CN107064052B - Terahertz fingerprint detection sensitivity enhancement method based on microcavity resonance mode - Google Patents

Terahertz fingerprint detection sensitivity enhancement method based on microcavity resonance mode Download PDF

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CN107064052B
CN107064052B CN201710282296.4A CN201710282296A CN107064052B CN 107064052 B CN107064052 B CN 107064052B CN 201710282296 A CN201710282296 A CN 201710282296A CN 107064052 B CN107064052 B CN 107064052B
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microcavity
terahertz
target substance
structure
mode
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CN107064052A (en
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韩张华
史晓梅
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中国计量大学
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light
    • G01N21/3581Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light using far infra-red light; using Terahertz radiation
    • G01N21/3586Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light using far infra-red light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]

Abstract

The invention discloses a method for enhancing the sensitivity of terahertz fingerprint detection based on a microcavity resonance mode, which comprises the following steps: for a target substance, assume a characteristic absorption frequency f0Firstly, designing a microcavity resonant structure to make its resonant frequency at f0And then comparing the transmittance change of the microcavity resonance structure before and after loading the target substance, identifying whether the target substance exists or not according to the shift of the resonance frequency, and quantitatively analyzing the target substance according to the transmittance reduction degree of the microcavity resonance structure. The invention aims at the situation that the transmissivity of a microcavity resonance mode to a target substance is at f0Compared with the traditional fingerprint detection method in a pure transmission mode, the method has the advantages that the fingerprint identification characteristic of terahertz spectrum detection can be kept, the detection sensitivity can be greatly improved, the identification and measurement of target substances with nanometer-level thickness can be realized, and the method is suitable for high-sensitivity fingerprint detection of different target substances, different detection sensitivities and different detection ranges.

Description

Terahertz fingerprint detection sensitivity enhancement method based on microcavity resonance mode

Technical Field

The invention relates to a method for realizing high-sensitivity terahertz substance type identification and quantitative analysis by using microcavity high-quality factor resonance as a detection signal, belonging to the technical field of terahertz detection application.

Background

Quantitative measurement of the solubility, thickness, etc. of a substance can be achieved by refractive index measurement, but species identification of the substance cannot be achieved. Due to the fact that resonance is generated by the collective vibration of most biological molecules and the rotation between molecules or in molecules, the absorption characteristic frequency domain of the resonance is located in the terahertz wave band, and therefore the type identification of various substances can be achieved through the absorption spectrum 'fingerprint' of the substances to the terahertz waves, and the resonance is the most attractive place in the terahertz application at present. In addition, the terahertz wave has the characteristics of low photon energy, weak radiation, transparency in most dielectric materials and the like, so that the terahertz wave has the unique advantages in safety detection, disease diagnosis and the like. However, since most of the molecular structure size and the absorption cross section are very small compared to the terahertz wavelength (30-3000 μm), the strength of interaction of molecules with terahertz waves is very weak. In order to obtain an obvious absorption effect, a sample with a larger volume or a thicker size is often needed, the traditional terahertz fingerprint detection in a transmission mode is to roll a substance to be detected into powder and press the powder into a sheet shape, and the terahertz fingerprint detection is combined with a terahertz spectrometer system to carry out transmission spectrum observation (L.Ho, etall, Signatures and fingerprints, nat. Photonics, Vol.2, No.9, pp.541-543, 2008.). However, the thickness of the sample tablet commonly used in this way is up to several millimeters, which severely limits the application range of terahertz fingerprint detection. Researchers adopt various means to improve the local field intensity or increase the interaction length of electromagnetic waves and substances to improve the sensitivity of terahertz fingerprint detection, but the effect is not ideal. For example, d.k.lee et al (d.k.lee, etall, high throughput detection by y terrestrial nao-antennas, sci.rep., vol.5,2015.) use a terahertz nano slot antenna to enhance local field strength and perform feature selection on various low-concentration saccharide solutions (saccharide solid content is about several hundred milligrams per liter), although different saccharides can be effectively distinguished, the fingerprint signal in the transmission spectrum is still weak, and it is difficult to obtain an amplified fingerprint signal in actual operation; t.s.bui et al (t.s.bui, et all, metal-enhanced visual absorption spectrum for the detection of protein molecules, sci.rep.vol.6,2016.) attempted to amplify thin film protein fingerprint absorption signals by a Metamaterial structure, but the transmission spectrum of the loaded protein of the Metamaterial structure normalized the transmission spectrum of the Metamaterial structure itself, as far as the amplification of protein fingerprint signals by the Metamaterial structure is not clear. The effect of increasing the absorption cross section of biomolecules by using an antenna structure or a metamaterial structure to enhance the local field strength is currently not ideal. Therefore, J.J.Yang et al (J.J.Yang, et all, Broadband molecular sensing with a Tappedspeaf plasma waveguide, Opt.Express, Vol.23, No.7, pp.8583-8589,2015.) use a metal tapered waveguide structure to increase the interaction length of the terahertz wave and the detection substance to improve the detection sensitivity, but the metal tapered waveguide is a two-dimensional structure, so that the biological dosage is not clear, and the adjustment of the structural parameters is very complicated for fingerprint detection of other biomolecule characteristics. In addition, P.Weis et al (P.Weis, et all, Hybridization induced transmittance in compositions of biomolecules and atomic media, Opt.express, Vol.19, No.23, pp.23573-23580,2011.) propose a new method for Hybridization of a metamaterial resonance mode with a biomolecule fingerprint absorption peak to form an induced transmission peak, which is simple and easy to process, but the fingerprint signal of 50m thick lactose is still less than 10%, and the sensitivity is still not high enough.

Disclosure of Invention

The invention aims to provide a method for enhancing the detection sensitivity of a terahertz fingerprint based on a microcavity resonance mode, aiming at the problems in the prior art, and the technical problem to be solved is how to improve the detection sensitivity of the terahertz fingerprint.

The purpose of the invention can be realized by the following technical scheme: a terahertz fingerprint detection sensitivity enhancing method based on a microcavity resonance mode is characterized by comprising the following steps: step a, designing a microcavity resonance structure for detection; b, loading a substance to be detected in the microcavity resonance structure, and testing and recording a terahertz transmission spectrum of the substance to be detected in the microcavity resonance structure; and c, judging whether the target substance exists or not by analyzing the transmittance of the terahertz transmission spectrum.

The detection device adopted in the method has high transmittance and high Q characteristics, and the characteristic fingerprint detection of the substance to be detected with the nanometer-level thickness can be realized by combining the analysis of the terahertz transmission spectrum, so that the method has the characteristics of high detection sensitivity, obvious fingerprint signal enhancement effect and the like.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, in the step a, firstly, one characteristic absorption frequency f of the target substance is selected0Then designing a microcavity resonant structure with a resonant frequency f0The terahertz transmission spectrum in the step b is a microcavity resonance structure at f0Nearby terahertz transmission spectra. The microcavity resonant structure has a resonant frequency and a characteristic absorption frequency f of the target substance0Uniform microcavity resonance mode, and the resonance frequency is unique.

In the method for enhancing the sensitivity of terahertz fingerprint detection based on the microcavity resonance mode, the microcavity resonance structure in the step a is a photonic crystal microcavity structure with a one-dimensional structure, and is composed of a middle defect air layer with an adjustable defect cavity length and two periodic bragg reflectors respectively located on two sides of the middle defect air layer, the middle defect air layer is used as a loading area for material fingerprint detection, and the defect mode is a high-quality factor resonance mode formed by back-and-forth reflection of terahertz waves in the middle defect air layer after the terahertz waves are vertically incident through the bragg reflectors on one side. The central resonance frequency of the photonic crystal can move in the photonic crystal band gap, the photonic crystal band gap has strong adjustability, and the photonic crystal band gap is suitable for characteristic fingerprint detection of different substance molecules, namely, the resonance mode of the microcavity resonance structure can adjust the length of a defect cavity according to different detection objects, and the microcavity structure has the characteristics of tunable defect mode, high transmittance and high quality factor, and can realize characteristic fingerprint detection of nanometer-level thickness.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, the two Bragg reflectors have the same structure and are arranged on two sides of the middle defect air layer in a bilateral symmetry mode.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, the bragg reflector is formed by alternately stacking two different materials, and a high-refractive-index contrast layer is formed between the two materials.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, the bragg reflectors are high-refractive-index contrast layers formed by alternately arranging high-resistance silicon layers and air layers, and the two bragg reflectors and the middle defect air layer form a Fabry-Perot resonant cavity structure. Terahertz waves form a high-quality factor resonance mode in the middle defect air layer through the Bragg reflector, the number of the silicon layers or the air layers can be selected in a compromise mode according to the measurement range of the thickness of the detected substance and the value of the resonance quality factor, the more the number of the silicon layers or the air layers is, the smaller the integral transmittance of the structure is, but the value of the quality factor is increased, and the measurement range of the thickness of the detected substance is reduced.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, the microcavity resonance structure is in an on-chip ring shape or a Fabry-Perot shape based on a Si material.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, in the step b, firstly, the terahertz transmittance of the microcavity resonance structure before and after loading the substance to be detected is detected and recorded; and c, identifying whether the target substance exists or not by comparing the change of the microcavity resonance structure loaded with the substance to be detected.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, in the step c, when the defect mode transmittance of the terahertz transmission spectrum is attenuated and has no obvious frequency shift, it is indicated that a target substance exists; when the defect mode transmittance is only shifted and does not significantly attenuate, it indicates that the substance to be detected is not the target substance.

In the method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode, after the target substance is determined to be present in the step c, the loading amount of the target substance is calculated by calculating the attenuation degree of the peak transmittance of the transmission spectrum. The peak transmittance of the transmission spectrum is related to the loading amount of the target substance, and the method can realize the species identification of the loaded substance and can also realize the quantitative analysis of the loaded substance when the loaded substance is consistent with the target substance.

Compared with the existing fingerprint detection method, the method is based on the two characteristics that the microcavity defect signal is greatly influenced by the material loss in the microcavity and the intrinsic loss of the substance is maximum near the characteristic absorption frequency, can keep the fingerprint identification characteristic of terahertz spectrum detection, can greatly improve and enhance the detection sensitivity, can simultaneously realize the identification and measurement of the target substance with the nanometer-level thickness, and is suitable for the high-sensitivity fingerprint detection of different target substances, different detection sensitivities and different detection ranges.

Drawings

FIG. 1 is a schematic diagram of microcavity enhanced terahertz fingerprint detection sensitivity. (a) The target substance itself has weak absorption to the terahertz waves; (b) the absorption intensity of the target substance loaded micro-cavity to the terahertz wave is enhanced by the micro-cavity.

FIG. 2 is a schematic diagram of a one-dimensional photonic crystal microcavity structure.

In FIG. 3, a) terahertz transmittance of the one-dimensional photonic crystal microcavity itself; b) the transmittance of the one-dimensional photonic crystal microcavity when loading alpha-lactose with different thicknesses in the defect; c) the alpha-lactose permeability per se with different thicknesses; d) when the one-dimensional photonic crystal microcavity is loaded with alpha-lactose with different thicknesses, the transmittance peak value and the exponential fitting function relationship of the alpha-lactose thickness are obtained.

FIG. 4 is a comparison of the transmission spectra of one-dimensional photonic crystal microcavities for species loaded with the same 0.1 micron thickness of alpha-lactose and another absorption frequency at 0.62 THz.

Detailed Description

The following are specific embodiments of the present invention and are further described with reference to the drawings, but the present invention is not limited to these embodiments.

The invention relates to a terahertz fingerprint detection method based on a microcavity high-quality factor resonance mode, which is characterized by comprising the following steps of:

step a, firstly, selecting one characteristic absorption frequency f of a target substance0Then designing a microcavity resonant structure with a resonant frequency f0

B, loading a small amount of substance to be detected in the microcavity resonance structure, testing and recording the position f of the substance to be detected in the microcavity resonance structure0Nearby terahertz transmission spectra;

c, identifying whether the target substance exists or not by comparing the change of the microcavity resonance structure loaded with the substance to be detected, specifically, when the defect mode transmittance of the terahertz transmission spectrum is attenuated and has no obvious frequency shift, indicating that the target substance exists; when the defect mode transmittance only has frequency shift and does not have obvious attenuation, the substance to be detected is not the target substance; after the target substance is judged to be present, the load of the target substance is calculated by calculating the degree of attenuation of the peak transmittance of the transmission spectrum.

A schematic diagram of a detection principle of the method for enhancing the sensitivity of terahertz fingerprint detection based on a microcavity resonance mode is shown in an attached figure 1. Since the target substance is weakly absorbed at the characteristic frequency, the attenuation of the terahertz wave after passing through the thin target substance is weak, and the terahertz wave is difficult to identify in the transmission spectrum (as shown in fig. 1 (a)). However, when the target substance is placed in a cavity with a high quality factor and a resonant frequency corresponding to the intrinsic absorption frequency of the target substance, the transmittance of the resonant frequency of the microcavity will be greatly attenuated because the microcavity defect mode is highly affected by the loss of the material in the cavity (see (b) in fig. 1). Based on the microcavity enhancement principle, the present embodiment explains the process of identifying and quantitatively analyzing α -lactose by taking a photonic crystal microcavity structure as an example in combination with the accompanying drawings, and further details the fingerprint detection method of the present invention:

the photonic crystal microcavity structure is composed of a middle defect air layer serving as a loading area for material fingerprint detection and two same Bragg reflectors symmetrically distributed left and right, a Fabry-Perot resonant cavity structure is formed in the two Bragg reflectors and the middle defect air layer, and terahertz waves form a high-quality factor resonant mode in the middle defect cavity through the Bragg reflectors. The Bragg reflector can be formed by selecting two different materials to form a high-refractive-index contrast layer, specifically, the high-refractive-index contrast layer is formed by alternately arranging high-resistance silicon layers and air layers, the number of the silicon layers or the air layers can be selected according to the measurement range of the thickness of the detection substance and the resonance quality factor value, the more the number of the silicon layers or the air layers is, the smaller the integral transmittance of the structure is, but the quality factor value can be increased, and the measurement range of the thickness of the substance to be detected is reduced. The structure is a one-dimensional structure with a defect cavity length dcThe period P of the photonic crystal can be adjusted according to different substances to be detected, and different characteristic absorption lines are matched, so that characteristic fingerprint detection of the substances is realized. The resonant mode can be based on different length d of the defect cavitycThe central resonance frequency of the photonic crystal can move in the band gap of the photonic crystal by adjustment, so that the method has strong adjustability and is suitable for characteristic fingerprint detection of different substance molecules. The detection device has the characteristics of tunable defect mode, high transmittance and high quality factor, and can realize the thickness of nanometer levelCharacteristic fingerprint detection.

The structural schematic diagram of the photonic crystal microcavity is shown in the attached figure 2: terahertz waves are vertically incident through the Bragg reflector on the left, and are reflected back and forth in the middle defect air cavity to form a high-quality factor resonance mode, namely a defect mode. Simulating and adjusting structural parameters in defect length d by using numerical calculation methodc319 μm, air layer thickness daThickness d of high-resistance silicon layer of 100 μmsIn 233 μm, the photonic crystal microcavity structure has only one resonant mode in the photonic crystal forbidden band, and the resonant frequency is 0.529THz, which corresponds to a certain absorption frequency of the target substance α -lactose. It can be seen from fig. 3(a) that the resonant mode transmittance is close to 100% and the peak full width at half maximum is 0.435 GHz. After the centers of the micro-cavity defect cavities of the one-dimensional photonic crystal are loaded with alpha-lactose with different thicknesses, a partial enlarged view of the transmittance is shown in fig. 3 (b). The relative dielectric constant of a-lactose was characterized in simulations using the Lorentzian resonators (Lorentzian oscillators) model:

wherein epsilonIs the background relative dielectric constant, ω, of the non-resonancepAnd gammapAngular frequency and damping rate, respectively, of the intrinsic absorption resonancepIs the oscillation intensity factor. For simple calculations, only the absorption of a-lactose at 0.529THz is considered, for better why the experimental measurements other lorentz model parameters are: epsilon=3.145,γp=1.59*1011rad/s,Δεp=0.052(A.Roggenbuck,et all,Coherent broadband continuous-wave terahertzspectroscopy on solid-state samples,New J.Phys.Vol.12,no.4,pp.043017,2010)。

Since the resonance frequency of the resonant structure is at the absorption fingerprint frequency of lactose, and the resonance mode characteristic is influenced by the loss of alpha-lactose at 0.529THz, even if the thickness of the alpha-lactose is only 50nm, the transmission spectrum of the whole structure shows obvious transmittance reduction, namely, the transmittance is reduced from 100% to 74%, and is changed by 26%. Due to the thin thickness of the loaded alpha-lactose, the resulting change in the optical path length within the cavity is negligible and the position of the resonance peak is hardly shifted. As the thickness of the α -lactose increases, the amount of change in optical path due to the intracavity loaded α -lactose is already negligible, the overall decrease in transmittance is more pronounced and is accompanied by a slight red-shift phenomenon. As can be seen from fig. 3(d), the photonic crystal microcavity is loaded with lactose of different thicknesses, the transmittance peak of the whole structure is exponential in its thickness, and since the α -lactose absorption spectrum is narrower at 0.529THz, the transmittance peak of the whole structure at a thickness of less than 1.0m is significantly reduced as its thickness is increased. As can be seen from fig. 3(d), the quality factor value of the photonic crystal microcavity can be further increased in order to obtain higher fingerprint detection sensitivity. Assuming that the limit at which the change in transmittance can be observed is 5%, the detectable α -lactose molecule thickness of the one-dimensional photonic crystal microcavity can be reduced to 7 nm. Such high fingerprint detection sensitivity has never been reported in the literature. In addition, when the thickness of the alpha-lactose exceeds 1m, the transmittance peak value of the photonic crystal microcavity shows a saturated state, which indicates that the dynamic range of the structure for alpha-lactose quantitative analysis is about 1 micron. In order to obtain a higher dynamic range of the detection thickness, the structural parameters can be adjusted to reduce the quality factor value, namely, the sensitivity is weakened, so that a larger dynamic range can be obtained.

In order to compare the fingerprint detection effect enhanced by the photonic crystal microcavity, the transmittance curves of alpha-lactose with different thicknesses are simulated in fig. 3 (c). As can be seen from fig. 3(c), the attenuation of the transmission of 0.05m α -lactose at the resonance frequency is only 0.06%, and even if the thickness thereof is increased to 0.3 μm or even 0.5 μm, the attenuation of the transmission is only 0.34% and 0.59%. And the transmittance attenuation of the one-dimensional photonic crystal microcavity structure loaded with alpha-lactose with the thickness of 0.05 μm is 26%, which is 433 times larger than the transmittance change directly passing through the alpha-lactose with the thickness of 0.05 μm. And when the α -lactose is thinner down to 7nm, its peak transmittance decay is amplified 520 times when enhanced with this microcavity over when using α -lactose alone. That is to say, the one-dimensional photonic crystal microcavity structure forms high-quality factor resonance, so that the fingerprint signal of the alpha-lactose can be amplified by more than 500 times, and the fingerprint signal of the alpha-lactose with the nanometer-level thickness can be easily detected in the experimental operation.

In order to verify that the method can still maintain the identification characteristic of the terahertz spectrum to the substance, another substance B to be detected is loaded into the microcavity structure. We assume that the intrinsic absorption frequency of substance B is at 0.62THz, deviating from the absorption frequency of-lactose by 0.529 THz. The transmittance curve for the same microcavity structure loaded with 0.1 μm thick substance B is shown by the red dashed line in fig. 4, which simultaneously gives the transmittance curve for the same thickness of alpha-lactose loading for comparison. It can be seen that the peak transmittance change of the microcavity structure is only effective for alpha-lactose, while the defect peak of the microcavity of substance B appears only slightly shifted in the frequency domain, without a change in the peak. The method further shows that the method can realize the improvement of the characteristic fingerprint detection sensitivity of the substance according to the dependency relationship between the integral change of the transmittance and the material loss based on the one-dimensional photonic crystal microcavity structure, and has the capability of substance selectivity and substance identification.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (7)

1. A terahertz fingerprint detection sensitivity enhancing method based on a microcavity resonance mode is characterized by comprising the following steps: step a, designing the microcavity resonance structure for detecting, the microcavity resonance structure is the photonic crystal microcavity structure of one-dimensional structure, and the intermediate defect air bed that is adjustable by a defect chamber length and two periodic Bragg reflectors that are located intermediate defect air bed both sides respectively constitute, the intermediate defect air bed is as the loading region that material fingerprint detected, the microcavity resonance structure has the microcavity defect mode, after the microcavity defect mode is that terahertz wave passes through the Bragg reflector vertical incidence of one side, make a round trip to reflect the high quality factor resonance that forms in the intermediate defect air bedA mode; b, loading a substance to be detected in the microcavity resonance structure, and testing and recording a terahertz transmission spectrum of the substance to be detected in the microcavity resonance structure; c, judging whether the target substance exists or not by analyzing the transmittance of the terahertz transmission spectrum, wherein in the step a, one characteristic absorption frequency f of the target substance is selected firstly0Then designing a microcavity resonant structure with a resonant frequency f0The terahertz transmission spectrum in the step b is a microcavity resonance structure at f0In the step c, when the defect mode transmittance of the terahertz transmission spectrum is attenuated and has no obvious frequency shift, the existence of the target substance is indicated; when the defect mode transmittance is only shifted and does not significantly attenuate, it indicates that the substance to be detected is not the target substance.
2. The microcavity resonance mode-based terahertz fingerprint detection sensitivity enhancing method according to claim 1, wherein the structures of the two bragg reflectors are the same, and the two bragg reflectors are arranged on two sides of the middle defect air layer in bilateral symmetry.
3. The method for enhancing the sensitivity of micro-cavity resonance mode based terahertz fingerprint detection according to claim 2, wherein the bragg reflector is formed by alternately stacking two different materials, and a high refractive index contrast layer is formed between the two materials.
4. The method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode is characterized in that the Bragg reflectors are high-refractive-index contrast layers formed by alternately arranging high-resistance silicon layers and air layers, and a Fabry-Perot resonant cavity structure is formed by the two Bragg reflectors and the middle defect air layer.
5. The method for enhancing the sensitivity of the terahertz fingerprint detection based on the microcavity resonance mode according to claim 1, wherein the microcavity resonance structure in the step a is an on-chip ring or a fabry perot type based on a Si material.
6. The method for enhancing the sensitivity of terahertz fingerprint detection based on the microcavity resonance mode as claimed in claim 1, 2 or 5, wherein in the step b, firstly the terahertz transmittances of the microcavity resonance structure before and after the loading of the substance to be detected are detected and recorded; and c, identifying whether the target substance exists or not by comparing the change of the microcavity resonance structure loaded with the substance to be detected.
7. The method for enhancing the sensitivity of terahertz fingerprint detection based on the microcavity resonance mode as claimed in claim 6, wherein after the target substance is determined to be present in step c, the loading amount of the target substance is calculated by calculating the degree of attenuation of the peak transmittance of the transmission spectrum, and the peak transmittance of the transmission spectrum is correlated with the loading amount of the target substance.
CN201710282296.4A 2017-04-26 2017-04-26 Terahertz fingerprint detection sensitivity enhancement method based on microcavity resonance mode CN107064052B (en)

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