CN108827902A - A kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure - Google Patents
A kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure Download PDFInfo
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- 239000000126 substance Substances 0.000 claims abstract description 37
- 239000013076 target substance Substances 0.000 claims abstract description 26
- 238000000411 transmission spectrum Methods 0.000 claims abstract description 15
- 230000005684 electric field Effects 0.000 claims abstract description 11
- 238000012360 testing method Methods 0.000 claims abstract description 5
- 238000004458 analytical method Methods 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
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- 238000001228 spectrum Methods 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 3
- GUBGYTABKSRVRQ-XLOQQCSPSA-N Alpha-Lactose Chemical compound O[C@@H]1[C@@H](O)[C@@H](O)[C@@H](CO)O[C@H]1O[C@@H]1[C@@H](CO)O[C@H](O)[C@H](O)[C@H]1O GUBGYTABKSRVRQ-XLOQQCSPSA-N 0.000 description 16
- 229930195727 α-lactose Natural products 0.000 description 13
- 239000011259 mixed solution Substances 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 6
- GUBGYTABKSRVRQ-QKKXKWKRSA-N Lactose Natural products OC[C@H]1O[C@@H](O[C@H]2[C@H](O)[C@@H](O)C(O)O[C@@H]2CO)[C@H](O)[C@@H](O)[C@H]1O GUBGYTABKSRVRQ-QKKXKWKRSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000008101 lactose Substances 0.000 description 3
- 235000013339 cereals Nutrition 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000003319 supportive effect Effects 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
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- 239000002994 raw material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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Abstract
The Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure that the present invention relates to a kind of belongs to Terahertz detection applied technical field.A kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure, this method comprises the following steps：Step a, designed for the nano-antenna structure of detection；Step b, substance to be detected load is tested on nano-antenna body structure surface and records Terahertz transmission spectrum of the substance to be detected on nano-antenna body structure surface；Step c, judge that target substance whether there is by the variation of the transmitance of Terahertz transmission spectrum before and after analysis load test substance.Compared with existing fingerprint detection method, the present invention is in nano-antenna structure slit 105The electric field strength of magnitude and all band high transmittance this two major features, are greatly improved detection sensitivity, realize the identification and measurement of nanometer scale thickness targets substance.
Description
Technical field
The Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure that the present invention relates to a kind of, belongs to terahertz
Hereby detect applied technical field.
Background technique
Due to the collective vibration of most of biomolecule, intermolecular or intramolecular rotation generates resonance, absorbs
Characteristic frequency is located at terahertz wave band, therefore can be realized the absorption spectrum " fingerprint " of THz wave to various by substance
The category identification of substance, this is one of most attractive place in current Terahertz application.In addition, THz wave is with low
Photon energy, weak radiation and it is transparent in most dielectric materials the features such as so that Terahertz in safety detection and
Medical diagnosis on disease etc. has advantageous advantage.However, since most molecular structure sizes and absorption cross-section are compared to too
Hertz wave (30-3000 μm) is very small, and the interaction strength of molecule and THz wave is very weak.In order to obtain apparent absorption
Effect will often need the sample of larger volume or thicker size, traditional to be with transmission mode progress Terahertz fingerprint detection
Substance to be detected is rolled into powder and is compressed into tablet form, (L.Ho, et are observed to it in conjunction with terahertz light spectrometer system
al,Signatures and fingerprints,Nat.Photonics,Vol.2,no.9,pp.541-543,2008.).So
And common thickness of sample is up to several millimeters under this mode, dosage is bigger, and which has limited THz wave fingerprint detections
Application range.Researcher using a variety of methods be dedicated to improve the sensitivity of Terahertz fingerprint detection, such as increase electromagnetic wave with
The interaction area of substance improves local electric field intensity etc..P.Weis(P.Weis,et al,Hybridization
induced transparency in composites of metamaterials and atomic media,
Opt.Express, Vol.19, no.23, pp.23573-23580,2011.) et al. propose between Meta Materials and detection molecules
EIT effect detect target substance, although the structure is simple easy to process, the lactose of 50 μ m thicks its fingerprint signal is still
Less than 10%, sensitivity is still not high enough；J.J.Yang(J.J.Yang,et al,Broadband molecular sensing
with a tapered spoof plasmon waveguide,Opt.Express,Vol.23,no.7,pp.8583-8589,
Et al. 2015.) using the interaction area that metallic tapered waveguides structure increases THz wave and detects substance to improve detection
Sensitivity, but adjust its structural parameters be adapted to other substances detection when it is sufficiently complex；X Shi(X.Shi,et al,
Enhanced terahertz fingerprint detection with ultrahigh sensitivity using the
Cavity defect modes, Scientific Reports, Vol.7, no 1, pp 13147.) et al. utilize a kind of microcavity
Mode of resonance improves detection sensitivity, although the detection of nanometer scale thickness targets substance may be implemented, to detection device
Precise requirements are high, and operation difficulty is big, and analytic process is complicated.
Summary of the invention
Object of the present invention is to be directed to the prior art, there are the above problems, propose a kind of Terahertz based on nano-antenna structure
Fingerprint detection sensitivity Enhancement Method, the technical problem to be solved is that the sensitivity for how improving Terahertz fingerprint detection for it.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure, this method include following step
Suddenly：
Step a, designed for the nano-antenna structure of detection；
Step b, substance to be detected load is tested on nano-antenna body structure surface and records substance to be detected in nanometer
Terahertz transmission spectrum on antenna structure surface；
Step c, target substance is judged by the variation of the transmitance of Terahertz transmission spectrum before and after analysis load test substance
It whether there is.
The step of the method for the present invention is：Nano-antenna structure is that a transmissivity is very high approximate straight before loading substance
Line, after loading substance, transmissivity reduces at the resonance frequency of load substance, to identify target substance, and by saturating
The decline degree for penetrating rate to carry out quantitative analysis to target substance.The present invention is in nano-antenna structure slit 105Magnitude
Detection sensitivity is greatly improved compared with previous fingerprint detection to the high sensitivity of target substance in electric field strength, realizes
The identification and measurement of nanometer scale thickness targets substance, while can realize without changing structural parameters to plurality of target substance
Detection, the high sensitivity detection suitable for mixed solution.
This method use in nano-antenna structure have high transmittance and resonance free feature, in conjunction with Terahertz through compose into
Row analysis may be implemented the characteristic fingerprint detection of nanometer scale thickness mixed solution, have detection sensitivity high and fingerprint detection
The features such as signal enhancing effect is obvious.
Preferably, the nano-antenna structure in the step a is the One Dimension Periodic narrow slit structure on metallic film.
The metal can be any kind of metal.In terahertz wave band, any metal is all similar to perfect electric conductor.
Preferably, it is 10 that the narrow slit structure, which is length-width ratio,4The recessed grain of magnitude, the recess region is interior to be entered in Terahertz
Have 10 when penetrating5The electric field strength of magnitude.Its slit areas is with the high feature of electric field strength, it can be achieved that the spy of nanometer scale thickness
Levy fingerprint detection.Further preferably, the slit width d of the narrow slit structure is 100nm, and metal thickness t is 50nm, One Dimension Periodic
It is 10 μm.The slit width of the narrow slit structure is smaller, and One Dimension Periodic is bigger, and metal thickness is bigger, and the electric field in groove is stronger.
Preferably, the antenna structure in the step a is placed on quartz substrate or silicon substrate.Substrate is to THz wave
There is absorption, but plays a supportive role to antenna structure and be conducive to load detection substance.
Preferably, detecting first in the step b and recording nano-antenna structure before and after loading substance to be detected
Terahertz transmission spectrum；Know in the step c by comparing the variation of nano-antenna structure transmission spectrum before and after load test substance
The presence or absence of other target substance.
Preferably, in Terahertz transmission spectrum, transmissivity occurs at target substance resonance frequency in the step c
When being decreased obviously, illustrate that target substance exists；When transmissivity is without being decreased obviously, illustrate that substance to be detected is not target substance.
Preferably, after judging that target substance exists in the step c, by calculating transmission spectrum in target substance resonance frequency
Transmission slippage at rate calculates the loading capacity of target substance.It is related to the loading capacity of target substance to transmit slippage, this method
Realizing the category identification of load substance simultaneously, moreover it is possible to realize to its quantitative analysis when load substance is consistent with target substance.
The beneficial effects of the invention are as follows：Compared with existing fingerprint detection method, the present invention is directed to nano-antenna structure slit
Interior 105The electric field strength of magnitude and all band high transmittance this two major features, are greatly improved detection sensitivity, realize nanometer
The identification and measurement of magnitude thickness targets substance, while inspection to plurality of target substance can be realized without changing structural parameters
It surveys, the high sensitivity detection suitable for mixed solution.
Detailed description of the invention
Fig. 1 is nano-antenna structural schematic diagram, wherein PEC perfection electric conductor, t metal thickness, d slit width, E field
Direction, H magnetic direction, the direction of k incidence THz wave；
A) nano-antenna structure itself Terahertz transmitance in Fig. 2；B) nano-antenna structure loads different-thickness on surface
Transmitance when alpha-lactose；C) alpha-lactose of different-thickness itself transmitance；D) alpha-lactose of nano-antenna load different-thickness
When with and without nano-antenna structure when through difference and the linear fit relationship of alpha-lactose thickness；
Fig. 3 is nano-antenna structure load resonance frequency respectively in the mixed solution of two kinds of substances of 0.529 and 0.7THz
When transmitance.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention will be further explained in detail.It answers
Work as understanding, implementation of the invention is not limited by the following examples, the accommodation in any form done to the present invention and/or
Change falls within the scope of the present invention.
In the present invention, if not refering in particular to, all parts, percentage are unit of weight, used equipment and raw material etc.
It is commercially available or commonly used in the art.Method in following embodiments is unless otherwise instructed the normal of this field
Rule method.
Embodiment：
A kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure, specific step is as follows：
Step a, designed for the nano-antenna structure of detection；
Step b, substance to be detected load is tested on nano-antenna body structure surface and records substance to be detected in nanometer
Terahertz transmission spectrum on antenna structure surface；
Step c, judge that target substance whether there is by analyzing the transmitance of Terahertz transmission spectrum.
The nano-antenna structure is the One Dimension Periodic narrow slit structure on metallic film.The narrow slit structure is length-width ratio
It is 104The recessed grain of magnitude, the recess region is interior to have 10 in Terahertz incidence5The electric field strength of magnitude.Its slit areas tool
There is the high feature of electric field strength, it can be achieved that the characteristic fingerprint of nanometer scale thickness detects.The metal can be any kind of
Metal.In terahertz wave band, any metal is all similar to perfect electric conductor PEC.Antenna structure can be placed on quartz substrate
Or on silicon substrate.Substrate has absorption to THz wave, but plays a supportive role to antenna structure and be conducive to load detectable substance
Matter.
The structural schematic diagram of the nano-antenna structure is as shown in Figure 1：THz wave vertical incidence is formed in slit areas
105Order of magnitude high field.It in slit width d is 100nm by numerical computation method analog regulation structural parameters, metal is thick
Degree t is 50nm, in the case where 10 μm of the period, from Fig. 2 (a) it can be seen that transmitance is greater than 90%, and approximate straight line.In nanometer
After the alpha-lactose of the surface load different-thickness of antenna structure, transmitance figure such as Fig. 2 (b).Alpha-lactose is opposite in simulations
Dielectric constant is characterized using Lorentz lorentz-harmonic oscillator (Lorentzian oscillators) model：
Wherein ε∞It is the background relative dielectric constant of off-resonance, ωpAnd γpBe respectively Intrinsic Gettering resonance angular frequency and
Ratio of damping, Δ εpIt is the oscillation intensity factor.For simple computation, absorption of the alpha-lactose at 0.529THz is considered, only in order to more
Experiment value others Lorentz lorentz's model parameter of coincideing well is：ε∞=3.145, γp=1.59*1011rad/s,Δεp=0.052
(A.Roggenbuck,et al,Coherent broadband continuous-wave terahertz spectroscopy
on solid-state samples,New J.Phys.Vol.12,no.4,pp.043017,2010)。
Due to the high electric field strength of the nano-antenna structure slit areas, the absorption cross-section of alpha-lactose is greatly increased, from i.e.
When alpha-lactose thickness being made to be only 150nm thickness, also presenting at 0.529THz through spectrum for total is decreased obviously, by original
96.95% come drops to 81.64%, changes 15.31%.From Fig. 2 (d) as can be seen that the load of nano-antenna structure is different
Linear functional relation is presented in the alpha-lactose of thickness, transmitance difference and its thickness with and without structure.Transmitance difference is with its thickness
The increase of degree and obviously increase.
In order to compare the detection effect of nano-antenna structure enhancing fingerprint, Fig. 2 (c) analog simulation α-of different-thickness
The transmittance curve of lactose itself.From Fig. 2 (c), it can be seen that, transmitance of the alpha-lactose of 150nm at resonance frequency is decayed to
Only 0.14%, even if increasing its thickness to 200nm even 250nm, also there was only 0.25% and 0.3% through decaying.And pass through
It is loaded with the nano-antenna structure of 150nm thickness alpha-lactose, transmitance decays to 15.31%, than directly passing through 150nm thickness
The transmitance change of alpha-lactose is exaggerated 109 times.
In order to verify this method to the evident characteristics of mixed solution, inventor exists lactose and another resonance frequency
The mixed solution of the substance of 0.7THz is loaded in nano-antenna body structure surface.It is loaded with receiving with a thickness of the 150nm mixed solution
The transmittance curve of rice antenna structure is as shown in Figure 3.As it can be seen that all going out at the resonance frequency 0.529 and 0.7THz of two kinds of solutes
Now apparent transmitance changes.This further illustrates this method is applicable not only to single substance detection, same to mixed solution
Effectively.
Specific embodiment described herein is only an example for the spirit of the invention.The neck of technology belonging to the present invention
The technical staff in domain can make various modifications or additions to the described embodiments or replace by a similar method
In generation, however, it does not deviate from the spirit of the invention or beyond the scope of the appended claims.
Claims (8)
1. a kind of Terahertz fingerprint detection sensitivity Enhancement Method based on nano-antenna structure, it is characterised in that this method includes
Following steps：
Step a, designed for the nano-antenna structure of detection；
Step b, substance to be detected load is tested on nano-antenna body structure surface and records substance to be detected in nano-antenna
Terahertz transmission spectrum on body structure surface；
Step c, judge whether target substance is deposited by the transmitance variation of Terahertz transmission spectrum before and after analysis load test substance
?.
2. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 1 based on nano-antenna structure, special
Sign is：Nano-antenna structure in the step a is the One Dimension Periodic narrow slit structure on metallic film.
3. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 2 based on nano-antenna structure, special
Sign is：The narrow slit structure is that length-width ratio is 104The recessed grain of magnitude, the recess region is interior to have 10 in Terahertz incidence5
The electric field strength of magnitude.
4. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 3 based on nano-antenna structure, special
Sign is：The slit width d of the narrow slit structure is 100 nm, and metal thickness t is 50 nm, and One Dimension Periodic is 10 μm.
5. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 1 based on nano-antenna structure, special
Sign is：Antenna structure in the step a is placed on quartz substrate or silicon substrate.
6. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 1 based on nano-antenna structure, special
Sign is：In the step b, detects first and record Terahertz transmission of the nano-antenna structure before and after loading substance to be detected
Spectrum；Target substance is identified by comparing the variation of nano-antenna structure transmission spectrum before and after load test substance in the step c
The presence or absence of.
7. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 6 based on nano-antenna structure, special
Sign is：In the step c, in Terahertz transmission spectrum, when transmissivity is decreased obviously at target substance resonance frequency,
Illustrate that target substance exists；When transmissivity is without being decreased obviously, illustrate that substance to be detected is not target substance.
8. the Terahertz fingerprint detection sensitivity Enhancement Method according to claim 7 based on nano-antenna structure, special
Sign is：After judging that target substance exists in the step c, by calculating transmission of the transmission spectrum at target substance resonance frequency
The loading capacity of slippage calculating target substance.
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| CN105590986A (en) * | 2016-03-16 | 2016-05-18 | 侯皓文 | Room temperature terahertz detector based on gallium nitride high electron mobility transistor and preparation method thereof |
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| CN115046958A (en) * | 2022-05-07 | 2022-09-13 | 中国计量大学 | Terahertz super-surface enhanced fingerprint detection method based on incident angle scanning |
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