CN108827902B - Terahertz fingerprint detection sensitivity enhancing method based on nano antenna structure - Google Patents

Terahertz fingerprint detection sensitivity enhancing method based on nano antenna structure Download PDF

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CN108827902B
CN108827902B CN201810654069.4A CN201810654069A CN108827902B CN 108827902 B CN108827902 B CN 108827902B CN 201810654069 A CN201810654069 A CN 201810654069A CN 108827902 B CN108827902 B CN 108827902B
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秦坚源
韩宝娟
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China Jiliang University
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Abstract

The invention relates to a method for enhancing terahertz fingerprint detection sensitivity based on a nano antenna structure, belonging to terahertz detectionThe technical field of measurement and application. A terahertz fingerprint detection sensitivity enhancing method based on a nano antenna structure comprises the following steps: step a, designing a nano antenna structure for detection; b, loading a substance to be detected on the surface of the nano antenna structure, and testing and recording a terahertz transmission spectrum of the substance to be detected on the surface of the nano antenna structure; and c, judging whether the target substance exists or not by analyzing the change of the transmittance of the terahertz transmission spectrum before and after the substance to be detected is loaded. Compared with the existing fingerprint detection method, the method aims at the 10 in the slit of the nano antenna structure5The detection sensitivity is greatly improved by two characteristics of magnitude electric field intensity and full-wave band high transmittance, and the identification and measurement of target substances with nanometer magnitude thickness are realized.

Description

Terahertz fingerprint detection sensitivity enhancing method based on nano antenna structure
Technical Field
The invention relates to a method for enhancing terahertz fingerprint detection sensitivity based on a nano antenna structure, and belongs to the technical field of terahertz detection application.
Background
Due to the fact that most biological molecules vibrate in a collective mode, rotation between molecules or in molecules generates resonance, and the absorption characteristic frequency of the resonance is located in a terahertz wave band, the type identification of various substances can be achieved through absorption spectrum fingerprints of the substances to terahertz waves, and the resonance is one of the most attractive places in terahertz application at present. In addition, the terahertz wave has the characteristics of low photon energy, weak radiation, transparency in most dielectric materials and the like, so that the terahertz wave has the unique advantages in safety detection, disease diagnosis and the like. However, since most of the molecular structure size and the absorption cross section are very small compared to terahertz waves (30-3000 μm), the strength of interaction of molecules with terahertz waves is very weak. In order to obtain a significant absorption effect, a sample with a larger volume or thicker size is often required, and the traditional terahertz fingerprint detection in transmission mode is to crush the substance to be detected into powder and press the powder into a sheet shape, and observe the powder by combining a terahertz spectrometer system (L.Ho, et al, Signatures and fingerprints, Nat.Photonics, Vol.2, No.9, pp.541-543,2008.). However, the thickness of a sample commonly used in the method is up to several millimeters, and the using amount is large, so that the application range of the terahertz wave fingerprint detection is limited. Researchers are dedicated to improving the sensitivity of terahertz fingerprint detection by using various methods, such as increasing the interaction area of electromagnetic waves and substances, improving the local electric field intensity, and the like. EIT effect between metamaterial and detecting molecule is proposed by P.Weis (P.Weis, et al, Hybridization induced reactivity in compositions of metamaterials and atomic media, Opt.express, Vol.19, No.23, pp.23573-23580,2011.) but the structure is simple and easy to process, fingerprint signal of lactose with thickness of 50 μm is still less than 10%, and sensitivity is still not high enough; J.Yang (J.J.Yang, et al, Broadband molecular sensing with a tapered waveguide, opt.express, Vol.23, No.7, pp.8583-8589,2015.) et al use a tapered waveguide structure to increase the interaction area of terahertz waves and the detection substance to improve the detection sensitivity, but adjusting the structural parameters is very complicated when adapting to the detection of other substances; x Shi (x.shi, et al, Enhanced terahertz finger print detection with ultra high sensitivity using the cavity defect model, Scientific Reports, vol.7, no 1, pp 13147.) and others utilize a microcavity resonance mode to improve detection sensitivity, and although detection of target substances with nanometer-scale thickness can be achieved, the requirements on the accuracy of the detection device are high, the operation difficulty is large, and the analysis process is complex.
Disclosure of Invention
The invention aims to provide a method for enhancing the sensitivity of terahertz fingerprint detection based on a nano antenna structure aiming at the problems in the prior art, and aims to solve the technical problem of how to improve the sensitivity of terahertz fingerprint detection.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a terahertz fingerprint detection sensitivity enhancing method based on a nano antenna structure comprises the following steps:
step a, designing a nano antenna structure for detection;
b, loading a substance to be detected on the surface of the nano antenna structure, and testing and recording a terahertz transmission spectrum of the substance to be detected on the surface of the nano antenna structure;
and c, judging whether the target substance exists or not by analyzing the change of the transmittance of the terahertz transmission spectrum before and after the substance to be detected is loaded.
The method comprises the following steps: the nano antenna structure is an approximate straight line with high transmissivity before loading the substance, and the transmissivity is reduced at the resonant frequency of the loaded substance after loading the substance, so that the nano antenna structure is formedThe target substance is identified, and the target substance is quantitatively analyzed by the degree of decrease in transmittance. The present invention is directed to the nano-antenna structure within the slit 105Compared with the prior fingerprint detection, the high sensitivity of the magnitude of electric field intensity to the target substance greatly improves the detection sensitivity, realizes the identification and measurement of the target substance with nanometer magnitude thickness, can realize the detection of various target substances without changing structural parameters, and is suitable for the high sensitivity detection of mixed solution.
The nano antenna structure adopted in the method has high transmittance and no resonance characteristic, and the characteristic fingerprint detection of the mixed solution with the nano-scale thickness can be realized by combining the analysis of the terahertz transmission spectrum, so that the method has the characteristics of high detection sensitivity, obvious fingerprint detection signal enhancement effect and the like.
Preferably, the nano-antenna structure in step a is a one-dimensional periodic slit structure on the metal thin film. The metal may be any kind of metal. In the terahertz band, any metal is similar to a perfect electric conductor.
Preferably, the slit structure has an aspect ratio of 104A recess of the order of magnitude having 10 in the region of the recess at terahertz incidence5Magnitude of electric field strength. The slit area has the characteristic of high electric field intensity, and the characteristic fingerprint detection with nanometer-level thickness can be realized. More preferably, the slit structure has a slit width d of 100nm, a metal thickness t of 50nm, and a one-dimensional period of 10 μm. The smaller the width of the slit structure is, the larger the one-dimensional period is, the larger the metal thickness is, and the stronger the electric field in the groove is.
Preferably, the antenna structure in step a is placed on a quartz substrate or a silicon substrate. The substrate has an absorption effect on terahertz waves, but has a supporting effect on the antenna structure and is beneficial to loading detection substances.
Preferably, in the step b, firstly, terahertz transmission spectrums of the nano antenna structure before and after the nano antenna structure is loaded with the substance to be detected are detected and recorded; and c, identifying the existence of the target substance by comparing the changes of the transmission spectrums of the nano antenna structures before and after the loading of the substance to be detected.
Preferably, in the step c, when the transmittance in the terahertz transmission spectrum is obviously reduced at the resonance frequency of the target substance, the target substance is indicated to be present; when the transmittance does not decrease significantly, it indicates that the substance to be detected is not the target substance.
Preferably, after the presence of the target substance is judged in the step c, the loading amount of the target substance is calculated by calculating the transmission decrease amount of the transmission spectrum at the resonance frequency of the target substance. The transmission reduction amount is related to the loading amount of the target substance, and the method can realize the type identification of the loading substance and can also realize the quantitative analysis of the loading substance when the loading substance is consistent with the target substance.
The invention has the beneficial effects that: compared with the existing fingerprint detection method, the method aims at the 10 in the slit of the nano antenna structure5The detection sensitivity is greatly improved by two characteristics of magnitude electric field intensity and full-wave band high transmittance, the identification and measurement of target substances with nanometer magnitude thickness are realized, meanwhile, the detection of various target substances can be realized without changing structural parameters, and the method is suitable for the high-sensitivity detection of mixed solutions.
Drawings
Fig. 1 is a schematic diagram of a nano-antenna structure, wherein PEC perfect electrical conductor, t metal thickness, d slit width, E electric field direction, H magnetic field direction, k incident terahertz wave direction;
in fig. 2 a) terahertz transmittance of the nano-antenna structure itself; b) the transmittance of the nano antenna structure when the surface is loaded with alpha-lactose with different thicknesses; c) the alpha-lactose permeability per se with different thicknesses; d) linear fitting relation between transmission difference and alpha-lactose thickness when the nano antenna is loaded with alpha-lactose with different thicknesses and without a nano antenna structure;
fig. 3 is a graph showing the transmittance of a mixed solution of two substances having a nano-antenna structure loaded with a resonance frequency of 0.529 and 0.7THz, respectively.
Detailed Description
The technical solution of the present invention is further specifically described below by way of specific examples in conjunction with the accompanying drawings. It is to be understood that the practice of the invention is not limited to the following examples, and that any variations and/or modifications may be made thereto without departing from the scope of the invention.
In the present invention, all parts and percentages are by weight, unless otherwise specified, and the equipment and materials used are commercially available or commonly used in the art. The methods in the following examples are conventional in the art unless otherwise specified.
Example (b):
a terahertz fingerprint detection sensitivity enhancing method based on a nano antenna structure comprises the following specific steps:
step a, designing a nano antenna structure for detection;
b, loading a substance to be detected on the surface of the nano antenna structure, and testing and recording a terahertz transmission spectrum of the substance to be detected on the surface of the nano antenna structure;
and c, judging whether the target substance exists or not by analyzing the transmittance of the terahertz transmission spectrum.
The nano antenna structure is a one-dimensional periodic slit structure on a metal film. The slit structure has an aspect ratio of 104A recess of the order of magnitude having 10 in the region of the recess at terahertz incidence5Magnitude of electric field strength. The slit area has the characteristic of high electric field intensity, and the characteristic fingerprint detection with nanometer-level thickness can be realized. The metal may be any kind of metal. In the terahertz band, any metal approximates a perfect electrical conductor PEC. The antenna structure may be placed on a quartz substrate or a silicon substrate. The substrate has an absorption effect on terahertz waves, but has a supporting effect on the antenna structure and is beneficial to loading detection substances.
The schematic structural diagram of the nano-antenna structure is shown in fig. 1: the terahertz wave is vertically incident and forms 10 in the slit region5High magnitude electric fields. The transmittance is more than 90% and is approximately a straight line as can be seen from fig. 2(a) under the conditions that the slit width d is 100nm, the metal thickness t is 50nm and the period is 10 μm by simulating and adjusting the structural parameters through a numerical calculation method. After the surface of the nano antenna structure is loaded with alpha-lactose with different thicknesses, the transmittance graph is shown as the figure2 (b). The relative dielectric constant of a-lactose was characterized in simulations using the Lorentzian resonators (Lorentzian resonators) model:
Figure BDA0001705001120000061
wherein epsilonBackground relative dielectric constant, ω, that is non-resonantpAnd gammapAngular frequency and damping rate, respectively, of the intrinsic absorption resonancepIs the oscillation intensity factor. For simple calculations, only the absorption of a-lactose at 0.529THz is considered, and other lorentz model parameters to better fit the experimental values are: epsilon=3.145,γp=1.59*1011rad/s,Δεp=0.052(A.Roggenbuck,et al,Coherent broadband continuous-wave terahertz spectroscopy on solid-state samples,New J.Phys.Vol.12,no.4,pp.043017,2010)。
Due to the high electric field intensity of the slit region of the nano antenna structure, the absorption cross section of alpha-lactose is greatly increased, and even if the thickness of the alpha-lactose is only 150nm, the transmission spectrum of the whole structure is obviously reduced at 0.529THz, and is reduced from 96.95% to 81.64%, and is changed from 15.31%. As can be seen from fig. 2(d), the nano-antenna structure is loaded with a-lactose of different thickness, and the difference in transmittance with and without the structure is a linear function of its thickness. The difference in transmittance increases significantly with the thickness.
To compare the detection effect of the nano antenna structure enhanced fingerprint, fig. 2(c) simulates the transmittance curve of alpha-lactose itself with different thicknesses. As can be seen from fig. 2(c), the transmission attenuation of 150nm α -lactose at the resonance frequency is only 0.14%, and even if the thickness is increased to 200nm or even 250nm, the transmission attenuation is only 0.25% and 0.3%. While the transmittance attenuation through the nano-antenna structure loaded with 150nm thickness alpha-lactose is 15.31%, which is a 109-fold magnification compared to the transmittance change directly through 150nm thickness alpha-lactose.
In order to verify the identification characteristics of the method on the mixed solution, the inventor loads the mixed solution of lactose and another substance with the resonance frequency of 0.7THz on the surface of the nano-antenna structure. The transmittance curve of the nano-antenna structure loaded with the mixed solution having a thickness of 150nm is shown in fig. 3. It can be seen that significant transmission changes occur at the resonant frequencies of both solutes, 0.529 and 0.7 THz. This further demonstrates that the method is not only suitable for single species detection, but is equally effective for mixed solutions.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (4)

1. A terahertz fingerprint detection sensitivity enhancing method based on a nano antenna structure is characterized by comprising the following steps:
step a, designing a nano antenna structure for detection, wherein the nano antenna structure is a one-dimensional periodic slit structure on a metal film;
b, loading a substance to be detected on the surface of the nano antenna structure, and testing and recording a terahertz transmission spectrum of the substance to be detected on the surface of the nano antenna structure;
c, judging whether the target substance exists or not by analyzing the transmittance change of the terahertz transmission spectrum before and after the substance to be detected is loaded;
in the step b, firstly, detecting and recording terahertz transmission spectrums of the nano antenna structure before and after loading the substance to be detected; in the step c, the existence of the target substance is identified by comparing the changes of the transmission spectrums of the nano antenna structures before and after the substance to be detected is loaded;
in the step c, when the transmittance in the terahertz transmission spectrum is obviously reduced at the resonance frequency of the target substance, the existence of the target substance is indicated; when the transmittance does not obviously decrease, the substance to be detected is not the target substance;
and c, after the target substance is judged to be present in the step c, calculating the loading amount of the target substance by calculating the transmission reduction amount of the transmission spectrum at the resonant frequency of the target substance.
2. The method for enhancing the sensitivity of terahertz fingerprint detection based on the nano-antenna structure according to claim 1, characterized in that: the slit structure has an aspect ratio of 104A recess of the order of magnitude having 10 in the region of the recess at terahertz incidence5Magnitude of electric field strength.
3. The method for enhancing the sensitivity of terahertz fingerprint detection based on the nano-antenna structure as claimed in claim 2, wherein: the slit width d of the slit structure is 100nm, the metal thickness t is 50nm, and the one-dimensional period is 10 μm.
4. The method for enhancing the sensitivity of terahertz fingerprint detection based on the nano-antenna structure according to claim 1, characterized in that: the antenna structure in the step a is placed on a quartz substrate or a silicon substrate.
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