CN108844639B - The test circuit and method of electrical readout non-refrigerated infrared detector - Google Patents

The test circuit and method of electrical readout non-refrigerated infrared detector Download PDF

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Publication number
CN108844639B
CN108844639B CN201810324887.8A CN201810324887A CN108844639B CN 108844639 B CN108844639 B CN 108844639B CN 201810324887 A CN201810324887 A CN 201810324887A CN 108844639 B CN108844639 B CN 108844639B
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China
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voltage
sample
tested
test
infrared detector
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CN108844639A (en
Inventor
刘超
候影
刘瑞文
傅剑宇
王玮冰
陈大鹏
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Institute of Microelectronics of CAS
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KUNSHAN MICROOPTIC ELECTRONIC CO Ltd
Institute of Microelectronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22Electrical features thereof
    • G01J5/24Use of specially adapted circuits, e.g. bridge circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/18Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/20Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity

Abstract

The invention discloses a kind of test circuit of electrical readout non-refrigerated infrared detector and methods, and testing circuit includes: sample to be tested, fixed resistance, variable resistance, voltage source, voltage amplification module, voltmeter and voltage oscilloscope.Wherein using sample to be tested as measurement arm, two fixed resistances as ratio arms, variable resistance as arm is compared, Wheatstone bridge is constituted;Electric bridge is by voltage fed, and voltmeter is connected in parallel on on the measurement concatenated ratio arms of arm, and output end voltage is shown after the amplification of voltage amplification module by voltage oscilloscope.Test circuit and method of the invention can measure response time, thermal conductivity and the thermal capacitance for obtaining electrical readout non-refrigerated infrared detector, with circuit feature simple, easy to operate, vdiverse in function, measurement accuracy is high.

Description

The test circuit and method of electrical readout non-refrigerated infrared detector
Technical field
The present invention relates to non-refrigerated infrared detector technical fields, particularly relate to a kind of electrical readout uncooled ir The test circuit and method of detector.
Background technique
Non-refrigerated infrared detector obtains large-scale application in fields such as military affairs, electric power, fire-fighting, medical treatment.Currently, Non-refrigerated infrared detector can be divided into electrical readout according to imaging mechanism and light reads two classes.Wherein, electrical readout is using in structure The thermal sensitive effect of sensing element converts the thermal energy that infra-red radiation generates to after electrical signal and reads imaging.Accurately survey The performance parameter for measuring Uncooled infrared detector device pixel grade, there is overall merit electrical readout non-refrigerated infrared detector performance Significance especially grasps thermal conductivity, thermal capacitance and the response time of the single pixel of device, helps to fully understand pixel, and Its structure design and craft is assisted to optimize.
The main stream approach for obtaining electrical readout non-refrigerated infrared detector thermal conductivity and thermal capacitance is using theoretical calculation and emulation mould The quasi- method combined, but can not reaction member actual numerical value.There are mainly two types of the traditional measurement methods of thermal response time: One, using mechanical chopper periodic modulation black body radiation, two, measured with pulsed infrared laser light source.Mechanical chopper is due to this There are mechanical delays for the chopping process of body, and very big interference can be caused to thermal response time measurement;Simultaneously by black body radiation to device The amount of radiation of part pixel be chopped into device modulation after also have large change so that by machinery copped wave method measure thermal response when Between there are precision problem, it is larger to the measurement interference of the response time of Millisecond.And test needed for pulsed infrared laser light method is set Standby to be not easy to obtain, high-precision pulsed infrared laser light source device is sufficiently expensive, and common research unit and company are difficult to bear.This When outer use machinery copped wave method and pulsed laser deposition calorimetric response time, self-heating effect of the device under operating current can ring heat Measurement between seasonable interferes.
Summary of the invention
In order to overcome drawbacks described above, the present invention provides a kind of test circuit of electrical readout non-refrigerated infrared detector and sides Method.
The present invention is to solve technical solution used by its technical problem:
A kind of test circuit of electrical readout non-refrigerated infrared detector, sample to be tested including non-refrigerated infrared detector, First fixed resistance, the second fixed resistance, variable resistance, voltage source, voltage amplification module, voltmeter and voltage oscilloscope, with The sample to be tested is as test arm, and first fixed resistance and the second fixed resistance are as ratio arms, the variable resistance As arm is compared, Wheatstone bridge is constituted;The Wheatstone bridge is by the voltage fed, and the voltmeter is connected in parallel on and institute It states on the concatenated ratio arms of test arm i.e. sample to be tested i.e. the first fixed resistance, the output end voltage of the Wheatstone bridge is through institute It is shown after stating the amplification of voltage amplification module by the voltage oscilloscope.
As a further improvement of the present invention, the voltage amplification module includes that prime operational amplifier and rear class operation are put Big device, the voltage amplification module is using the measurement arm of Wheatstone bridge and compares the both end voltage of arm as inputting, wherein measuring The output end of arm is connected with the non-inverting input terminal of the prime operational amplifier, and the one of the output end of the prime operational amplifier Branch is directly fed back to the inverting input terminal of the prime operational amplifier, another branch of the prime operational amplifier After connecting with the 4th resistance, the rear class operational amplifier inverting input terminal is accessed;The rear class operational amplifier it is same mutually defeated It is connected to enter end output of arm with compared with, the output end of the rear class operational amplifier fed back to after connecting with the 4th resistance it is described after The inverting input terminal of grade operational amplifier.
As a further improvement of the present invention, the sample to be tested is thermosensitive resistance type, PN junction diode type, thermocouple type One of with thermoelectric type.
As a further improvement of the present invention, the voltage source is high-precision signal generator.
Originally it returns and a kind of test method of test circuit based on above-mentioned electrical readout non-refrigerated infrared detector is provided, adopt Thermal conductivity test is carried out to the sample to be tested with the test circuit of the electrical readout non-refrigerated infrared detector, thermal response time is surveyed Examination and thermal capacitance test.
As a further improvement of the present invention, the thermal conductivity test includes the following steps:
Step 1, signal generator provides a constant voltage source for test circuit;
Step 2, after circuit work read-out voltage table registration, and according to first fixed resistance in parallel with voltmeter Resistance value calculates the electric current for flowing through sample to be tested;
Step 3, the amplitude of adjustment signal generator output voltage repeatedly makes sample to be tested work under operating current;
Step 4, both end voltage when sample to be tested works normally is calculated, the voltage temperature coefficient in conjunction with infrared device is anti- Push away the temperature for obtaining sample to be tested work;
Step 5, according to this operating temperature and environment temperature, the thermal conductivity of non-refrigerated infrared detector is calculated.
As a further improvement of the present invention, the thermal response time test includes the following steps:
Step 1, signal generator first provides a constant voltage source for test circuit;
Step 2, the variable resistance on arm is compared in adjusting keeps two output terminal potentials of electric bridge equal;
Step 3, adjustment signal generator generates a cycle square-wave voltage and gives test circuit power supply;
Step 4, variation and the amplification of two output end voltages of electric bridge are read with voltage amplifier module, and by voltage oscilloscope It shows.
As a further improvement of the present invention, the thermal capacitance test method is indirectly testing method, tests the sample to be tested Thermal conductivity and thermal response time, further according to formula: thermal capacitance=thermal conductivity × thermal response time, calculate obtain.
The beneficial effects of the present invention are: the test circuit of the electrical readout non-refrigerated infrared detector and method are based on infrared device The self-heating effect of part can be controlled more preferably to the factor for having tested interference without considering extraneous radiation, test operability Height, precision are also high.Test circuit of the invention is simple and easy to do, and compared with conventional test methodologies, application apparatus is simple, experimental implementation Simply, sample can be loaded and is accurately controlled, required test equipment is easy to obtain, and test equipment selects conventional electrical Equipment controls testing cost well, while measuring accuracy is also higher, can realize essence to the thermal response time of millisecond magnitude Really measurement, practicability are very high.
Detailed description of the invention
Fig. 1 is the test circuit diagram of electrical readout non-refrigerated infrared detector of the present invention.
In conjunction with attached drawing, make the following instructions:
S_01 --- Wheatstone bridge;S_02 --- voltage amplification module;
VCC --- voltage source;R1 --- the first fixed resistance;
R2 --- the second fixed resistance;R3 --- third fixed resistance;
R4 --- the 4th fixed resistance;D --- sample to be tested;
R5 --- variable resistance;U1 --- prime operational amplifier;
U2 --- rear class operational amplifier;U3 --- voltage oscilloscope;
U4 --- voltmeter.
Specific embodiment
Below in conjunction with attached drawing, elaborate to a preferred embodiment of the invention.But protection scope of the present invention is not Be limited to following embodiments, i.e., in every case with simple equivalence changes made by scope of the present invention patent and description with repair Decorations, all still belong within the invention patent covering scope.
It refering to fig. 1, is a kind of test circuit of electrical readout non-refrigerated infrared detector of the present invention, including non-brake method The sample to be tested D of infrared detector, the first fixed resistance R1, the second fixed resistance R2, variable resistance R5, voltage source VCC, voltage Amplification module S_02, voltmeter U4 and voltage oscilloscope U3, using the sample to be tested D as test arm, the described first fixed electricity R1 and the second fixed resistance R2 is hindered as ratio arms, and the variable resistance R5 constitutes Wheatstone bridge S_01 as arm is compared;Institute It states Wheatstone bridge S_01 to be powered by the voltage source VCC, the voltmeter U4 is connected in parallel on and the test arm i.e. sample to be tested D On concatenated ratio arms i.e. the first fixed resistance R1, the output end voltage of the Wheatstone bridge S_01 is through the voltage amplification mould It is shown after block S_02 amplification by the voltage oscilloscope U3.
The voltage amplification module S_02 includes prime operational amplifier U1 and rear class operational amplifier U2, and the voltage is put Big module S_02 is using the measurement arm of Wheatstone bridge and compares the both end voltage of arm as input, wherein measure arm output end and The non-inverting input terminal of the prime operational amplifier U1 is connected, and a branch of the output end of the prime operational amplifier U1 is straight The reversed inverting input terminal for being fed to the prime operational amplifier U1, another article of branch of the prime operational amplifier U1 and After four resistance R4 series connection, the rear class operational amplifier U2 inverting input terminal is accessed;The same phase of the rear class operational amplifier U2 The output of input terminal arm compared with is connected, and the output end of the rear class operational amplifier U2 is fed back to after connecting with the 4th resistance R3 The inverting input terminal of the rear class operational amplifier U2.
Wherein, the sample to be tested be thermosensitive resistance type, PN junction diode type, thermocouple type and thermoelectric type wherein it One, the voltage source is high-precision signal generator.
A kind of test method of the test circuit based on above-mentioned electrical readout non-refrigerated infrared detector, is read using the electricity The test circuit of non-refrigerated infrared detector carries out thermal conductivity test, thermal response time test and thermal capacitance survey to the sample to be tested out Examination.
Thermal conductivity test, i.e. I-V method of testing, test philosophy: infrared device sample device after absorbing extraneous infra-red radiation Part own temperature can increase, and the voltage at infrared device sample to be measured both ends can reduce with the raising of device own temperature.I With the relationship between temperature to quantify infrared device both end voltage and device of voltage temperature coefficient this concept itself.I-V Method of testing around this principle, loads a current offset, since the self-heating effect of infrared device can generate on sample to be tested Heat, this heat rise the temperature of sample itself, are eventually held in a temperature, by measuring pixel both ends at this time Voltage obtains the temperature T of sample at this time further according to TCV.By sample operating temperature and environment temperature Ts, in conjunction with thermal conductivity definitionThe thermal conductivity of device is calculated.
Thermal conductivity test includes the following steps:
Step 1, signal generator provides a constant voltage source for test circuit;
Step 2, after circuit work read-out voltage table U4 registration, and it is fixed electric according in parallel with voltmeter U4 first The resistance value for hindering R1, calculates the electric current for flowing through sample to be tested (D);
Step 3, the amplitude of adjustment signal generator output voltage repeatedly makes sample to be tested work under operating current;
Step 4, both end voltage when sample to be tested works normally is calculated, counter is pushed away in conjunction with the TCV curve of infrared device The temperature of sample to be tested work out;
Step 5, according to this operating temperature and environment temperature, the thermal conductivity of non-refrigerated infrared detector is calculated.
Thermal response time test philosophy: when infrared device sample to be measured is placed in the room temperature environment of complete darkness, environment Radiation and target emanation and itself extraneous heat radiation is simply ignored, at this time equation of heat balance are as follows:Wherein c is thermal capacitance, and I, V are the voltage and current on sample to be tested, and G is sample to be tested and ring Thermal conductivity between border.Show that R1 both end voltage is V according to voltmeter (U4)1, therefore electric current on sampleSample to be tested both ends Voltage V=VCC-V1.We assume that the product of IV changes less during the experiment;Then peer-to-peer both sides integrate:Wherein, Q is integral of the IV to the time.It is defined according to thermal response time: the temperature of infrared detector From initial temperature to the 1-e of final temperature-1The time spent in when=63%, i.e. thermal response time size are
The thermal response time test includes the following steps:
Step 1, signal generator first provides a constant voltage source for test circuit;
Step 2, the variable resistance on arm is compared in adjusting keeps two output terminal potentials of electric bridge equal;
Step 3, adjustment signal generator generates a cycle square-wave voltage and gives test circuit power supply;
Step 4, variation and the amplification of two output end voltages of electric bridge are read with voltage amplifier module, and by voltage oscilloscope It shows.
Thermal capacitance test method, the test method are indirectly testing method.By the thermal conductivity parameter and thermal response time tested out, Further according to formula: thermal capacitance is calculated in thermal capacitance=thermal conductivity * thermal response time.
The principle of test method of the invention is the self-heating effect based on infrared device, can without considering extraneous radiation More preferably to control to the factor for having tested interference, experiment operability is high, and precision is also high.The test circuit of this patent is easy easily Row, compared with above-mentioned conventional test methodologies, application apparatus is simple, and experimental implementation is simple, can load to sample and accurately be controlled System, required test equipment are easy to obtain, and test equipment selects conventional electrical equipment, controls testing cost well, together When measuring accuracy it is also higher, precise measurement can be realized to the thermal response time of millisecond magnitude, practicability is very high.

Claims (8)

1. a kind of test circuit of electrical readout non-refrigerated infrared detector, it is characterised in that: including non-refrigerated infrared detector Sample to be tested (D), the first fixed resistance (R1), the second fixed resistance (R2), variable resistance (R5), voltage source (VCC), voltage are put Big module (S_02), voltmeter (U4) and voltage oscilloscope (U3), using the sample to be tested (D) as test arm, described first Fixed resistance (R1) and the second fixed resistance (R2) are used as ratio arms, the variable resistance (R5) as arm is compared, constitute favour this Energization bridge (S_01);The Wheatstone bridge (S_01) by the voltage source (VCC) power, the voltmeter (U4) be connected in parallel on On the test arm, that is, sample to be tested (D) i.e. the first fixed resistance of concatenated ratio arms (R1), the Wheatstone bridge (S_01) Output end voltage through the voltage amplification module (S_02) amplification after by the voltage oscilloscope (U3) show;Wherein,
Thermal conductivity test when: by make test circuit work after read-out voltage table (U4) registration, and according to voltmeter (U4) simultaneously The resistance value of the first fixed resistance (R1) of connection, calculates the electric current for flowing through sample to be tested (D);Adjustment signal generator exports repeatedly The amplitude of voltage makes sample to be tested work under operating circuit;Both end voltage when sample to be tested work is calculated, in conjunction with infrared The voltage temperature coefficient of device pushes away the temperature for obtaining sample to be tested work repeatedly;According to this operating temperature and environment temperature, meter Calculate the thermal conductivity of non-refrigerated infrared detector;
When geo-thermal response test: when infrared device sample to be measured is placed in the room temperature environment of complete darkness, environmental radiation and target It radiates and itself is simply ignored extraneous heat radiation, at this time equation of heat balance are as follows: Wherein c is thermal capacitance, and I, V are the voltage and current on sample to be tested, thermal conductivity of the G between sample to be tested and environment;According to voltage Table (U4) show that R1 both end voltage is V1, therefore electric current on sampleSample to be tested both end voltage V=VCC-V1
Signal generator first provides a constant voltage source for test circuit;The variable resistance on arm is compared in adjusting makes the two of electric bridge A output terminal potential is equal;Adjustment signal generator generates a cycle square-wave voltage and gives test circuit power supply;With voltage amplifier Module reads the variation of two output end voltages of electric bridge and amplification, and is shown by voltage oscilloscope;According to thermal response time Definition: 1-e of the temperature of infrared detector from initial temperature to final temperature-1The time spent in when=63%;
When thermal capacitance calculates: according to the thermal conductivity and thermal response time for testing the sample to be tested, further according to formula: thermal capacitance=thermal conductivity × Thermal response time calculates and obtains thermal capacitance.
2. the test circuit of electrical readout non-refrigerated infrared detector according to claim 1, it is characterised in that: the voltage Amplification module (S_02) includes prime operational amplifier (U1) and rear class operational amplifier (U2), the voltage amplification module (S_ 02) using the measurement arm of Wheatstone bridge and compare the both end voltage of arm as input, wherein the output end of measurement arm with it is described before The non-inverting input terminal of grade operational amplifier (U1) is connected, and a branch of the output end of the prime operational amplifier (U1) is direct Feed back the inverting input terminal of the prime operational amplifier (U1), another branch of the prime operational amplifier (U1) with After the series connection of 4th resistance (R4), rear class operational amplifier (U2) inverting input terminal is accessed;The rear class operational amplifier (U2) output of non-inverting input terminal arm compared with is connected, the output end and the 4th resistance of the rear class operational amplifier (U2) (R3) inverting input terminal of the rear class operational amplifier (U2) is fed back to after connecting.
3. the test circuit of electrical readout non-refrigerated infrared detector according to claim 1, it is characterised in that: described to be measured Sample is one of thermosensitive resistance type, PN junction diode type, thermocouple type and thermoelectric type.
4. the test circuit of electrical readout non-refrigerated infrared detector according to claim 1, it is characterised in that: the voltage Source is high-precision signal generator.
5. a kind of test of the test circuit based on electrical readout non-refrigerated infrared detector of any of claims 1-4 Method, which is characterized in that heat is carried out to the sample to be tested using the test circuit of the electrical readout non-refrigerated infrared detector Lead test, thermal response time test and thermal capacitance test.
6. test method according to claim 5, which is characterized in that the thermal conductivity test includes the following steps:
Step 1, signal generator provides a constant voltage source for test circuit;
Step 2, after circuit work read-out voltage table (U4) registration, and it is fixed electric according in parallel with voltmeter (U4) first The resistance value for hindering (R1), calculates the electric current for flowing through sample to be tested (D);
Step 3, the amplitude of adjustment signal generator output voltage repeatedly makes sample to be tested work under operating current;
Step 4, both end voltage when sample to be tested works normally is calculated, counter is pushed away in conjunction with the voltage temperature coefficient of infrared device The temperature of sample to be tested work out;
Step 5, according to this operating temperature and environment temperature, the thermal conductivity of non-refrigerated infrared detector is calculated.
7. test method according to claim 5 or 6, which is characterized in that the thermal response time test includes following step It is rapid:
Step 1, signal generator first provides a constant voltage source for test circuit;
Step 2, the variable resistance on arm is compared in adjusting keeps two output terminal potentials of electric bridge equal;
Step 3, adjustment signal generator generates a cycle square-wave voltage and gives test circuit power supply;
Step 4, variation and the amplification of two output end voltages of electric bridge are read with voltage amplifier module, and are shown by voltage oscilloscope Out.
8. test method according to claim 7, which is characterized in that the thermal capacitance test method is indirectly testing method, is surveyed The thermal conductivity and thermal response time for trying the sample to be tested, further according to formula: thermal capacitance=thermal conductivity × thermal response time is calculated and is obtained.
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CN110346052B (en) * 2019-06-13 2020-05-05 无锡物联网创新中心有限公司 MEMS non-refrigeration infrared detector thermal parameter testing circuit and testing method
CN110440955B (en) * 2019-08-13 2021-04-13 中核控制系统工程有限公司 Response time test system for thermal resistance conditioning module
CN113075154A (en) * 2021-03-31 2021-07-06 江苏国电南自海吉科技有限公司 Non-dispersive infrared gas concentration detection device and detection method based on platinum resistor

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Patentee before: KUNSHAN MICROOPTIC ELECTRONIC CO.,LTD.

Patentee before: Institute of Microelectronics, Chinese Academy of Sciences