CN108842137A - Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber - Google Patents
Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber Download PDFInfo
- Publication number
- CN108842137A CN108842137A CN201810859240.5A CN201810859240A CN108842137A CN 108842137 A CN108842137 A CN 108842137A CN 201810859240 A CN201810859240 A CN 201810859240A CN 108842137 A CN108842137 A CN 108842137A
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- CN
- China
- Prior art keywords
- vacuum chamber
- drive rod
- vacuum
- translation
- pulley
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention discloses substrate frame transmission devices in a kind of vacuum coating equipment vacuum chamber, including transmission mechanism and translation mechanism, transmission mechanism includes the more drive rods for passing through vacuum chamber two sides side plate, the both ends of drive rod are separately mounted on two pieces of mounting plates, bellows is cased with outside drive rod outside vacuum chamber, the end of drive rod one end is equipped with synchronous pulley, synchronous pulley installation site on adjacent two drive rods is opposite, motor on two pieces of mounting plates is connect by synchronous belt with the synchronous pulley on ipsilateral drive rod, friction pulley is housed on the indoor drive rod of vacuum, friction pulley on adjacent two drive rods is staggered, translation mechanism includes translation motor, lead screw, feed screw nut, guided in translation device, translation motor is connect by synchronous belt with lead screw, feed screw nut is connect by connecting rod with mounting plate.The present invention realizes and carries out round-trip transmission to multiple substrate frames under same vacuum chamber environment, shortens the length of vacuum equipment, improves production efficiency.
Description
Technical field
The present invention relates to technical field of vacuum plating, are substrate frame transmission in a kind of vacuum coating equipment vacuum chamber specifically
Device.
Background technique
Vacuum coating production line is that multiple vacuum chambers are distributed in same level plane, by glass plating in transmission device
Conveying under, handled by each vacuum chamber, realize surface coating.It is existing by glass plating transmission use there are two types of
Transmission mode, one is linear transport mode is used, one end is brought out into one, and another kind is using loopback mode, and disengaging all exists
The same end, but the substrate disengaging of both modes transmission is completed in different vacuum chambers, so that the number of vacuum chamber
Amount increases, and corresponding vacuum-pumping system can obviously increase.
Summary of the invention
For above-mentioned the technical problems existing in the prior art, the present invention provides one kind and is able to achieve in same vacuum chamber environment
Under multiple substrate frames are carried out with the substrate frame transmission device of round-trip individual transmission.
The technical solution adopted by the present invention is as follows：Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber, including pass
Transfer mechanism and translation mechanism, the transmission mechanism include the more drive rods for being horizontally through vacuum chamber two sides side plate, drive rod
Both ends are separately mounted on two pieces of mounting plates, and bellows, ripple are cased with outside the drive rod between vacuum chamber side plate and mounting plate
Pipe both ends with vacuum chamber side plate and mounting plate airtight connection, are equipped with synchronous belt in the end of drive rod wherein one end respectively
It takes turns, the synchronous pulley installation site on adjacent two drive rods is opposite, and a motor is respectively equipped on two pieces of mounting plates, and motor is logical
It crosses synchronous belt to connect with the synchronous pulley on ipsilateral drive rod, two or more is housed on the indoor drive rod of vacuum
Friction pulley, the friction pulley on adjacent two drive rods is staggered, and the friction pulley on two drive rods being separated by is corresponding same
On one straight line；The translation mechanism includes the translation motor being mounted on vacuum chamber bottom plate, lead screw, feed screw nut, guided in translation
Device, the translation motor are connect by synchronous belt with lead screw, and feed screw nut passes through one in connecting rod and the transmission mechanism
The connection of block mounting plate, the guided in translation device include the line slide rail connecting with vacuum chamber bottom plate and fix on mounting plate
With the sliding block of line slide rail cooperation.The translation mechanism can drive the transmission mechanism whole laterally under the driving of translation motor
It moves back and forth.
Further, it is connected between the drive rod and mounting plate by device for sealing magnetic fluid.
Further, it is connected between the drive rod and vacuum chamber side plate by linear bearing.
Further, the friction pulley quantity on the drive rod on vacuum chamber inlet port and inlet and outlet side is that other drive rods rub
Twice for wiping wheel quantity, the position of friction pulley is corresponding with the position of other drive rod friction pulleys.
Further, it is additionally provided with synchronous belt tensioner pulley on a mounting board.
The beneficial effects of the invention are as follows：The present invention solves translation of multiple substrate frames under single cabinet vacuum environment and exchanges
Function is able to achieve under same vacuum chamber environment and carries out round-trip transmission to multiple substrate frames, and each substrate frame may be implemented
Individual transmission, which not will cause the variation of vacuum degree in whole work process, shortens the length of entire vacuum equipment
Degree, reduces the occupied space of whole system, improves the production efficiency of equipment.
Detailed description of the invention
Fig. 1 is overlooking structure diagram of the invention.
Fig. 2 is A side structure schematic diagram in Fig. 1.
Fig. 3 is B side structure schematic diagram in Fig. 1.
Fig. 4 is sectional view of the invention.
Fig. 5 is schematic perspective view of the invention.
Specific embodiment
To facilitate the understanding of the present invention, the present invention is made below in conjunction with Figure of description and preferred embodiment more complete
Face meticulously describes, but the protection scope of the present invention is not limited to the following specific embodiments.
As Figure 1-Figure 5, substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber of the present embodiment, including pass
Transfer mechanism and translation mechanism.The transmission mechanism includes the more drive rods 201 for passing through vacuum chamber two sides side plate 101, drive rod
It is connected between 201 and vacuum chamber side plate 101 by linear bearing 203, the both ends of drive rod 201 are separately mounted to two pieces of mounting plates
On 205, connected between drive rod 201 and mounting plate 205 by device for sealing magnetic fluid 207.Vacuum chamber and mounting plate 205 it
Between drive rod outside be cased with bellows 204,204 both ends of bellows respectively with vacuum chamber side plate 101 and the closed company of mounting plate 205
It connects, synchronous pulley 206 is installed in the end of the wherein one end of drive rod 201, the synchronous pulley installation on adjacent two drive rods
Position is opposite, and a motor 208 is respectively equipped on two pieces of mounting plates 205, and motor 208 passes through on synchronous belt and ipsilateral drive rod
Synchronous pulley connection, be additionally provided with synchronous belt tensioner pulley 209 on a mounting board.Two are equipped on the indoor drive rod 201 of vacuum
A friction pulley 202, the friction pulley on adjacent two drive rods is staggered, and the friction pulley on two drive rods being separated by is corresponding to exist
On same straight line；It is set on the drive rod 201 on vacuum chamber inlet port and inlet and outlet side there are four friction pulley 202, friction pulley
Position is corresponding with the position of friction pulley on other drive rods.
The translation mechanism includes the translation motor 301 being mounted on vacuum chamber bottom plate 102, lead screw 302, feed screw nut
303, guided in translation device 4, the translation motor 301 are connect by synchronous belt with lead screw 302, and feed screw nut 303 passes through connection
Bar 304 is connect with one piece of mounting plate 205 in the transmission mechanism, and the guided in translation device 4 includes and vacuum chamber bottom plate 102
The line slide rail 401 of connection and fix on mounting plate 205 with line slide rail 401 cooperate sliding block 402.
The translation mechanism can drive the transmission mechanism lateral shuttle mobile under the driving of translation motor.
The course of work of the invention is as follows：
2 sets of new substrate frames enter the transmission device by vacuum chamber inlet and outlet, the side the A/side B friction pulley is in an intermediate position accept into
The 2 sets of new substrate frames entered, two sides motor rotates forward simultaneously so that 2 sets of new substrate frames enter vacuum chamber, is driven by translation motor
Entire transmission mechanism is moved under vacuum conditions from the side B/A sidesway to the side A/side B, and 2 sets of new substrate frames rest on the side A/side B
On friction pulley, so that the friction pulley close to the side B/side A is moved to middle position.Vacuum chamber inlet port Joining Technology chamber, in work
2 sets of substrate frames after skill chamber completion plated film are respectively individually rotated backward by two sides motor, are successively entered the side B/side A and are rubbed
It wipes on wheel, just there is 4 sets of substrate frames above the transmission device in this way（2 sets of new sets of substrate frame+2 complete the substrate frame after plated film）, so
Drive entire transmission mechanism under vacuum conditions from the side A/B sidesway to the side B/side A by translation motor again afterwards, such 2 sets new
Substrate frame is moved to middle position, is respectively individually rotated forward by two sides motor, and 2 sets of new substrate frames of driving are successively independent
Coating process is completed into processing chamber.When 2 sets of new substrate frames the last one enter processing chamber after, translation motor drive
Entire transmission mechanism is moved from the side B/A sidesway to the side A/side B, so that 2 sets of substrate frames for completing plated film before rest on interposition
It sets, is rotated backward simultaneously by two sides motor, the substrate frame for completing plated film leaves vacuum chamber by inlet and outlet simultaneously, at the same time work
The new substrate frame of 2 sets of completion plated films of skill chamber can be rotated backward by two sides motor while be moved to the side the A/side B friction pulley
Above, then vacuum chamber has reentered 2 sets of new substrate frames, and the workflow begun the above is recycled.
With the help of the introduction present in aforementioned specification and relevant drawings, those skilled in the art in the invention will
It will recognize that many modifications and other embodiments of the invention.It will consequently be understood that the present invention is not limited to disclosed specific realities
Scheme is applied, modification and other embodiments are to be considered as included in scope of the appended claims.Although spy is used herein
Determine term, they are only used with generic and descriptive sense, rather than limitation.
Claims (5)
1. substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber, it is characterised in that：Including transmission mechanism and translation mechanism,
The transmission mechanism includes the more drive rods for being horizontally through vacuum chamber two sides side plate, and the both ends of drive rod are separately mounted to
On two pieces of mounting plates, it is cased with bellows outside the drive rod between vacuum chamber side plate and mounting plate, bellows both ends are respectively and very
Empty room side plate and mounting plate airtight connection are equipped with synchronous pulley, adjacent two transmissions in the end of drive rod wherein one end
Synchronous pulley installation site on bar is opposite, is respectively equipped with a motor on two pieces of mounting plates, motor by synchronous belt with it is ipsilateral
Drive rod on synchronous pulley connection, on the indoor drive rod of vacuum be equipped with two or more friction pulleys, it is adjacent
Friction pulley on two drive rods is staggered, and the friction pulley on two drive rods being separated by is corresponding on the same line；
The translation mechanism includes the translation motor being mounted on vacuum chamber bottom plate, lead screw, feed screw nut, guided in translation device,
The translation motor is connect by synchronous belt with lead screw, and feed screw nut passes through one piece of installation in connecting rod and the transmission mechanism
Plate connection, the guided in translation device include the line slide rail being connect with vacuum chamber bottom plate and fix on mounting plate with straight line
The sliding block of sliding rail cooperation.
2. substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that：The biography
It is connected between lever and mounting plate by device for sealing magnetic fluid.
3. substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that：The biography
It is connected between lever and vacuum chamber side plate by linear bearing.
4. substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that：In vacuum
Friction pulley quantity on room inlet port and the drive rod on inlet and outlet side is twice of other drive rod friction pulley quantity, friction pulley
Position it is corresponding with the position of other drive rod friction pulleys.
5. substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that：It is installing
Synchronous belt tensioner pulley is additionally provided on plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859240.5A CN108842137A (en) | 2018-07-31 | 2018-07-31 | Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859240.5A CN108842137A (en) | 2018-07-31 | 2018-07-31 | Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108842137A true CN108842137A (en) | 2018-11-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810859240.5A Pending CN108842137A (en) | 2018-07-31 | 2018-07-31 | Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| US20120107074A1 (en) * | 2009-04-22 | 2012-05-03 | Atotech Deutschland Gmbh | Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading apparatus |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106756850A (en) * | 2016-12-26 | 2017-05-31 | 肇庆市科润真空设备有限公司 | A kind of efficiency compact high magnetic control film coating device and method |
| CN208917284U (en) * | 2018-07-31 | 2019-05-31 | 湖南玉丰真空科学技术有限公司 | Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber |
-
2018
- 2018-07-31 CN CN201810859240.5A patent/CN108842137A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120107074A1 (en) * | 2009-04-22 | 2012-05-03 | Atotech Deutschland Gmbh | Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading apparatus |
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106756850A (en) * | 2016-12-26 | 2017-05-31 | 肇庆市科润真空设备有限公司 | A kind of efficiency compact high magnetic control film coating device and method |
| CN208917284U (en) * | 2018-07-31 | 2019-05-31 | 湖南玉丰真空科学技术有限公司 | Substrate frame transmission device in a kind of vacuum coating equipment vacuum chamber |
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