then Cleaning 3min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 65min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.02um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 12min.
The preprocess method of the present embodiment is that matrix is placed in 840 DEG C of first modifier treatment 25min, then in 550 DEG C of furnace Middle cooling 1h, is finally cooled to room temperature with 5 DEG C/min.
Vacuum degree is 25MPa, sputtering power 2W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 7Hz.
The induction coil heating temperature of the present embodiment is 320 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 4mm.
The ultrasonic power of the present embodiment is 1KW, supersonic frequency 22KHz.
Embodiment 2：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 16min, then Cleaning 5min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 75min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.08um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 14min.
The preprocess method of the present embodiment is that matrix is placed in 860 DEG C of first modifier treatment 35min, then in 570 DEG C of furnace Middle cooling 2h, is finally cooled to room temperature with 7 DEG C/min.
Vacuum degree is 35MPa, sputtering power 6W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 9Hz.
The induction coil heating temperature of the present embodiment is 360 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 8mm.
The ultrasonic power of the present embodiment is 2KW, supersonic frequency 26KHz.
Embodiment 3：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 14min, then Cleaning 4min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 70min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.05um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 13min.
The preprocess method of the present embodiment is that matrix is placed in 850 DEG C of first modifier treatment 30min, then in 560 DEG C of furnace Middle cooling 1.5h, is finally cooled to room temperature with 6 DEG C/min.
Vacuum degree is 35MPa, sputtering power 6W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 9Hz.
The induction coil heating temperature of the present embodiment is 360 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 8mm.
The ultrasonic power of the present embodiment is 2KW, supersonic frequency 26KHz.
Embodiment 3：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 14min, then Cleaning 4min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 70min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.05um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 13min.
The preprocess method of the present embodiment is that matrix is placed in 850 DEG C of first modifier treatment 30min, then in 560 DEG C of furnace Middle cooling 1.5h, is finally cooled to room temperature with 6 DEG C/min.
Vacuum degree is 30MPa, sputtering power 4W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 8Hz.
The induction coil heating temperature of the present embodiment is 340 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 6mm.
The ultrasonic power of the present embodiment is 1.5KW, supersonic frequency 24KHz.
Embodiment 4：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 10min, then Cleaning 2min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 60min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.01um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 10min.
The preprocess method of the present embodiment is that matrix is placed in 830 DEG C of first modifier treatment 20min, then in 540 DEG C of furnace Middle cooling 0.8h, is finally cooled to room temperature with 4 DEG C/min.
Vacuum degree is 20MPa, sputtering power 1.5W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 5Hz.
The induction coil heating temperature of the present embodiment is 310 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 2mm.
The ultrasonic power of the present embodiment is 0.5KW, supersonic frequency 20KHz.
Embodiment 5：
A kind of method of raising metal matrix ceramic composites wearability of the present embodiment, includes the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 18min, then Cleaning 6min is carried out with ethyl alcohol, is subsequently sent to carry out surface treatment 80min in sputtering chamber, is formed and is applied with a thickness of the surface of 0.1um Layer；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasound Handle 16min.
The preprocess method of the present embodiment is that matrix is placed in 870 DEG C of first modifier treatment 40min, then in 580 DEG C of furnace Middle cooling 2.5h, is finally cooled to room temperature with 8 DEG C/min.
Vacuum degree is 40MPa, sputtering power 8W/cm in the sputtering chamber of the present embodiment2。
Also rotating excitation field is used to handle when being surface-treated in the sputtering chamber of the present embodiment.
The rotating excitation field processing field frequency of the present embodiment is 8Hz.
The induction coil heating temperature of the present embodiment is 380 DEG C.
The induction coil of the present embodiment and step 1 process storeroom away from for 10mm.
The ultrasonic power of the present embodiment is 2KW, supersonic frequency 26KHz.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (10)

1. a kind of method for improving metal matrix ceramic composites wearability, which is characterized in that include the following steps：
Step 1 first pre-processes metal matrix ceramic composites matrix, followed by grinding process 12-16min, then uses Ethyl alcohol carries out cleaning 3-5min, is subsequently sent to carry out surface treatment 65-75min in sputtering chamber, is formed with a thickness of 0.02-0.08um Surface covering；
Step 2 is heat-treated it by induction coil for material is processed in step 1, then again using ultrasonic treatment 12-14min.
2. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute Stating preprocess method is that matrix is placed in 840-860 DEG C of first modifier treatment 25-35min, then cooling in 550-570 DEG C of furnace 1-2h is finally cooled to room temperature with 5-7 DEG C/min.
3. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute Stating vacuum degree in sputtering chamber is 25-35MPa, sputtering power 2-6W/cm2。
4. a kind of method for improving metal matrix ceramic composites wearability according to claim 3, which is characterized in that institute Stating vacuum degree in sputtering chamber is 30MPa, sputtering power 4W/cm2。
5. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute State also uses rotating excitation field to handle when being surface-treated in sputtering chamber.
6. a kind of method for improving metal matrix ceramic composites wearability according to claim 5, which is characterized in that institute Stating rotating excitation field processing field frequency is 7-9Hz.
7. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute Stating induction coil heating temperature is 320-360 DEG C.
8. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute It states induction coil and step 1 and processes storeroom away from for 4-8mm.
9. a kind of method for improving metal matrix ceramic composites wearability according to claim 1, which is characterized in that institute Stating ultrasonic power is 1-2KW, supersonic frequency 22-26KHz.
10. a kind of method for improving metal matrix ceramic composites wearability according to claim 9, which is characterized in that The ultrasonic power is 1.5KW, supersonic frequency 24KHz.
CN201810843674.6A 2018-07-27 2018-07-27 A method of improving metal matrix ceramic composites wearability Pending CN108866494A (en)

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Publication number Priority date Publication date Assignee Title
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CN103418790A (en) * 2012-05-17 2013-12-04 枣阳秦鸿新材料有限公司 Anti-abrasion metal-ceramic composite product and preparation method thereof
CN107815621A (en) * 2017-12-26 2018-03-20 苏州浩焱精密模具有限公司 A kind of mould high duty metal ceramic material
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Publication number Priority date Publication date Assignee Title
CN1361084A (en) * 2000-12-29 2002-07-31 中国科学院金属研究所 Simultaneous process of sintering titanium carbide cermet and welding to steel structure
CN102066616A (en) * 2008-06-13 2011-05-18 山高刀具公司 Coated cutting tool for metal cutting applications generating high temperatures
CN102409290A (en) * 2011-10-11 2012-04-11 宁波市瑞通新材料科技有限公司 Hard Ti-Mo-N multi-element thin film
CN103418790A (en) * 2012-05-17 2013-12-04 枣阳秦鸿新材料有限公司 Anti-abrasion metal-ceramic composite product and preparation method thereof
CN108004447A (en) * 2016-11-02 2018-05-08 重庆市科学技术研究院 A kind of ceramic tool of TiCN bases covering TiAlN coatings and preparation method thereof
CN107815621A (en) * 2017-12-26 2018-03-20 苏州浩焱精密模具有限公司 A kind of mould high duty metal ceramic material

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Application publication date: 20181123