CN108857867A - Diamond lap pad and its preparation process - Google Patents
Diamond lap pad and its preparation process Download PDFInfo
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- CN108857867A CN108857867A CN201810568850.XA CN201810568850A CN108857867A CN 108857867 A CN108857867 A CN 108857867A CN 201810568850 A CN201810568850 A CN 201810568850A CN 108857867 A CN108857867 A CN 108857867A
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- Prior art keywords
- diamond
- abrasive material
- team
- substrate
- adhesive
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
Abstract
The present invention discloses a kind of diamond lap pad and its preparation process, and diamond lap pad includes substrate and the abrasive material that is set on substrate surface, and abrasive material includes following materials in percentage by mass：Diamond forms a team abrasive material 5-10%, adhesive 70-75%, clout as filler material；Wherein diamond abrasive material of forming a team is formed a team by individual particle diamond and is formed；Diamond lap pad is prepared by using inventive formulation and technique, its removal amount is big, it ensure that cutting force, grinding efficiency effectively improves, and grinding efficiency stability is more preferable, and service life also greatly prolongs, and simultaneous processing product surface roughness is lower, the surface quality for greatly improving converted products, is worth of widely use.
Description
Technical field
The present invention relates to grinding pad field technology, a kind of diamond lap pad and its preparation process are referred in particular to.
Background technique
As semiconductor chip substrate is grown rapidly, the high speed transmission of signals of 5G network, it is desirable that communication device, signal receive
The metallization removals such as terminal, the superhard materials such as ceramics, high strength glass, sapphire, will gradually substituted metals with its excellent performance
Effect in the communications field, and the use of these superhard materials process it and also proposed higher requirement.
Domestic tradition attrition process enterprise all uses free abrasive technique, this process efficiency is low, stability is poor, at high cost etc.
Easy to operate, high production efficiency can be realized using novel diamond grinding pad cooperation coolant liquid in problem, and stability is good, can have
Effect reduces energy consumption, waste discharge, and save the cost really realizes energy conservation and environmental protection；And for superhard materials such as sapphire, ceramics
The Mohs' hardness of material is 9 or so, and only the diamond of Mohs' hardness 10 just can be to its grinding, therefore develops Buddha's warrior attendant
The demand of the grinding-material of stone is increasing.
Artificial single crystal's diamond pattern is irregular, it is easy to bring scuffing into during the grinding process.Also, common grinding process
In, cutting force is big when particle is big, but grinding be easy to cause scratch, scratch surface of poor quality, and when particle is small, cutting
Power is small but finish is good.This is a contradiction.How balanced cutting power and finish, be high performance abrasive materials need it is to be achieved
Target.
Summary of the invention
In view of this, in view of the deficiencies of the prior art, the present invention aims to provide a kind of diamond laps
Pad and its preparation process can effectively promote the surface quality of product on guaranteeing the higher premise of grinding efficiency.
To achieve the above object, the present invention is using following technical solution：
The abrasive material that a kind of diamond lap pad includes substrate and is set on substrate surface, abrasive material 1, a kind of diamond
The abrasive material that grinding pad includes substrate and is set on substrate surface, abrasive material include following materials in percentage by mass：Gold
Hard rock forms a team abrasive material 5-10%, adhesive 70-75%, clout as filler material；Wherein diamond forms a team abrasive material by individual particle diamond
It forms a team to be formed.
As a preferred embodiment, the individual particle diamond is single-crystal diamond, passes through surface modifier and soda acid
Processing.
As a preferred embodiment, the adhesive is inorganic or organic adhesion agent.
As a preferred embodiment, the adhesive is ceramic adhesive, metallic bond, UV glue or epoxy resin.
As a preferred embodiment, the filler material be one of calcium carbonate, lime stone, wollastonite and silica or
It is a variety of.
As a preferred embodiment, the diamond form a team abrasive material granularity be 50-80 μm.
As a preferred embodiment, the abrasive material is fixed on a surface of a substrate by adhesive layer fitting.
As a preferred embodiment, the bottom surface of the substrate is covered with gum layer.
As a preferred embodiment, the abrasive material includes base portion and the abrading block that integrally extends in base surface
Portion, abrading block portion be it is multiple, multiple abrading block portions are intervally arranged.
A kind of preparation process of diamond lap pad, includes following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material；
（2）The preparation of abrasive material：By step（1）In diamond obtained form a team that dispersion is mixed with adhesive, filler material is equal for abrasive material
It is even, elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment material
Bucket, by gravure coating process, the slurry of matrix cavity is attached on PET film substrate in thermosetting or light prevent prolapse mold forming, from
And obtain required abrasive material；
（3）Substrate is taken, and abrasive material fitting is fixed on a surface of a substrate.
The present invention has obvious advantages and beneficial effects compared with the existing technology, specifically, by above-mentioned technical proposal
Known to：
Diamond lap pad is prepared by using inventive formulation and technique, removal amount is big, ensure that cutting force, is ground
Efficiency effectively improves, and grinding efficiency stability is more preferable, and service life also greatly prolongs, simultaneous processing product surface roughness
It is lower, the surface quality of converted products is greatly improved, is worth of widely use.
In order to explain the structural features and functions of the invention more clearly, come with reference to the accompanying drawing with specific embodiment to this hair
It is bright to be described in detail.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Description of drawing identification：
10, substrate 20, abrasive material
30, adhesive layer 40, gum layer.
Specific embodiment
It please refers to shown in Fig. 1, it to include substrate 10 that show a kind of specific structures of diamond lap pad of the present invention
With the abrasive material 20 being set on 10 surface of substrate, abrasive material 20 includes following materials in percentage by mass：Diamond is formed a team mill
Expect that 5-10%, adhesive 70-75%, clout are filler material；Wherein diamond abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive be inorganic or organic adhesion agent or the adhesive be ceramic adhesive,
Metallic bond, UV glue or epoxy resin, the filler material are one of calcium carbonate, lime stone, wollastonite and silica
Or it is a variety of.And the abrasive material 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the substrate 10
Bottom surface be covered with gum layer 40, so as to outside installation fix.The abrasive material 20 includes base portion 21 and in base portion 21
The abrading block portion 22 that surface is integrally extended, abrading block portion 22 be it is multiple, multiple abrading block portions 22 are intervally arranged, abrading block portion 22 can be three
Angular, rectangle, square, diamond shape, pentagon, hexagon, circle wait until that in the present embodiment, abrading block portion 22 is square,
Not to be limited.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
With multiple embodiments, invention is further described in detail below：
Embodiment 1：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 8%, adhesive 72%, clout as filler material；It is wherein golden
Hard rock abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are inorganic adhesive, and the filler material is calcium carbonate.And the abrasive material
Layer 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with gum layer 40,
To be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
Grinding test is carried out to diamond lap pad made from the present embodiment below, test result is as follows shown in table：
As seen from the above table, using diamond lap pad made from the present embodiment, removal amount is big, and grinding efficiency improves 50%, and
Grinding efficiency stability is good, and service life greatly prolongs, and simultaneous processing product surface roughness is lower, and surface smoothness is more preferable.
Embodiment 2：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 5%, adhesive 70%, clout as filler material；It is wherein golden
Hard rock abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are organic adhesion agent, and the filler material is lime stone.And the abrasive material
Layer 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with gum layer 40,
To be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
After tested, its removal amount of diamond lap pad made from the present embodiment is 30 μm, grinding efficiency is 2.5 μm/60S,
Grinding efficiency stability is ± 3.5S, and service life 250h, converted products surface roughness is 0.209 μm.
Embodiment 3：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 10%, adhesive 74%, clout as filler material；Wherein
Diamond abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are ceramic adhesive, and the filler material is wollastonite.And the abrasive material
Layer 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with gum layer 40,
To be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
After tested, its removal amount of diamond lap pad made from the present embodiment is 30 μm, grinding efficiency is 2.6 μm/60S,
Grinding efficiency stability is ± 3.2S, and service life 252h, converted products surface roughness is 0.213 μm.
Embodiment 4：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 6%, adhesive 75%, clout as filler material；It is wherein golden
Hard rock abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are metallic bond, and the filler material is silica.And the mill
The bed of material 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with gum layer
40, to be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
After tested, its removal amount of diamond lap pad made from the present embodiment is 30 μm, grinding efficiency is 2.8 μm/60S,
Grinding efficiency stability is ± 3.6S, and service life 248h, converted products surface roughness is 0.223 μm.
Embodiment 5：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 7%, adhesive 71%, clout as filler material；It is wherein golden
Hard rock abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are UV glue, and the filler material is calcium carbonate and lime stone.And the mill
The bed of material 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with gum layer
40, to be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
After tested, its removal amount of diamond lap pad made from the present embodiment is 30 μm, grinding efficiency is 2.6 μm/60S,
Grinding efficiency stability is ± 3.3S, and service life 254h, converted products surface roughness is 0.211 μm.
Embodiment 6：
The abrasive material 20 that a kind of specific structure of diamond lap pad includes substrate 10 and is set on 10 surface of substrate, mill
The bed of material 20 includes following materials in percentage by mass：Diamond forms a team abrasive material 9%, adhesive 73%, clout as filler material；It is wherein golden
Hard rock abrasive material of forming a team is formed a team by individual particle diamond and is formed.
The diamond form a team abrasive material granularity be 50-80 μm.The individual particle diamond is single-crystal diamond, is passed through
Surface modifier and soda acid processing, the adhesive are epoxy resin, and the filler material is wollastonite and silica.And
The abrasive material 20 is fixed on the surface of the substrate 10 by the fitting of adhesive layer 30, also, the bottom surface of the substrate 10 is covered with
Gum layer 40, to be fixed with outside installation.
The invention also discloses a kind of preparation processes of diamond lap pad, include following steps：
（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So
Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved
Point, the diamond for obtaining suitable particle size is formed a team abrasive material.Curing mode is photocuring or heat cure；Diamond form a team abrasive material preparation institute
Adhesive is inorganic or organic adhesion agent, or is ceramic adhesive, metallic bond, UV glue or epoxy resin, institute
Some fillers are one of calcium carbonate, lime stone, wollastonite and silica or a variety of.
（2）The preparation of abrasive material：By step（1）In diamond obtained abrasive material of forming a team mixed with adhesive, filler material point
It dissipates uniform；Elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment
The slurry of matrix cavity is attached on PET film substrate by charging basket by gravure coating process in thermosetting or light prevent prolapse mold forming,
To obtain required abrasive material.
（3）Substrate is taken, and the fitting of abrasive material 20 is fixed upper on the surface of the substrate 10.
After tested, its removal amount of diamond lap pad made from the present embodiment is 30 μm, grinding efficiency is 2.8 μm/60S,
Grinding efficiency stability is ± 3.3S, and service life 254h, converted products surface roughness is 0.224 μm.
Design focal point of the invention is：Diamond lap pad is prepared by using inventive formulation and technique,
Removal amount is big, ensure that cutting force, grinding efficiency effectively improve, and grinding efficiency stability is more preferable, and service life is also significantly
Extend, simultaneous processing product surface roughness is lower, greatly improves the surface quality of converted products, is worth of widely use
The above described is only a preferred embodiment of the present invention, be not intended to limit the scope of the present invention, therefore it is all
It is any subtle modifications, equivalent variations and modifications to the above embodiments according to the technical essence of the invention, still falls within
In the range of technical solution of the present invention.
Claims (10)
- The abrasive material that 1. a kind of diamond lap pad includes substrate and is set on substrate surface, it is characterised in that：Abrasive material It include following materials in percentage by mass：Diamond forms a team abrasive material 5-10%, adhesive 70-75%, clout as filler material；Wherein Diamond abrasive material of forming a team is formed a team by individual particle diamond and is formed.
- 2. diamond lap pad according to claim 1, it is characterised in that：The individual particle diamond is single crystal diamond Stone is handled by surface modifier and soda acid.
- 3. diamond lap pad according to claim 1, it is characterised in that：The adhesive is inorganic or organic gluing Agent.
- 4. diamond lap pad according to claim 1, it is characterised in that：The adhesive is ceramic adhesive, metal Bonding agent, UV glue or epoxy resin.
- 5. diamond lap pad according to claim 1, it is characterised in that：The filler material is calcium carbonate, lime stone, silicon One of lime stone and silica are a variety of.
- 6. diamond lap pad according to claim 1, it is characterised in that：The form a team granularity of abrasive material of the diamond is 50-80μm。
- 7. diamond lap pad according to claim 1, it is characterised in that：The abrasive material is bonded by adhesive layer and is fixed On a surface of a substrate.
- 8. diamond lap pad according to claim 1, it is characterised in that：The bottom surface of the substrate is covered with gum layer.
- 9. diamond lap pad according to claim 1, it is characterised in that：The abrasive material includes base portion and in base The abrading block portion that portion integrally extends on surface, abrading block portion be it is multiple, multiple abrading block portions are intervally arranged.
- 10. a kind of preparation process of diamond lap pad as described in any one of claim 1 to 9, it is characterised in that：Include Following steps：（1）Diamond is formed a team the preparation of abrasive material：It takes individual particle diamond, adhesive and filler to mix first and is uniformly dispersed；So Spherical agglomerates are obtained by spray drying, fluidized bed or sol-gal process afterwards；Then spherical agglomerates are solidified and is sieved Point, the diamond for obtaining suitable particle size is formed a team abrasive material；（2）The preparation of abrasive material：By step（1）In diamond obtained form a team that dispersion is mixed with adhesive, filler material is equal for abrasive material It is even, elimination bubble is vacuumized after fully dispersed, obtains required slurry；Then gained slurry is added into automatic coating equipment material Bucket, by gravure coating process, the slurry of matrix cavity is attached on PET film substrate in thermosetting or light prevent prolapse mold forming, from And obtain required abrasive material；（3）Substrate is taken, and abrasive material fitting is fixed on a surface of a substrate.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112980391A (en) * | 2021-03-02 | 2021-06-18 | 河北思瑞恩新材料科技有限公司 | Coarse grinding fluid for processing silicon carbide wafer and preparation method thereof |
| CN114161230A (en) * | 2021-11-29 | 2022-03-11 | 凯吉斯金刚石(广州)有限公司 | Renovation process of marble table top |
| CN114161230B (en) * | 2021-11-29 | 2024-04-12 | 凯吉斯金刚石(广州)有限公司 | Renovating process of marble table top |
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