CN108838514A - A kind of device and method on laser cavitation polishing material surface - Google Patents
A kind of device and method on laser cavitation polishing material surface Download PDFInfo
- Publication number
- CN108838514A CN108838514A CN201810687647.4A CN201810687647A CN108838514A CN 108838514 A CN108838514 A CN 108838514A CN 201810687647 A CN201810687647 A CN 201810687647A CN 108838514 A CN108838514 A CN 108838514A
- Authority
- CN
- China
- Prior art keywords
- laser
- sink
- material surface
- polishing
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
Abstract
The present invention relates to a kind of device and method based on laser cavitation polishing material surface, including sink, fluid box I, drinking-water pipe, liquid pump, outlet pipe and fluid box II, bottom is equipped with bearing platform in the sink, workpiece is fixed on the bearing platform by clamping device, and the sink is placed in three-dimensional mobile platform；Laser cavitation system is installed above the sink, the liquid pump is pumped by the drinking-water pipe in the polishing fluid to the sink in the fluid box I, the outlet pipe is located at another side wall of the sink, the outlet pipe is connected to the fluid box II, and for ensureing, liquid capacity is certain in sink.The present invention drives abrasive grain to polish material surface using the pressure of shock wave during laser cavitation and microjet, its controllability is stronger, and it uses diffractive-optical element to carry out laser beam splitter and expands the zone of action to improve polishing efficiency, its degree of polishing is measured in real time simultaneously, reduces the time for carrying workpiece to be machined.
Description
Technical field
The present invention relates to a kind of laser cavitation polishing material surface apparatus and methods, are suitable for laser cavitation to material surface
Carry out polishing technology field.
Background technique
When laser action is in liquid medium, the laser power density of focal spot is greater than the breakdown threshold of liquid medium,
" avalanche type " ionization occurs for hydrone, and optical breakdown effect occurs and forms plasma chamber, and plasma chamber, which continues to absorb, to swash
Light energy, volume accelerated expansion grows into hole, and then becomes vacuole.Then, the vacuole that induced with laser generates pressure in steeping
Under the interaction of fluid pressure, pulsation is constantly expanded and is compressed, it is final to vanish after recycling for several times.In vacuole
During crumbling and fall, it may occur that blast effect and high-speed jet to external radiation act under turbulence state in polishing fluid
Abrasive grain is allowed to that ablation occurs between material surface, achievees the effect that polishing.Incident laser energy is bigger, laser-induced cavitation institute
Energy content is bigger, when bubble collapse generated effluxvelocity and impact force also accordingly become larger.
Diffraction optical element（DOE）For a laser beam to be decomposed into multiple light beams, and the characteristic of each light beam
It is consistent with incident original laser light beam, shaping and beam splitting are carried out to laser beam in a manner of high energy efficiency.DOE is with the smallest light loss
The production facility, medical laser and diagnostic instrments applied in Materialbearbeitung mit Laserlicht are lost, while in illumination, printing technology and light
Quarter field, and measurement and metering system in be also widely used.The present invention using diffractive-optical element by collimated laser beam into
Row beam splitting, so that expansion of laser light cavitation region is to improve polishing efficiency.
According to the reflection law of light, parallel rays is after interface is reflected, due to the presence of interface roughness, it may occur that be all-trans
It penetrates and diffusing reflection, the laser of a branch of high brightness, high coherence, high directivity and high monochromaticity is projected into material with certain incidence angle
Expect surface, must have a loss for generating light because diffusing reflection occurs, polishing degree is detected with this, device is simple and easy to operate.
Polish simultaneously its polishing degree of real-time detection to material surface using laser cavitation, has for material surface processing
Significance is also provided for a kind of new idea and thinking, and at present about the correlation text of the method and apparatus of this respect
It offers and is not yet retrieved with patent.
Summary of the invention
The purpose of the present invention is to provide a kind of device and method on laser cavitation polishing material surface, utilize laser cavitation
The shock wave and microjet pressure that bubble collapse generates in the process drive the abrasive grain in fluid polishing liquid to throw material surface
Light.
For achieving the above object, the technical scheme adopted by the invention is as follows：A kind of laser cavitation polishing material surface
Device, including sink, fluid box I, drinking-water pipe, liquid pump, outlet pipe and fluid box II, bottom is equipped with bearing material in the sink
Platform, workpiece are fixed on the bearing platform by clamping device, and the sink is placed in three-dimensional mobile platform；Above the sink
Laser cavitation system is installed, the liquid pump pumps the polishing fluid in the fluid box I to the sink by the drinking-water pipe
Interior, the outlet pipe is located at another side wall of the sink, and the outlet pipe is connected to the fluid box II, for ensureing sink
Interior liquid capacity is certain.
It further include a throwing photometric detection system, the throwing photometric detection system includes laser pen and light in above scheme
Dependent sensor, the laser pen are controlled by computer, and the photosensitive sensor is connected by data processing equipment with computer.
In above scheme, the side wall surface of the sink is sliding wall, and the sliding wall is mounted on sink by sliding rail
Water inlet side, can freely adjust its height.
In above scheme, booster is installed on the sliding wall, the booster by the drinking-water pipe with it is described
Liquid pump connection.
In above scheme, blender is equipped in the fluid box I.
In above scheme, the liquid pump, the three-dimensional mobile platform and the laser cavitation system with the calculating
Machine connection,
In above scheme, the laser cavitation system includes laser beam splitter lens group, total reflective mirror, YAG laser and laser controlling
Device, the laser beam splitter lens group are made of concavees lens, convex lens and diffractive-optical element DOE, and the YAG laser is in laser
Controller control is lower to issue laser beam, and the laser beam passes through total reflective mirror, then successively passes through concavees lens, convex lens and optical diffraction
Element DOE forms multiple laser, multiple focus points is obtained in the polishing fluid above workpiece, to form multiple vacuoles.
In above scheme, the bearing platform is equipped with several dovetail grooves, and the clamping device can be big according to the size of workpiece
It is small to be fixed on the fixation that workpiece is preferably adapted on corresponding dovetail groove.
The present invention also provides a kind of methods on laser cavitation polishing material surface, include the following steps：The first step：With machinery
Method or chemical method carry out surface preparation to workpiece, remove oxidation film, organic contaminations, burr and dust of material surface etc., clearly
Clean polished surface；Second step：The workpiece of preprocessed mistake is fixed on bearing platform by clamping device, and by entire sink
It is placed in three-dimensional mobile platform, positions and fixes；Third step：Blender is opened, liquid pump work is controlled by computer, is adjusted
The height for saving booster parameter and sliding wall, makes polishing fluid there not to be workpiece and is formed on its surface turbulent flow, meanwhile, it opens
Water outlet keeps liquid capacity in sink certain；4th step：YAG laser parameters are adjusted by laser controller, are adjusted complete
Anti- mirror makes optical path change, and adjusts concavees lens and convex lens obtains collimated laser beam, then pass through diffractive-optical element DOE
Multiple laser is formed, while focuses on each Shu Jiguang on the polished region of workpiece by computer regulated three-dimensional mobile platform
Side forms vacuole；5th step：The shock wave and microjet generated in cavitation processes provides power and pressure for the abrasive grain in polishing fluid
Power makes it act on all polished regions by controlling three-dimensional mobile platform；6th step：Closing liquid pump, booster and YAG
Laser, and clean polished surface, laser pen with certain incident angular machined surface throw light, the light through being totally reflected into
Enter photosensitive sensor, collect the corresponding data of total reflection light, and handled by data processing equipment, then incoming computer
It is analyzed, obtains the real time data of polishing degree.
In above scheme, photosensitive sensor is loss light, computer point for receiving total reflection light corresponding data, scattering light
Analysis calculates the ratio between the data of data processing equipment treated data and laser pen direct projection photosensitive sensor.
Beneficial effects of the present invention：（1）The blast effect of bubble collapse during laser cavitation and microjet are converted into mill
The power that is polished of grain, and induced with laser vacuole belongs to energy deposition induction cavitation, have Sphere symmetry is good, controllability is strong,
The advantages of no mechanicalness becomes and other cavitations such as accurate positioning do not have, can be effectively controlled its polishing process；（2）The device optical path
Diffractive-optical element DOE is applied in system, one laser beam can be decomposed into multiple beam, and each laser with the smallest light loss
Beam characteristic is constant, has both reduced laser energy loss, has expanded time processing region to improve polishing efficiency；（3）The present invention
By polishing with throw photometric detection synchronize combine, the two procedure carry out, reduce carry workpiece to be machined time,
The photosensitive sensor Parameters variation of reflection front and back is used up to indicate that polishing degree, device are simple and convenient and easy to operate；（4）The device into
Mouth of a river side plate is set as movable, and matches with booster, and polishing fluid can be effectively quickly in workpiece surface machining area
Turbulent flow is formed, polishing validity and quality of finish are improved.
Detailed description of the invention
Fig. 1 is the schematic diagram of the device of laser cavitation polishing material surface and throwing photometric detection.
Fig. 2 is polishing degree detecting system schematic diagram.
In figure：1. computer；2. data processing equipment；3. fluid box II；4. outlet pipe；5. three-dimensional mobile platform；6. water
Slot；7. bearing platform；8. workpiece；9. clamping device；10. polishing fluid；11. blender；12 fluid boxes I；13. drinking-water pipe；14. sliding
Side wall；15. liquid pump；16. booster；17. vacuole；18. diffractive-optical element DOE；19. convex lens；20. concavees lens；21. complete
Anti- mirror；22. laser beam；23.YAG laser；24. laser controller；25. throwing photometric detection system；25-1. laser pen；25-2.
Total reflection light；25-3. photosensitive sensor；25-4. scattering light.
Specific embodiment
With reference to the accompanying drawing, technical solution of the present invention is described in further detail.
As shown in Figure 1, the device of a kind of laser cavitation polishing material surface and throwing photometric detection, including sink 6, laser are empty
Change system throws photometric detection system 25 and computer 1.The laser cavitation system and the throwing photometric detection system 25 are respectively positioned on
The top of sink 6, the laser cavitation system include concavees lens 20, convex lens 19, diffractive-optical element DOE18, total reflective mirror 21,
YAG laser 23 and laser controller 24, are used to form multiple laser, obtain multiple focusing in the polishing fluid 10 above workpiece
Point.The 6 water inlet side of sink can freely adjust its height, 16 water outlet of booster is mounted on equipped with slidably side wall 14
On the sliding wall 14, to adapt to the height of workpiece 8, the workpiece surface is made to form turbulent flow.The booster 16 and liquid
Pump 15 is connected by drinking-water pipe 13, realizes pumping and being pressurized for polishing fluid 10 in fluid box I 12, the fluid box I 12 is provided with
Blender 11,6 other side wall of sink has outlet pipe 4, and is connected to fluid box II 3.The sink 6 is provided with bearing platform
7, clamping device 9 and the workpiece 8 by 9 positioning and clamping of clamping device, the sink 6 are placed in three-dimensional mobile platform 5.Its
In, liquid pump 15, three-dimensional mobile platform 5 and laser controller 24 are connect with computer 1.
As shown in Fig. 2, the throwing photometric detection system of the embodiment of the present invention, which is located at 6 top of sink, including laser
25-1 and photosensitive sensor 25-3, using the photosensitive Parameters variation of light reflection front and back, and by 2 analysis of data processing equipment
To detect to polishing degree, the data processing equipment 2 and laser pen 25-1 are connect with computer 1 reason.
Specific embodiment：Surface preparation is carried out to workpiece, remove the oxidation film of material surface, organic contaminations, burr and
Dust etc. cleans polished surface；The workpiece 8 of preprocessed mistake is fixed on bearing platform 7 by clamping device 9, and will be whole
A sink 6 is placed in three-dimensional mobile platform 5, is positioned and fixed；Blender 11 is opened, liquid pump 15 is controlled by computer 1
Work adjusts the height of booster 16 and sliding wall 14, so that polishing fluid 10 there not to be workpiece 8 and be formed on its surface turbulent flow i.e.
Can, water outlet is opened simultaneously, keeps liquid capacity in sink 6 certain；The every ginseng of YAG laser 23 is adjusted by laser controller 24
Number, adjusting total reflective mirror 21 makes optical path change, and adjusts concavees lens 20 and convex lens 19 obtains collimated laser beam, then pass through
Diffractive-optical element DOE18 forms multiple laser, while adjusting three-dimensional mobile platform 5 by computer 1 focuses each Shu Jiguang
In the polished overlying regions of workpiece 8, vacuole 17 is formed；The shock wave and microjet generated in cavitation processes is in polishing fluid 10
Abrasive grain provides power and pressure, so that it is acted on all polished regions by controlling three-dimensional mobile platform 5；Closing liquid pump
15, booster 16 and YAG laser 23, and polished surface is cleaned, laser pen 25-1 is with certain incident angular machined surface
Throw light, the light through being totally reflected enter photosensitive sensor 25-3, collect the corresponding data of total reflection light 25-2, and pass through number
It is handled according to processing unit 2, then incoming computer 1 is analyzed, and the real time data of polishing degree is obtained.
The polishing fluid 10 is a kind of flowable mixture for adulterating abrasive grain, is made of high molecular material and abrasive grain, abrasive grain
Using aluminium oxide, silicon carbide, boron carbide, cubic boron nitride and diamond etc..
23 output wavelength of YAG laser is 1.06, single pulse energy range is 60~800, pulsewidth 5~
50。
Claims (10)
1. a kind of device on laser cavitation polishing material surface, which is characterized in that including sink（6）, fluid box I（12）, draw water
Pipe（13）, liquid pump（15）, outlet pipe（4）With fluid box II（3）, the sink（6）Interior bottom is equipped with bearing platform（7）, workpiece
（8）Pass through clamping device（9）It is fixed on the bearing platform（7）On, the sink（6）It is placed in three-dimensional mobile platform（5）；It is described
Sink（6）Top is installed by laser cavitation system, the liquid pump（15）Pass through the drinking-water pipe（13）Pump the fluid box I
（12）In polishing fluid（10）To the sink（6）It is interior, the outlet pipe（4）Positioned at the sink（6）Another side wall, it is described
Outlet pipe（4）With the fluid box II（3）Connection, for ensureing sink（6）Interior liquid capacity is certain.
2. a kind of device on laser cavitation polishing material surface according to claim 1, which is characterized in that further include polishing
Spend detection system（25）, the throwing photometric detection system（25）Including laser pen（25-1）And photosensitive sensor（25-3）, described
Laser pen（25-1）By computer（1）Control, the photosensitive sensor（25-3）Pass through data processing equipment（2）With computer
（1）It is connected.
3. a kind of device on laser cavitation polishing material surface according to claim 1 or 2, which is characterized in that the water
Slot（6）Side wall surface be sliding wall（14）, the sliding wall（14）Sink is mounted on by sliding rail（6）Water inlet one
Side can freely adjust its height.
4. a kind of device on laser cavitation polishing material surface according to claim 3, which is characterized in that the sliding side
Wall（14）On booster is installed（16）, the booster（16）Pass through the drinking-water pipe（13）With the liquid pump（15）Even
It connects.
5. a kind of device on laser cavitation polishing material surface according to claim 1, which is characterized in that the fluid box
Ⅰ（12）It is interior to be equipped with blender（11）.
6. a kind of device on laser cavitation polishing material surface according to claim 1 or 2, which is characterized in that the liquid
Body pump（15）, the three-dimensional mobile platform（5）With the laser cavitation system with the computer（1）Connection.
7. a kind of device on laser cavitation polishing material surface according to claim 6, which is characterized in that the laser is empty
Change system includes laser beam splitter lens group, total reflective mirror（21）, YAG laser（23）And laser controller（24）, the laser point
Beam lens group is by concavees lens（20）, convex lens（19）With diffractive-optical element DOE（18）Composition, the YAG laser（23）?
Laser controller（24）Control is lower to issue laser beam（22）, the laser beam（22）By total reflective mirror（21）, then successively pass through recessed
Lens（20）, convex lens（19）With diffractive-optical element DOE（18）Multiple laser is formed, in workpiece（8）The polishing fluid of top
（10）It is middle to obtain multiple focus points, to form multiple vacuoles（17）.
8. a kind of device on laser cavitation polishing material surface according to claim 1 or 2, which is characterized in that described to hold
Expect platform（7）It is equipped with several dovetail grooves, the clamping device（9）It can be according to workpiece（8）Size be fixed on corresponding ladder
Preferably to adapt to workpiece on shape slot（8）Fixation.
9. a kind of method on laser cavitation polishing material surface, includes the following steps：
The first step：With Mechanical Method or chemical method to workpiece（8）Surface preparation is carried out, the oxidation film, organic of material surface is removed
Contamination, burr and dust etc. clean polished surface；
Second step：By the workpiece of preprocessed mistake（8）Pass through clamping device（9）It is fixed on bearing platform（7）On, and by entire sink
（6）It is placed in three-dimensional mobile platform（5）On, it positions and fixes；
Third step：Open blender（11）, pass through computer（1）Control liquid pump（15）Work adjusts booster（16）Parameter
And sliding wall（14）Height, make polishing fluid（10）Do not cross workpiece（8）And it is formed on its surface turbulent flow, meanwhile, it opens
Water outlet makes sink（6）Interior liquid capacity is certain；
4th step：Pass through laser controller（24）Adjust YAG laser（23）Parameters adjust total reflective mirror（21）Send out optical path
It is raw to change, adjust concavees lens（20）And convex lens（19）Collimated laser beam is obtained, then passes through diffractive-optical element DOE（18）
Multiple laser is formed, while passing through computer（1）Adjust three-dimensional mobile platform（5）Each Shu Jiguang is set to focus on workpiece（8）Wait throw
Light overlying regions form vacuole（17）；
5th step：The shock wave and microjet generated in cavitation processes is polishing fluid（10）In abrasive grain power and pressure are provided,
By controlling three-dimensional mobile platform（5）It is set to act on all polished regions；
6th step：Closing liquid pump（15）, booster（16）And YAG laser（23）, and clean polished surface, laser pen
（25-1）With certain incident angular machined surface throw light, the light through being totally reflected enters photosensitive sensor（25-3）, acquisition
To total reflection light（25-2）Corresponding data, and pass through data processing equipment（2）It is handled, then incoming computer（1）It carries out
Analysis, obtains the real time data of polishing degree.
10. a kind of method on laser cavitation polishing material surface according to claim 9, which is characterized in that light sensor
Device（25-3）For receiving total reflection light（25-2）Corresponding data scatters light（25-4）For light, computer is lost（1）Analytical calculation
Data processing equipment（2）Data that treated and laser pen（25-1）Direct projection photosensitive sensor（25-3）The ratio between data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810687647.4A CN108838514A (en) | 2018-06-28 | 2018-06-28 | A kind of device and method on laser cavitation polishing material surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810687647.4A CN108838514A (en) | 2018-06-28 | 2018-06-28 | A kind of device and method on laser cavitation polishing material surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108838514A true CN108838514A (en) | 2018-11-20 |
Family
ID=64200747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810687647.4A Pending CN108838514A (en) | 2018-06-28 | 2018-06-28 | A kind of device and method on laser cavitation polishing material surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108838514A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110526379A (en) * | 2019-08-26 | 2019-12-03 | 江苏大学 | It is a kind of for handling the efficient laser cavitation device of waste water from dyestuff |
| CN110560891A (en) * | 2019-09-25 | 2019-12-13 | 吉林大学 | Device and method for processing transparent dielectric material by using static pressure water to assist nanosecond laser |
| CN110560936A (en) * | 2019-07-26 | 2019-12-13 | 青岛理工大学 | Laser parallel processing device and processing method for leather product array air holes |
| CN110614429A (en) * | 2019-08-23 | 2019-12-27 | 江苏大学 | Laser-induced cavitation forming device and method |
| CN110777250A (en) * | 2019-11-12 | 2020-02-11 | 徐州工程学院 | Underwater particle vacuole coupled material strengthening device and method |
| CN110842349A (en) * | 2019-08-02 | 2020-02-28 | 江苏大学 | Device and method for removing burrs based on laser cavitation |
| CN110936021A (en) * | 2019-12-25 | 2020-03-31 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN111843843A (en) * | 2020-06-16 | 2020-10-30 | 江苏大学 | Method for ultrasonic uniform cavitation shot blasting of mixed particle solution |
| CN113814883A (en) * | 2021-10-19 | 2021-12-21 | 浙江工业大学 | Optical suspension polishing device and polishing method thereof |
| CN114227546A (en) * | 2021-08-30 | 2022-03-25 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN114653672A (en) * | 2022-03-15 | 2022-06-24 | 广东工业大学 | Engine connecting rod circulating cleaning device and method based on laser cavitation |
| CN114669884A (en) * | 2022-05-16 | 2022-06-28 | 郑州磨料磨具磨削研究所有限公司 | Laser processing diamond flattening device and method based on horizontal liquid level regulation |
| CN114871569A (en) * | 2022-05-19 | 2022-08-09 | 江苏大学 | Laser cavitation device and method for polishing |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63207545A (en) * | 1987-02-23 | 1988-08-26 | Toshiba Corp | Polishing device |
| CN101363725A (en) * | 2008-09-28 | 2009-02-11 | 北京时代之峰科技有限公司 | Detection device for roughness of surface |
| US20090188901A1 (en) * | 2006-04-10 | 2009-07-30 | Board Of Trustees Of Michigan State University | Laser Material Processing System |
| CN102869474A (en) * | 2010-04-28 | 2013-01-09 | 株式会社V技术 | Laser processing device |
| CN104440584A (en) * | 2014-11-04 | 2015-03-25 | 广东工业大学 | Abrasive flow micropore polishing device and polishing process thereof |
| CN107470276A (en) * | 2017-08-29 | 2017-12-15 | 江苏大学 | A kind of apparatus and method for realizing laser cavitation cleaning material surface micronano particle |
-
2018
- 2018-06-28 CN CN201810687647.4A patent/CN108838514A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63207545A (en) * | 1987-02-23 | 1988-08-26 | Toshiba Corp | Polishing device |
| US20090188901A1 (en) * | 2006-04-10 | 2009-07-30 | Board Of Trustees Of Michigan State University | Laser Material Processing System |
| CN101363725A (en) * | 2008-09-28 | 2009-02-11 | 北京时代之峰科技有限公司 | Detection device for roughness of surface |
| CN102869474A (en) * | 2010-04-28 | 2013-01-09 | 株式会社V技术 | Laser processing device |
| CN104440584A (en) * | 2014-11-04 | 2015-03-25 | 广东工业大学 | Abrasive flow micropore polishing device and polishing process thereof |
| CN107470276A (en) * | 2017-08-29 | 2017-12-15 | 江苏大学 | A kind of apparatus and method for realizing laser cavitation cleaning material surface micronano particle |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110560936A (en) * | 2019-07-26 | 2019-12-13 | 青岛理工大学 | Laser parallel processing device and processing method for leather product array air holes |
| CN110560936B (en) * | 2019-07-26 | 2022-01-07 | 青岛理工大学 | Laser parallel processing device and processing method for leather product array air holes |
| CN110842349A (en) * | 2019-08-02 | 2020-02-28 | 江苏大学 | Device and method for removing burrs based on laser cavitation |
| CN110614429A (en) * | 2019-08-23 | 2019-12-27 | 江苏大学 | Laser-induced cavitation forming device and method |
| CN110614429B (en) * | 2019-08-23 | 2021-09-10 | 江苏大学 | Laser-induced cavitation forming device and method |
| CN110526379A (en) * | 2019-08-26 | 2019-12-03 | 江苏大学 | It is a kind of for handling the efficient laser cavitation device of waste water from dyestuff |
| CN110560891A (en) * | 2019-09-25 | 2019-12-13 | 吉林大学 | Device and method for processing transparent dielectric material by using static pressure water to assist nanosecond laser |
| CN110777250A (en) * | 2019-11-12 | 2020-02-11 | 徐州工程学院 | Underwater particle vacuole coupled material strengthening device and method |
| CN110936021A (en) * | 2019-12-25 | 2020-03-31 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN110936021B (en) * | 2019-12-25 | 2023-12-19 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN111843843A (en) * | 2020-06-16 | 2020-10-30 | 江苏大学 | Method for ultrasonic uniform cavitation shot blasting of mixed particle solution |
| CN114227546A (en) * | 2021-08-30 | 2022-03-25 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN114227546B (en) * | 2021-08-30 | 2023-05-23 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN113814883A (en) * | 2021-10-19 | 2021-12-21 | 浙江工业大学 | Optical suspension polishing device and polishing method thereof |
| CN114653672A (en) * | 2022-03-15 | 2022-06-24 | 广东工业大学 | Engine connecting rod circulating cleaning device and method based on laser cavitation |
| CN114653672B (en) * | 2022-03-15 | 2023-12-22 | 广东工业大学 | Automatic cleaning circulation and quality monitoring device and method for laser cavitation bubbles |
| CN114669884A (en) * | 2022-05-16 | 2022-06-28 | 郑州磨料磨具磨削研究所有限公司 | Laser processing diamond flattening device and method based on horizontal liquid level regulation |
| CN114669884B (en) * | 2022-05-16 | 2024-02-02 | 郑州磨料磨具磨削研究所有限公司 | Device and method for flattening laser processing diamond based on horizontal liquid level regulation and control |
| CN114871569A (en) * | 2022-05-19 | 2022-08-09 | 江苏大学 | Laser cavitation device and method for polishing |
| CN114871569B (en) * | 2022-05-19 | 2024-04-09 | 江苏大学 | Laser cavitation device and method for polishing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108838514A (en) | A kind of device and method on laser cavitation polishing material surface | |
| Zhao et al. | Investigation of the optimal parameters for the surface finish of K9 optical glass using a soft abrasive rotary flow polishing process | |
| CN108145606A (en) | Polishing fluid bulky grain real time on-line monitoring device in a kind of polishing process | |
| CN109093247A (en) | A kind of device and method for realizing laser cavitation high-efficient rust-removing paint removal | |
| CN103008882A (en) | Micro-processing method and system for pulse laser fragile material | |
| CN109676442B (en) | Grinding and polishing device with auxiliary laser dipping polishing solution and application method thereof | |
| CN104772569A (en) | Laser impact micro forming device and micro forming process thereof of medical titanium alloy plate | |
| CN109866028B (en) | Jet-flow-constrained femtosecond laser ultra-precision machining system and method | |
| CN103317234A (en) | Laser induced low pressure jet flow combined etching processing method and device | |
| Hirata et al. | Machining property in smoothing of steeply curved surfaces by elastic emission machining | |
| CN102248293B (en) | Rotary adjustable water waveguide laser processing device | |
| CN108838747A (en) | A kind of focus ultrasonic fluid oscillation polishing system based on acoustic lens | |
| JP2001321977A (en) | Hybrid machining device | |
| CN107181931B (en) | A kind of camera system for orthogonal turning and milling process high speed imaging | |
| CN209078390U (en) | A kind of focus ultrasonic fluid oscillation polishing system based on acoustic lens | |
| CN116532825A (en) | Laser hole making process monitoring and regulating combined protection method and system | |
| CN107138863A (en) | Laser cutting machine | |
| JPH07256479A (en) | Laser beam machine and laser beam processing method | |
| Booij et al. | Nanometer accurate shaping with fluid jet polishing | |
| CN206732374U (en) | A kind of picosecond laser fly-cutting glass machine | |
| JP2002261059A (en) | Grinding state detector | |
| Wang et al. | Laser and water-jet fiber coupling technology for water-jet guided laser micromachining | |
| CN113634880A (en) | Multi-beam water-guided laser processing device and system | |
| CN204093783U (en) | A kind of Focus tracking laser cleaning machine | |
| US10210963B2 (en) | Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181120 |
|
| RJ01 | Rejection of invention patent application after publication |